Target profile for a physical vapor deposition chamber target

Abstract

Description

FIG. 1 is a perspective view of a target profile for a physical vapor deposition chamber target, showing our new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a right side plan view thereof;

FIG. 5 is a left side plan view thereof;

FIG. 6 is a front view thereof;

FIG. 7 is a back view thereof; and,

FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2.

The dashed lines in FIGS. 1-8 represent disclaimed matter forming no part of the claimed design.

Claims

We claim the ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.