Target profile for a physical vapor deposition chamber target

Information

  • Patent Grant
  • D825504
  • Patent Number
    D825,504
  • Date Filed
    Monday, July 10, 2017
    6 years ago
  • Date Issued
    Tuesday, August 14, 2018
    5 years ago
Abstract
Description


FIG. 1 is a perspective view of a target profile for a physical vapor deposition chamber target, showing my new design;



FIG. 2 is a top plan view thereof;



FIG. 3 is a bottom plan view thereof;



FIG. 4 is a left side elevation view thereof;



FIG. 5 is a right side elevation view thereof;



FIG. 6 is a back elevation view thereof;



FIG. 7 is a front elevation view thereof; and,



FIG. 8 is a cross sectional view taken along line 8-8 of FIG. 2.


The dashed lines in FIGS. 1-8 represent disclaimed matter that forms no part of the claimed design.


Claims
  • The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
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Entry
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Divisions (1)
Number Date Country
Parent 29524557 Apr 2015 US
Child 29610166 US