Claims
- 1. A turbo-molecular pump comprising:a casing having an intake port; a stator fixedly mounted in said casing; a rotor with a main shaft being supported in said casing for rotation relative to said stator, said stator and said rotor serving as at least one of a turbine blade pumping section and a groove pumping section for evacuating gas; and a scattering prevention member comprising at least one blade for preventing fragments of at least one of said rotor and said stator from being scattered through said intake port; wherein said at least one blade of the scattering prevention member is located at an axially uppermost position relative to said rotor and is made of a material stronger than a material that the rotor is made of; and wherein the scattering prevention member is directly mounted to the main shaft of the rotor.
- 2. A turbo-molecular pump according to claim 1, wherein said rotor comprises rotor blades and said stator comprises stator blades, and said at least one blade of said scattering prevention member serves a same purpose as said rotor blades.
- 3. A turbo-molecular pump according to claim 1, wherein said scattering prevention member is made of a high-strength material.
- 4. A turbo-molecular pump comprising:a casing having an intake port; a stator fixedly mounted in said casing; a rotor supported in said casing for rotation relative to said stator, said stator and said rotor serving as at least one of a turbine blade pumping section and a groove pumping section for evacuating gas; and a scattering prevention member comprising at least one blade for preventing fragments of at least one of said rotor and said stator from being scattered through said intake port, wherein said rotor comprises rotor blades and said stator comprises stator blades, and said at least one blade of said scattering prevention member serves a same purpose as said rotor blades; wherein said at least one blade of the scattering prevention member is located at an axially uppermost position relative to said rotor and is made of a material stronger than a material that the rotor is made of.
Priority Claims (1)
Number |
Date |
Country |
Kind |
11-166637 |
Jun 1999 |
JP |
|
Parent Case Info
This is a continuation-in-part of application Ser. No. 09/473,137, filed Dec. 28, 1999, which is a continuation-in-part of Ser. No. 09/104,171 filed Jun. 25, 1998.
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4309143 |
Klatt et al. |
Jan 1982 |
A |
4579508 |
Tsumaki et al. |
Apr 1986 |
A |
4787829 |
Miyazaki et al. |
Nov 1988 |
A |
5528618 |
Schlie et al. |
Jun 1996 |
A |
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Number |
Date |
Country |
2549700 |
Nov 1976 |
DE |
0 332 107 |
Sep 1989 |
EP |
64-29695 |
Jan 1989 |
JP |
1-190991 |
Aug 1989 |
JP |
8-68389 |
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Continuation in Parts (2)
|
Number |
Date |
Country |
Parent |
09/473137 |
Dec 1999 |
US |
Child |
09/592411 |
|
US |
Parent |
09/104171 |
Jun 1998 |
US |
Child |
09/473137 |
|
US |