Number | Name | Date | Kind |
---|---|---|---|
5226321 | Varnham et al. | Jul 1993 | |
5450751 | Putty et al. | Sep 1995 | |
5547093 | Sparks | Aug 1996 | |
5623098 | Castleman | Apr 1997 | |
5652374 | Chia | Jul 1997 |
Entry |
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K. Funk et al., Surface-Micromachining of Resonant Silicon Structures, Transducers '-Eurosensors IX, 8th Int'l Conf. on Solid-State Sensors and Actuators, and Eurosensors IX, Stockholm, Sweden, Jun. 25-29, 1995, pp. 50-52. |