Number | Date | Country | Kind |
---|---|---|---|
62-54044 | Mar 1987 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3849204 | Fowler | Nov 1974 | |
4772927 | Saito et al. | Sep 1988 |
Number | Date | Country |
---|---|---|
182835 | Oct 1983 | JPX |
32479 | Feb 1986 | JPX |
Entry |
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Pollack et al., "Hydrogen Passivation of Polysilicon MOSFET's from a Plasma Nitride Source", IEEE Electron Device Letters, vol. EDL-5, No. 11, Nov. 1984, pp. 468-470. |