Systems and methods for digital signal synthesis with variable sample rate DAC

Information

  • Patent Grant
  • 12231145
  • Patent Number
    12,231,145
  • Date Filed
    Friday, February 24, 2023
    2 years ago
  • Date Issued
    Tuesday, February 18, 2025
    2 months ago
  • Inventors
  • Original Assignees
    • Mixed-Signal Devices Inc. (Irvine, CA, US)
  • Examiners
    • Nguyen; Khai M
    Agents
    • KPPB LLP
Abstract
Systems and methods for digital signal synthesis with variable sample rate digital-to-analog converters (DACs) in accordance with various embodiments of the invention are described. One embodiment includes a digital frequency generator that includes a direct digital frequency synthesizer (DDFS); a digital-to-analog converter (DAC); a frequency/phase estimation circuit; a stable reference clock (REF CLK); a variable frequency sample clock; a frequency control word (FCW); where the DAC is sampled by the variable frequency sample clock; where the DDFS is clocked by the variable frequency sample clock; where the frequency/phase estimation circuit receives as inputs the stable REF CLK and the variable frequency sample clock and estimates a FCW frequency error and adjusts the FCW to the DDFS; where the DDFS receives the FCW and outputs a digital sine codeword at the variable frequency sample clock to the DAC, where the FCW to the DDFS is continuously adjusted to track the variable frequency sample clock.
Description
FIELD OF THE INVENTION

The present invention relates to digital signal synthesis with variable sample rate digital-to-analog converters (DACs).


BACKGROUND

Modern electronic systems process and store information digitally. However, due to the analog nature of the world, conversions between analog and digital domains are needed and performed by data converters. Digital-to-analog converters (DACs) can be used to convert digital codewords into analog signals (e.g., voltage, current, among others).


SUMMARY OF THE INVENTION

Systems and methods in accordance with embodiments of the invention provide for digital signal synthesis using variable sample rate DACs. One embodiment includes a digital frequency generator that includes: a direct digital frequency synthesizer (DDFS); a digital-to-analog converter (DAC); a frequency/phase estimation circuit; a stable reference clock (REF CLK); a variable frequency sample clock; a frequency control word (FCW); where the DAC is sampled by the variable frequency sample clock; where the DDFS is clocked by the variable frequency sample clock; where the frequency/phase estimation circuit receives as inputs the stable REF CLK and the variable frequency sample clock and estimates a FCW frequency error and adjusts the FCW to the DDFS; where the DDFS receives the FCW and outputs a digital sine codeword at the variable frequency sample clock to the DAC, where the FCW to the DDFS is continuously adjusted to track the variable frequency sample clock; and where the DAC converts the sine codeword to an analog waveform.


In a further embodiment, the variable frequency sample clock is at least one variable frequency sample clock selected from the group consisting of a frequency ramp generator, a pseudo random (PN) modulated frequency source, and a frequency modulation source.


In a further embodiment again, the frequency/phase estimation circuit estimates a frequency error by comparing edges of the REF CLK and the variable frequency sample clock, where the frequency error is filtered with a loop filter to generate the FCW for the DDFS.


In yet a further embodiment, the FCW is a ratio of a desired frequency (fc) and the variable frequency sample clock (fsj) wherein j denotes an index of the sample frequency.


An embodiment includes a broadband modulator including: a stable symbol clock (CLK); a variable frequency sample clock; an OFDM modulator circuit that operates at the stable symbol CLK to generate OFDM symbols; a frequency/phase estimation circuit that receives as inputs the stable symbol CLK and the variable frequency sample clock and estimates a frequency error and a phase error; a variable interpolator/decimator (VID) circuit that uses the frequency error and the phase error to generate a codeword; a digital-to-analog converter (DAC) that receives the codeword from the VID and generates an analog output.


In a further embodiment, the analog output is filtered by a filter to provide a filtered analog output.


In a further embodiment, the VID circuit converts a modulated signal from the stable symbol CLK domain to the variable frequency sample clock domain, where the VID circuit generates a corrected codeword that is provided to the DAC.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 illustrates DAC outputs in accordance with an embodiment of the invention.



FIG. 2 illustrates an architecture for digital frequency generation in accordance with an embodiment of the invention.



FIG. 3 illustrates NRZ DAC output spectrum in accordance with an embodiment of the invention.



FIG. 4 illustrate a frequency spectrum filtered output in accordance with an embodiment of the invention.



FIG. 5 illustrates a digital frequency generation architecture with DAC nonlinearity in accordance with an embodiment of the invention.



FIG. 6 illustrates an NRZ DAC output spectrum with IM products in accordance with an embodiment of the invention.



FIG. 7 illustrates a spectrum of a filtered output with IM products in accordance with an embodiment of the invention.



FIG. 8 illustrates an NRZ DAC output spectrum with two sample frequencies in accordance with an embodiment of the invention.



FIG. 9 illustrates an NRZ DAC output spectrum with IM products with variable sample frequency in accordance with an embodiment of the invention.



FIG. 10 illustrates an architecture for digital frequency synthesis with variable sample rate DAC in accordance with an embodiment of the invention.



FIG. 11 illustrates an architecture for frequency/phase estimation in accordance with an embodiment of the invention.



FIG. 12 illustrates a process for digital frequency synthesis with a variable sample rate DAC in accordance with an embodiment of the invention.



FIG. 13 illustrates a digital broadband modulator with a variable sample rate DAC in accordance with an embodiment of the invention.



FIG. 14 illustrates a process for a broadband modulator with a variable sample rate DAC in accordance with an embodiment of the invention.





DETAILED DESCRIPTION

Turning now to the drawings, systems and methods for digital signal synthesis with variable sample rate digital-to-analog converters (DACs) in accordance with various embodiments of the invention are illustrated. Systems in accordance with many embodiments can provide for digital frequency synthesis using a variable sample rate DAC. In many embodiments, a DAC can be sampled by a variable frequency source. In many embodiments, a variable frequency source can be a frequency ramp generator, pseudo random (PN) modulated frequency source, and/or frequency modulation source among others. In many embodiments, a direct digital frequency synthesizer (DDFS) can also be clocked by the same variable frequency source. In many embodiments, given that a sample frequency can be variable, a frequency control word (FCW) to the DDFS may be adjusted continuously to track the variable sample frequency. A frequency/phase estimation circuit can be used to estimate FCW frequency error. The frequency/phase estimation circuit can take both a stable reference clock and a variable sample clock as inputs. Described now are details regarding DAC operation in accordance with several embodiments of the invention.


DAC Operation


A DAC can be a device that converts a fine-precision digital-format number (typically a finite-length binary format number) to an analog electrical quantity (such a voltage, current and/or electric charge). Two basic types of DAC output formats can be used to construct an analog signal, including non-return-to-zero (NRZ) and return-to-zero (RZ). FIG. 1 illustrates DAC outputs for different types of DACs, including a DAC analog output for NRZ, a DAC analog output for RZ, and a filtered DAC output. As illustrated in FIG. 1, for NRZ, the DAC can update its analog output according to a digital input at a fixed time interval of Ts and the DAC can hold the output, where Ts can be referred to as an updating and sampling period. For an RZ type DAC, after updating the output at each time interval Ts, the DAC can hold the output for a certain time (Th), which can then go back to zero. In both types of DACs, a DAC's output can be held for a certain time Th, where 0<Th<=Ts, known as zero-order-hold. An output of a DAC is typically a stepwise or pulsed analog signal and can be low pass filtered to construct the desired analog signal.


DAC Output Spectrum


An architecture of a digital frequency generator using direct digital frequency synthesis (DDFS) and a DAC in accordance with an embodiment of the invention is illustrated in FIG. 2. The DDFS input can be a frequency control word (e.g., FCW=fc/fs) which can be a ratio of a desired frequency (fc) and a sample frequency (fs). The DDFS can output a digital sine codeword at the sample rate (fs). The DAC can convert the sine codeword into an analog waveform.


A raw DAC output (e.g., NRZ and RZ) can have many harmonics other than a desired output frequency. FIG. 3 illustrates an NRZ DAC output spectrum of a single tone with frequency fc with sample frequency at fs. In addition to the desired frequency (fc and −fc), there can also be harmonic frequencies at equation (1) below:

n*fs+fc and n*fs−fc where n is an integer from −∞ to ∞  (1)


These harmonics may be away from a desired frequency fc if fs is chosen properly (e.g., fc has been less than fs/2). In many embodiments, a low pass filter can be used to suppress harmonics. FIG. 4 illustrates using a low pass filter so suppress harmonics to a desired level in accordance with an embodiment of the invention.


In many embodiments, if there is a non-linear device (e.g., an amplifier and/or driver) before the low pass filter (as shown in FIG. 5 in accordance with an embodiment), intermodulation (IM) products of these harmonics can show up in-band of fc and they may no longer be filtered out. An example of a spectrum with nonlinearity added to a DAC output in accordance with an embodiment of the invention is illustrated in FIG. 6. A spectrum of a filtered output and the in-band IM products at the filtered output in accordance with an embodiment of the invention is illustrated in FIG. 7. In many embodiments, un-filtered IM products can add noise to a system and degrade the system performance.


IM Product Suppression with Variable Sample Frequency


Systems in accordance with many embodiments can, instead of using a fixed sample frequency fs, use multiple sample frequencies fsj, where j denotes an index of the sample frequency. In many embodiments, a digital frequency control word (FCW) can be adjusted according to the sample frequency fsj, and thus a DAC output can still have a desired frequency. Accordingly, harmonics can be spread into multiple frequency components with lower power.


For example, a desired output frequency is 1000 Hz and 2 sample frequencies 5000 and 5050 can be used. For fs=5000 Hz, FCW=1000/5000=0.2 can be used and the image frequency is at 4000 Hz. For fs=5050 Hz, FCW=1000/5050=0.198 can be used and the image frequency is at 4050 Hz.


An example DAC output spectrum with 2 sample frequencies in accordance with an embodiment of the invention is illustrated in FIG. 8. As illustrated in FIG. 8, harmonics can be split into two components and their powers can be lowered by a certain amount (e.g., by 3 dB). In many embodiments, if N sample frequencies are used, a harmonic power can be lowered by 10*log 10 (N). If the sample frequency varies over a frequency band with bandwidth BW, the harmonic power in dBc/Hz can be lowered by 10*log 10 (BW).


With lower harmonic power, IM products of these harmonics can be lowered with a same non-linear device. An example of variable sampled DAC output spectrum with IM products added in accordance with an embodiment of the invention is illustrated in FIG. 9. As illustrated in FIG. 9, IM products can spread over a wide frequency range and in-band SNR can be improved.


Digital Frequency Synthesis Architectures with Variable Sample Rate DACs


A circuit architecture for digital frequency synthesis with a variable sample rate DAC in accordance with an embodiment of the invention is illustrated in FIG. 10. The DAC 1020 can be sampled by a variable frequency source 1010. In many embodiments, a variable frequency source can be a frequency ramp generator, pseudo random (PN) modulated frequency source, and/or frequency modulation source among others. In many embodiments, DDFS 1015 can also be clocked by the same variable frequency source 1010. Given the sample frequency is variable, FCW 1006 to the DDFS 1015 may need to be adjusted continuously to track the variable sample frequency. A frequency/phase estimation circuit 1005 can be used to estimate FCW frequency error. The frequency/phase estimation circuit 1005 can take both a stable reference clock 1001 and the variable sample clock 1010 as inputs. Although FIG. 10 illustrates a particular circuit architecture for digital frequency synthesis with a variable sample rate DAC, any of a variety of architectures can be utilized as appropriate to the requirements of specific applications in accordance with embodiments of the invention.


A frequency/phase estimation circuit architecture in accordance with an embodiment of the invention is illustrated in FIG. 11. As illustrated in FIG. 11, the phase error can be estimated by comparing edges of a reference clock and a sample clock. This phase error can be filtered with a loop filter to generate a final FCW for a DDFS. Although FIG. 11 illustrates a particular circuit architecture of a frequency/phase estimation circuit, any of a variety of architectures can be utilized as appropriate to the requirements of specific applications in accordance with embodiments of the invention.


A process for frequency generation in accordance with an embodiment of the invention is illustrated FIG. 12. The process 1200 compares (at 1205), using a frequency/phase estimation circuit, a stable reference clock and a variable sample clock to estimate a frequency error. The process adjusts (at 1210) a frequency control word (FCW) value going to a DDFS circuit. The process generates (at 1215) a final codeword for a DAC using a DDFS circuit that takes in the corrected FCW to generate the final codeword for the DAC. The process completes. Although FIG. 12 illustrates a particular process for frequency generation using a frequency/phase estimation circuit to generate a corrected FCW, any of a variety of processes can be utilized as appropriate to the requirements of specific applications in accordance with embodiments of the invention.


Digital Broadband Modulator Architectures with Variable Sample Rate DACs


Variable sample rate DAC architectures in accordance with many embodiments may not be limited to a single frequency generation. Systems in accordance with many embodiments can be used for broad-band signal generation. A circuit architecture of a broadband modulator (OFDM modulator) with a variable sample rate DAC in accordance with an embodiment of the invention is illustrated in FIG. 13. As illustrated, an OFDM modulator 1305 that can operate at a stable symbol CLK can be used to generated OFDM symbols. A frequency/phase estimation circuit 1330 can be used to estimate the frequency and phase error with symbol CLK and variable frequency sample clock. A variable-interpolator-decimator (VID) circuit can be used to convert OFDM symbols from OFDM symbol CLK domain to variable sample clock domain 1340. A variable interpolator/decimator (VID) circuit can use a frequency error and a phase error from the frequency/phase estimation circuit 1330 for the signal processing. A DAC 1315 can receive the signal from the VID and generate an output 1320, which can be filtered by a filter 1325 to provide a filtered output. Although FIG. 13 illustrates a particular variable sample rate DAC architecture, any of a variety of architectures can be utilized as appropriate to the requirements of specific applications in accordance with embodiments of the invention.


A process for broad-band signal generation in accordance with an embodiment of the invention is illustrated in FIG. 14. The process 1400 generates (at 1401) a modulated signal on a stable REF CLK using a broadband modulator circuit. In many embodiments, a broadband modulator circuit can receive a REF CLK, a sync signal, and at least one MOD parameter and the circuit can output MOD symbols. The process compares (at 1405), using a frequency/phase estimation circuit, REF CLK and a variable frequency sample clock to generate a frequency error and a phase error. The process converts (at 1415), using a VID processing circuit, the modulated signal from REF CLK domain to a variable frequency sample clock domain. The process generates, using the VID processing circuit, a corrected codeword that is provided to a DAC. The process completes. Although FIG. 14 illustrates a particular process for broad-band signal generation, any of a variety of processes can be utilized as appropriate to the requirements of specific applications in accordance with embodiments of the invention.


Mathematical Operations


A DAC operation can be modeled by 3 mathematical operations:


1) Normalized frequency scaling. A digital normalized frequency can be scaled by the actual DAC sample frequency to generate the output frequency.


2) Frequency multiplication with multiple tones. The band-limited digital signal can be mixed by multiple tones that are integer multiply of the sample frequency.


3) The broad-band signal can be convolved with a rectangular pulse. For NRZ DAC, the rectangular pulse width can be the same as the sample period. For RZ DAC, the rectangular pulse width can be less than the sample period. For both cases, this convolution can be the same as low pass filtering by a sinc( ) function in frequency domain. The frequency response of the low-pass filter can be determined by the pulse width and the sample frequency.


Given a digital signal x(n)=sin(2π·0.1*n), n=1, 2, . . . and a DAC sampled at 100 MHz can be used to convert this digital signal into analog. The output analog signal has frequencies fop (0.1*100=10 MHZ) and fon (−0.1*100=−10 MHZ) and their frequency multiplication products with integer multiples of the sample frequency 100 MHz.

fop(k)=k*100+10 MHZ, k=−∞, . . . ,−1,0,1, . . . ,∞
fon(k)=k*100−10 MHz, k=−∞, . . . ,−1,0,1, . . . ,∞


Each frequency component is weighted by the sinc( ) filter and the filter weight h(f) is given as follows:







h

(
f
)

=


1

T
s



sin


c

(

f
*

T
p


)






Tp is the pulse width. For NRZ DAC, Tp=Ts. For RZ DAC, Tp<Ts.


Given a digital signal with normalized frequency component at fnc and a DAC with sample frequency at fs, the DAC output can include many frequencies fop (k) and fcn(k)

fcp(k)=k*fs+fnc*fs,k=−∞, . . . ,−1,0,1, . . . ,∞
fcn(k)=k*fs−fnc*fs,k=−∞, . . . ,−1,0,1, . . . ,∞


Each frequency component is weighted by wcp(k) and wcn(k)








w

c

p


(
k
)

=


1

T
s



sin


c

(



f

c

p


(
k
)

*

T
p


)










w

c

n


(
k
)

=


1

T
s



sin


c

(



f

c

n


(
k
)

*

T
p


)






For an ideal DAC with perfect linearity and fnc<0.5, it can be shown that frequency components within {−fs/2, fs/2} are fcp(0) and fcn(0). A low-pass filter with pass band {−fs/2, fs/2} can filter out all other frequencies. The filtered output is a sinewave with frequency at fnc*fs.


However, if there is non-linearity in the DAC, intermodulation (IM) products would show up at the DAC output and these IM products can fall within






{


-


f
s

2


,


f
s

2


}





band. These in-band IM products cannot be filtered out by the low-pass filter. They become spurs and degrade quality of the generated signal. The general expression of IM products of p-th order (k-th frequency) and q-th order (l-th frequency) is as follows:

[fcp(k)]p*[fcp(l)]q=(k*p+l*q)fs+(p+q)(fnc*fs)
[fcn(k)]p*[fcn(l)]q=(k*p+l*q)fs−(p+q)(fnc*fs)
[fcp(k)]p*[fcn(l)]q=(k*p+l*q)fs+(p−q)(fnc*fs)


Their associated weights are:

α(p,q)*[wcp(k)]p*[wcp(l)]q
α(p,q)*[wcp(k)]p*[wcn(l)]q
α(p,q)*[wcn(k)]p*[wcn(l)]q

    • α(p, q) is a function associated with the DAC non-linearity.


Any IM products with non-zero (k*p+l*q) term may not be desirable since they can be spur right next to the desired frequency. On the other hand, IM products with (k*p+l*q)=0 is an integer harmonic of the desired frequency and the frequency spacing is at least (fnc*fs).


Given a digital signal with fnc=0.199 and fs=100 MHZ, the desired frequency is 19.9 MHz. With k=1, p=3, l=−2, and q=1, IM products [fcn(k)]p*[fcn(l)]q has output frequency at 20.4 MHz which is 0.4 MHz away from the desired frequency. This close-in spur may not be desirable and should be reduced as much as possible to improve signal quality. In many embodiments, a way to suppress this spur can be to improve the DAC linearity which means more power and area. In certain embodiments, another way can be to sample the DAC with variable sample frequency fs(t). fs(t) can be a random variable that takes value between {fs_min, fs_max}. If the difference between fs_min and fs_max is small compared to








f

s

_

m

i

n


(




f

s

_

m

ax


-

f

s

_

m

i

n




f

s

_

m

i

n




1

)

,





can the above DAC analysis can extend from fixed frequency sampling to variable frequency sampling.


Given a digital signal with normalized frequency component at fnc (t) and a DAC with variable sample frequency at fs(t), fnc (t) tracks the change of fs(t) such that fnc (t)*fs(t)=fc. The DAC output can include many frequencies fcp(k, t) and fcn(k, t)

fcp(k,t)=k*fs(t)+fc,k=−∞, . . . ,−1,0,1, . . . ,∞
fcn(k,t)=k*fs(t)−fc,k=−∞, . . . ,−1,0,1, . . . ,∞


Each frequency component is weighted by wcp(k, t) and wcn(k, t)








w

c

p


(

k
,
t

)

=


1

T
s



sin


c

(



f

c

p


(

k
,
t

)

*


T
p

(
t
)


)










w

c

n


(

k
,
t

)

=


1

T
s



sin


c

(



f

c

n


(

k
,
t

)

*


T
p

(
t
)


)






Added non-linearity, IM products of p-th order (k-th frequency) and q-th order (l-th frequency) is as follows:

[fcp(k,t)]p*[fcp(l,t)]q=(k*p+l*q)fs(t)+(p+q)fc
[fcn(k,t)]p*[fcn(l,t)]q=(k*p+l*q)fs(t)−(p+q)fc
[fcp(k,t)]p*[fcn(l,t)]q=(k*p+l*q)fs(t)+(p−q)fc


Their associated weights are:

α(p,q)*[wcp(k,t)]p+[wcp(l,t)]q
α(p,q)*[wcp(k,t)]p+[wcn(l,t)]q
α(p,q)*[wcn(k,t)]p*[wcn(l,t)]q


Note that any IM products with non-zero (k*p+l*q) term is no longer a single tone. Its frequency spreads over a wide range depending on {fs_min, fs_max}, k, p, l, and q.


To generate a frequency with 19.9 MHz with a variable sample frequency fs(t) and {fs_min=99.9 MHZ, fs_max=100.1 MHz}, the normalized frequency fnc (t) should be between 0.1988 and 0.1992 tracking fs(t). With k=1, p=3, l=−2, and q=1, IM products [fcn(k)]p*[fcn(l)]q has output frequencies range from 19.9 to 20.9 MHz. Since the IM product is spread over a wide range (1 MHZ), each individual tone in the frequency range is reduced (1/1,000,000 in this case).


While the above descriptions and associated figures have digital signal synthesis with variable sample rate digital-to-analog converters, it should be clear that any of a variety of configurations for digital signal synthesis with variable sample rate digital-to-analog converters can be implemented in accordance with embodiments of the invention. More generally, although the present invention has been described in certain specific aspects, many additional modifications and variations would be apparent to those skilled in the art. It is therefore to be understood that the present invention may be practiced otherwise than specifically described. Thus, embodiments of the present invention should be considered in all respects as illustrative and not restrictive.

Claims
  • 1. A digital frequency generator comprising: a direct digital frequency synthesizer (DDFS);a digital-to-analog converter (DAC);a frequency/phase estimation circuit;a stable reference clock (REF CLK);a variable frequency sample clock; anda frequency control word (FCW);wherein the DAC is sampled by the variable frequency sample clock;wherein the DDFS is clocked by the variable frequency sample clock;wherein the frequency/phase estimation circuit receives as inputs the stable REF CLK and the variable frequency sample clock and estimates a FCW frequency error and adjusts the FCW to the DDFS;wherein the DDFS receives the FCW and outputs a digital sine codeword at the variable frequency sample clock to the DAC, wherein the FCW to the DDFS is continuously adjusted to track the variable frequency sample clock; andwherein the DAC converts the digital sine codeword to an analog waveform.
  • 2. The digital frequency generator of claim 1, wherein the variable frequency sample clock is at least one variable frequency sample clock selected from the group consisting of a frequency ramp generator, a pseudo random (PN) modulated frequency source, and a frequency modulation source.
  • 3. The digital frequency generator of claim 1, wherein the frequency/phase estimation circuit estimates a frequency error by comparing edges of the REF CLK and the variable frequency sample clock, wherein the frequency error is filtered with a loop filter to generate the FCW for the DDFS.
  • 4. The digital frequency generator of claim 1, wherein the FCW is a ratio of a desired frequency (fc) and the variable frequency sample clock (fsj) wherein j denotes an index of the sample frequency.
  • 5. A broadband modulator comprising: a stable symbol clock (CLK);a variable frequency sample clock;an OFDM modulator circuit that operates at the stable symbol CLK to generate OFDM symbols;a frequency/phase estimation circuit that receives as inputs the stable symbol CLK and the variable frequency sample clock and estimates a frequency error and a phase error;a variable interpolator/decimator (VID) circuit that uses the frequency error and the phase error to generate a codeword; anda digital-to-analog converter (DAC) that receives the codeword from the VID and generates an analog output.
  • 6. The broadband modulator of claim 5, wherein the analog output is filtered by a filter to provide a filtered analog output.
  • 7. The broadband modulator of claim 5, wherein the VID circuit converts a modulated signal from the stable symbol CLK domain to the variable frequency sample clock domain, wherein the VID circuit generates a corrected codeword that is provided to the DAC.
CROSS REFERENCED APPLICATIONS

This application claims priority under 35 U.S.C. 119 (e) to U.S. Provisional Patent Application Ser. No. 63/268,457, entitled “Digital Signal Synthesis with DAC Sampled by Variable Frequency”, filed Feb. 24, 2022 by Yu et al., which is hereby incorporated by reference in its entirety as if set forth herewith.

US Referenced Citations (157)
Number Name Date Kind
5682161 Ribner et al. Oct 1997 A
5889443 Joergensen Mar 1999 A
5914933 Cimini et al. Jun 1999 A
6414455 Watson Jul 2002 B1
6724249 Nilsson Apr 2004 B1
7176820 Fuller et al. Feb 2007 B1
8294605 Pagnanelli Oct 2012 B1
8949699 Gustlin Feb 2015 B1
10020818 Yu et al. Jul 2018 B1
10090845 Midha Oct 2018 B1
10367522 Yu et al. Jul 2019 B2
10530372 Yu et al. Jan 2020 B1
10812087 Yu et al. Oct 2020 B2
10840939 Yu et al. Nov 2020 B2
11258448 Yu et al. Feb 2022 B2
11933919 Yu et al. Mar 2024 B2
20010022555 Lee et al. Sep 2001 A1
20020053986 Brooks et al. May 2002 A1
20020057214 Brooks et al. May 2002 A1
20020061086 Adachi et al. May 2002 A1
20020093442 Gupta et al. Jul 2002 A1
20030128143 Yap et al. Jul 2003 A1
20030137359 Patana et al. Jul 2003 A1
20030174080 Brooks et al. Sep 2003 A1
20030179121 Gupta et al. Sep 2003 A1
20030227401 Yang et al. Dec 2003 A1
20040032355 Melanson et al. Feb 2004 A1
20040066321 Brooks et al. Apr 2004 A1
20040081266 Adachi et al. Apr 2004 A1
20040108947 Yang et al. Jun 2004 A1
20040228416 Anderson et al. Nov 2004 A1
20040233084 Brooks et al. Nov 2004 A1
20040233085 Fukuda et al. Nov 2004 A1
20040252038 Robinson et al. Dec 2004 A1
20050001750 Lo et al. Jan 2005 A1
20050012649 Adams et al. Jan 2005 A1
20050030212 Brooks et al. Feb 2005 A1
20050057385 Gupta et al. Mar 2005 A1
20050062627 Jelonnek et al. Mar 2005 A1
20050063505 Dubash et al. Mar 2005 A1
20050088327 Yokoyama et al. Apr 2005 A1
20050093726 Hezar et al. May 2005 A1
20050116850 Hezar et al. Jun 2005 A1
20050128111 Brooks et al. Jun 2005 A1
20050156767 Melanson et al. Jul 2005 A1
20050156768 Melanson et al. Jul 2005 A1
20050156771 Melanson et al. Jul 2005 A1
20050162222 Hezar et al. Jul 2005 A1
20050207480 Norsworthy et al. Sep 2005 A1
20050237119 Irie Oct 2005 A1
20050266805 Jensen et al. Dec 2005 A1
20050285685 Frey et al. Dec 2005 A1
20060028364 Rivoir et al. Feb 2006 A1
20060038708 Luh et al. Feb 2006 A1
20060044057 Hezar et al. Mar 2006 A1
20060109153 Gupta et al. May 2006 A1
20060115036 Adachi et al. Jun 2006 A1
20060164276 Luh et al. Jul 2006 A1
20060290549 Laroia et al. Dec 2006 A1
20070001776 Li et al. Jan 2007 A1
20070013566 Chuang et al. Jan 2007 A1
20070018866 Melanson et al. Jan 2007 A1
20070035425 Hinrichs et al. Feb 2007 A1
20070080843 Lee et al. Apr 2007 A1
20070126618 Tanaka et al. Jun 2007 A1
20070152865 Melanson et al. Jul 2007 A1
20070165708 Darabi et al. Jul 2007 A1
20070279034 Roh et al. Dec 2007 A1
20080062022 Melanson et al. Mar 2008 A1
20080062024 Maeda et al. Mar 2008 A1
20080100486 Lin et al. May 2008 A1
20080180166 Gustat et al. Jul 2008 A1
20080191713 Hauer et al. Aug 2008 A1
20080198050 Akizuki et al. Aug 2008 A1
20080211588 Frey et al. Sep 2008 A1
20080272945 Melanson et al. Nov 2008 A1
20080272946 Melanson et al. Nov 2008 A1
20090083567 Kim et al. Mar 2009 A1
20090096649 Ferri et al. Apr 2009 A1
20090220219 Mcleod et al. Sep 2009 A1
20090309774 Hamashita et al. Dec 2009 A1
20100020910 Bhagavatheeswaran et al. Jan 2010 A1
20100045498 Liu et al. Feb 2010 A1
20100052960 Lakdawala et al. Mar 2010 A1
20100074368 Karthaus et al. Mar 2010 A1
20100164773 Clement et al. Jul 2010 A1
20100214143 Nakamoto et al. Aug 2010 A1
20100219999 Oliaei et al. Sep 2010 A1
20100225517 Aiba et al. Sep 2010 A1
20100283648 Niwa et al. Nov 2010 A1
20100295715 Sornin et al. Nov 2010 A1
20110006936 Lin et al. Jan 2011 A1
20110050472 Melanson et al. Mar 2011 A1
20110149155 Lin et al. Jun 2011 A1
20110299642 Norsworthy et al. Dec 2011 A1
20120063519 Oliaei et al. Mar 2012 A1
20120161864 Lee et al. Jun 2012 A1
20120194369 Galton et al. Aug 2012 A1
20120200437 Moue et al. Aug 2012 A1
20120242521 Kinyua et al. Sep 2012 A1
20120275493 Fortier et al. Nov 2012 A1
20120280843 Tsai et al. Nov 2012 A1
20120286982 Kajita et al. Nov 2012 A1
20130068019 Takase et al. Mar 2013 A1
20130099949 Wagner et al. Apr 2013 A1
20130169460 Obata et al. Jul 2013 A1
20130259103 Jensen et al. Oct 2013 A1
20140028374 Zare-Hoseini et al. Jan 2014 A1
20140035769 Rajaee et al. Feb 2014 A1
20140070969 Shu Mar 2014 A1
20140113575 Mitani et al. Apr 2014 A1
20140139293 Tsangaropoulos et al. May 2014 A1
20140286467 Norsworthy et al. Sep 2014 A1
20140307825 Ostrovskyy et al. Oct 2014 A1
20140320325 Muthers et al. Oct 2014 A1
20140368365 Quiquempoix et al. Dec 2014 A1
20150002325 Lin Jan 2015 A1
20150009054 Ono et al. Jan 2015 A1
20150036766 Elsayed et al. Feb 2015 A1
20150061907 Miglani Mar 2015 A1
20150084797 Singh et al. Mar 2015 A1
20150109157 Caldwell et al. Apr 2015 A1
20150116138 Li et al. Apr 2015 A1
20150146773 Ma et al. May 2015 A1
20150171887 Okuda Jun 2015 A1
20150341159 Norsworthy et al. Nov 2015 A1
20150349794 Lin Dec 2015 A1
20160013805 Maehata Jan 2016 A1
20160049947 Adachi Feb 2016 A1
20160050382 Rizk et al. Feb 2016 A1
20160065236 Ahmed et al. Mar 2016 A1
20160127119 Anantharaman et al. May 2016 A1
20160149586 Roh et al. May 2016 A1
20160336946 Ho et al. Nov 2016 A1
20160344404 Miglani et al. Nov 2016 A1
20160359499 Bandyopadhyay Dec 2016 A1
20160373125 Pagnanelli et al. Dec 2016 A1
20170033801 Lo et al. Feb 2017 A1
20170041019 Miglani et al. Feb 2017 A1
20170045403 Zanbaghi et al. Feb 2017 A1
20170093407 Kim et al. Mar 2017 A1
20170102248 Maurer et al. Apr 2017 A1
20170134055 Ebrahimi et al. May 2017 A1
20170163295 Talty et al. Jun 2017 A1
20170170839 Zhao et al. Jun 2017 A1
20170170840 Zhao Jun 2017 A1
20170184645 Sawataishi Jun 2017 A1
20170222652 Adachi Aug 2017 A1
20170222658 Miglani et al. Aug 2017 A1
20170250662 Cope et al. Aug 2017 A1
20170276484 Marx et al. Sep 2017 A1
20170288693 Kumar et al. Oct 2017 A1
20180145700 Yu et al. May 2018 A1
20190356329 Yu et al. Nov 2019 A1
20200106448 Yu et al. Apr 2020 A1
20210175889 Yu et al. Jun 2021 A1
20230266448 Yu et al. Aug 2023 A1
Foreign Referenced Citations (6)
Number Date Country
110168930 Aug 2019 CN
3542461 Sep 2019 EP
2016063038 Apr 2016 WO
2016063038 Jul 2016 WO
2018094380 May 2018 WO
2023163792 Aug 2023 WO
Non-Patent Literature Citations (13)
Entry
Extended European Search Report for European Application No. 17872454.8, Search completed May 25, 2020, Mailed Jun. 4, 2020, 15 pgs.
International Preliminary Report on Patentability for International Application PCT/US2017/062744, Report issued May 21, 2019, Mailed May 31, 2019, 8 pgs.
International Search Report and Written Opinion for International Application No. PCT/US2017/062744, Search completed Jan. 17, 2018, Mailed Feb. 5, 2018, 13 pgs.
International Search Report and Written Opinion for International Application No. PCT/US2022/070817 Search completed Apr. 13, 2022, Mailed Jun. 16, 2022, 20 pgs.
Aigner et al., “Advancement of MEMS into RF-Filter Applications”, International Electron Devices Meetings, IEDM '02, Dec. 8-11, 2002, pp. 897-900, doi: 10.1109/iedm.2002.1175981.
Grudkowski et al., “Fundamental-mode VHF/UHF miniature acoustic resonators and filters on silicon”, Applied Physics Letters, vol. 37, No. 11, Dec. 1, 1980, pp. 993-995, doi: 10.1063/1.91745.
Lakin et al., “Thin Film Resonators and Filters”, 1982 Ultrasonics Symposium, Oct. 27-29, 1982, San Diego, CA, USA, pp. 466-475, doi: 10.1109/ultsym.1982.197870.
Lam, “A Review of the Recent Development of MEMS and Crystal Oscillators and Their Impacts on the Frequency Control Products Industry”, Invited Paper, 2008 IEEE International Ultrasonics Symposium, Beijing, Nov. 2-5, 2008, pp. 694-704, doi: 10.1109/ULTSYM.2008.0167.
Majd et al., “Bandwidth Enhancement in Delta Sigma Modulator Transmitter Using Low Complexity Time-Interleaved Parallel Delta Sigma Modulator”, AEU—International Journal of Electronics and Communications, vol. 69, No. 7, Apr. 11, 2015, pp. 1032-1038, doi: 10.1016/j.aeue.2015.04.001.
Piazza et al., “Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators”, Journal of Microelectromechanical Systems, vol. 15, No. 6, Dec. 2006, pp. 1406-1418, doi: 10.1109/jmems.2006.886012.
Rai et al., “A Digitally Compensated 1.5 GHz CMOS/FBAR Frequency Reference”, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 57, No. 3, Mar. 4, 2010, pp. 552-561, doi: 10.1109/tuffc.2010.1447.
Ruby et al., “PCS 1900 MHz Duplexer Using Thin Film Bulk Acoustic Resonator (FBARs)”, Electronics Letters, vol. 35, No. 10, May 13, 1999, pp. 794-795, doi: 10.1049/el:19990559.
Schreier et al., “Understanding delta-sigma data converters”, IEEE Press, 2005, 455 pgs.
Provisional Applications (1)
Number Date Country
63268457 Feb 2022 US