The accuracy of integrated temperature sensors can potentially be limited by semiconductor process parameter variations. For example, the accuracy of bipolar-based temperature sensors may be limited by the base-emitter voltage (VBE) variations among the devices in a batch. Likewise, high accuracy CMOS temperature sensors are typically based on substrate PNP bipolar VBE and ΔVBE, and can be subject to similar variations. The accuracy of such temperature sensors, without calibration, is commonly about +/−2° C., over the temperature range −55° C. to +125° C. This means that for temperature sensors that are design-limited by VBE variations, calibration is desired for an accuracy of less than +/−2° C.
To calibrate a temperature sensor, a reference temperature with accuracy better than the temperature sensor is desired. The output of the temperature sensor can then be compared to the reference temperature for calibration purposes. Calibration schemes are generally either thermal calibration schemes or electrical calibration schemes. For example, one thermal scheme includes using a temperature bath or chamber to produce a reference temperature, and a high accuracy thermometer to measure the reference temperature. The measured reference is compared to the output of the temperature sensor to be calibrated. However, it can be difficult to both control the temperature of the reference chamber environment and to accurately measure it. Additionally, it can take a relatively long time (on the order of minutes or tens of minutes, for example) for thermal contact and stabilization. This increases the cost of the test stages of the manufacturing process of each part.
In an alternate thermal process, calibrating a wafer made up of multiple sensors can spread the overhead over the multiple sensors. Additionally, the average error of a batch of sensors can be measured, and each sensor of the batch can be calibrated based on the average error. However, group calibration does not address temperature errors (which can be on the order of +/−0.5° C.) that can be due to the mechanical stress effects of packaging. Further, group calibration avoids calibrating each sensor part, but the resultant accuracy depends on the accuracy of the average error (number of samples required), the intra-batch variation, and the reproducibility.
One electrical calibration scheme includes using electrical means to measure the reference temperature, for example. However, while an electrical measurement can be fast (seconds compared to minutes), the use of such high-precision test measurement equipment in a production test environment is not trivial. Alternately, an electrical means may be used to calibrate VBE indirectly by calibrating the bandgap reference voltage used in the analog-to-digital converter (ADC) of the sensor. For example, the precise temperature may not be as important, since the temperature coefficient of a trimmed bandgap can be zero.
On the other hand, the bandgap has a zero temperature coefficient only at the trim temperature with curvature over the temperature range. In addition, the target reference voltage for a zero temperature coefficient calibration has some dependency on the calibration temperature and other parameters (including the ideality factor η). For a certain type of curvature corrected temperature sensor, a non-zero temperature coefficient voltage reference is needed, which then requires the temperature to be known to determine the correct trim reference voltage. In addition, for a temperature sensor ADC that uses a charge balancing technique, the reference voltage is often generated dynamically from ΔVBE and VBE and is not available for direct measurement.
The detailed description is set forth with reference to the accompanying figures. In the figures, the left-most digit(s) of a reference number identifies the figure in which the reference number first appears. The use of the same reference numbers in different figures indicates similar or identical items.
For this discussion, the devices and systems illustrated in the figures are shown as having a multiplicity of components. Various implementations of devices and/or systems, as described herein, may include fewer components and remain within the scope of the disclosure. Alternately, other implementations of devices and/or systems may include additional components, or various combinations of the described components, and remain within the scope of the disclosure.
Overview
Representative implementations of devices and techniques provide calibration for a chip-based temperature sensor. To calibrate a temperature sensor, a reference temperature with accuracy better than the temperature sensor is desired. The output of the temperature sensor can then be compared to the reference temperature for calibration purposes.
In various aspects, two or more measurements are taken using a high resolution temperature sensor digitizer (TSD). The reference temperature may be calculated from the measurements, based on a base-emitter voltage (VBE) (i.e., internal reference voltage) and/or a difference in the base-emitter voltages (ΔVBE) of two or more bipolar devices used by the TSD. Alternately, ΔVBE can also be obtained from one bipolar device biased by at least two different currents. The comparison of the reference temperature calculated and the temperature measured by the temperature sensor can be used to determine a trim for the temperature sensor. The devices and techniques described herein may be used to calibrate individual temperature sensor components (e.g., packaged or un-packaged), as well as calibrate multiple temperature sensors on a production wafer.
In an implementation, the base-emitter voltage (VBE) and the difference in base-emitter voltages (ΔVBE) are inputs to an analog-to-digital converter (ADC) of the TSD. In the implementation, at least one measurement is taken with these inputs present. Additionally, one or more of the measurements are taken while substituting one of the base-emitter voltage (VBE) or the difference in base-emitter voltages (ΔVBE) with a predefined external reference voltage, a derived reference voltage, or the like.
In other implementations, the difference in base-emitter voltages (ΔVBE) is calculated while using the base-emitter voltage (VBE) and the predefined external reference voltage (VEXT) as inputs for one or more of the measurements. In the implementations, the reference temperature is calculated based on the difference in base-emitter voltages (ΔVBE) derived.
Various implementations and techniques for calibrating a temperature sensor arrangement are discussed in this disclosure. Techniques and devices are discussed with reference to example devices and systems illustrated in the figures that use analog-to-digital converters (ADC), modulators, or like components. In some cases, sigma-delta ADC designs are shown and discussed. However, this is not intended to be limiting, and is for ease of discussion and illustrative convenience. The techniques and devices discussed may be applied to any of various modulator or ADC device designs, structures, and the like (e.g., successive-approximation ADC (SA-ADC), direct-conversion ADC, flash ADC, ramp-compare ADC, integrating ADC (also referred to as dual-slope or multi-slope ADC), counter-ramp ADC, pipeline ADC, sigma-delta ADC, time interleaved ADC, intermediate FM stage ADC, etc.), and remain within the scope of the disclosure.
Implementations are explained in more detail below using a plurality of examples. Although various implementations and examples are discussed here and below, further implementations and examples may be possible by combining the features and elements of individual implementations and examples.
Example TSD Arrangement
For the purposes of this disclosure, a digital result (e.g., digital output) may be described as a digital approximation of an analog input. For example, a digital result may include a digital representation that is proportional to the magnitude of the voltage or current of the analog input(s), at a point in time and/or over a selected duration. The digital representation may be expressed in various ways (e.g., base 2 binary code, binary coded decimal, voltage values, electrical or light pulse attributes, and the like).
In an implementation, the base-emitter reference voltage VBE and/or the difference in base-emitter voltages ΔVBE are based on two or more bipolar devices within the bipolar core 102. The bipolar devices may include bipolar junction transistors, diodes, or like devices. Alternately, the bipolar devices of the bipolar core 102 may comprise sub-threshold metal-oxide-semiconductor (MOS) devices, referencing the gate-source voltage (VGS) of the MOS devices as the reference voltage.
As shown in
In various implementations, the temperature error of a temperature sensor can be determined by comparing the temperature reading of the sensor with a reference temperature derived from the TSD 100, while both are in the same thermal environment. In one implementation, the reference temperature can be derived from the difference in base-emitter voltages (ΔVBE), using the formula:
ΔVBE=(ηkT/q)*Ln(N) (Equation 1)
where k is the Boltzmann constant, q is electric charge, T is absolute temperature (° Kelvin), Ln is the natural logarithm function, N is a number based on a desired design ratio (e.g., the ratio of PNP emitter areas or bias currents, for example), and η is the ideality factor (i.e., forward emission coefficient) which may deviate from unity in some CMOS technologies.
For example, once ΔVBE is known, the temperature (in ° K) can be derived from Equation 1 as:
T=q*ΔVBE/{ηk*Ln(N)} (Equation 1a)
For an accurate temperature T measurement in some applications, the value of η is desired to be known. A separate batch calibration is sometimes used to determine the value of η. For example, one technique for determining the value of η is via the relationship:
VBE=(ηkT/q)*Ln(IC/IS) (Equation 2)
where IC is the collector current and IS is the reverse saturation current of the base-emitter junction.
From the slope of VBE versus Ln(IC) at a known temperature T, η can be calculated, assuming that η is process dependent (the same value for each batch) but temperature independent. However, when used to model the reverse Early effect, η is temperature dependent.
Example Implementations
In various implementations, alternative techniques may be applied that use the TSD 100 to determine ΔVBE, and to determine a reference temperature, via equations 1 and 1a. In the implementations, the techniques will have the same inherent advantages of faster calibration time and simpler equipment set-up, relative to thermal calibration, for example. In addition, the ideality factor η contribution is also included in the techniques, making separate batch calibration unnecessary. In some implementations, the η factor can be measured as part of the calibration, which can be useful since the η value also impacts precision bandgap reference voltage performance.
In one implementation, the value of ΔVBE is determined by taking two measurement values of DOUT (values D1 and D2) using the TSD 100, as illustrated in
For example, the modulator 106 arrangement at
D1=α*ΔVBE/(α*ΔVBE+VBE) (Equation 3)
For the measurement D2, the modulator 106 at either
D2=VEXT/(α*ΔVBE+VBE) (Equation 4)
Using the two measurements D1 and D2 from the TSD 100, ΔVBE can be determined by the formula:
ΔVBE=D1*VEXT/(D2*α) (Equation 5)
Accordingly, the reference temperature (T) is determined using equations 1 and 1a. The relative errors can be analyzed using the following formula:
∂T=∂ΔVBE≦∂D1+∂D2+∂VEXT+∂α (Equation 6)
where ∂x=Δx/x.
To avoid the use of the additional input to the ADC 104, the modulator 106 at
D2a=VEXT/(VEXT+VBE) (Equation 7)
Using the two measurements D1 and D2a from the TSD 100, ΔVBE can be determined by the formula:
ΔVBE={D1/(D2a*α)}*{(1−D2a)/(1−D1)}*VEXT =(VEXT/α)*{D1/(1−D1)}*{(1−D2a)/D2a} (Equation 8)
Accordingly, the reference temperature (T) is determined using equations 1 and 1a. The relative errors can be analyzed using the formula:
∂T=∂ΔVBE≦∂D1/(1−D1)+∂D2a/(1−D2a)+∂VEXT+∂α (Equation 9)
In another implementation, the value of ΔVBE is determined by taking two measurement values of DOUT (values D1 and D2) using the TSD 300, as illustrated in
For the first measurement resulting in output D1, the two inputs ΔVBE and VBE are processed at the ADC 104, with the resulting value comprising ΔVBE/VBE. This value is digitized at the ADC 104:
D1=ΔVBE/VBE (Equation 10)
This can be processed at the digital backend 304, forming the measurement output DOUT which is alternate representation of Equation 3.
DOUT=α*(ΔVBE/VBE)/{α*(ΔVBE/VBE)+1}=α*D1/(α*D1+1) (Equation 3a)
For the measurement of D2, an external reference voltage VEXT is used as an input to the ADC 104, in substitution for ΔVBE, as shown in
For D2, the two inputs VEXT and VBE are processed at the ADC 104, with the resulting value comprising VEXT/VBE. This value is digitized at the ADC 104 forming the measurement output D2. D2 can be expressed with the formula:
D2=VEXT/VBE (Equation 11)
Using the two measurements D1 and D2 from the TSD 300, ΔVBE can be determined by the formula:
ΔVBE=D1*VBE=D1*VEXT/D2 (Equation 12)
Accordingly, the reference temperature (T) is determined using equations 1 and 1a. The relative errors can be analyzed using the formula:
∂T=∂ΔVBE≦∂D1+∂D2+∂VEXT (Equation 13)
In another implementation, the value of ΔVBE is determined by taking two measurement values of DOUT (values D1 and D2) using the TSD 500, as illustrated in
As in the TSD 100, the bipolar core 102 of the TSD 500 provides the two inputs (VBE and ΔVBE, in the case of D1 measurement) to the ADC 104, based on the bipolar junction components (or MOS components, etc.) of the bipolar core 102. In an implementation, the output of the ADC 104 is the digital value X, which is equal to VBE/ΔVBE for measurement D1.
D1=VBE/ΔVBE (Equation 14)
This can be processed at the digital backend 304, forming the measurement output DOUT which is alternate representation of Equation 3.
DOUT=α/{α+(VBE/ΔVBE)}=α/(α+D1) (Equation 3b)
For the measurement of D2, an external reference voltage VEXT is used as an input to the ADC 104, in substitution for ΔVBE, as shown in
In an implementation, a multiplexer (MUX) 602 (or like circuit) is used with the TSD 500, to determine between inputs ΔVBE and VEXT for the input opposite VBE, for the first (D1) and second (D2) measurements, respectively. As shown, the alternative input signal is represented by (VX) in the illustration of
For D2, the two inputs VEXT and VBE are processed at the ADC 104, with the resulting value comprising X=VBE/VEXT. This value is digitized at the ADC 104 forming the measurement output D2. D2 can be expressed with the formula:
D2=VBE/VEXT (Equation 15)
Using the two measurements D1 and D2 from the TSD 500, ΔVBE can be determined by the formula:
ΔVBE=VBE/D1=VEXT*D2/D1 (Equation 16)
Accordingly, the reference temperature (T) is determined using equations 1 and 1a. The relative errors can be analyzed using the formula:
∂T=∂ΔVBE≦∂D1+∂D2+∂VEXT (Equation 17)
Additional Implementations
When used with a TSD 100, 300, or 500 to model the reverse Early effect, the ideality factor (i.e. forward emission coefficient) η is temperature dependent and can be derived to be:
1/η=1−(Vth/VBE)*Ln {1+VBE/VAR} (Equation 18)
where Vth is the thermal voltage (kT/q) and VAR is the reverse Early voltage.
Other derivations are also possible:
1/η=1−(Vth/VAR)/{1+VBE/VAR} (Equation 18a)
1/η=1−(Vth/VB) (Equation 18b)
where VB is a forward bias Early voltage.
Substituting Equation 18 into Equation 1 gives
Vth=kT/q=ΔVBE/Ln{N(1+VBE/VAR)(ΔVBE/VBE)}, and
T=(q/k)ΔVBE/Ln{N(1+VBE/VAR)(ΔVBE/VBE)} (Equation 19)
Substituting Equation 18a into Equation 1 gives
Vth=kT/q=ΔVBE/{Ln(N)+(ΔVBE/VAR)/(1+VBE/VAR)}, and
T=(q/k)ΔVBE/{Ln(N)+(ΔVBE/VAR)/(1+VBE/VAR)} (Equation 19a)
Substituting Equation 18b into Equation 1 gives
Vth=kT/q=ΔVBE/{Ln(N)+(ΔVBE/VB)}, and
T=(q/k)ΔVBE/{Ln(N)+(ΔVBE/VB)} (Equation 19b)
Using Equations 19, 19a, or 19b, the reference temperature (T) can be computed inclusive of the temperature dependent η contribution provided ΔVBE and VBE are measured electrically for a known VAR or VB.
Another benefit of using a TSD 100, 300, or 500 to take measurements to determine ΔVBE is that the ideality factor η can be measured using Equation 1a with the temperature (T) measured from Equation 19. This may be expressed as:
η=ΔVBE/{(kT/q)*Ln(N)} (Equation 20)
This allows verification of the temperature dependence of η with implications for temperature sensor testing and calibration. Additional verification of a temperature sensor may be made by taking electrical measurements of VBE of the temperature sensor.
For example, based on the description of TSD 100 above, VBE=VEXT*(1−D2a)/D2a. Based on the description of TSD 300 above, VBE=VEXT/D2. Finally, based on the description of TDS 500 above, VBE=VEXT*D2.
As mentioned, the TDS 100, 300, and 500 may be implemented similarly with sub-threshold MOS devices using VGS instead of VBE and ΔVGS instead of ΔVBE. As discussed above, the techniques, components, and devices described herein with respect to the example TSD 100, 300, and 500 are not limited to the illustrations in
Representative Process
The order in which the process is described is not intended to be construed as a limitation, and any number of the described process blocks can be combined in any order to implement the process, or alternate processes. Additionally, individual blocks may be deleted from the process without departing from the spirit and scope of the subject matter described herein. Furthermore, the process can be implemented in any suitable materials, or combinations thereof, without departing from the scope of the subject matter described herein.
At block 702, the process includes providing a first analog input and a second analog input from at least one or two bipolar devices of a digital temperature sensor (i.e., temperature sensor digitizer “TSD”). At block 704, the process includes receiving the first analog input and the second analog input at an analog-to-digital converter (ADC) (such as ADC 104, for example) of the TSD.
At block 706, the process includes taking a first measurement with the TSD to get a first digital output (i.e., D1, for example). At block 708, the process includes substituting an external reference voltage for the second analog input. At block 710, the process includes taking a second measurement with the digital temperature sensor to get a second digital output (i.e., D2, for example).
At block 712, the process includes determining a reference temperature based on the first digital output, the second digital output and a difference in base-emitter voltages of the at least one or two bipolar devices (i.e., ΔVBE). In an implementation, the process includes comparing a temperature measured by a temperature sensor under test to the reference temperature to calibrate the temperature sensor under test.
In an implementation, the process includes determining the difference in the base-emitter voltages (i.e., ΔVBE) of the at least one or two bipolar devices based on the first and second measurements. For example, equations 5, 8, 12, or 16 may be used, based on the TSD application. In the implementation, the process includes determining the reference temperature from the difference in the base-emitter voltages of the at least one or two bipolar devices. For example, equations 1 and 1a may be used, once the value of ΔVBE is known. In various implementations, a processing or computing component, such as a controller, processor, digital logic, or the like, (the control logic 506, for example) may be used to determine the values of ΔVBE and/or the reference temperature, using the first and second digital outputs and the equations described herein, for instance.
In an implementation, the process includes determining the reference temperature based on the difference in base-emitter voltages of the at least one or two bipolar devices divided by a reference voltage comprising the base-emitter voltage of one of the at least one or two bipolar devices (i.e., ΔVBE/VBE). In the implementation, the process also includes determining the reference temperature based on the external reference voltage divided by the reference voltage comprising the base-emitter voltage of one of the at least one or two bipolar devices (i.e., VEXT/VBE).
In an implementation, the process includes determining the reference temperature based on a reference voltage comprising the base-emitter voltage of one of the at least one or two bipolar devices divided by the difference in base-emitter voltages of the at least one or two bipolar devices (i.e., VBE/ΔVBE). In the implementation, the process also includes determining the reference temperature based on the reference voltage comprising the base-emitter voltage of one of the at least one or two bipolar devices divided by the external reference voltage (i.e., VBE/VEXT).
In an implementation, the process includes multiplexing the second analog input (i.e., ΔVBE) and the external reference voltage (i.e., VEXT) to the ADC, based on whether the first (D1) or second (D2) measurement is being taken, respectively.
In alternate implementations, other techniques may be included in the process in various combinations, and remain within the scope of the disclosure.
Conclusion
Although the implementations of the disclosure have been described in language specific to structural features and/or methodological acts, it is to be understood that the implementations are not necessarily limited to the specific features or acts described. Rather,the specific features and acts are disclosed as representative forms of implementing example devices and techniques.
Number | Name | Date | Kind |
---|---|---|---|
6480127 | Aslan | Nov 2002 | B1 |
6808307 | Aslan | Oct 2004 | B1 |
7010440 | Lillis | Mar 2006 | B1 |
7309157 | Aslan | Dec 2007 | B1 |
7579860 | Deken | Aug 2009 | B2 |
7695189 | Lim | Apr 2010 | B2 |
8092084 | Riddle | Jan 2012 | B2 |
8167485 | Lin | May 2012 | B2 |
8696199 | St. Pierre | Apr 2014 | B2 |
8915646 | Wei | Dec 2014 | B2 |
9411355 | Cocetta | Aug 2016 | B2 |
20060259999 | Zelinski | Nov 2006 | A1 |
20080304546 | Lim | Dec 2008 | A1 |
20100329304 | Doorenbos | Dec 2010 | A1 |
20110316606 | Ladurner | Dec 2011 | A1 |
20130325391 | Kwon, II | Dec 2013 | A1 |
20140092939 | Chang | Apr 2014 | A1 |
20140341257 | Bernardinis | Nov 2014 | A1 |
20150117495 | Tiruvuru | Apr 2015 | A1 |
20150145486 | Bizjak | May 2015 | A1 |
20150346754 | Teo | Dec 2015 | A1 |
Number | Date | Country | |
---|---|---|---|
20150369674 A1 | Dec 2015 | US |