Target profile for a physical vapor deposition chamber target

Information

  • Patent Grant
  • D868124
  • Patent Number
    D868,124
  • Date Filed
    Monday, December 11, 2017
    6 years ago
  • Date Issued
    Tuesday, November 26, 2019
    5 years ago
Abstract
Description


FIG. 1 is a top perspective view of a target profile for a physical vapor deposition chamber target.



FIG. 2 is a top plan view thereof.



FIG. 3 is a bottom plan view thereof.



FIG. 4 is a right side plan view thereof.



FIG. 5 is a left side plan view thereof.



FIG. 6 is a front view thereof.



FIG. 7 is a back view thereof; and,



FIG. 8 is an enlarged cross sectional view taken along line 8-8 in FIG. 2.


Claims
  • The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
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