| AH Smith, Phase Mask Machining of High Throughput via Formation, Litel Instruments, pp. 1-6. |
| B. Smoother, “Cylindrical Lens Arrays Homogenize Excimer Beam”, Laser Focus World, Nov. 1991, pp. 39. |
| Lambda Physik, “Application of Excimer Lasers in Electronic Packaging and Manufacturing”, Lambda Physik Industrial Report, 5/96, Publication No. 10, pp. 1-8. |
| “Phase Mask Machining for High Throughput via Formation” by AH Smith, Litel Instruments, pp 1-6. |
| “Cylindrical Lens Arrays Homogenize Excimer Beam” by B. Smoother, Laser Focus World, Nov. 1991, pp 39. |
| “Application of Excimer Lasers in Electronic Packaging and Manufacturing” by Lambda Physik, 5/96, Lambda Physik Industrial Report, Publication No. 10, pp. 1-8. |
| EPO Search Report for RD25905 dated Jun. 30, 2003. |