| Number | Name | Date | Kind |
|---|---|---|---|
| 3627963 | Lindsay | Dec 1971 | |
| 3701931 | Revitz et al. | Oct 1972 | |
| 4169032 | Haase et al. | Sep 1979 | |
| 4180711 | Hirata et al. | Dec 1979 | |
| 4209552 | Welch | Jun 1980 | |
| 4243861 | Strandwitz | Jan 1981 |
| Number | Date | Country |
|---|---|---|
| 5124213 | Oct 1980 | JPX |
| 6159016 | Dec 1981 | JPX |
| 6159017 | Dec 1981 | JPX |
| 6159028 | Dec 1981 | JPX |
| Entry |
|---|
| R. Petrovic et al., Electrical and Structural Properties of Tantalum Nitride Thin Films Deposited by Sputtering, Thin Films, p. 333-336, 1979. |
| Witold Posadowski et al., Properties of TiNx Films Reactively Spattered in an Argon-Nitrogen Atmosphere, Thin Solid Films, pp. 347-351, 1979. |