Number | Date | Country | Kind |
---|---|---|---|
11-062767 | Mar 1999 | JP | |
11-080051 | Mar 1999 | JP | |
11-083314 | Mar 1999 | JP | |
11-083316 | Mar 1999 | JP | |
11-083319 | Mar 1999 | JP |
Filing Document | Filing Date | Country | Kind |
---|---|---|---|
PCT/JP00/01441 | WO | 00 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO00/54339 | 9/14/2000 | WO | A |
Number | Name | Date | Kind |
---|---|---|---|
5089863 | Satoh et al. | Feb 1992 | A |
5471080 | Satoh et al. | Nov 1995 | A |
5880015 | Hata | Mar 1999 | A |
5977586 | Crisenza et al. | Nov 1999 | A |
5981383 | Lur et al. | Nov 1999 | A |
5989967 | Gardner et al. | Nov 1999 | A |
6069387 | Gardner | May 2000 | A |
6284613 | Subrahmanyam et al. | Sep 2001 | B1 |
Number | Date | Country |
---|---|---|
3-60-127761 | Jul 1985 | JP |
3-61-36975 | Feb 1986 | JP |
3-63-9154 | Jan 1988 | JP |
4-2-226727 | Sep 1990 | JP |
4-5-21454 | Jan 1993 | JP |
4-5-243261 | Sep 1993 | JP |
4-6-260645 | Sep 1994 | JP |
Entry |
---|
Spacer Formation on Electrodes With Non-Vertical Sidealls, IBM Technical Disclosure Bulletin, Nov. 1, 1984, vol. 27, No. 6, TDB-ACC-No. NN84113464, pp. 3464-3466. |