Claims
- 1. A semiconductor test fixture for sampling thin films on the surface of a semiconductor wafer in the process of manufacturing integrated circuits thereon comprising:
- a first plate for supporting said wafer;
- at least one test fluid reservoir having a projecting collar around one end thereof and a sealing means under said collar;
- a second plate having at least one opening therein for allowing the major portion of said at least one test fluid reservoir to pass through and with said collar of the reservoir supporting said second plate;
- means associated with said first and second plates for tightening said second plate against said collar of the reservoir and in turn the sealing means of said collar against said wafer which is supported upon said first plate so as to allow a fluid to be contained in said reservoir without leakage.
- 2. The test fixture of claim 12 wherein said at least one reservoir is substantially cylindrical and said sealing means is an O-ring.
- 3. The test fixture of claim 2 wherein there are at least three of said at least one reservoir composed of plastic tubular material and said first and second plates are composed of steel.
- 4. The test fixture of claim 3 wherein said plastic tubular reservoirs have diameters of between about 5 to 150 millimeters.
- 5. The test fixture of claim 3 wherein said means for tightening include a hand screw which coacts with said first and second plates.
Parent Case Info
This is a division of U.S. application Ser. No. 07/758,564 filed Sep. 12, 1991 and now U.S. Pat. No. 5,248,614.
US Referenced Citations (12)
Foreign Referenced Citations (5)
Number |
Date |
Country |
75639 |
Apr 1988 |
JPX |
312259 |
Dec 1990 |
JPX |
188642 |
Aug 1991 |
JPX |
189536 |
Aug 1991 |
JPX |
197838 |
Aug 1991 |
JPX |
Non-Patent Literature Citations (1)
Entry |
"VLSI Technology" Second Edition by S. M. Sze, Published by McGraw Hill International Editions, N.Y., N.Y., 1988, Chapter 12.4 pp.548-554. |
Divisions (1)
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Number |
Date |
Country |
Parent |
758564 |
Sep 1991 |
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