Number | Date | Country | Kind |
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197 46 350 | Oct 1997 | DE |
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PCT/DE98/01966 | WO | 00 |
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WO99/21304 | 4/29/1999 | WO | A |
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5416629 | Huber | May 1995 | A |
5479547 | Kunikane et al. | Dec 1995 | A |
5636309 | Henry et al. | Jun 1997 | A |
5657406 | Ball | Aug 1997 | A |
5786914 | Fielding | Jul 1998 | A |
5796883 | Hamamoto et al. | Aug 1998 | A |
6061481 | Heidrich et al. | May 2000 | A |
6104851 | Mahgerefteh | Aug 2000 | A |
6115403 | Brenner et al. | Sep 2000 | A |
Number | Date | Country |
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19 51 948 | May 1970 | DE |
32 17 610 | Nov 1983 | DE |
197 45 466 | Apr 1999 | DE |
2 308 461 | Jun 1997 | GB |
06 244797 | Nov 1994 | JP |
Entry |
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Kato et al., Selective Area Impurity Doped Planar Edge. . . , Electronic Letters, vol. 32, No. 22, pp. 207-208, 1996. |