Information storage devices are used to retrieve and/or store data in computers and other consumer electronics devices. Energy assisted magnetic recording (EAMR) or heat assisted magnetic recording (HAMR) technology may be used to increase areal density (AD) of hard disks. A laser beam is delivered through an optical target waveguide and excites a near field transducer (NFT) at an air bearing surface (ABS) adjacent the magnetic disk surface. The NFT generates a very strong localized electromagnetic field. When the localized electromagnetic field is close enough to the magnetic recording medium, the recording medium absorbs part of the localized electromagnetic field and heats up in a region limited in part by the small dimension of the NFT. This heating lowers the coercivity of the magnetic medium locally and enables a write pole to magnetize the media with high density, which helps to realize the magnetic recording process with increased AD.
Various methods for focusing the laser to the NFT are known, such as mirror focusing. However, there are deficiencies with the known systems. For example, when using mirror focusing (e.g., parabolic solid immersion mirror), the focus tightness is limited.
There is a need in the art for improved focusing of a laser to an NFT in EAMR/HAMR technology.
Various aspects of the present invention will now be presented in the detailed description by way of example, and not by way of limitation, with reference to the accompanying drawings, wherein:
In light of the above described problems and unmet needs, an improved focusing structure is presented herein. The focusing structure may be used in HAMR along with other potential applications, including microwave imaging, infrared and visible optics, far ultraviolet (UV) applications such as UV lithography, and X-ray focusing/imaging. The improved focusing structure ensures tight focusing while being easy to manufacture and maintaining compact dimensions.
Aspects of a focusing structure include a first end, a second end, and an optically altered portion between the first and second ends, wherein the optically alerted portion focuses light into one or more focal points or zones located toward the second end when light is incident from the first end. The altered portion comprises an array of localized optical alterations that alter the propagation of light through the focusing structure to diffractively focus the light as it exits the focusing structure, the array of optical alterations being formed along either a straight or a curved surface within a cross section of the focusing structure.
Aspects presented herein may be applied, e.g., in an HAMR waveguide having an entrance at a first end, a second end opposing the first end, and an optically altered portion located between the first and second ends. The optically altered portion forms a focusing element comprised in the waveguide. The optically altered portion may focus light into one or more focal points or zones located toward the second end, when light is incident from the first end. A near field transducer may be located at the one or more focal points. The focusing element includes an array of localized optical alterations that alter the propagation of the laser beam through the waveguide to diffractively focus the laser beam approximately at the near field transducer. The optical alterations may be formed along either a straight line or a curved line. The HAMR transducer may include a near field transducer located at the one or more focal points. The first surface of the HAMR transducer may be aligned to an air bearing surface (ABS) of the slider and the second surface of the HAMR transducer may be aligned to a surface of the slider opposite the ABS.
Additional advantages and novel features of these aspects will be set forth in part in the description that follows, and in part will become more apparent to those skilled in the art upon examination of the following or upon learning by practice of the invention.
The word “exemplary” is used herein to mean serving as an example, instance, or illustration. Any embodiment described herein as “exemplary” is not necessarily to be construed as preferred or advantageous over other embodiments. Likewise, the term “embodiment” of an apparatus, method or article of manufacture does not require that all embodiments of the invention include the described components, structure, features, functionality, processes, advantages, benefits, or modes of operation.
The slider 106 may be aerodynamically designed to fly above the magnetic disk 102 by virtue of an air bearing created between the surface of the slider 106 and the rotating magnetic disk 102. This surface of the slider 108 is also interchangeably referred to herein as an air bearing surface (ABS). The ABS may include the portion of the slider 106 surface that is closest to the rotating magnetic disk 102, which is typically, for example, the head. A HAMR transducer 214, as described in connection with
The HAMR transducer 214 may be mounted on a distal end of the slider 106 below the laser diode 204, such that a waveguide fabricated in the HAMR transducer 214 is aligned with the emission exit 206 of the laser diode 204. The HAMR transducer 214 may include a first surface aligned to the ABS of the slider 106 and second surface aligned to a surface of the slider 106 opposite the ABS.
An important aspect of waveguide applications, including HAMR-related waveguide applications is the ability to concentrate or focus light at a desired focal point. In HAMR applications, the desired focal point is the NFT.
Arrays of localized optical alterations in a waveguide may be used to concentrate light on (or redirect towards) a desired focal position. The desired focal position may be, e.g., the NFT for energy assisted magnetic recording applications. The alterations can be placed in the waveguides to block or alter the propagation of certain zones to ensure focusing at the desired position. The optical alterations may be spaced to form optically non-obstructing slits for producing one or more interferometric light energy patterns by phase coincidences. Such slits may be used to focus light into one or more focal points or zones located.
Thus, the waveguide may form alterations in the waveguide that diffractively focus the light similar to a zone plate. This can be beneficial in HAMR, e.g., because the use of coherent light enables the zones of desired phase to be well-defined.
The use of the optical alterations formed in the waveguide, as presented herein, offers a large numerical aperture while maintaining very compact dimensions. For example, in both Fresnel zone plates and Rayleigh-Wood plates, the resolution is comparable to the thickness of the last, e.g., thinnest, zone ring. In order to achieve a tight focus, e.g., a decent numerical aperture, very large plates containing hundreds of zones may be needed. The arrays of optical alterations in a waveguide described herein provide a desirable numerical aperture with compact dimensions.
Phase control and manufacturing are both simplified. For example, during manufacturing, certain portions of the waveguide altered, or spoiled, in order to achieve the focusing. The benefits can be obtained without the need for optical quality boundaries between different parts of the waveguide.
In HAMR, the NFT may be positioned adjacent to a magnetic recording medium, such that electromagnetic radiation emitted at the end of the NFT can be used to heat a portion of the recording medium. If the NFT is chosen with the correct dimensions, particularly the correct length, then it resonates with the incident light and creates extremely large electric fields in a recording medium in the vicinity of the end of the transducer.
Two example waveguides are shown in
As shown in
As shown in
The array of optical alterations in the waveguide may be used in combination with other focusing elements. Thus, the waveguide may comprise at least one additional focusing element or aspect. Fiber/waveguide tapering may be used as an additional focusing aspect, as illustrated in
Each of the various types of alterations shown in
As illustrated in
The focusing element formed using the optical alterations may be used as a single focusing element or in combination with other focusing elements, e.g., in order to form a compound lens. For example, the optical alterations may be configured to include multiple curved lines of alterations extending within a cross section of a waveguide.
Although the aspects presented herein have been described using the example of an HAMR-related waveguide, the aspects presented herein can be used in focusing structures for additional applications. For example, the optical alterations described in connection with
The various example embodiments are provided to enable one of ordinary skill in the art to practice various aspects of the present invention. Modifications to example embodiments presented throughout this disclosure will be readily apparent to those skilled in the art, and the concepts disclosed herein may be extended to other devices. All structural and functional equivalents to the various components of the example embodiments described throughout this disclosure that are known or later come to be known to those of ordinary skill in the art are expressly incorporated herein by reference.
This application claims the benefit of U.S. Provisional Application No. 61/953,564 entitled “System and Method of Diffractive Focusing of Light in a Waveguide of a Heat Assisted Magnetic Recording Head,” filed on Mar. 14, 2014, which is expressly incorporated by reference herein in its entirety.
Number | Name | Date | Kind |
---|---|---|---|
4743083 | Schimpe | May 1988 | A |
6016290 | Chen et al. | Jan 2000 | A |
6018441 | Wu et al. | Jan 2000 | A |
6025978 | Hoshi et al. | Feb 2000 | A |
6025988 | Yan | Feb 2000 | A |
6032353 | Hiner et al. | Mar 2000 | A |
6033532 | Minami | Mar 2000 | A |
6034851 | Zarouri et al. | Mar 2000 | A |
6043959 | Crue et al. | Mar 2000 | A |
6046885 | Aimonetti et al. | Apr 2000 | A |
6049650 | Jerman et al. | Apr 2000 | A |
6055138 | Shi | Apr 2000 | A |
6058094 | Davis et al. | May 2000 | A |
6073338 | Liu et al. | Jun 2000 | A |
6078479 | Nepela et al. | Jun 2000 | A |
6081499 | Berger et al. | Jun 2000 | A |
6094803 | Carlson et al. | Aug 2000 | A |
6099362 | Viches et al. | Aug 2000 | A |
6103073 | Thayamballi | Aug 2000 | A |
6108166 | Lederman | Aug 2000 | A |
6118629 | Huai et al. | Sep 2000 | A |
6118638 | Knapp et al. | Sep 2000 | A |
6125018 | Takagishi et al. | Sep 2000 | A |
6130779 | Carlson et al. | Oct 2000 | A |
6134089 | Barr et al. | Oct 2000 | A |
6136166 | Shen et al. | Oct 2000 | A |
6137661 | Shi et al. | Oct 2000 | A |
6137662 | Huai et al. | Oct 2000 | A |
6160684 | Heist et al. | Dec 2000 | A |
6163426 | Nepela et al. | Dec 2000 | A |
6166891 | Lederman et al. | Dec 2000 | A |
6173486 | Hsiao et al. | Jan 2001 | B1 |
6175476 | Huai et al. | Jan 2001 | B1 |
6178066 | Barr | Jan 2001 | B1 |
6178070 | Hong et al. | Jan 2001 | B1 |
6178150 | Davis | Jan 2001 | B1 |
6181485 | He | Jan 2001 | B1 |
6181525 | Carlson | Jan 2001 | B1 |
6185051 | Chen et al. | Feb 2001 | B1 |
6185077 | Tong et al. | Feb 2001 | B1 |
6185081 | Simion et al. | Feb 2001 | B1 |
6188549 | Wiitala | Feb 2001 | B1 |
6190764 | Shi et al. | Feb 2001 | B1 |
6193584 | Rudy et al. | Feb 2001 | B1 |
6195229 | Shen et al. | Feb 2001 | B1 |
6198608 | Hong et al. | Mar 2001 | B1 |
6198609 | Barr et al. | Mar 2001 | B1 |
6201673 | Rottmayer et al. | Mar 2001 | B1 |
6204998 | Katz | Mar 2001 | B1 |
6204999 | Crue et al. | Mar 2001 | B1 |
6212153 | Chen et al. | Apr 2001 | B1 |
6215625 | Carlson | Apr 2001 | B1 |
6219205 | Yuan et al. | Apr 2001 | B1 |
6221218 | Shi et al. | Apr 2001 | B1 |
6222707 | Huai et al. | Apr 2001 | B1 |
6229782 | Wang et al. | May 2001 | B1 |
6230959 | Heist et al. | May 2001 | B1 |
6233116 | Chen et al. | May 2001 | B1 |
6233125 | Knapp et al. | May 2001 | B1 |
6237215 | Hunsaker et al. | May 2001 | B1 |
6252743 | Bozorgi | Jun 2001 | B1 |
6255721 | Roberts | Jul 2001 | B1 |
6258468 | Mahvan et al. | Jul 2001 | B1 |
6266216 | Hikami et al. | Jul 2001 | B1 |
6271604 | Frank, Jr. et al. | Aug 2001 | B1 |
6275354 | Huai et al. | Aug 2001 | B1 |
6277505 | Shi et al. | Aug 2001 | B1 |
6282056 | Feng et al. | Aug 2001 | B1 |
6296955 | Hossain et al. | Oct 2001 | B1 |
6297955 | Frank, Jr. et al. | Oct 2001 | B1 |
6304414 | Crue, Jr. et al. | Oct 2001 | B1 |
6307715 | Berding et al. | Oct 2001 | B1 |
6310746 | Hawwa et al. | Oct 2001 | B1 |
6310750 | Hawwa et al. | Oct 2001 | B1 |
6317290 | Wang et al. | Nov 2001 | B1 |
6317297 | Tong et al. | Nov 2001 | B1 |
6322911 | Fukagawa et al. | Nov 2001 | B1 |
6330136 | Wang et al. | Dec 2001 | B1 |
6330137 | Knapp et al. | Dec 2001 | B1 |
6333830 | Rose et al. | Dec 2001 | B2 |
6340533 | Ueno et al. | Jan 2002 | B1 |
6349014 | Crue, Jr. et al. | Feb 2002 | B1 |
6351355 | Min et al. | Feb 2002 | B1 |
6353318 | Sin et al. | Mar 2002 | B1 |
6353511 | Shi et al. | Mar 2002 | B1 |
6356412 | Levi et al. | Mar 2002 | B1 |
6359779 | Frank, Jr. et al. | Mar 2002 | B1 |
6369983 | Hong | Apr 2002 | B1 |
6376964 | Young et al. | Apr 2002 | B1 |
6377535 | Chen et al. | Apr 2002 | B1 |
6381095 | Sin et al. | Apr 2002 | B1 |
6381105 | Huai et al. | Apr 2002 | B1 |
6389499 | Frank, Jr. et al. | May 2002 | B1 |
6392850 | Tong et al. | May 2002 | B1 |
6396660 | Jensen et al. | May 2002 | B1 |
6399179 | Hanrahan et al. | Jun 2002 | B1 |
6400526 | Crue, Jr. et al. | Jun 2002 | B2 |
6404600 | Hawwa et al. | Jun 2002 | B1 |
6404601 | Rottmayer et al. | Jun 2002 | B1 |
6404706 | Stovall et al. | Jun 2002 | B1 |
6410170 | Chen et al. | Jun 2002 | B1 |
6411522 | Frank, Jr. et al. | Jun 2002 | B1 |
6417998 | Crue, Jr. et al. | Jul 2002 | B1 |
6417999 | Knapp et al. | Jul 2002 | B1 |
6418000 | Gibbons et al. | Jul 2002 | B1 |
6418048 | Sin et al. | Jul 2002 | B1 |
6421211 | Hawwa et al. | Jul 2002 | B1 |
6421212 | Gibbons et al. | Jul 2002 | B1 |
6424505 | Lam et al. | Jul 2002 | B1 |
6424507 | Lederman et al. | Jul 2002 | B1 |
6430009 | Komaki et al. | Aug 2002 | B1 |
6430806 | Chen et al. | Aug 2002 | B1 |
6433965 | Gopinathan et al. | Aug 2002 | B1 |
6433968 | Shi et al. | Aug 2002 | B1 |
6433970 | Knapp et al. | Aug 2002 | B1 |
6437945 | Hawwa et al. | Aug 2002 | B1 |
6445536 | Rudy et al. | Sep 2002 | B1 |
6445542 | Levi et al. | Sep 2002 | B1 |
6445553 | Barr et al. | Sep 2002 | B2 |
6445554 | Dong et al. | Sep 2002 | B1 |
6447935 | Zhang et al. | Sep 2002 | B1 |
6448765 | Chen et al. | Sep 2002 | B1 |
6451514 | Iitsuka | Sep 2002 | B1 |
6452742 | Crue et al. | Sep 2002 | B1 |
6452765 | Mahvan et al. | Sep 2002 | B1 |
6456465 | Louis et al. | Sep 2002 | B1 |
6459552 | Liu et al. | Oct 2002 | B1 |
6462920 | Karimi | Oct 2002 | B1 |
6466401 | Hong et al. | Oct 2002 | B1 |
6466402 | Crue, Jr. et al. | Oct 2002 | B1 |
6466404 | Crue, Jr. et al. | Oct 2002 | B1 |
6468436 | Shi et al. | Oct 2002 | B1 |
6469877 | Knapp et al. | Oct 2002 | B1 |
6477019 | Matono et al. | Nov 2002 | B2 |
6479096 | Shi et al. | Nov 2002 | B1 |
6483662 | Thomas et al. | Nov 2002 | B1 |
6487040 | Hsiao et al. | Nov 2002 | B1 |
6487056 | Gibbons et al. | Nov 2002 | B1 |
6490125 | Barr | Dec 2002 | B1 |
6496330 | Crue, Jr. et al. | Dec 2002 | B1 |
6496334 | Pang et al. | Dec 2002 | B1 |
6504676 | Hiner et al. | Jan 2003 | B1 |
6512657 | Heist et al. | Jan 2003 | B2 |
6512659 | Hawwa et al. | Jan 2003 | B1 |
6512661 | Louis | Jan 2003 | B1 |
6512690 | Qi et al. | Jan 2003 | B1 |
6515573 | Dong et al. | Feb 2003 | B1 |
6515791 | Hawwa et al. | Feb 2003 | B1 |
6532823 | Knapp et al. | Mar 2003 | B1 |
6535363 | Hosomi et al. | Mar 2003 | B1 |
6552874 | Chen et al. | Apr 2003 | B1 |
6552928 | Qi et al. | Apr 2003 | B1 |
6577470 | Rumpler | Jun 2003 | B1 |
6583961 | Levi et al. | Jun 2003 | B2 |
6583968 | Scura et al. | Jun 2003 | B1 |
6597548 | Yamanaka et al. | Jul 2003 | B1 |
6611398 | Rumpler et al. | Aug 2003 | B1 |
6618223 | Chen et al. | Sep 2003 | B1 |
6629357 | Akoh | Oct 2003 | B1 |
6633464 | Lai et al. | Oct 2003 | B2 |
6636394 | Fukagawa et al. | Oct 2003 | B1 |
6639291 | Sin et al. | Oct 2003 | B1 |
6650503 | Chen et al. | Nov 2003 | B1 |
6650506 | Risse | Nov 2003 | B1 |
6654195 | Frank, Jr. et al. | Nov 2003 | B1 |
6657816 | Barr et al. | Dec 2003 | B1 |
6661621 | Iitsuka | Dec 2003 | B1 |
6661625 | Sin et al. | Dec 2003 | B1 |
6674610 | Thomas et al. | Jan 2004 | B1 |
6680863 | Shi et al. | Jan 2004 | B1 |
6683763 | Hiner et al. | Jan 2004 | B1 |
6687098 | Huai | Feb 2004 | B1 |
6687178 | Qi et al. | Feb 2004 | B1 |
6687977 | Knapp et al. | Feb 2004 | B2 |
6691226 | Frank, Jr. et al. | Feb 2004 | B1 |
6697294 | Qi et al. | Feb 2004 | B1 |
6700738 | Sin et al. | Mar 2004 | B1 |
6700759 | Knapp et al. | Mar 2004 | B1 |
6704158 | Hawwa et al. | Mar 2004 | B2 |
6707083 | Hiner et al. | Mar 2004 | B1 |
6713801 | Sin et al. | Mar 2004 | B1 |
6721138 | Chen et al. | Apr 2004 | B1 |
6721149 | Shi et al. | Apr 2004 | B1 |
6721203 | Qi et al. | Apr 2004 | B1 |
6724569 | Chen et al. | Apr 2004 | B1 |
6724572 | Stoev et al. | Apr 2004 | B1 |
6729015 | Matono et al. | May 2004 | B2 |
6735850 | Gibbons et al. | May 2004 | B1 |
6737281 | Dang et al. | May 2004 | B1 |
6744608 | Chen et al. | Jun 2004 | B1 |
6747301 | Hiner et al. | Jun 2004 | B1 |
6751055 | Alfoqaha et al. | Jun 2004 | B1 |
6754049 | Seagle et al. | Jun 2004 | B1 |
6756071 | Shi et al. | Jun 2004 | B1 |
6757140 | Hawwa | Jun 2004 | B1 |
6760196 | Niu et al. | Jul 2004 | B1 |
6762910 | Knapp et al. | Jul 2004 | B1 |
6765756 | Hong et al. | Jul 2004 | B1 |
6775902 | Huai et al. | Aug 2004 | B1 |
6778358 | Jiang et al. | Aug 2004 | B1 |
6781927 | Heanuc et al. | Aug 2004 | B1 |
6785955 | Chen et al. | Sep 2004 | B1 |
6791793 | Chen et al. | Sep 2004 | B1 |
6791807 | Hikami et al. | Sep 2004 | B1 |
6798616 | Seagle et al. | Sep 2004 | B1 |
6798625 | Ueno et al. | Sep 2004 | B1 |
6801408 | Chen et al. | Oct 2004 | B1 |
6801411 | Lederman et al. | Oct 2004 | B1 |
6803615 | Sin et al. | Oct 2004 | B1 |
6806035 | Atireklapvarodom et al. | Oct 2004 | B1 |
6807030 | Hawwa et al. | Oct 2004 | B1 |
6807332 | Hawwa | Oct 2004 | B1 |
6809899 | Chen et al. | Oct 2004 | B1 |
6816345 | Knapp et al. | Nov 2004 | B1 |
6828897 | Nepela | Dec 2004 | B1 |
6829160 | Qi et al. | Dec 2004 | B1 |
6829819 | Crue, Jr. et al. | Dec 2004 | B1 |
6833979 | Spallas et al. | Dec 2004 | B1 |
6834010 | Qi et al. | Dec 2004 | B1 |
6859343 | Alfoqaha et al. | Feb 2005 | B1 |
6859997 | Tong et al. | Mar 2005 | B1 |
6861937 | Feng et al. | Mar 2005 | B1 |
6870712 | Chen et al. | Mar 2005 | B2 |
6873494 | Chen et al. | Mar 2005 | B2 |
6873547 | Shi et al. | Mar 2005 | B1 |
6879464 | Sun et al. | Apr 2005 | B2 |
6888184 | Shi et al. | May 2005 | B1 |
6888704 | Diao et al. | May 2005 | B1 |
6891702 | Tang | May 2005 | B1 |
6894871 | Alfoqaha et al. | May 2005 | B2 |
6894877 | Crue, Jr. et al. | May 2005 | B1 |
6906894 | Chen et al. | Jun 2005 | B2 |
6909578 | Missell et al. | Jun 2005 | B1 |
6912106 | Chen et al. | Jun 2005 | B1 |
6934113 | Chen | Aug 2005 | B1 |
6934129 | Zhang et al. | Aug 2005 | B1 |
6940688 | Jiang et al. | Sep 2005 | B2 |
6942824 | Li | Sep 2005 | B1 |
6943993 | Chang et al. | Sep 2005 | B2 |
6944938 | Crue, Jr. et al. | Sep 2005 | B1 |
6947258 | Li | Sep 2005 | B1 |
6950266 | McCaslin et al. | Sep 2005 | B1 |
6954332 | Hong et al. | Oct 2005 | B1 |
6958885 | Chen et al. | Oct 2005 | B1 |
6961221 | Niu et al. | Nov 2005 | B1 |
6969989 | Mei | Nov 2005 | B1 |
6975486 | Chen et al. | Dec 2005 | B2 |
6987643 | Seagle | Jan 2006 | B1 |
6989962 | Dong et al. | Jan 2006 | B1 |
6989972 | Stoev et al. | Jan 2006 | B1 |
7006327 | Krounbi et al. | Feb 2006 | B2 |
7007372 | Chen et al. | Mar 2006 | B1 |
7012832 | Sin et al. | Mar 2006 | B1 |
7023658 | Knapp et al. | Apr 2006 | B1 |
7026063 | Ueno et al. | Apr 2006 | B2 |
7027268 | Zhu et al. | Apr 2006 | B1 |
7027274 | Sin et al. | Apr 2006 | B1 |
7035046 | Young et al. | Apr 2006 | B1 |
7041985 | Wang et al. | May 2006 | B1 |
7046490 | Ueno et al. | May 2006 | B1 |
7054113 | Seagle et al. | May 2006 | B1 |
7057857 | Niu et al. | Jun 2006 | B1 |
7059868 | Yan | Jun 2006 | B1 |
7092195 | Liu et al. | Aug 2006 | B1 |
7110289 | Sin et al. | Sep 2006 | B1 |
7111382 | Knapp et al. | Sep 2006 | B1 |
7113366 | Wang et al. | Sep 2006 | B1 |
7114241 | Kubota et al. | Oct 2006 | B2 |
7116517 | He et al. | Oct 2006 | B1 |
7124654 | Davies et al. | Oct 2006 | B1 |
7126788 | Liu et al. | Oct 2006 | B1 |
7126790 | Liu et al. | Oct 2006 | B1 |
7131346 | Buttar et al. | Nov 2006 | B1 |
7133253 | Seagle et al. | Nov 2006 | B1 |
7134185 | Knapp et al. | Nov 2006 | B1 |
7154715 | Yamanaka et al. | Dec 2006 | B2 |
7170725 | Zhou et al. | Jan 2007 | B1 |
7171080 | Rausch | Jan 2007 | B2 |
7177117 | Jiang et al. | Feb 2007 | B1 |
7193815 | Stoev et al. | Mar 2007 | B1 |
7196880 | Anderson et al. | Mar 2007 | B1 |
7199974 | Alfoqaha | Apr 2007 | B1 |
7199975 | Pan | Apr 2007 | B1 |
7211339 | Seagle et al. | May 2007 | B1 |
7212384 | Stoev et al. | May 2007 | B1 |
7238292 | He et al. | Jul 2007 | B1 |
7239478 | Sin et al. | Jul 2007 | B1 |
7248431 | Liu et al. | Jul 2007 | B1 |
7248433 | Stoev et al. | Jul 2007 | B1 |
7248449 | Seagle | Jul 2007 | B1 |
7272079 | Challener | Sep 2007 | B2 |
7280325 | Pan | Oct 2007 | B1 |
7283327 | Liu et al. | Oct 2007 | B1 |
7284316 | Huai et al. | Oct 2007 | B1 |
7286329 | Chen et al. | Oct 2007 | B1 |
7289303 | Sin et al. | Oct 2007 | B1 |
7292409 | Stoev et al. | Nov 2007 | B1 |
7296339 | Yang et al. | Nov 2007 | B1 |
7307814 | Seagle et al. | Dec 2007 | B1 |
7307818 | Park et al. | Dec 2007 | B1 |
7310204 | Stoev et al. | Dec 2007 | B1 |
7318947 | Park et al. | Jan 2008 | B1 |
7333295 | Medina et al. | Feb 2008 | B1 |
7337530 | Stoev et al. | Mar 2008 | B1 |
7342752 | Zhang et al. | Mar 2008 | B1 |
7349170 | Rudman et al. | Mar 2008 | B1 |
7349179 | He et al. | Mar 2008 | B1 |
7354664 | Jiang et al. | Apr 2008 | B1 |
7363697 | Dunn et al. | Apr 2008 | B1 |
7371152 | Newman | May 2008 | B1 |
7372665 | Stoev et al. | May 2008 | B1 |
7375926 | Stoev et al. | May 2008 | B1 |
7379269 | Krounbi et al. | May 2008 | B1 |
7386933 | Krounbi et al. | Jun 2008 | B1 |
7389577 | Shang et al. | Jun 2008 | B1 |
7417832 | Erickson et al. | Aug 2008 | B1 |
7419891 | Chen et al. | Sep 2008 | B1 |
7428124 | Song et al. | Sep 2008 | B1 |
7430098 | Song et al. | Sep 2008 | B1 |
7436620 | Kang et al. | Oct 2008 | B1 |
7436638 | Pan | Oct 2008 | B1 |
7440220 | Kang et al. | Oct 2008 | B1 |
7440660 | Jin et al. | Oct 2008 | B1 |
7443632 | Stoev et al. | Oct 2008 | B1 |
7444740 | Chung et al. | Nov 2008 | B1 |
7493688 | Wang et al. | Feb 2009 | B1 |
7500255 | Seigler et al. | Mar 2009 | B2 |
7508627 | Zhang et al. | Mar 2009 | B1 |
7522377 | Jiang et al. | Apr 2009 | B1 |
7522379 | Krounbi et al. | Apr 2009 | B1 |
7522382 | Pan | Apr 2009 | B1 |
7542246 | Song et al. | Jun 2009 | B1 |
7551406 | Thomas et al. | Jun 2009 | B1 |
7552523 | He et al. | Jun 2009 | B1 |
7554767 | Hu et al. | Jun 2009 | B1 |
7583466 | Kermiche et al. | Sep 2009 | B2 |
7595967 | Moon et al. | Sep 2009 | B1 |
7639457 | Chen et al. | Dec 2009 | B1 |
7660080 | Liu et al. | Feb 2010 | B1 |
7672080 | Tang et al. | Mar 2010 | B1 |
7672086 | Jiang | Mar 2010 | B1 |
7684160 | Erickson et al. | Mar 2010 | B1 |
7688546 | Bai et al. | Mar 2010 | B1 |
7691434 | Zhang et al. | Apr 2010 | B1 |
7695761 | Shen et al. | Apr 2010 | B1 |
7719795 | Hu et al. | May 2010 | B2 |
7726009 | Liu et al. | Jun 2010 | B1 |
7729086 | Song et al. | Jun 2010 | B1 |
7729087 | Stoev et al. | Jun 2010 | B1 |
7736823 | Wang et al. | Jun 2010 | B1 |
7785666 | Sun et al. | Aug 2010 | B1 |
7796356 | Fowler et al. | Sep 2010 | B1 |
7800858 | Bajikar et al. | Sep 2010 | B1 |
7819979 | Chen et al. | Oct 2010 | B1 |
7829264 | Wang et al. | Nov 2010 | B1 |
7846643 | Sun et al. | Dec 2010 | B1 |
7855854 | Hu et al. | Dec 2010 | B2 |
7869160 | Pan et al. | Jan 2011 | B1 |
7872824 | Macchioni et al. | Jan 2011 | B1 |
7872833 | Hu et al. | Jan 2011 | B2 |
7888663 | Zhou et al. | Feb 2011 | B2 |
7910267 | Zeng et al. | Mar 2011 | B1 |
7911735 | Sin et al. | Mar 2011 | B1 |
7911737 | Jiang et al. | Mar 2011 | B1 |
7916426 | Hu et al. | Mar 2011 | B2 |
7918013 | Dunn et al. | Apr 2011 | B1 |
7968219 | Jiang et al. | Jun 2011 | B1 |
7982989 | Shi et al. | Jul 2011 | B1 |
8008912 | Shang | Aug 2011 | B1 |
8012804 | Wang et al. | Sep 2011 | B1 |
8015692 | Zhang et al. | Sep 2011 | B1 |
8018677 | Chung et al. | Sep 2011 | B1 |
8018678 | Zhang et al. | Sep 2011 | B1 |
8024748 | Moravec et al. | Sep 2011 | B1 |
8072705 | Wang et al. | Dec 2011 | B1 |
8074345 | Anguelouch et al. | Dec 2011 | B1 |
8077418 | Hu et al. | Dec 2011 | B1 |
8077434 | Shen et al. | Dec 2011 | B1 |
8077435 | Liu et al. | Dec 2011 | B1 |
8077557 | Hu et al. | Dec 2011 | B1 |
8079135 | Shen et al. | Dec 2011 | B1 |
8081403 | Chen et al. | Dec 2011 | B1 |
8091210 | Sasaki et al. | Jan 2012 | B1 |
8097846 | Anguelouch et al. | Jan 2012 | B1 |
8104166 | Zhang et al. | Jan 2012 | B1 |
8116043 | Leng et al. | Feb 2012 | B2 |
8116171 | Lee | Feb 2012 | B1 |
8125856 | Li et al. | Feb 2012 | B1 |
8134794 | Wang | Mar 2012 | B1 |
8136224 | Sun et al. | Mar 2012 | B1 |
8136225 | Zhang et al. | Mar 2012 | B1 |
8136805 | Lee | Mar 2012 | B1 |
8141235 | Zhang | Mar 2012 | B1 |
8146236 | Luo et al. | Apr 2012 | B1 |
8149536 | Yang et al. | Apr 2012 | B1 |
8151441 | Rudy et al. | Apr 2012 | B1 |
8163185 | Sun et al. | Apr 2012 | B1 |
8164760 | Willis | Apr 2012 | B2 |
8164855 | Gibbons et al. | Apr 2012 | B1 |
8164864 | Kaiser et al. | Apr 2012 | B2 |
8165709 | Rudy | Apr 2012 | B1 |
8166631 | Tran et al. | May 2012 | B1 |
8166632 | Zhang et al. | May 2012 | B1 |
8169473 | Yu et al. | May 2012 | B1 |
8171618 | Wang et al. | May 2012 | B1 |
8179636 | Bai et al. | May 2012 | B1 |
8191237 | Luo et al. | Jun 2012 | B1 |
8194365 | Leng et al. | Jun 2012 | B1 |
8194366 | Li et al. | Jun 2012 | B1 |
8196285 | Zhang et al. | Jun 2012 | B1 |
8200054 | Li et al. | Jun 2012 | B1 |
8203800 | Li et al. | Jun 2012 | B2 |
8208350 | Hu et al. | Jun 2012 | B1 |
8220140 | Wang et al. | Jul 2012 | B1 |
8222599 | Chien | Jul 2012 | B1 |
8225488 | Zhang et al. | Jul 2012 | B1 |
8227023 | Liu et al. | Jul 2012 | B1 |
8228633 | Tran et al. | Jul 2012 | B1 |
8231796 | Li et al. | Jul 2012 | B1 |
8233248 | Li et al. | Jul 2012 | B1 |
8248896 | Yuan et al. | Aug 2012 | B1 |
8254060 | Shi et al. | Aug 2012 | B1 |
8257597 | Guan et al. | Sep 2012 | B1 |
8259410 | Bai et al. | Sep 2012 | B1 |
8259539 | Hu et al. | Sep 2012 | B1 |
8262918 | Li et al. | Sep 2012 | B1 |
8262919 | Luo et al. | Sep 2012 | B1 |
8264797 | Emley | Sep 2012 | B2 |
8264798 | Guan et al. | Sep 2012 | B1 |
8270126 | Roy et al. | Sep 2012 | B1 |
8276258 | Tran et al. | Oct 2012 | B1 |
8277669 | Chen et al. | Oct 2012 | B1 |
8279719 | Hu et al. | Oct 2012 | B1 |
8284517 | Sun et al. | Oct 2012 | B1 |
8288204 | Wang et al. | Oct 2012 | B1 |
8289821 | Huber | Oct 2012 | B1 |
8291743 | Shi et al. | Oct 2012 | B1 |
8307539 | Rudy et al. | Nov 2012 | B1 |
8307540 | Tran et al. | Nov 2012 | B1 |
8308921 | Hiner et al. | Nov 2012 | B1 |
8310785 | Zhang et al. | Nov 2012 | B1 |
8310901 | Batra et al. | Nov 2012 | B1 |
8315019 | Mao et al. | Nov 2012 | B1 |
8316527 | Hong et al. | Nov 2012 | B2 |
8320076 | Shen et al. | Nov 2012 | B1 |
8320077 | Tang et al. | Nov 2012 | B1 |
8320219 | Wolf et al. | Nov 2012 | B1 |
8320220 | Yuan et al. | Nov 2012 | B1 |
8320722 | Yuan et al. | Nov 2012 | B1 |
8322022 | Yi et al. | Dec 2012 | B1 |
8322023 | Zeng et al. | Dec 2012 | B1 |
8325569 | Shi et al. | Dec 2012 | B1 |
8333008 | Sin et al. | Dec 2012 | B1 |
8334093 | Zhang et al. | Dec 2012 | B2 |
8336194 | Yuan et al. | Dec 2012 | B2 |
8339738 | Tran et al. | Dec 2012 | B1 |
8341826 | Jiang et al. | Jan 2013 | B1 |
8343319 | Li et al. | Jan 2013 | B1 |
8343364 | Gao et al. | Jan 2013 | B1 |
8346039 | Lu et al. | Jan 2013 | B2 |
8349195 | Si et al. | Jan 2013 | B1 |
8351307 | Wolf et al. | Jan 2013 | B1 |
8357244 | Zhao et al. | Jan 2013 | B1 |
8373945 | Luo et al. | Feb 2013 | B1 |
8375564 | Luo et al. | Feb 2013 | B1 |
8375565 | Hu et al. | Feb 2013 | B2 |
8381391 | Park et al. | Feb 2013 | B2 |
8385157 | Champion et al. | Feb 2013 | B1 |
8385158 | Hu et al. | Feb 2013 | B1 |
8394280 | Wan et al. | Mar 2013 | B1 |
8400731 | Li et al. | Mar 2013 | B1 |
8404128 | Zhang et al. | Mar 2013 | B1 |
8404129 | Luo et al. | Mar 2013 | B1 |
8405930 | Li et al. | Mar 2013 | B1 |
8409453 | Jiang et al. | Apr 2013 | B1 |
8413317 | Wan et al. | Apr 2013 | B1 |
8416540 | Li et al. | Apr 2013 | B1 |
8419953 | Su et al. | Apr 2013 | B1 |
8419954 | Chen et al. | Apr 2013 | B1 |
8422176 | Leng et al. | Apr 2013 | B1 |
8422342 | Lee | Apr 2013 | B1 |
8422841 | Shi et al. | Apr 2013 | B1 |
8424192 | Yang et al. | Apr 2013 | B1 |
8441756 | Sun et al. | May 2013 | B1 |
8443510 | Shi et al. | May 2013 | B1 |
8444866 | Guan et al. | May 2013 | B1 |
8449948 | Medina et al. | May 2013 | B2 |
8451556 | Wang et al. | May 2013 | B1 |
8451563 | Zhang et al. | May 2013 | B1 |
8454846 | Zhou et al. | Jun 2013 | B1 |
8455119 | Jiang et al. | Jun 2013 | B1 |
8456961 | Wang et al. | Jun 2013 | B1 |
8456963 | Hu et al. | Jun 2013 | B1 |
8456964 | Yuan et al. | Jun 2013 | B1 |
8456966 | Shi et al. | Jun 2013 | B1 |
8456967 | Mallary | Jun 2013 | B1 |
8458892 | Si et al. | Jun 2013 | B2 |
8462592 | Wolf et al. | Jun 2013 | B1 |
8468682 | Zhang | Jun 2013 | B1 |
8472288 | Wolf et al. | Jun 2013 | B1 |
8480911 | Osugi et al. | Jul 2013 | B1 |
8486285 | Zhou et al. | Jul 2013 | B2 |
8486286 | Gao et al. | Jul 2013 | B1 |
8488272 | Tran et al. | Jul 2013 | B1 |
8491801 | Tanner et al. | Jul 2013 | B1 |
8491802 | Gao et al. | Jul 2013 | B1 |
8493693 | Zheng et al. | Jul 2013 | B1 |
8493695 | Kaiser et al. | Jul 2013 | B1 |
8495813 | Hu et al. | Jul 2013 | B1 |
8498084 | Leng et al. | Jul 2013 | B1 |
8506828 | Osugi et al. | Aug 2013 | B1 |
8514517 | Batra et al. | Aug 2013 | B1 |
8518279 | Wang et al. | Aug 2013 | B1 |
8518832 | Yang et al. | Aug 2013 | B1 |
8520336 | Liu et al. | Aug 2013 | B1 |
8520337 | Liu et al. | Aug 2013 | B1 |
8524068 | Medina et al. | Sep 2013 | B2 |
8526275 | Yuan et al. | Sep 2013 | B1 |
8531801 | Xiao et al. | Sep 2013 | B1 |
8532450 | Wang et al. | Sep 2013 | B1 |
8533937 | Wang et al. | Sep 2013 | B1 |
8537494 | Pan et al. | Sep 2013 | B1 |
8537495 | Luo et al. | Sep 2013 | B1 |
8537502 | Park et al. | Sep 2013 | B1 |
8545999 | Leng et al. | Oct 2013 | B1 |
8547659 | Bai et al. | Oct 2013 | B1 |
8547667 | Roy et al. | Oct 2013 | B1 |
8547730 | Shen et al. | Oct 2013 | B1 |
8555486 | Medina et al. | Oct 2013 | B1 |
8559141 | Pakala et al. | Oct 2013 | B1 |
8563146 | Zhang et al. | Oct 2013 | B1 |
8565049 | Tanner et al. | Oct 2013 | B1 |
8576517 | Tran et al. | Nov 2013 | B1 |
8578594 | Jiang et al. | Nov 2013 | B2 |
8582238 | Liu et al. | Nov 2013 | B1 |
8582241 | Yu et al. | Nov 2013 | B1 |
8582253 | Zheng et al. | Nov 2013 | B1 |
8588039 | Shi et al. | Nov 2013 | B1 |
8593914 | Wang et al. | Nov 2013 | B2 |
8597528 | Roy et al. | Dec 2013 | B1 |
8599520 | Liu et al. | Dec 2013 | B1 |
8599657 | Lee | Dec 2013 | B1 |
8603593 | Roy et al. | Dec 2013 | B1 |
8607438 | Gao et al. | Dec 2013 | B1 |
8607439 | Wang et al. | Dec 2013 | B1 |
8611035 | Bajikar et al. | Dec 2013 | B1 |
8611054 | Shang et al. | Dec 2013 | B1 |
8611055 | Pakala et al. | Dec 2013 | B1 |
8614864 | Hong et al. | Dec 2013 | B1 |
8619512 | Yuan et al. | Dec 2013 | B1 |
8625233 | Ji et al. | Jan 2014 | B1 |
8625941 | Shi et al. | Jan 2014 | B1 |
8628672 | Si et al. | Jan 2014 | B1 |
8630068 | Mauri et al. | Jan 2014 | B1 |
8634280 | Wang et al. | Jan 2014 | B1 |
8638529 | Leng et al. | Jan 2014 | B1 |
8643980 | Fowler et al. | Feb 2014 | B1 |
8649123 | Zhang et al. | Feb 2014 | B1 |
8665561 | Knutson et al. | Mar 2014 | B1 |
8670211 | Sun et al. | Mar 2014 | B1 |
8670213 | Zeng et al. | Mar 2014 | B1 |
8670214 | Knutson et al. | Mar 2014 | B1 |
8670294 | Shi et al. | Mar 2014 | B1 |
8670295 | Hu et al. | Mar 2014 | B1 |
8675318 | Ho et al. | Mar 2014 | B1 |
8675455 | Krichevsky et al. | Mar 2014 | B1 |
8681594 | Shi et al. | Mar 2014 | B1 |
8689430 | Chen et al. | Apr 2014 | B1 |
8693141 | Elliott et al. | Apr 2014 | B1 |
8703397 | Zeng et al. | Apr 2014 | B1 |
8705205 | Li et al. | Apr 2014 | B1 |
8711518 | Zeng et al. | Apr 2014 | B1 |
8711528 | Xiao et al. | Apr 2014 | B1 |
8717709 | Shi et al. | May 2014 | B1 |
8720044 | Tran et al. | May 2014 | B1 |
8721902 | Wang et al. | May 2014 | B1 |
8724259 | Liu et al. | May 2014 | B1 |
8749790 | Tanner et al. | Jun 2014 | B1 |
8749920 | Knutson et al. | Jun 2014 | B1 |
8753903 | Tanner et al. | Jun 2014 | B1 |
8760807 | Zhang et al. | Jun 2014 | B1 |
8760818 | Diao et al. | Jun 2014 | B1 |
8760819 | Liu et al. | Jun 2014 | B1 |
8760822 | Li et al. | Jun 2014 | B1 |
8760823 | Chen et al. | Jun 2014 | B1 |
8763235 | Wang et al. | Jul 2014 | B1 |
8780498 | Jiang et al. | Jul 2014 | B1 |
8780505 | Xiao | Jul 2014 | B1 |
8786983 | Liu et al. | Jul 2014 | B1 |
8790524 | Luo et al. | Jul 2014 | B1 |
8790527 | Luo et al. | Jul 2014 | B1 |
8792208 | Liu et al. | Jul 2014 | B1 |
8792312 | Wang et al. | Jul 2014 | B1 |
8793866 | Zhang et al. | Aug 2014 | B1 |
8797680 | Luo et al. | Aug 2014 | B1 |
8797684 | Tran et al. | Aug 2014 | B1 |
8797686 | Bai et al. | Aug 2014 | B1 |
8797692 | Guo et al. | Aug 2014 | B1 |
8813324 | Emley et al. | Aug 2014 | B2 |
20020003752 | Fuji et al. | Jan 2002 | A1 |
20050031278 | Shi et al. | Feb 2005 | A1 |
20090116804 | Peng et al. | May 2009 | A1 |
20100046083 | Peng | Feb 2010 | A1 |
20100290157 | Zhang et al. | Nov 2010 | A1 |
20110086240 | Xiang et al. | Apr 2011 | A1 |
20110090588 | Gao et al. | Apr 2011 | A1 |
20110157599 | Weaver et al. | Jun 2011 | A1 |
20120111826 | Chen et al. | May 2012 | A1 |
20120216378 | Emley et al. | Aug 2012 | A1 |
20120237878 | Zeng et al. | Sep 2012 | A1 |
20120298621 | Gao | Nov 2012 | A1 |
20130064051 | Peng et al. | Mar 2013 | A1 |
20130100783 | Ostrowski et al. | Apr 2013 | A1 |
20130216702 | Kaiser et al. | Aug 2013 | A1 |
20130216863 | Li et al. | Aug 2013 | A1 |
20130257421 | Shang et al. | Oct 2013 | A1 |
20130277575 | Peng et al. | Oct 2013 | A1 |
20130279035 | Peng et al. | Oct 2013 | A1 |
20140154529 | Yang et al. | Jun 2014 | A1 |
20140175050 | Zhang et al. | Jun 2014 | A1 |
20140254335 | Gage et al. | Sep 2014 | A1 |
Entry |
---|
M. Ams, et al., “Slit beam shaping method for femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses,” Optical Society of America, Jul. 25, 2005, vol. 13, No. 15, pp. 1-6. |
Number | Date | Country | |
---|---|---|---|
61953564 | Mar 2014 | US |