Claims
- 1. A thin film electric heater comprising:
- a thin film electric resistor to be formed directly on a surface of an object to be heated;
- said thin film electric resistor having terminal portions to supply thereto electric power to thereby heat the surface of the object;
- said thin film electric resistor having a surface resistivity r of a value defined by: ##EQU2## wherein L is a length between said terminal portions as measured along said thin film electric resistor, D is length of said thin film electric resistor in a direction perpendicular to the direction between said terminal portions, V.sub.a is a maximum value of allowable voltage applied between said terminal portions, I.sub.a is a maximum value of allowable current flowing between said terminal portions, and W.sub.r is an input power per unit area of said thin film electric resistor determined to obtain a desired rate of increase of temperature of the surface of the object.
- 2. A thin film electric heater as claimed in claim 1, wherein said thin film electric resistor is formed of a material selected from a group consisting of TiN, TiC, TiCN, TiAlN and CrN.
- 3. A thin film electric heater as claimed in claim 1, wherein said surface resistivity r is from 0.05 to 1.0 .OMEGA./.quadrature..
- 4. A thin film electric heater as claimed in claim 1, wherein said film electric resistor has a volume resistivity within a range of 10.times.10.sup.-8 to 200.times.10.sup.-8 .OMEGA./.quadrature..
Priority Claims (2)
Number |
Date |
Country |
Kind |
6-148630 |
Jun 1994 |
JPX |
|
7-86501 |
Mar 1995 |
JPX |
|
Parent Case Info
This is a divisional application of Ser. No. 08/462,790, filed Jun. 5, 1995 now U.S. Pat. No. 5,569,474.
US Referenced Citations (12)
Foreign Referenced Citations (2)
Number |
Date |
Country |
49-53953 |
May 1974 |
JPX |
55-67417 |
May 1980 |
JPX |
Divisions (1)
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Number |
Date |
Country |
Parent |
462790 |
Jun 1995 |
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