This is a division of application with Ser. No. 08/522,878 filed on Sep. 1, 1995, U.S. Pat. No. 5,756,895.
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4806755 | Duerig et al. | Feb 1989 | |
5085070 | Miller et al. | Feb 1992 | |
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5265470 | Kaiser | Nov 1993 | |
5275047 | Zabler et al. | Jan 1994 | |
5285686 | Peters | Feb 1994 | |
5290102 | Kaiser et al. | Mar 1994 | |
5293781 | Kaiser et al. | Mar 1994 | |
5315247 | Kaiser et al. | May 1994 | |
5377545 | Norling | Jan 1995 | |
5431051 | Biebl et al. | Jul 1995 | |
5438870 | Zalbler et al. | Aug 1995 | |
5596194 | Kubena | Jan 1997 | |
5756895 | Kubena | May 1998 |
Number | Date | Country |
---|---|---|
0 619 494 | Oct 1994 | EPX |
40 32 559 | Apr 1992 | DEX |
59 171141 | Jan 1985 | JPX |
03 101127 | Apr 1991 | JPX |
40 4369418 | Dec 1992 | JPX |
Entry |
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Benecke, W., et al "Micro Electrto Mechanical Systems" US, New York, IEEE, Feb. 4-7, 1992, pp. 214-219. |
Kenny, T.W., et al. "Micromachined tunneling displacement transducers for physical sensors" Journal of Vacuum Science & Technology, Jul./Aug., 1993, pp. 797-802. v. 11, No. 4. |
Kaiser, J.W., et al. "Tunnel-Effect Displacement Sensor" NTIS Tech Notes, Apr., 1990. |
Number | Date | Country | |
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Parent | 522878 | Sep 1995 |