| Number | Name | Date | Kind |
|---|---|---|---|
| 3409217 | Gentry | Nov 1968 | |
| 4027524 | Fletcher et al. | Jun 1977 | |
| 4125365 | Nelson | Nov 1978 | |
| 4225306 | Wick | Sep 1980 | |
| 4309171 | Gentry | Jan 1982 | |
| 4359210 | Peterson | Nov 1982 | |
| 4373364 | Tanimoto et al. | Feb 1983 | |
| 4394121 | Wakamiya et al. | Jul 1983 | |
| 4463437 | Schenck et al. | Jul 1984 | |
| 4501552 | Wakamiya | Feb 1985 | |
| 4577278 | Shannon | Mar 1986 |
| Number | Date | Country |
|---|---|---|
| 57-111617 | Jul 1982 | JPX |
| 56-23556 | Sep 1982 | JPX |
| 58-6721 | Jan 1983 | JPX |
| 105456 | Jan 1983 | JPX |
| 0728955 | Apr 1980 | SUX |
| 0759165 | Aug 1980 | SUX |
| Entry |
|---|
| Boerger et al., "Diffusion Furnace Control"; IBM Technical Disclosure Bulletin, vol. 12, No. 9, Feb. 1970, pp. 1437-1438. |