Claims
- 1. A transparent and conductive ultrathin metal layer deposited on a substrate made of a glass comprising at least one member selected from the group consisting of silicate, borosilicate, and alkali glass, said metal layer having a thickness of 1 to 50 nm, a light permeability of 30% to 90%, and a conductivity of 1 k.OMEGA./.quadrature. to 10 k.OMEGA./.quadrature., said metal layer formed by vaporizing and depositing a transition metal on the substrate surface while simultaneously exciting said substrate surface under a vacuum, wherein the conductivity of the metal layer is reduced by the excitation of said substrate surface, said transition metal being selected from the group consisting of titanium, vanadium, chromium, manganese, cobalt, nickel, zirconium, niobium, molybdenum, rhodium, palladium, silver, hafnium, tantalum, tungsten, iridium, platinum, gold, lanthanide metals, and actinide metals.
- 2. A transparent and conductive ultrathin metal layer as claimed in claim 1, wherein the transition metal layer has a thickness of 1 to 30 nm.
- 3. A transparent and conductive ultrathin metal layer deposited on a substrate made of a ceramic material comprising at least one member selected from the group consisting of alumina, magnesia, and zirconia, said metal layer having a thickness of 1 to 50 nm, a light permeability of 30% to 90%, and a conductivity of 1 k.OMEGA./.quadrature. to 10 k.OMEGA./.quadrature., said metal layer formed by vaporizing and depositing a single transition metal on the substrate surface while simultaneously exciting said substrate surface under a vacuum, wherein the conductivity of the metal layer is reduced by the excitation of said substrate surface, said single transition metal being selected from the group consisting of titanium, vanadium, chromium, manganese, iron, cobalt, nickel, zirconium, niobium, molybdenum, rhodium, palladium, silver, hafnium, tantalum, tungsten, iridium, platinum, gold, lanthanide metals, and actinide metals.
- 4. A transparent and conductive ultrathin metal layer as claimed in claim 3, wherein the transition metal layer has a thickness of 1 to 30 nm.
- 5. A transparent and conductive ultrathin metal layer deposited on a substrate made of an organic polymer comprising at least one member selected from the group consisting of methacrylic resins, said metal layer having a thickness of 1 to 50 nm, a light permeability of 30% to 90%, and a conductivity of 1 k.OMEGA./.quadrature. to 10 k.OMEGA./.quadrature., said metal layer formed by vaporizing and depositing a transition metal on the substrate surface while simultaneously exciting said substrate surface under a vacuum, wherein the conductivity of the metal layer is reduced by the excitation of said substrate surface, said transition metal being selected from the group consisting of titanium, vanadium, chromium, manganese, iron, cobalt, nickel, zirconium, niobium, molybdenum, rhodium, palladium, silver, hafnium, tantalum, tungsten, iridium, platinum, gold, lanthanide metals, and actinide metals.
- 6. A transparent and conductive ultrathin metal layer as claimed in claim 5, wherein the transition metal layer has a thickness of 1 to 30 nm.
Priority Claims (1)
Number |
Date |
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Kind |
5-210929 |
Aug 1993 |
JPX |
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Parent Case Info
This application is a continuation of U.S. patent application Ser. No. 08/284,189, filed Aug. 2, 1994, now abandoned.
US Referenced Citations (6)
Continuations (1)
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Number |
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284189 |
Aug 1994 |
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