THIN FILM TRANSISTOR ARRAY PANEL

Abstract

A data line and an amorphous silicon pattern are formed on a substrate. The first electrode pattern is extended from the data line and overlaps an edge of the amorphous silicon pattern. The second electrode pattern is made of the same metal as the first electrode pattern and overlaps the edge of the amorphous silicon pattern at an opposite side of the first electrode pattern. Edges of the first and the second electrode patterns are sharply formed so that a tunneling effect easily occurs through the amorphous silicon pattern. An indium-tin-oxide pattern for a capacitor is formed at the end of the second electrode pattern. The capacitor is formed between the ITO pattern and a common electrode.

Description

BACKGROUND OF THE INVENTION

(a) Field of the Invention

The present invention relates to liquid crystal displays (referred to as an LCD hereinafter) and manufacturing methods thereof, and more particularly, to circuits for preventing electrostatic discharge which are provided in the LCD and manufacturing methods thereof.

(b) Description of the Related Art

A liquid crystal display (LCD), which is one type of flat panel display (FPD), includes two substrates having transparent electrodes and a liquid crystal layer interposed between the substrates. In the LCD, light transmittance is controlled by varying the voltages applied to the liquid crystal layer.

On a thin film transistor (TFT) substrate of the LCD, N gate lines and M data lines, which cross each other, define a plurality of pixels In an N.times.M matrix. A pixel electrode is formed in each of the pixels and the pixel electrode is connected to the gate and the data lines through a switching device such as the TFT. The TFT controls display signals transmitted through the data line according to the states of the scanning signals transmitted through the gate line.

The majority of the LCD manufacturing process is performed on a glass substrate. Since the glass substrate is nonconductive, electric charges, which are abruptly generated on the substrate, cannot be dispersed. This may cause the insulating films or TFTs to become damaged by the electrostatic discharge.

In the LCD manufacturing process, since the electrostatic charges, which is generated after the step of assembling the TFT substrate and a color filter substrate is completed, cause high voltages even though the amount of the charges are small, the quality of the substrate decreases. In addition, since the electrostatic charge Is usually generated during the step of cutting the substrate, then flow into an active area having the pixel regions through gate and data pads, the channels of the TFTs near the pads become damaged by the electrostatic discharge with easy.

FIG. 1 shows a layout view of the conventional LCD substrate which is damaged by an electrostatic discharge. As shown in the drawing, the LCD panel includes a TFT substrate 10 and a color filter substrate 20. A pad area 30, in which pads are formed to connect each wire of the TFT substrate 10 to driving circuits, and an active area 40, in which actual images are displayed, are separately formed on the TFT substrate 10.

Lines 50 in the active area 40 illustrate pixels having some defects by damaged TFT portions. If electrostatic charges are generated in the pad area 30 and moves inside the active area 40, the channels of the TFTs, which are located near the pads, become damaged, or the quality of the channels is deteriorated.

The deteriorated TFT is shown in FIG. 2. As shown in the drawing, a gate line 60 and a data line 80 cross each other, and an edge of a gate electrode 61, extended from the gate line 60, overlaps an end of a source electrode 81 which is extended from the data line 80. An edge of the gate electrode 61, opposite the edge overlapping with the source electrode 81, overlaps with a drain electrode 82. A semiconductor film 70 is formed on the overlapping portion of the gate electrode 61, source electrode 81 and drain electrode 82.

If the electrostatic charges enter Into the TFT, comprised of the semiconductor film 70, the source and drain electrodes 81 and 82, and the gate electrode 61, sparks occur between the source and the drain electrodes 81 and 82, thereby damaging the semiconductor film 70.

To limit to the LCD by electrostatic discharge, a shorting bar, through which all metal wires are connected, is widely used for dispersing the electrostatic charges. However, in the case where an amount of the electric charges is large, it is not possible to completely prevent damage caused by the electrostatic discharge. Moreover, after the shorting bar is removed, it is not possible to prevent the electrostatic charges from entering into the substrate.

In manufacturing the LCD panel having the above structure, polarizers are attached after performing a visual display test by applying test signals to the shorting bar. Next, the main substrate is cut into individual LCD substrates, a liquid crystal material is injected between the substrates, and the injection holes are sealed. The shorting bar is removed in the step of cutting the substrate. In another visual display test, different test signals are applied to adjacent data lines by using probes directly contacted to each of the pads, then driving circuits are attached to the LCD panel.

As mentioned above, since the shorting bar is removed in the same step of cutting the substrate, it is difficult to protect the substrate against the electrostatic charges after the step of removing the shorting bar. Moreover, since the polarizers are attached after the simple test. In which only one signal is applied to every wire, by using the shorting bar, there is a high possibility that the polarizers are attached even on the damaged LCD panel. If the damaged panel is detected in the post-test, the panel, along with the expensive polarizers, has to be discarded, thereby increasing overall manufacturing costs of the LCD.

SUMMARY OF THE INVENTION

It is an object of the present invention to provide a liquid crystal display having a substrate which is protected against electrostatic charges, regardless of the strength thereof.

It is another object of the present invention to provide a liquid crystal display which prevents electrostatic charges from entering into the substrate after a shorting bar is removed, thereby minimizing pixel defects.

It is yet another object of the present invention to provide a manufacturing method of a liquid crystal display in which an LCD panel is prevented from becoming damaged by an electrostatic discharge, while manufacturing costs of the LCD are reduced.

To achieve the above objects, the present invention provides a liquid crystal display in which a plurality of spark inducing circuits, which extinguish electrostatic charges generated in wires of a TFT substrate, and electrostatic charging circuits, which charge the electrostatic charges and extinguish the same, are formed on a TFT substrate.

The spark inducing circuit includes a plurality of the TFTs, connected in series between two adjacent wires and gate electrodes of which are connected to one another; and two capacitors, one electrode of which is connected to the gate electrode of the TFTs and the other electrode of which is connected to the adjacent wire. Since a plurality of the spark inducing circuits are connected in parallel between the adjacent wires, if electrostatic charges generate in the wires, sparks occur in the TFTs of the spark inducing circuits and high voltage current is induced between the source and the drain electrode of the TFTs. This surge current loses its strength by being changed into joule heat. Therefore, the TFTs in an active area are protected from the electrostatic discharge. It is also possible for the electrostatic charges generated in the wires to be dispersed. The spark inducing circuit is formed such that the TFT connects to the capacitor between each wire and a common electrode in series.

In another aspects, the spark inducing circuit may include a TFT, a gate electrode and a drain electrode of which are respectively connected to the same wire, and a source electrode of which is connected to a dummy line, and a capacitor which is formed between the wire and the drain electrode.

Meanwhile, a circuit for dispersing electrostatic charges, which comprises a resistor and a capacitor connected in series between a data line and a dummy gate line; and another resistor connected between an adjacent data line of the data line and the capacitor, may be used instead of the spark inducing circuit.

The electrostatic charging circuit includes a first electrostatic charging circuit, which is formed outside a sealing material by which a TFT substrate and a corresponding substrate are assembled to each other, and a second electrostatic charging circuit, which is formed Inside a sealing material. The first electrostatic charging circuit has two capacitors which connect to each other between two adjacent wires in series. A plurality of the first electrostatic charging circuits may be connected to the adjacent wires in parallel. The second electrostatic charging circuit, for preventing electrostatic charges from entering inside the active area, includes capacitors which are formed between each wire and a common electrode. The capacitor includes an additional corresponding electrode connected to the common electrode and the wires. The corresponding electrode which corresponds to the gate line of the wires is made of a metal used for forming the data line, and the corresponding electrode which corresponds to the data line of wires is made of a metal used for forming the gate line. The first and the second electrostatic charging circuits charge and remove the electrostatic charges generating in the wires.

To protect the TFT substrate from electrostatic charges, a shorting bar, which links all the wires formed on the TFT substrate, is formed inside a cutting line of the substrate Since the shorting bar remains on the substrate even after the TFT substrate is divided into a plurality LCD panels, it is still possible for the TFT substrate to be protected by the shorting bar.

To protect the LCD from electrostatic charges occurring in the manufacturing process, a electrostatic discharge protection circuit, a TFT and wires are formed in a substrate, a shorting bar is formed inside the cutting line of the substrate, and the substrate is cut to be divided into several TFT substrates. Next, individual LCD panels are formed and the shorting bar is removed by edge-grinding. After visual display tests are performed by applying test signals to each of the wires, polarizers are attached on the LCD panel on which no defect is detected. Driving circuits are then connected to the LCD panels.

In the manufacturing method of the LCD, it is possible to protect the LCD panel against electrostatic charges generated during the manufacturing process since the step of cutting the substrate, of injecting liquid crystals and of sealing an injection hole are performed while the shorting bar remains on the LCD panel. Moreover, it is possible to reduce manufacturing costs since polarizers are attached on only the good LCD panels.

In another embodiment of the present invention, dummy lines are formed outside a visual active area which is defined by a plurality of pixels, the pixels being formed by a plurality of dummy pixels by the intersections of gate and data lines and the dummy lines. A dummy TFT connecting the dummy line is formed in each dummy pixel.

In the above, the ratio of the width to the length of the dummy TFT channel is larger than the ratio of the width to the length of the TFT channel, which is formed in the active area, or one or more dummy TFTs are formed in the dummy pixel. Accordingly, electrostatic charges are dispersed through the dummy TFT when the same is generated.

A dummy pixel electrode, which is connected to the TFT, is formed in the dummy pixel, and a black matrix which covers the dummy pixel is formed on one of two substrates.

Generally, since electrostatic charges, which generate at the beginning or end of each step, passes through the dummy gate and data lines which define the dummy pixels surrounding the active area, deterioration caused by electrostatic charges occur in the dummy TFT first. Therefore, the TFTs, which are formed inside the active area and connected to the gate and the data line, are protected against electrostatic charges. Here, damage to the dummy pixels does not affect the quality of the LCD.

The shape of the dummy TFT may be changed to effectively induce electrostatic charges It is preferable that the ratio of the width to the area of the dummy TFT channel is bigger than the ratio of the width to the area of the TFT. A plurality of dummy TFTs may be formed in the dummy pixel.

Meanwhile, a electrostatic charge dispersing pattern, consisting of two electrodes and a semiconductor pattern, is formed outside an active area to discharge electrostatic charges through the channel of the semiconductor pattern. To effectively discharge electrostatic charges, the ends of the electrodes may be pointedly formed and it preferable to form a capacitor in the end of the semiconductor pattern. A plurality of the discharging patterns may be connected to a wire, or two wires, in parallel.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a layout view of a conventional liquid crystal display (LCD) substrate which is damaged by an electrostatic discharge;

FIG. 2 is an enlarged layout view of the thin film transistor in FIG. 1;

FIG. 3 is a schematic diagram of a LCD substrate according to a preferred embodiment of the present Invention;

FIG. 4 is an enlarged layout view of A in FIG. 3 according to a first preferred embodiment of the present invention.

FIG. 5 illustrates an equivalent circuit of an electrostatic discharge protection diode circuit shown in FIG. 4;

FIG. 6 is an enlarged layout view of A in FIG. 3 according to a second preferred embodiment of the present invention;

FIG. 7 Is an equivalent circuit of a first spark inducing circuit in FIGS. 4 and 6;

FIG. 8 is an equivalent circuit of a second spark inducing circuit in FIGS. 4 and 6;

FIG. 9 is an equivalent circuit of a third spark inducing circuit in FIGS. 4 and 6;

FIG. 10 is an equivalent circuit of a fourth spark inducing circuit in FIGS. 4 and 6:

FIG. 11 is an equivalent circuit of a first electrostatic charging circuit in FIGS. 4 and 6;

FIG. 12 is an equivalent circuit of a second electrostatic charging circuit in FIGS. 4 and 6:

FIG. 13 is a layout view of a pattern of the fourth spark inducing circuit of FIG. 10;

FIG. 14 is a cross sectional view taken along line XIV-XIV′ of FIG. 13;

FIG. 15 is a layout view of another pattern of the fourth spark inducing circuit of FIG. 10,

FIG. 16 is a cross sectional view taken along line XVI-XVI′ of FIG. 15;

FIG. 17 is a layout view of a dummy pixel for discharging electrostatic charges according to a preferred embodiment of the present invention.

FIG. 18 is a cross sectional view taken along line XVIII-XVIII′ of FIG. 17;

FIG. 19 is a layout view of a dummy pixel for discharging electrostatic charges according to another preferred embodiment of the present invention;

FIG. 20 is a layout view of a pattern for discharging electrostatic charges according to a first preferred embodiment of the present invention;

FIG. 21 is a cross sectional view taken along line XXI-XXI′ of FIG. 20;

FIG. 22 is a perspective view of a capacitor formed in an end of the pattern for discharging electrostatic charges;

FIG. 23 is a layout view of a pattern for discharging electrostatic charges according to a second preferred embodiment the present invention;

FIG. 24 is a layout view of a pattern for discharging electrostatic charges according to a third preferred embodiment of the present invention;

FIG. 25 is a layout view of a pattern for discharging electrostatic charges according to a fourth preferred embodiment of the present invention;

FIGS. 26A to 26F are cross sectional views used to describe a manufacturing method of the patterns for discharging electrostatic charges of the first to third embodiments of the present invention;

FIG. 27 is an equivalent circuit of a circuit for preventing electrostatic charges which is connected to a portion of A in FIG. 3 according to a third preferred embodiment of the present invention;

FIG. 28 is a layout view of the pattern of the circuit in FIG. 27;

FIG. 29 is a cross sectional view taken along line XXIX-XXIX′ of FIG. 28;

FIG. 30 is a layout view of the pattern of the circuit for preventing an electrostatic discharge which is connected to a portion of A in FIG. 3 according to a fourth preferred embodiment of the present invention;

FIG. 31 is a cross sectional view taken along line XXXI-XXXI′ in FIG. 30;

FIG. 32 is a layout view of the pattern of the circuit for preventing an electrostatic discharge which is connected to a portion of A in FIG. 3 according to a fifth preferred embodiment of the present invention;

FIG. 33 is a perspective view of an LCD showing a state in which a thin film transistor substrate and a color filter substrate are assembled to each other; and

FIG. 34 is a flow chart showing a manufacturing method of an LCD according to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention now will be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the thickness of layers and regions are exaggerated for clarity. Like numbers refer to like elements throughout. It will be understood that when an element such as a layer, region or substrate is referred to as being “on” another element, it can be directly on the other element or intervening elements may also be present.

Referring first to FIG. 3, shown is a schematic diagram of a liquid crystal display substrate according to a preferred embodiment of the present invention. As shown in FIG. 3, a plurality of gate lines 100 are formed on a transparent insulating substrate 10 in a horizontal direction, and gate pads 101 are formed at the ends of respective gate lines 100. A plurality of data lines 200 are formed in a vertical direction to cross the gate lines 100, and data pads 201 are formed at the ends of respective data lines 200. Thin film transistors (TFTs), which are switching devices, are formed in respect pixel regions PXs defined by intersections of the gate and data lines 100 and 200. The gathering of a plurality of the pixel regions PX is an active area, confined by an active area line 41, where the visual image is displayed.

Shorting bars 102 and 202, which respectively link all the gate lines 100 and all the data lines 200 at ends thereof, are formed near edges of the substrate 10. The shorting bars 102 and 202 are interconnected such that the gate and the data lines 100 and 200 are electrically connected. As a result, if electrostatic charges are generated in the gate and data pads 101 and 201, the electrostatic charges are dispersed through the shorting bars 102 and 202.

In the case that the electrostatic charges have a high electric charge value, the electrostatic charges may nevertheless enter into the active area, even with the shorting bars 102 and 202 being provided as described above. In addition, if electrostatic charges are generated after the shorting bars 102 and 202 are removed along a cutting line 11, the electrostatic charges easily enter the active area. To effectively disperse the electrostatic charges, electrostatic charge dispersing circuits, which are connected to a guard ring or a dummy line 110 surrounding the active area, are provided at an area A of the substrate 10, i.e., at the area between the pads either 101 or 201 and the active area.

In a meanwhile, the shorting bars 102 and 202 may be located inside a cutting line 11 of the substrate, differently as illustrated in FIG. 3.

FIG. 4 shows an enlarged view of the area A in FIG. 3. In FIG. 4, the cutting line 11, at which the substrate 10 is cut to remove the shorting bar 102, a boundary line 21 which corresponds to another substrate 20 opposite the substrate 10, and the active area line 41 are shown by dotted lines. The shorting bar 102 is located inside the cutting line 11, the pads 101 connected to the shorting bar 102 are located between the cutting line 11 and the boundary line 21, and wires 100 extend from the pads 101 toward the active area. A seal area 90 occupied by a sealant for combing two substrates is located between the boundary line 21 and the active area line 41. The guard ring or dummy line 110, made of metal, is placed between the seal area 90 and the active area line 41, and electrostatic discharge protection diode circuits 120, spark inducing circuits or electrostatic charging circuits 140 and 150 are connected respective wires 100 and the dummy line 110.

Now, the electrostatic discharge protection diode circuits 120 are described with reference to FIG. 5.

A gate electrode and a drain electrode of a TFT Q1 are connected to the dummy line 110, and a source electrode is connected to the wire 100. There is provided another TFT Q2 having a gate electrode and a drain electrode connected to the wire 100, and a source electrode connected to the dummy line 110. Since the gate and the drain electrodes of the TFTs Q1 and Q2 are connected to each other, the TFTs Q1 and Q2 serves as diodes. As a result, tire TFTs Q1 and Q2 are interconnected in a back-to-back mode between the dummy line 110 and the wire 100.

The TFTs Q1 and Q2 generally includes an amorphous silicon having high resistance, while the wire 100 is made of a material having low resistance such as a metal. Therefore, the amount of electrostatic charges which enter the dummy line 110 may be smaller than the amount of electrostatic charges which enter the wire 100. As a result, it is difficult to completely protect the LCD substrate against electrostatic charges having a large electric charge value using only the circuit shown in FIG. 5.

The spark inducing circuit and the electrostatic charging circuit may help the electrostatic discharge protection.

As previously mentioned in FIG. 4, spark inducing circuits 130 and first electrostatic charging circuits 140 are connected to the adjacent wires 100 at the positions between the seal area 90 and the pads 101, and second electrostatic charging circuits 150 are connected to the wires 100 at the positions between the seal area 90 and the active area 41. Therefore, the electrostatic charges are effectively discharged.

However, since the spark inducing circuits 130 and the electrostatic charging circuits 140 and 150 are located outside the area enclosed by the seal area 90, circuit defects such as erosion by air or damage by external shocks may occur.

FIG. 6 is an enlarged view of the area A in FIG. 3 according to a second preferred embodiment of the present invention. In the second embodiment, electrostatic discharge protection circuits are located inside the area enclosed by the seal area 90.

As shown in FIG. 6, spark inducing circuits 130 are connected to wires 100 at the position between the seal area 90 and the active area line 41, and electrostatic discharge protection diode circuits 120 are connected to the wires 100 as in the previous embodiment. First and second electrostatic charging circuits (not shown) may be provided inside the area enclosed by the seal area 90.

A various types of the spark inducing circuits 130 according to the preferred embodiments are shown in FIGS. 7 to 11. First to fourth spark inducing circuits ST1, ST2, ST3 and ST4 will be described with reference to FIGS. 7 to 10, respectively, the first to fourth spark inducing circuits ST1, ST2, ST3 and ST4 representing the different types of spark inducing circuits.

FIG. 7 illustrates the first spark inducing circuit ST1. As shown in the drawing, the first spark inducing circuit ST1 includes a pair of TFTs Q3 and Q4, which are connected between two adjacent wires 100 in series, and two capacitors C1 and C2. That is, gate electrodes of the TFTs Q3 and Q4 are connected to each other, a source or a drain electrode of one of the TFTs is connected to a source or a drain electrode of the other TFT, and electrodes of the capacitors C1 and C2 are respectively connected to one of the adjacent two wires 10 and to the gate electrodes of the TFTs Q3 and Q4. A plurality of the first spark inducing circuit ST1 are connected to the adjacent two wires 100 in parallel.

The operation of the first spark inducing circuit ST1 will be described hereinafter. If electrostatic charges generated from the pads 101 enter into the first spark inducing circuit ST1, sparks occur in the TFTs of the first spark inducing circuit ST1 to extinguish the electrostatic charges. As a result, the TFTs in the active area are protected from the electrostatic charges. In the case that electrostatic charges are generated in the wires 100, since they are charged in the capacitors C1 and C2 to turn on the TFTs, the electrostatic charges are dispersed through the wires 100.

In the first spark inducing circuit ST1, if more than two TFTs are connected between the wires 100 in series, the increase of the current between the wires 100 can be effectively reduced.

FIG. 8 shows the second spark inducing circuit ST2. As shown in the drawing, the second spark inducing circuit ST2 includes a TFT Q5 and a capacitor C3. A gate electrode and a drain electrode of the TFT Q5 are electrically connected to each other and a source electrode of the TFT Q5 is connected to the wire 100. The capacitor C3 is connected between the gate electrode and a common voltage Vcom which is also connected to a common electrode (not shown). A plurality of the second spark inducing circuits ST1 may be connected to each of the wires 100.

In this embodiment, the common electrode is used as a storage electrode, but an additional electrode may be used as the storage electrode.

FIG. 9 shows the third spark inducing circuit ST3. As shown in the drawing, the structure of the third spark inducing circuit ST3 is substantially the same as the second spark inducing circuit ST2. However, the third spark inducing circuits ST3 has a plurality of TFTs Q6 and Q7 and only one capacitor C4. The gate electrodes and the drain electrodes of the TFTs Q6 and Q7 are connected to each other and to the capacitor C4, and the source electrodes of the TFTs Q6 and Q7 are connected to the wire 100. The operation of the third spark inducing circuit ST3 is almost the same as that of the second spark inducing circuit ST2.

As the same as in the second spark inducing circuit, the common electrode is used as a storage electrode, but an additional electrode may be used as the storage electrode.

The first to the third spark inducing circuits ST1, ST2 and ST3 may be located inside the area enclosed by the seal area 90.

FIG. 10 shows the fourth spark inducing circuit ST4.

As shown in the drawing, a dummy wire or a guard ring including a dummy gate line 111 and a dummy data line connected to the dummy gate line 111 is provided, and a TFT 08 is formed on the dummy gate line 111. A gate, a source and a drain electrodes of the TFT Q8 are connected to the dummy gate line 111, a data line 200, and an electrode of a capacitor C5 which has another electrode connected to the dummy gate line 111.

In the fourth spark inducing circuit ST4, if electrostatic charges are transmitted to the dummy gate line 111, the capacitor C5 is charged to turn on the TFT Q8, and the electrostatic charges generated from the dummy gate line 111 and from the dummy data line 112, are dispersed to the data line 200 and the dummy wires. In the case that the charge value of the electrostatic charges is large, the TFT Q8 is broken down by sparks occurring in the same, thereby extinguishing the electrostatic charges.

In the first to fourth spark inducing circuits ST1, ST2, ST3 and ST4, the energy due to the electrostatic charges is changed to joule energy by burning the TFTs such that the electrostatic charges do not affect the circuits in the active area.

FIG. 11 shows the first electrostatic charging circuit 140 of FIG. 4. As shown in the drawing, the first electrostatic charging circuit includes capacitors C6 and C7 which are connected to each other in series between two adjacent wires. A plurality of the circuits are connected to adjacent wires 100 in parallel. The first electrostatic charging circuit may be located outside the area enclosed by the seal area 90, and it stores electrostatic charges to reduce the level of the same.

FIG. 12 shows the second electrostatic charging circuit 150 of FIG. 4. Here, the second electrostatic charging circuit finally removes the remaining electrostatic charges so that they do not enter the active area. As shown in the drawing, capacitors a plurality of capacitors C8 are connected between the respective wires 100 and a common electrode voltage Vcom. The second electrostatic charging circuit 150 stores electrostatic charges and reduces the level of the same.

The fourth spark inducing circuit ST4 of FIG. 10 will be described In more detail hereinafter with reference to FIG. 13 illustrating a layout view of the fourth spark inducing circuit ST4 of FIG. 10, and FIG. 14 showing a cross sectional view taken along line XIV-XIV′ of FIG. 13.

As shown in FIGS. 13 and 14, the fourth spark inducing circuit includes a TFT pattern and a capacitor. The TFT includes a gate electrode which is a portion of a dummy gate line 111, a gate insulating film 3, a semiconductor pattern 700 formed on the gate insulating film 3 opposite the gate electrode, a source electrode which is a branch of a data line 200 and a metal pattern 103 serving as a drain electrode. The source and drain electrodes overlap the either edges of the semiconductor pattern 700. A transparent conductive layer 6 which is connected to the metal pattern 103 and overlaps the dummy gate line 111 to form a storage capacitor. A dummy data line 112 is formed in a vertical direction at the position outer than the fourth spark inducing circuits, and connected to ail the dummy gate lines 111 through connecting patterns 5.

In detail, a plurality of dummy gate lines 111 are formed on a substrate 10 in a horizontal direction, a gate insulating film 3 is formed thereon, and semiconductor patterns 700 are formed on the gate insulating film 3 opposite the dummy gate line 111. A dummy data line 112 and a plurality of data lines 200 are formed on the gate insulating film 3 in a vertical direction and the data lines 200 overlap one edges of the semiconductor patterns 700. A plurality of metal patterns 103, overlapping the opposite edges of the semiconductor patterns 700 are formed on the gate insulating film 3, and ohmic contact layers 710 for improving electric contact characteristics are formed between the semiconductor patterns 700 and the data lines 200 and the metal patterns 103. An interlayer insulating film 4 covers the dummy data line 112, the data lines 200 and the semiconductor patterns 700. Contact holes CH1 and CH3 are pierced in the interlayer insulating film 4, and contact holes CH2 in the gate insulating film 3 and the interlayer insulating film 4 expose the dummy gate line 111. Transparent conductive patterns 6 are formed on the interlayer insulating film 4 and connected to the metal pattern 103 through the contact hole CH3, and transparent contact patterns 5 on the interlayer insulating film 4 are connected to the dummy data line 112 and the respective dummy gate lines 111 through the contact holes CH1 and CH2.

In this embodiment, it is desirable that the distance between the dummy gate lines 111 is smaller than the distance between the gate lines inside the active area to reduce the area occupied by the dummy wires.

In the above spark inducing circuit having the TFT and the capacitor structures, when electrostatic charges enter the circuit through the data line 200 or the dummy data line 112, the electrostatic charges charge between the capacitor transparent conductive pattern 700 and the dummy gate line 111, and disappears. The electrostatic charges generating from the dummy data line 200 may be changed into joule heat energy by burning the TFT, and may disappear.

FIG. 15 is another layout view of the fourth spark inducing circuit, and FIG. 16 is a cross sectional view taken along line XVI-XVI′ of FIG. 15, in which an enlarged metal pattern 104 is substituted for the transparent conductive pattern for the capacitor. In this structure, the metal pattern 104 is enlarged to overlap the dummy gate line 111 such that a predetermined storage capacitance is formed between the metal pattern 104 and the dummy gate line 111. The extinguishing of electrostatic charges is performed identically as in the fourth spark inducing circuit ST4 described with reference to FIGS. 13 and 14.

To prevent electrostatic charges from entering an active area, it is preferable to form dummy pixels having a structure similar with the pixels in the active area.

FIG. 17 shows a layout view of a dummy pixel for discharging electrostatic charges according to a preferred embodiment of the present invention, and FIG. 18 is a cross sectional view taken along the line XVIII-XVIII′ of FIG. 17.

As shown in the drawings, a gate line or a dummy gate line 100 is formed on the first substrate 10 in a horizontal direction. The portion of the gate line or the dummy gate line 100 functions as a dummy gate electrode. A gate insulating layer film 3 covers the dummy gate line 100, and a dummy amorphous silicon layer 700 is formed on the gate insulating film 3 over the dummy gate electrode. A dummy data line 110 is formed on the gate insulating film 3 in a vertical direction. The dummy gate line 100 and the dummy data line 110 cross each other and define a dummy pixel DP. The dummy pixel may be defined by the crossing of the gate line and the dummy gate line or of the dummy data line and the dummy gate line.

A dummy source electrode 113, which branches from the dummy data line 110, overlaps an edge of a doped amorphous silicon layer 710, and a dummy drain electrode 114 overlaps another edge of the doped amorphous silicon layer 710 at the opposite side of the dummy source electrode 113. A highly doped amorphous silicon layer 710 is formed at the contact surface of the dummy electrodes 113 and 114 and the dummy amorphous silicon layer 710.

A width of the dummy source and drain electrodes 113 and 114 is equal to the width of the channel formed in the dummy amorphous silicon 700, and a distance DL between the dummy source electrode 113 and the dummy drain electrode 114 is a channel length DL. Here, the width of the dummy source and drain electrodes 113 and 114 is different from the width of the source and the drain electrode formed in the pixel, and the length between the dummy source electrode 113 and the dummy drain electrode 114 is different from the length between the source and the drain electrode formed in the pixel.

As described above, to induce electrostatic charges into the dummy pixel, it is preferable that the ratio of the channel width to the channel length in the dummy pixel is more than twice that of the ratio of the channel width to the channel length formed in the active area.

A passivation film 4 is formed on the dummy data line 110 and the dummy amorphous silicon layer 700, and a contact hole C4 is formed in the passivation film 4 to expose the dummy drain electrode 114. A pixel electrode 300, which is connected to the dummy drain electrode 114 through the contact hole CH4, is made of indium-tin-oxide (ITO) on the passivation film 4. The pixel electrode 300 partially overlaps the adjacent dummy gate line 100.

An alignment film 7 covering the passivation film 4 is formed on the first substrate 10. A black matrix 400, having an opening area at the region corresponding to the dummy pixel DP, is formed on the side of the second substrate 11 facing the first substrate 10. A color filter 500, overlapping the edges of the black matrix 400, is formed in the pixel region DP Further, a transparent conductive common electrode 600 and an alignment film 8 are, in this order, formed over the color filter 500 and the black matrix.

Although the black matrix 400 is formed in the second substrate 11 in the LCD according to the present Invention, it is possible to form the same in the first substrate 10. In this embodiment, the dummy gate line 100 and the dummy data line 110 are formed outside the active area to prevent electrostatic charges from entering into the active area. In addition, a plurality of the dummy TFTs may be formed in the dummy pixel.

FIG. 19 is a layout view of a dummy pixel for discharging electrostatic charges according to another preferred embodiment of the present invention. As shown in the drawing, the structure of the discharging dummy pixel is substantially identical to the structure of the dummy pixel shown in FIG. 17, but the dummy gate electrode 101, which Is connected to the dummy gate line 100, is extended into the dummy pixel region. Moreover, three (i.e., a plurality) of source electrodes 115, 116 and 117 are connected to the dummy data line 110, and dummy drain electrodes 125, 126 and 127, which respectively correspond to the dummy source electrodes 115, 116 and 117, are connected to the dummy pixel electrode 301 through contact holes CH5, CH6 and CH7.

A width DW1 of the first dummy source and drain electrodes 115 and 125 is narrower than a width DW2 of the second dummy source and drain electrode 116 and 126, and the width DW2 of the second dummy source and drain electrodes 116 and 126 is narrower than a width DW3 of the third dummy source and drain electrodes 117 and 127. With this structure, all distances DL between the dummy source electrodes 115, 116 and 117 and the dummy drain electrodes 125, 126 and 127 are the same. However, it is possible to form these distances differently.

Pixel defects in the active area can be prevented by changing the structure of the dummy TFT as described above and by quickly inducing electrostatic charges to the dummy TFT in the dummy pixel.

Another discharging pattern for preventing electrostatic charges from entering the active area will be described hereinafter. FIG. 20 shows a layout view of a electrostatic charge discharging pattern according to a first preferred embodiment of the present invention, FIG. 21 shows a cross sectional view taken along line XXI-XXI′ of FIG. 20, and FIG. 22 is a perspective view of a capacitor which is formed on an end of the electrostatic charge discharging pattern.

A data line or a dummy data line 110 is formed on a gate insulating film 3 over a substrate 10, and an amorphous silicon pattern 704 for discharging electrostatic charges is formed on the gate insulating film 3. The first electrode pattern 118, which overlaps an edge of the amorphous silicon pattern 704, is extended from the data line or the dummy data line 110, and the second electrode pattern 128 overlaps another edge of the amorphous silicon pattern 704 at the opposite side of the first electrode pattern 118. The ends of the first and the second electrode patterns 118 and 128 are tapered to a point, and a doped amorphous silicon pattern 710, such as an Ohmic contact layer, is formed at the contact surface of the first and the second electrode patterns 118 and 128 and the amorphous silicon pattern 704. A passivation film 4 is formed over the dummy data line 110, and the first and the second electrode patterns 118 and 128; and a contact hole CH8 is formed in the passivation film 4 to expose the second electrode pattern 128. An ITO pattern 302 for the capacitor is formed on the passivation film 4 and overlaps the second electrode pattern 128. The ITO pattern 302 for the capacitor is connected to the second electrode pattern 128 through the contact hole CH8.

In other words, the discharging pattern includes the amorphous silicon pattern 704, the ITO pattern 302 for the capacitor for storing electrostatic charges, and the first and the second electrode patterns 118 and 128 which interlink the ITO pattern 302 and the amorphous silicon pattern 704 to the dummy data line 110. In the LCD having this discharging pattern, electrostatic charges generated in the dummy data line 110 often passes into the ITO pattern 302 through the amorphous silicon pattern 302 and the second electrode pattern 128, so that the amorphous silicon does not breakdown The reason that the tunneling effect is superior to the breakdown effect is that the first and the second electrode patterns 118 and 128 are pointedly formed so that the electrostatic charges are moved to the ends of the electrode patterns 118 and 128, rather than to other portions.

As shown in FIG. 22, the ITO pattern 302 of the discharging pattern corresponds to a common electrode 600 of an upper color filter substrate, facing the common electrode. Liquid crystal material LC is interposed between the ITO pattern 302 and the common electrode 600 so that the a storage capacitor Cst is formed in the end portion of the discharging pattern Since the electrostatic charges moving to the ITO pattern 302 for the capacitor are stored in the storage capacitor, the TFT in the active area is not affected by the electrostatic charges.

FIG. 23 shows a layout view of a electrostatic charge discharging pattern according to a second preferred embodiment of the present invention. The structure of the electrostatic charge discharging pattern of the second embodiment is similar to the structure of the electrostatic charge discharging pattern of the first embodiment, but more than two discharging devices are connected to the ITO pattern 302 and the dummy data line 110 in parallel.

As shown in FIGS. 21 to 23, the first discharging device, which includes the first amorphous silicon pattern 704 and the first and the second electrode patterns 118 and 128, and the second discharging device, which includes the second amorphous silicon pattern 705 and the third and the fourth electrode patterns 119 and 129, are formed on a gate insulating film 3. The first and the second discharging devices are connected to the dummy data line 110 in parallel. Contact holes CH8 and CH9 to expose the second and the fourth electrode pattern 128 and 129 are made in the passivation film 4, and the second and the fourth electrode patterns 128 and 129 are connected to the ITO pattern 302 for the capacitor through the contact holes CH8 and CH9.

As described in the electrostatic charge discharging pattern of the first embodiment, the ends of the first to the fourth electrode pattern 118, 128, 119 and 129 are pointedly formed. The first and the third electrode patterns 118 and 119 respectively face the second and the fourth electrode patterns 128 and 129. The first and the second patterns 118 and 128 are formed on the first amorphous silicon pattern 704, and the third and fourth patterns 119 and 129 are formed on the second amorphous silicon pattern 705. Thus, the electrostatic charges flowing through the dummy data line 110 are discharged to the ITO pattern 302 for the capacitor through the pointed portion and stored in the capacitor. The number of the discharging devices D1 and D2 which are connected to the dummy data line 110 may be increased as required.

FIG. 24 shows a layout view of a electrostatic charge discharging pattern according to a third preferred embodiment of the prevent invention. As shown in FIG. 24, the second electrode pattern 128 of the first discharging devices D1 and the fourth electrode pattern 129 of the second discharging devices D2 are connected to be adjacent to other data lines 210. The number of the discharging devices may be increased as required.

The structures of the electrostatic charge discharging patterns of the first to third embodiments described above have advantages in discharging electrostatic charges generated in the assembly step, the liquid crystal injection step, or the visual test step, since the capacitor is formed after the upper and the lower substrates for the LCD are assembled.

Referring now to FIG. 25, shown is a layout view of an electrostatic charge discharging pattern according to a fourth preferred embodiment of the present invention. As shown in the drawing, the structure of the electrostatic charge discharging pattern of the fourth embodiment is almost the same as that of the first electrostatic charge discharging pattern of the first embodiment, but the dummy metal line 310 is formed on the substrate 10 in a horizontal direction. The dummy metal line 310 is grounded and overlaps the ITO pattern 302 for the capacitor through a gate insulating film and a passivation film. Therefore, a capacitor is formed between the ITO pattern 302 and the dummy metal line 310 for when electrostatic charges move from the first electrode pattern 118 to the second electrode pattern 128 and the ITO pattern 302 by a tunneling effect in the amorphous silicon pattern 704.

The electrostatic charge discharging pattern of the fourth embodiment can discharge electrostatic charges more effectively because one more capacitor is formed in the step of forming wires in the substrate.

Now, a manufacturing method of the electrostatic charge discharging patterns will be described hereinafter with references to FIGS. 21 to 25, and FIGS. 26A to 26F.

As shown in FIG. 26A, a metal layer for gate wires is deposited on a substrate 10 and patterned to form a gate line and a dummy gate line 100 respectively inside and outside. In the case of the electrostatic charge discharging pattern of the fourth preferred embodiment, a dummy metal line 310 is formed outside an active area in parallel with the gate and the dummy gate line 100 in this step.

As shown In FIG. 26B, a gate Insulating film 3 is deposited with silicon nitride or silicon oxide. Next, an amorphous silicon and a doped amorphous silicon are deposited and then patterned to form an amorphous silicon pattern 704 for discharging electrostatic charges and a doped amorphous silicon layer 710 outside the active area.

Subsequently, as shown in FIG. 26C, a metal layer for data wires is deposited and patterned to form a data line, a dummy data line 110, the first electrode pattern 118, and the second electrode pattern 128. Where two or more discharging devices are formed, a plurality of pairs of electrode patterns 118, 128, 119, 129 are formed in this step. The doped amorphous silicon material, which is externally exposed, is then removed.

As shown in FIGS. 26D and 26E, a passivation film 4 is deposited and then the gate insulating film 3 and the passivation film 4 are patterned to form contact holes CH8 and CH9 to expose the second and the fourth electrode pattern 128 and 129. As shown in FIG. 27F, an ITO is deposited and patterned to form an ITO pattern 302 for a capacitor.

Next, another circuit for preventing the damage of the substrate by an electrostatic discharge will be described with reference to FIG. 27.

FIG. 27 is another equivalent circuit of a circuit for preventing electrostatic charges, which is connected to a portion of A in FIG. 3, according to a third preferred embodiment of the present invention.

As shown in FIG. 27, a first resistor R1 and a capacitor are connected to each other in series between a data line 200 and a dummy gate line 111, and the capacitor and an adjacent data line 200 of the data line 200 are connected in series by a second resistor R2. The dummy gate line 111 is electrically connected to a dummy data line 112 formed outside the data line 200.

The electrostatic charges generated along the data line 200 passes through the resistors R1 and R2 to disperse in a moment. The electrostatic charges generated to the dummy data line 112 moves along the dummy gate line 111 and stores to the capacitor C1 formed by the data line 200 and the dummy gate line 111.

The disappearance of the electrostatic charges will be described with reference to FIGS. 28 and 29.

FIG. 28 is a layout view of the pattern of the circuit in FIG. 27, and FIG. 29 is a cross sectional view taken along line XXIX-XXIX′ of FIG. 28.

In general, since the device for protecting a substrate from electrostatic charges should be formed in narrow area between an active area and pads, there is a limitation in minimizing the electrostatic charge capacitance by increasing the capacitance of the capacitor. In this embodiment, a semiconductor pattern as a resistance, which connects a capacitor to two adjacent data lines at the same time, is used to increase the ability of dispersing the static electricity.

As shown in FIGS. 28 and 29, a plurality of gate lines (not shown) are formed on a transparent insulating substrate 10 in a horizontal direction, at least one dummy gate line 11 is formed outside the gate line in the horizontal direction, and a gate insulating film 3 covers the gate lines and the dummy gate line 11.

On the gate insulating film 3, a plurality of semiconductor pattern 707 and 708 are formed near the dummy gate line 111 with an amorphous silicon material, and a plurality of data lines 200 are formed. Two or more semiconductor patterns 707 and 708 are located between the two adjacent data lines 200. If one of the patterns is named a first semiconductor pattern 707, and the other of the patterns is named a second semiconductor pattern 708, a first electrode 12 connected to the data line 200, and a second electrode 13 facing the first electrode 12 respectively overlap the both sides of the first semiconductor pattern 707. Moreover, a third electrode 15 connected to the other adjacent data line 200, and a fourth electrode 14 facing the third electrode 15 respectively overlap the both sides of the second semiconductor pattern 708. An Ohmic contact layer for improving the contact characteristic intermediates on the surface where the first the second, the third and the fourth electrodes 12, 13, 15 and 14 contacts the first and the second semiconductors 707 and 708.

At least one dummy data line 112 is formed outside the data line 200 in parallel with the data line 200.

A passivation film 4 covers the data lines 200 and the dummy data lines 112, and contact holes CH1, CH2, CH3, and CH4, through which the dummy data line 112, the end of the dummy gate line 111, the second and the fourth electrodes 13 and 14 are exposed, are made in the passivation film 4.

A connecting pattern 5, which overlap the dummy data line 112 and the dummy gate line 111, is formed on the passivation film 4 to connect the dummy data line 112 and the gate line 111. A pattern for a capacitor 9, which overlaps the second and the fourth electrodes 13 and 14 and the dummy gate line 111, is formed to connect the second and the fourth electrodes 13 and 14 though the contact holes CH3 and CH4. The connecting pattern 5 and the pattern for the capacitor 9 may be made of a transparent indium-tin-oxide (ITO).

As mentioned above, since the dummy gate line 111 is connected to the dummy data line 112, the electrostatic charges generated along the dummy data line 112 is transmitted to the dummy gate line 111 and is stored between the pattern for the capacitor 9 and the dummy gate line 111. The electrostatic charges generated along the data line 200 loses its energy by passing through the first and the second semiconductor patterns 707 and 708 to be transmitted to the pattern for the capacitor 9, or by demolishing the first and the second semiconductor patterns 707 and 708.

FIG. 30 is a layout view of the pattern of the circuit for preventing electrostatic charges which is connected to a portion of A in FIG. 3 according to a fourth embodiment of the present invention, and FIG. 31 is a cross sectional view taken along line XXXI-XXXI′ FIG. 30.

As shown in FIGS. 30 and 31, fifth electrodes 109 are respectively formed under the first and the semiconductor patterns 707 and 708, so another capacitance is formed between the fifth electrodes 109 and the first and the second semiconductor patterns 707 and 708.

The rest structures of the circuit are the same as in the third embodiment.

FIG. 32 is a layout view of the circuit for preventing an electrostatic discharge which is connected to A portion in FIG. 3 according to a fifth preferred embodiment of the present invention, in which dummy gate lines do not cross data lines and comprise a plurality of patterns divided with respect to the data lines

As shown in FIG. 32, each of the patterns of the dummy gate lines 111 is formed along the data line 200 between two the adjacent data lines 200, and overlaps several capacitor patterns 9 at a time, so sufficient capacitance can be obtained.

In this embodiment, the dummy gate line 111 is electrically floated.

Now, a manufacturing method of the LCD, in which damage by an electrostatic discharge can be minimized, will be described hereinafter with reference to FIGS. 33 and 34.

FIG. 33 shows a perspective view of an LCD showing a state in which a thin film transistor substrate and a color filter substrate are assembled to each other, and FIG. 34 shows a flow chart showing a manufacturing method of an LCD according to a present invention.

As shown in FIGS. 33 and 34, in STEP 1, a plurality of wires 100 are formed on a transparent insulating substrate 10, and a shorting bar 102, which links all the wires 100 and the pads 101 for contacting with external driving circuits, is formed outside the wires 100. In this step, electrostatic charge dispersing circuits such as the diodes, the spark inducing circuits, the electrostatic charging circuits and the discharging patterns are formed to complete the TFT substrate 10 and a color filter substrate, having a color filter and a common electrode, are formed.

Next, in STEP 2, the TFT substrate 10 and the color filter substrate 11 are cut to form each substrate, the substrates 10 and 11 are disposed opposing one another, then liquid crystal material is injected between the substrates 10 and 11. Electrostatic charges, generating in the step of cutting the substrates 10 and 11 and in the step of injecting the liquid crystal material, are dispersed by the shorting bar 102

In STEP 3, a hole used to inject the liquid crystal material is sealed and then the shorting bar 102 is removed by a grinding process. In STEP 4, test signals are applied to each wire 105 to detect defects in the LCD substrate. In this test, it is possible to perform a variety of tests by applying different test signals to each of the wires 100 by using probes which contact to each of the pads 101. Electrostatic charges generated in this step extinguished in the spark inducing circuits, electrostatic charging circuit, and discharging patterns.

After the test, STEP5 is performed. In STEP 5, polarizers 1 and 2 are attached on outer surfaces of the LCD substrates where there are no defects. In STEP 6, driving circuits are connected to the pads of the LCD. Generally, electrostatic charges easily generate in the step of attaching the polarizers 1 and 2. In this method, the electrostatic charges are effectively dispersed by the spark inducing circuit and the electrostatic charging circuit, so that the electrostatic charges can be prevented from entering into the active area.

Unlike the conventional method, in this manufacturing method of the LCD, since the steps of cutting the substrate, injecting the liquid crystal, and sealing the injection hole are performed with the shorting bar 102 present, the LCD substrate is protected from electrostatic charges generated In the process. In addition, since the polarizers 1 and 2 are attached on substrates which pass the visual test, manufacturing costs are reduced.

As described above, in the LCD according to the present invention, a dummy line is added outside the active area, a plurality of electrostatic charge dispersing circuits are connected to the dummy line, and the electrostatic charge dispersing circuit is made having a suitable structure to effectively discharge electrostatic charges. Thus, electrostatic charges can be prevented from entering into the active area.

In addition, since the electrostatic charge dispersing circuits are left remaining after the shorting bar is removed and the expensive polarizers are attached after the visual test, damage to the LCD by an electrostatic discharge is minimized and manufacturing costs are decreased.

In the drawings and specification, there have been disclosed typical preferred embodiments of the invention and, although specific terms are employed, they are used in a generic and descriptive sense only and not for purpose of limitation, the scope of the invention being set forth in the following claims.

Claims

1. (canceled)

2. A thin film transistor (TFT) array panel, comprising: a substrate comprising a display region and a peripheral region;a gate wiring pattern disposed on the substrate;a data wiring pattern disposed on the substrate, the data wiring pattern comprising a first data line; anda first electrostatic discharge protection circuit comprising:a first capacitor comprising a first electrode and a second electrode; anda first resistor comprising a first semiconductor pattern disposed in the peripheral region,wherein the first resistor is a two-end terminal element, the two end terminals being a first end terminal and a second end terminal, andwherein the first end terminal is electrically connected to the first data line, and the second end terminal is electrically connected to the first electrode.

3. The TFT array panel of claim 2, wherein the second electrode is connected to the gate wiring pattern by a direct electrical connection.

4. The TFT array panel of claim 2, wherein the first end terminal is connected to the first data line by a direct electrical connection.

5. The TFT array panel of claim 2, wherein the second end terminal is connected to the first electrode by a direct electrical connection.

6. The TFT array panel of claim 2, wherein the data wiring pattern comprises a second data line, and wherein the first electrostatic discharge protection circuit comprises a second resistor comprising a second semiconductor pattern disposed in the peripheral region.

7. The TFT array panel of claim 6, wherein the second resistor is a two-end terminal element, the two end terminals being a third end terminal and a fourth end terminal, and wherein the third end terminal is electrically connected to the second data line, and the fourth end terminal is electrically connected to the first electrode.

8. The TFT array panel of claim 7, wherein the second electrode is connected to the gate wiring pattern by a direct electrical connection.

9. The TFT array panel of claim 7, wherein the third end terminal is connected to the second data line by a direct electrical connection.

10. The TFT array panel of claim 7, wherein the fourth end terminal is connected to the first electrode by a direct electrical connection.

11. The TFT array panel of claim 2, further comprising a first insulating film disposed on the gate wiring pattern.

12. The TFT array panel of claim 11, wherein the data wiring pattern comprises the first electrode, and the gate wiring pattern comprises the second electrode.

13. The TFT array panel of claim 2, wherein the first electrode partially overlaps the first semiconductor pattern.

14. The TFT array panel of claim 2, wherein the second electrode is a dummy gate line.

15. The TFT array panel of claim 14, wherein the data wiring pattern further comprises a dummy data line electrically connected to the dummy gate line.

16. The TFT array panel of claim 15, further comprising an ohmic contact layer electrically coupled between the first semiconductor pattern and the first data line and between the first semiconductor pattern and the first electrode.