Claims
- 1. A thin film magnetic head having non-linear rail(s), which is characterized in that each rail is formed so as to have a tapered angle of 55-90.degree., wherein each rail is chamfered, by the ion milling employed in the formation of said rail, by 3-40 .mu.m in length and 1-50 .mu.m in depth at the rail top surface at the end of the element portion of the magnetic head which becomes an air outlet when the magnetic head is in operation.
- 2. A thin magnetic head according to claim 1, wherein each rail is formed by using an ion milling technique and also using a fluorinated hydrocarbon gas as an ion milling gas.
- 3. A thin film magnetic head according to claim 1, wherein each rail is formed by using an ion milling technique and also using, as an ion milling gas, a mixed gas of Ar or Xe and a fluorinated hydrocarbon gas.
- 4. A thin film magnetic head according to claim 2 or 3, wherein the fluorinated hydrocarbon gas is tetrafluoroethane.
- 5. A thin film magnetic head having non-linear rail(s), wherein each rail has, at each lengthwise edge of the rail top surface, a dent having a depth of 1-300 nm as compared with the center of the rail top surface and extending in a width of 10 .mu.m or smaller from said edge toward the center of the rail to the surface.
Priority Claims (3)
Number |
Date |
Country |
Kind |
5-154907 |
Jun 1993 |
JPX |
|
5-310110 |
Dec 1993 |
JPX |
|
6-077362 |
Apr 1994 |
JPX |
|
Parent Case Info
This is a division of application Ser. No. 08/263,915 filed Jun. 22, 1994, U.S. Pat. No. 5,567,333.
US Referenced Citations (16)
Divisions (1)
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Number |
Date |
Country |
Parent |
263915 |
Jun 1994 |
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