Number | Date | Country | Kind |
---|---|---|---|
9-047874 | Mar 1997 | JPX | |
9-59152 | Mar 1997 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
5292675 | Codama | Mar 1994 | |
5698882 | Park | Dec 1997 | |
5767531 | Yoshinouchi et al. | Jun 1998 |
Number | Date | Country |
---|---|---|
3-19340 | Jan 1991 | JPX |
3-120871 | May 1991 | JPX |
3-108319 | May 1991 | JPX |
3-241873 | Oct 1991 | JPX |
6-61490 | Mar 1994 | JPX |
6-85258 | Mar 1994 | JPX |
8-70127 | Mar 1996 | JPX |
8-107214 | Apr 1996 | JPX |
10-51005 | Feb 1998 | JPX |
Entry |
---|
Sekiya et al., High Performance Poly-Crystalline Silicon Thin Film Transistors Fabricated Using Remote Plasma IEEE Electron Device Letters, vol. 15, No.2, (1994) pp. 69-71. |