Susceptor of semiconductor manufacturing apparatus

Information

  • Patent Grant
  • D1079661
  • Patent Number
    D1,079,661
  • Date Filed
    Monday, February 5, 2024
    a year ago
  • Date Issued
    Tuesday, June 17, 2025
    4 months ago
  • Inventors
    • Taniguchi; Daiki
  • Original Assignees
  • Examiners
    • Malley; Mary Shannon
    • Simmons-Holloway; Bria' l
    Agents
    • FITCH, EVEN, TABIN & FLANNERY, LLP
Abstract
Description


FIG. 1 is a front, top and left side perspective view of a susceptor of semiconductor manufacturing apparatus showing my new design;



FIG. 2 is a front elevational view thereof;



FIG. 3 is a left side elevational view thereof;



FIG. 4 is a right side elevational view thereof;



FIG. 5 is a top plan view thereof;



FIG. 6 is a bottom plan view thereof;



FIG. 7 is a rear elevational view thereof; and,



FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2.


Claims
  • The ornamental design for a susceptor of semiconductor manufacturing apparatus, as shown and described.
Priority Claims (1)
Number Date Country Kind
2023-017720 D Aug 2023 JP national
US Referenced Citations (21)
Number Name Date Kind
5169684 Takagi Dec 1992 A
D515675 Tremoulet, Jr. Feb 2006 S
D599827 Yabe Sep 2009 S
D638522 Yoshida May 2011 S
D728757 Graham May 2015 S
D783922 Kirkland Apr 2017 S
D810705 Krishnan Feb 2018 S
D864361 Kim Oct 2019 S
D871561 Kang Dec 2019 S
D871608 Okuda Dec 2019 S
D888903 Gunther Jun 2020 S
D895075 Kang Sep 2020 S
D917825 Kirkland Apr 2021 S
D933619 Yoshida Oct 2021 S
D933726 Savandaiah Oct 2021 S
D974910 Collins Jan 2023 S
12087598 Tateno Sep 2024 B2
D1055006 Nallagonda Dec 2024 S
20090081887 Inoue Mar 2009 A1
20140090554 Chalk Apr 2014 A1
20140262193 Im Sep 2014 A1
Foreign Referenced Citations (4)
Number Date Country
304326143 May 2017 CN
305875373 Jan 2020 CN
2014-063820 Apr 2014 JP
1740585 Mar 2023 JP
Non-Patent Literature Citations (2)
Entry
Silicon Ring, posting date unavailable [online], [retrieved Mar. 24, 2025]. Retrieved from internet, https://www.dstcsemi.com/products/silicon-ring/ (Year: 2025).
Heat Resistant Plastic Wafer Hoop Ring for Expand Wafer, posting date unavailable [online], [retrieved Mar. 24, 2025]. Retrieved from internet, https://www.jedecictrays.com/quality-13789604-heat-resistant-plastic-wafer-hoop-ring-for-expand-wafer (Year: 2025).