The present invention relates to electronic lapping guides, and more specifically to systems and methods for shaping leads of electronic lapping guides to reduce calibration error.
Hard disk drives use magnetic media to store data and a movable slider having magnetic transducers (e.g., read/write heads) positioned over the magnetic media to selectively read data from and write data to the magnetic media. Electronic lapping guides (ELGs) are used for precisely controlling a degree of lapping applied to an air bearing surface (ABS) of the sliders for achieving a particular stripe height, or distance from the ABS, for the magnetic transducers located on the sliders. U.S. Pat. No. 8,165,709 to Rudy and U.S. Pat. No. 8,151,441 to Rudy et al., the entire content of each document is hereby incorporated by reference, provide a comprehensive description of ELGs used in manufacturing sliders for hard drives. As described in both of these references, ELGs typically include two leads that sandwich a resistive element.
During fabrication processes for the ELGs described in these references, and other references in the field, it has been observed that variations in the position and size of the leads can make resistance calculations for the ELG inaccurate (e.g., due to variations in the effective ELG track width). As a result of these inaccuracies in the calculated ELG resistance, calibration errors can occur such that the control of the precise dimensions of the magnetic transducer components associated with the measured ELG resistance can become inaccurate as well. Accordingly, an ELG structure that provides predictable resistance for the ELG despite potential process variation is needed.
Aspects of the invention relate to systems and methods for shaping leads of electronic lapping guides to reduce calibration error. In one embodiment, the invention relates to a device configured to generate predictable resistance for leads of an electronic lapping guide, the device including a lapping surface, and an electronic lapping guide (ELG) configured to provide information indicative of a degree of lapping performed on the lapping surface, the ELG including a first electrical lead, a second electrical lead spaced apart from the first electrical lead, and a resistive element coupled between the first electrical lead and the second electrical lead, the resistive element including a preselected shape including a right segment, a left segment, and a middle segment that abuts a bottom portion of each of the right segment and the left segment, where the right segment is spaced apart from the left segment and the middle segment is disposed adjacent to the lapping surface, where the first electrical lead and the second electrical lead are positioned further from the lapping surface than the middle segment of the resistive element.
In another embodiment, the invention relates to a method for generating predictable resistance for leads of an electronic lapping guide, the method including providing a device including a lapping surface, and an electronic lapping guide (ELG) configured to provide information indicative of a degree of lapping performed on the lapping surface, the ELG including a first electrical lead, a second electrical lead spaced apart from the first electrical lead, and a resistive element coupled between the first electrical lead and the second electrical lead, the resistive element including a preselected shape including a right segment, a left segment, and a middle segment that abuts a bottom portion of each of the right segment and the left segment, where the right segment is spaced apart from the left segment and the middle segment is disposed adjacent to the lapping surface, where the first electrical lead and the second electrical lead are positioned further from the lapping surface than the middle segment of the resistive element, lapping the lapping surface of the device, measuring a resistance of the ELG during the lapping of the lapping surface of the device, and controlling a degree of the lapping of the lapping surface of the device based on the measured resistance of the ELG and a calculated resistance of the ELG.
Referring now to the drawings, embodiments of electronic lapping guides (ELGs) having electrical leads recessed from a middle segment of a resistive element that provide predictable calculated ELG resistance and methods for controlling lapping processes that use the calculated ELG resistance are illustrated. The ELGs are configured to provide information indicative of a degree of lapping performed on the associated lapping surface and are typically located adjacent to a device to be lapped such as a magnetic transducer (e.g., reader or writer) located on a slider. The ELGs have a first electrical lead and a second electrical lead and a resistive element coupled between them. The resistive element has a right segment, a left segment, and a middle segment that abuts a bottom portion of each of the left and right segments, where the right segment is spaced apart from the left segment and the middle segment is adjacent to the lapping surface. The first and second electrical leads are recessed from the middle segment of the resistive element.
The resistive element typically has a resistance that is much greater than that of the electrical leads. So while recessing the low-resistance electrical leads forces current through an additional area of the high-resistance resistive element that it otherwise would not traverse (e.g., in conventional ELGs with electrical leads that extend to the lapping surface), and thereby increases the overall ELG resistance, the calculated ELG resistance becomes more predictable. This is despite potential process variations that skew the position and size of the electrical leads. As a result, calibration errors reducing the precision of the device formation associated with the ELG can be minimized or reduced.
The ELG 104 includes a first electrical lead 106 spaced apart from a second electrical lead 108. The ELG 104 further includes a resistive element composed of a left resistive segment 114a, a right resistive segment 114b, and a middle segment 114c positioned between the left resistive segment 114a and the right resistive segment 114b. The middle segment 114c is also positioned adjacent to the ABS 110, which is also the lapping surface. The ELG 104 further includes a first via 116 electrically coupled to the first electrical lead 106 and a second via 118 electrically coupled to the second electrical lead 108. The first electrical lead 106 is also electrically coupled to the left resistive segment 114a, and the second electrical lead 108 is electrically coupled to the right resistive segment 114b. The middle segment 114c is electrically coupled to the left resistive segment 114a and the right resistive segment 114b. In several embodiments, the resistive element (114a, 114b, 114c) is positioned on a first layer and the first electrical lead 106 and second electrical lead 108 is positioned on a second layer which is directly on top of the first layer.
In operation, a test current can be applied to the first via 116 and thereby passes through each of the first electrical lead 106, the left resistive segment 114a, the middle segment 114c, the right resistive segment 114b, the second electrical lead 108, and then the second via 118. Alternatively, the current can take the opposite path through these components. The measured current and applied voltage can then be used to generate a measured resistance of the ELG 104.
By recessing the electrical leads 106 and 108 to areas of the resistive element that are much wider and further from the middle segment 114c, the effects of the process variations on ELG fabrication, and particularly on the middle segment 114c of the ELG, can be minimized. Also, while more area of the resistive element is traversed by the applied test current, leading to increased overall ELG resistance, the resistance of the portions of the left and right resistive segments (114a, 114b) between the first and second electrical leads (106, 108) and the middle segment 114c is stable and is a predictable multiple of the resistive element sheet resistance (e.g., can be calculated or characterized with relative certainty). The predictable leads resistance can be achieved by forming the electrical leads with a preselected shape spaced apart from the middle segment such that the current density across the full width of the electrical leads (106, 108) is substantially uniform rather than having the applied test current concentrated in a small region of the electrical leads nearest the middle segment of the resistive element, as might be found in conventional ELG electrical leads that extend to the ABS.
As such, the first electrical lead 106 has a preselected shape (e.g., rounded rectangular shape) that is selected to minimize a variation in the resistance of a portion of the left segment 114a of the resistive element between the first electrical lead 106 and the middle segment 114c of the resistive element during fabrication of the resistive element. The minimization of resistance variation can be accomplished by recessing the first electrical lead 106 from the ABS 110 and by spacing apart the first electrical lead 106 from the middle segment 114c by a preselected distance that exceeds an expected degree of process variation in the formation of the first electrical lead 106. Similarly, the second electrical lead 108 has a preselected shape (e.g., rounded rectangular shape that is somewhat larger than the shape of the first electrical lead 106) that is selected to minimize a variation in the resistance of a portion of the right segment 114b of the resistive element between the second electrical lead 108 and the middle segment 114c of the resistive element during fabrication of the resistive element. The minimization of resistance variation can be accomplished by recessing the second electrical lead 108 from the ABS 110 and by spacing apart the second electrical lead 108 from the middle segment 114c by a preselected distance that exceeds an expected degree of process variation in the formation of the second electrical lead 108.
As a result of recessing the first electrical lead 106 from the ABS 110 and of spacing apart the first electrical lead 106 from the middle segment 114c by the preselected distance, the resistance of the portion of the left segment 114a between the first electrical lead 106 and the middle segment 114c is equal to a predictable multiple of a sheet resistance of the resistive element, and is also substantially constant with the stripe height of the middle segment 114c of the resistive element. Similarly, as a result of recessing the second electrical lead 108 from the ABS 110 and of spacing apart the second electrical lead 108 from the middle segment 114c by the preselected distance, the resistance of the portion of the right segment 114b between the second electrical lead 108 and the middle segment 114c is equal to a predictable multiple of a sheet resistance of the resistive element, and is also substantially constant with the stripe height of the middle segment 114c of the resistive element.
In the embodiment of
In several embodiments, the first electrical lead 106 is positioned on an internal layer of the slider 100 and the first via 116 electrically connects the first electrical lead 106 to a first pad on an outer surface of the slider 100. Similarly, in several embodiments, the second electrical lead 108 is positioned on an internal layer of the slider 100 and the second via 118 electrically connects the second electrical lead 108 to a second pad on an outer surface of the slider 100. In some embodiments, the first electrical lead 106 and the second electrical lead 108 are implemented with relatively low resistance conductive materials such as Ta, Au, Ru, Cu, Al, Pt and/or other suitable materials. In some embodiments, the resistive element is implemented with conductive materials (e.g., having a resistance somewhat higher than that of the electrical leads) such as Cr, Ru, Ta, Au and/or other suitable materials. In a number of embodiments, the resistive element and electrical leads are formed of resistive films (e.g., such that these components have a planar body shape) using one or more of these materials. In several embodiments, the resistive element and electrical leads are formed of the resistive films on different layers of a multilayer substrate (e.g., slider). In several embodiments, the first and second vias (116, 118) are made of suitable materials known in the art.
In several embodiments, the first electrical lead 106 is coupled to an upper portion of the left segment 114a, and the second electrical lead 108 is coupled to an upper portion of the right segment 114b. As can be seen in
In several embodiments, the length of either the first electrical lead 106 or the second electrical lead 108 is greater than a tolerance of the fabrication process for the first and second electrical leads. In several embodiments, the distance from the first electrical lead 106 to the lapping surface 110 is greater than a tolerance of a fabrication process for the first and second electrical leads, and similarly, the distance from the second electrical lead 108 to the lapping surface 110 is greater than a tolerance of the fabrication process for the first and second electrical leads.
In a number of embodiments, the resistance of the ELG can be determined by the following formula:
where RL is a resistance of both the first electrical lead and the second electrical lead, TWE is a track width of the middle segment, SHE is a stripe height of the middle segment, RSE is a sheet resistance of the resistive element, and K is a preselected constant determined based on a shape and a size of each of the first electrical lead, the left segment of the resistive element, the second electrical lead, and the right segment of the resistive element.
RL may also include the resistance one or more low resistance components that are external to the ELG structure and created by subsequent processes. In several embodiments, however, RL can be assumed to be negligible because it is a relatively minuscule amount and fairly difficult or impossible to calculate theoretically. As a result of assuming RL to be negligible, the value of K may be modified slightly from the pure theoretical value found in the formula. In several embodiments, K is a function of the current distribution in the portion of the left segment 114a between the first electrical lead 106 and the middle segment 114c and in the portion of the right segment 114b between the second electrical lead 108 and the middle segment 114c. In such case, the sensitivity to dimensional variation is greatly reduced as compared to conventional ELGs due to the increased width over which conduction takes place. More specifically, the current can be well distributed across the edge of the first electrical lead and second electrical lead closest to the lapped surface with an electrical lead width (or length of a non-linear edge) that is greater than the expected dimensional error in the leads.
The process then laps (504) the lapping surface of the device. The process measures (506) the resistance of the ELG during the lapping of the lapping surface of the device. The process then controls (508) a degree of the lapping of the lapping surface of the device based on the measured resistance of the ELG and a calculated resistance of the ELG.
In several embodiments, the device is a slider which includes a magnetic head having an initial stripe height to be reduced by the lapping process to a desired stripe height. In such case, the portion (e.g., middle segment) of the resistive element is configured to be lapped during the lapping process along with the magnetic head.
In one embodiment, the process can perform the sequence of actions in a different order. In another embodiment, the process can skip one or more of the actions. In other embodiments, one or more of the actions are performed simultaneously. In some embodiments, additional actions can be performed.
While the above description contains many specific embodiments of the invention, these should not be construed as limitations on the scope of the invention, but rather as examples of specific embodiments thereof. Accordingly, the scope of the invention should be determined not by the embodiments illustrated, but by the appended claims and their equivalents.
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