Number | Name | Date | Kind |
---|---|---|---|
5362941 | Johnson et al. | Nov 1994 | A |
5364474 | Williford, Jr. | Nov 1994 | A |
5419733 | Johnson et al. | May 1995 | A |
5859755 | Griffin et al. | Jan 1999 | A |
6120357 | Jackson et al. | Sep 2000 | A |
Number | Date | Country |
---|---|---|
2239731 | Oct 1991 | GB |
Entry |
---|
Williford, “Experiment on Spin-Cleaning of Patterned Silicon Wafer Using CO2 Snow,” Sep. 1995. |