TREA

Target profile for a physical vapor deposition chamber target

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Information

  • Patent Grant
  • D894137
  • Patent Number
    D894,137
  • Date Filed
    Thursday, May 9, 2019
    5 years ago
  • Date Issued
    Tuesday, August 25, 2020
    4 years ago
Information
Abstract
Description


FIG. 1 is a top perspective view of a target profile for a physical vapor deposition chamber target, according to the new design.



FIG. 2 is a bottom perspective view thereof.



FIG. 3 is a top plan view thereof.



FIG. 4 is a bottom plan view thereof.



FIG. 5 is a right side elevation view thereof.



FIG. 6 is a left side elevation view thereof.



FIG. 7 is a front elevation view thereof.



FIG. 8 is a back elevation view thereof; and,



FIG. 9 is an enlarged cross sectional view taken along line 9-9 in FIG. 4.


Dashed lines in FIGS. 1-9 represent features of the target profile for a physical vapor deposition chamber target that form no part of the claimed design.


Claims
  • We claim the ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
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Divisions (1)
Number Date Country
Parent 29621221 Oct 2017 US
Child 29690617 US