The present invention relates to a semiconductor laser, and particularly, to a two-dimensional photonic-crystal surface-emitting laser in which a two-dimensional photonic crystal is used for amplifying light.
Semiconductor lasers have many advantages, such as the small size, inexpensiveness, low power consumption and long life. Due to those advantages, semiconductor lasers have 15 been popularly used in a wide range of areas, such as light sources for optical recording, light sources for communications, laser displays, laser printers, or laser pointers. In the area of the laser-beam machining, a laser whose optical output exceeds at least 1 W is needed. However, none of the semiconductor lasers practically used so far have reached this output level. Accordingly, gas lasers, such as a carbon dioxide gas laser, have been used for this purpose.
In recent years, a two-dimensional photonic-crystal surface-emitting laser whose optical output exceeds the level of 1 W has been developed by Noda et al., who are members of the group of the present inventors (Non Patent Literatures 1 and 2). A two-dimensional photonic-crystal surface-emitting laser includes an active layer, a two-dimensional photonic 25 crystal, and a pair of electrodes between which the two previously mentioned elements are sandwiched. The two-dimensional photonic crystal is a device including a plate-shaped base body in which modified refractive index areas whose refractive index differs from that of the base body are periodically arranged, thereby forming a periodic distribution of the refractive index. An injection of electric current from the electrodes into the two-dimensional photonic-crystal surface-emitting laser induces an emission of light in the active layer. In this light, only a specific wavelength of light corresponding to the periodicity of the modified refractive index areas is amplified and causes a laser oscillation, to be eventually emitted as a laser beam in a perpendicular direction to the two-dimensional photonic crystal. This light is emitted from a certain region within the two-dimensional photonic crystal (surface emission). Accordingly, two-dimensional photonic-crystal surface-emitting lasers have a larger emission area than conventional semiconductor lasers and their optical output can be more easily increased. Two-dimensional photonic-crystal surface-emitting lasers themselves have already been known (for example, see Patent Literature 1). A feature of the invention described in Non Patent Literatures 1 and 2 exists in that modified refractive index areas having a right-triangular planar shape are arranged at the lattice points of a square lattice in such a manner that the orthogonally intersecting sides of the right triangle are parallel to the lattice. With this device, the optical output can be increased to approximately 1.5 W.
When an electric current is injected into a two-dimensional photonic-crystal surface-emitting laser, heat is generated inside the device. This heat creates a temperature distribution in each layer of the two-dimensional photonic-crystal surface-emitting laser in such a manner that the temperature increases toward the center of the layer. In order to Increase the optical output, a higher amount of current needs to be injected, which makes the unevenness of the temperature distribution more noticeable. Effects of such a temperature distribution have not been considered for conventional types of two-dimensional photonic-crystal surface-emitting lasers. A study by the present inventors focused on this point has revealed that the temperature distribution which occurs in the two-dimensional photonic crystal causes the following problem: In the two-dimensional photonic-crystal surface-emitting laser, the region where the current injected from the electrode passes through in each layer becomes the heat-generating source. The emission of light from the active layer occurs within the range where the current passes through the active layer (i.e. where carriers are injected into the active layer). This light is introduced into and amplified by the two-dimensional photonic crystal. The temperature distribution which occurs in the two-dimensional photonic crystal causes problems within this region where the light is amplified. This region substantially coincides with the current passage region in the two-dimensional photonic crystal. In the following description, the temperature distribution within the current passage region in the two-dimensional photonic crystal is primarily considered. It should be noted that the term “current passage region” as used in the following description means the current passage region in the two-dimensional photonic crystal unless a different layer in the two-dimensional photonic crystal laser is specifically mentioned.
The problem to be solved by the present invention is to provide a two-dimensional photonic-crystal surface-emitting laser capable of generating a stable laser oscillation even when a temperature distribution which is higher at its center and lower at its outer edge is formed within the current passage region of the two-dimensional photonic crystal.
A two-dimensional photonic-crystal surface-emitting laser according to the first aspect of the present invention developed for solving the previously described problem includes: a two-dimensional photonic crystal including a plate-shaped base body having a predetermined size in which modified refractive index areas whose refractive index differs from the base body are periodically arranged in a two-dimensional pattern; an active layer provided on one side of the two-dimensional photonic crystal; and a pair of electrodes facing each other across the two-dimensional photonic crystal and the active layer, for supplying an electric current to the active layer, wherein:
the modified refractive index areas are provided in such a manner that the in-plane occupancy of the modified refractive index areas in the base body increases in a direction from an outer edge toward the center of a current passage region which is a region where the electric current passes through the two-dimensional photonic crystal.
The in-plane occupancy is defined as the ratio of the area of the modified refractive index areas to the area of the base body per one unit of periodicity of the modified refractive index areas. If each modified refractive index area has an area which changes depending on the position in the thickness direction of the base body, the area of the modified refractive index area is defined as the average area in the thickness direction.
A two-dimensional photonic-crystal surface-emitting laser according to the second aspect of the present invention includes: a two-dimensional photonic crystal including a plate-shaped base body having a predetermined size in which modified refractive index areas whose refractive index differs from the base body are periodically arranged in a two-dimensional lattice pattern; an active layer provided on one side of the two-dimensional photonic crystal; and a pair of electrodes facing each other across the two-dimensional photonic crystal and the active layer, for supplying an electric current to the active layer, wherein:
the modified refractive index areas are arranged in such a manner that a lattice constant decreases in a direction from an outer edge toward the center of a current passage region which is a region where the electric current passes through the two-dimensional photonic crystal.
In the two-dimensional photonic-crystal surface-emitting laser according to the present invention, the modified refractive index areas are provided in such a manner that the in-plane occupancy of those areas increases (first aspect of the present invention) or the lattice constant for those areas decreases (second aspect of the present invention) with the in-plane position on the two-dimensional photonic crystal in the direction from an outer edge toward the center of the current passage region. This configuration cancels the influence of the unevenness of the temperature distribution whose level increases in the direction from the outer edge toward the center, thereby allowing one specific oscillation mode of standing wave to be easily formed within the two-dimensional photonic crystal. Consequently, a stable laser oscillation is obtained.
It is not essential to arrange modified refractive index areas outside the current passage region. However, in order to prevent the reflection of light at the outer edge of the current passage region, a periodical arrangement of the modified refractive index areas having the same structure as the outer edge of the current passage region may preferably be formed outside the current passage region.
In a preferable mode of the two-dimensional photonic-crystal surface-emitting laser according to the first aspect of the present invention, the difference Δf(x, y) between the in-plane occupancy f(x, y) at any in-plane position within the current passage region and the in-plane occupancy fb at the outer edge, i.e. Δf(x, y)=f(x, y)−fb, is proportional to the difference ΔT(x, y) between the temperature T(x, y) at the in-plane position concerned and the temperature Tb at the outer edge, i.e. ΔT(x, y)=T(x, y)−Tb (>0), with a positive proportionality coefficient. ΔT(x, y) can be determined by an experiment or computation based on the amount of electric current determined by the required level of optical output. The proportionality coefficient can also be determined by an experiment or computation. For example, a computation by the present inventors has shown that Δf(x, y) can be given by:
where neff is the effective refractive index, which is defined as the sum of the refractive indices of the base body and the modified refractive index areas multiplied by their respective in-plane occupancies. ∂neff(0)/∂T is the rate of change in the effective refractive index with respect to the temperature. ∂neff(0)/∂f is the rate of change in the effective refractive index with respect to a change in the in-plane occupancy f of the modified refractive index areas. ω0 is the resonance frequency of light calculated from the in-plane occupancy, lattice constant and other parameters. ∂ω/∂f is the rate of change in the resonance frequency with respect to a change in the in-plane occupancy. According to a simulation calculation, the numerator has a positive value, while the denominator has a negative value. Therefore, the proportionality coefficient, inclusive of the minus sign in equation (1), has a positive value. Since ΔT by definition has a positive value, the entire right side of equation (1) has a positive value. Accordingly, Δf(x, y) has a positive value, which means that the in-plane occupancy increases in the direction from the outer edge toward the center of the current passage region.
Similarly, in a preferable mode of the two-dimensional photonic-crystal surface-emitting laser according to the second aspect of the present invention, the difference Δa(x, y) between the lattice constant a(x, y) at any in-plane position within the current passage region and the lattice constant ab at the outer edge, i.e. Δa(x, y)=a(x, y)−ab, is proportional to the difference ΔT(x, y) between the temperature T(x, y) at the in-plane position concerned and the temperature Tb at the outer edge, ΔT(x, y)=T(x, y)−Tb (>0), with a negative proportionality coefficient. A computation by the present inventors has shown that Δa can be given by:
where neff(0) is the effective refractive index before the injection of the electric current (i.e. when temperature distribution is flat). Although the lattice constant at the outer edge, i.e. ab, is included not only on the left side (Δa(x, y)=a(x, y)−ab) but also on the right side of the equation, there is no problem in determining Δa(x, y) at any in-plane position, since ab is a constant. Furthermore, in normal cases, since Δa(x, y) is sufficiently smaller than ab, the position-dependent change in the lattice constant by an amount of Δa(x, y) merely produces a negligible influence on the wavelength (or frequency) of the standing wave. According to a simulation calculation, the numerator has a positive value. Therefore, the proportionality coefficient, inclusive of the minus sign in equation (2), has a negative value. Since ΔT(x, y) has a positive value as noted earlier, the entire right side of equation (2) has a negative value. Accordingly, Δa(x, y)=a(x, y)−ab has a negative value, which means that the lattice constant decreases in the direction from the outer edge toward the center of the current passage region.
In most cases, the temperature distribution in a two-dimensional photonic crystal has a form in which the temperature is highest at the center and concentrically decreases from that point. In such a case, the modified refractive index areas may preferably be provided in such a manner that the in-plane occupancy concentrically decreases from the center of the in-plane position in the case of the first aspect of the present invention, or the lattice constant concentrically increases from the center of the in-plane position in the case of the second aspect of the present invention. However, it is not always the case that the temperature distribution in the two-dimensional photonic crystal is formed in the aforementioned way. The in-plane occupancy or lattice constant of the modified refractive index areas should be adapted to the actual temperature distribution.
In the forgoing descriptions, the first and second aspects of the present invention have been handled as separate devices. A single two-dimensional photonic-crystal surface-emitting laser the features of both first and second aspects of the present invention is also possible. That is to say, the modified refractive index areas in the two-dimensional photonic-crystal surface-emitting laser according to the present invention may be provided in such a manner that the in-plane occupancy of those areas increases in the direction from the outer edge toward the center of the current passage region while the lattice constant for those areas decreases in the same direction.
The two-dimensional photonic-crystal surface-emitting laser according to the present invention can generate a stable laser oscillation even when a temperature distribution which is lower at the outer edge and higher at the center of the current passage region is formed within the two-dimensional photonic crystal.
An embodiment of the two-dimensional photonic-crystal surface-emitting laser according to the present invention is hereinafter described using
As shown in
The active layer 11 emits light within a specific wavelength band upon receiving electric charges injected from the first and second electrodes 15 and 16. The material used for the active layer 11 in the present embodiment is a multiple quantum well of InGaAs/AlGaAs (emission wavelength band: 935-945 nm). However, the material for the active layer in the present invention is not limited to this example. The active layer 11 has a square shape with a thickness of approximately 2 μm. The one-side length of this square is equal to or slightly larger than that of the outer contour of the frame portion 162 of the second electrode 16 (which will be described later). The active layer 11 in the present invention is not limited to these dimensions. Its shape may also be changed, such as a circular or hexagonal shape.
As shown in
The spacer layer 13 is provided to connect the active layer 11 and the two-dimensional photonic-crystal layer 12, which are made of different materials. The material used for the spacer layer 13 in the present embodiment is AlGaAs, which should be appropriately changed depending on the materials used for the active layer 11 and the two-dimensional photonic-crystal layer 12.
The first and second cladding layers 141 and 142 have the functions of connecting the first electrode 15 with the active layer 11 and the second electrode 16 with the two-dimensional photonic crystal layer 12, respectively, as well as facilitating the injection of the electric current from the first and second electrodes 15 and 16 into the active layer 11. In order to enable the cladding layers to perform those functions, a p-type semiconductor is used as the material for the first cladding layer 141, while an n-type semiconductor is used as the material for the second cladding layer 142. The first cladding layer 141 has a two-layer structure consisting of a p-GaAs layer and p-AlGaAs layer arranged from the first electrode 15. Similarly, the second cladding layer 142 has a two-layer structure consisting of a n-GaAs layer and n-AlGaAs layer arranged from the second electrode 16 (those two-layer structures are not shown in the figure). The materials for the first and second cladding layers 141 and 142 in the present invention are not limited to the mentioned examples. The planar dimensions of the first and second cladding layers 141 and 142 are the same as those of the active layer 11 and the base body 121 of the two-dimensional photonic-crystal layer 12. The thickness of the first cladding layer 141 is 2 μm, while that of the second cladding layer is 200 μm.
As just described, the first cladding layer 141 is much thinner than the second cladding layer 142. Accordingly, the distance between the two-dimensional photonic-crystal layer 12 and the first electrode 15 is much smaller than the distance between the two-dimensional photonic-crystal layer 12 and the second electrode 16. Consequently, as shown in
The first electrode 15 has a square planar shape whose one-side length is 200 μm and is shorter than those of the other layers. Therefore, the current passage region 21 can also be approximated by a square whose one-side length is 200 μm. The second electrode 16 is a square plate member having a square hollow portion formed inside. This hollow portion of the plate member is hereinafter called the “window portion 161”, while the remaining portion of the plate member is called the “frame portion 162”. The one-side length of the square plate member (outer side of the frame portion 162) is 800 μm, and that of the square window portion 161 is 600 μm. The laser light amplified within the two-dimensional photonic-crystal layer 12 oscillates in this layer, to be emitted through the window portion 161 to the outside of the two-dimensional photonic-crystal surface-emitting laser 10. The material used for the first electrode 15 and the frame portion 162 of the second electrode 16 may be a good conductor (e.g. gold) or a semiconductor having the same polarity as the neighboring cladding layer (a p-type semiconductor for the first electrode 15, and an n-type semiconductor for the second electrode 16).
The shape and arrangement of the modified refractive index areas 122 in the two-dimensional photonic-crystal layer 12 will be hereinafter described. As shown in
The in-plane occupancy f(x, y) of the modified refractive index areas 122 is f(x, y)=fb=0.15600 (15.600%) in the end zone 1235 and is gradually increased in the direction from the end zone 1235 toward the central zone 1231. Any two zones neighboring each other has a difference in the in-plane occupancy f(x, y) by an amount of 6f(x, y)=Δf(x, y)/ΔT(x, y)=0.00048 (0.048%). (In
The temperature difference of 4° C. between the central zone 1231 and the end zone 1235 has been chosen based on a simulation of the temperature distribution: As shown in
The value of the temperature difference ΔTm can be decreased by improving the heat dissipation capability of the two-dimensional photonic-crystal surface-emitting laser 10.
Though not shown, the modified refractive index areas 122 outside the current passage region 21 are arranged with the same in-plane occupancy and lattice constant as those used in the end zone 1235 inside the current passage region 21.
A calculation for confirming the stability of the laser oscillation was performed for the two-dimensional photonic-crystal surface-emitting laser 10 in the present embodiment. Specifically, the possible modes of oscillation of the light within the two-dimensional photonic crystal were calculated, and a threshold gain difference Δα (unit: cm−1) was determined, which is the difference between the lasing threshold for the fundamental mode in which the laser oscillation is achieved at the lowest energy level and the lasing threshold for the “next-order” mode in which the laser oscillation is achieved at the second lowest energy level. A greater value of the threshold gain difference Δα means that the next-order mode of oscillation is less likely to occur, and a stable laser oscillation will be obtained. The threshold gain difference Δα was calculated with respect to the temperature difference ΔTm between the center and the outer edge of the current passage region 21 (which is hereinafter simply called the “temperature difference ΔTm”), with ΔTm varied from 0° C. to 6° C. in steps of 1° C. As mentioned earlier, ΔTm=4° C. corresponds to the temperature difference assumed in the designing of the two-dimensional photonic-crystal surface-emitting laser 10. When the temperature difference ΔTm is within a range of 5-6° C., it means that the temperature difference is larger than expected. For comparison, a similar calculation was also performed for a device which had the same in-plane occupancy f and lattice constant a over the entire area of the two-dimensional photonic-crystal layer.
The graph in
A brief description on the derivation of equations (1) and (2) is as follows.
Consider a two-dimensional photonic-crystal layer which has neither the spatial distribution of the in-plane occupancy f nor the spatial distribution of the lattice constant a. If a spatial distribution of the temperature occurs in this two-dimensional photonic-crystal layer, a corresponding spatial distribution of the effective refractive index neff occurs in the same layer. In this situation, the wave-number offset δ(T), which indicates the displacement of the wave number of the standing wave formed within the two-dimensional photonic-crystal layer from a value computed from the lattice constant, is given by:
δ(T)=δ(0)′+Δneff(T)ω(T)/c (3)
where δ(0)′ is a constant, Δneff(T) is a change in the effective refractive index neff with respect to a temperature change, ωm is the frequency under the influence of the spatial distribution of the temperature, and c is the speed of light. The second term on the right side of equation (3) indicates the influence of the spatial distribution of the temperature. This term, which is hereinafter denoted by Δδ(T), can be rewritten as follows:
Δδ(T)(x,y)=Δneff(T)ω(T)/c
=Δneff(T)ω0(ω(T)/ω0)/c
˜Δneff(T)ω0/c (with the approximation of ω(T)/ω0˜1)
˜(δneff(0)/∂T)·ΔT(x,y)·ω0/c (4)
where ω0 is the frequency with no influence of the spatial distribution of the temperature.
In the case of a two-dimensional photonic-crystal layer which has a spatial distribution in the in-plane occupancy f(x, y), the wave-number offset δ(f) is given by:
δ(f)(x,y)˜(neff(0)ω(f)/c+Δf·∂(neff(0)ω(f)/c)∂f)−(Ω0/c)˜δ(0)′+(ω0/c)·(∂neff(0)/∂f+(neff(0)ω0)·(∂ω/∂f)·Δf(x,y) (5)
The second term on the right side of equation (5) indicates the influence of the spatial distribution of the in-plane occupancy f(x, y). This term is hereinafter denoted by Δδ(f)(x, y), i.e.:
Δδ(f)(x,y)=(ω0/c)·(∂neff(0)/∂f+(neff(0)/ω0)·(∂ω/∂f)·Δf(x,y) (6)
From equations (4) and (6), the influence of the spatial distribution of the temperature can be cancelled by the spatial distribution of the in-plane occupancy f when the following equation holds true:
Δδ(T)(x,y)+Δδ(f)(x,y)=0 (7)
i.e.,
(∂neff(0)/∂T)ΔT(x,y)·ω0/c+(ω0/c)·(∂neff(0)/∂f)+(neff(0)/ω0)·(∂ω/∂f)·Δf(x,y)=0 (8)
By transforming this equation (8), equation (1) can be obtained.
In the case of a two-dimensional photonic-crystal layer which has a spatial distribution in the lattice constant a(x, y), the wave-number offset δ(a) is given by:
δ(a)(x,y)=δ(0)′+(ω0/c)·(1−(a(0)/a(x,y))) (9)
The second term on the right side of equation (9) indicates the influence of the spatial distribution of the lattice constant a. This term is hereinafter denoted by Δδ(a), i.e.:
Δδ(a)(x,y)=−(ω0/c)·((a(0)/a(x,y))−1) (10)
From equations (4) and (10), the influence of the spatial distribution of the temperature can be cancelled by the spatial distribution of the lattice constant a when the following equation holds true:
Δδ(T)(x,y)+Δδ(x,y)=0 (11)
i.e.,
(∂neff(0)/∂T)·ΔT(x,y)·ω0/c−(ω0/c)·((a(0)/a(x,y))−1)=0 (12)
By transforming this equation (12), equation (2) can be obtained.
Several approximations have been made for the derivation of equations (1) and (2). In order to confirm that those approximations have only a minor effect, the threshold gain difference Δα has been calculated by simulation with the approximations as well as without the approximations.
The present invention is not limited to the previous embodiment but allows for various modifications.
For example, the two-dimensional photonic-crystal layers 12 and 12A in the examples of
In the previous embodiment, either the in-plane occupancy or lattice constant is varied depending on the position. It is possible to vary both the in-plane occupancy and the lattice constant depending on the position.
In place of the holes used in the previous embodiment, members made of a material different from the base body 121 may be used as the modified refractive index areas. The planar shape of the modified refractive index areas may be variously changed, such as a circular, equilateral triangular, isosceles triangular or square shape in place of the right triangular shape in the previous embodiment. The arrangement pattern of the modified refractive index areas, which is a square lattice in the previous embodiment, may be changed to a triangular lattice, rectangular lattice or other appropriate patterns.
Number | Date | Country | Kind |
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2015-169125 | Aug 2015 | JP | national |
Filing Document | Filing Date | Country | Kind |
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PCT/JP2016/074736 | 8/25/2016 | WO | 00 |
Publishing Document | Publishing Date | Country | Kind |
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WO2017/038595 | 3/9/2017 | WO | A |
Number | Name | Date | Kind |
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9991669 | Hirose | Jun 2018 | B2 |
20040247009 | Noda | Dec 2004 | A1 |
20050089075 | Baba | Apr 2005 | A1 |
20100238966 | Mochizuki | Sep 2010 | A1 |
20160020576 | Watanabe | Jan 2016 | A1 |
20160248224 | Noda | Aug 2016 | A1 |
Number | Date | Country |
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1547792 | Nov 2004 | CN |
105191028 | Dec 2015 | CN |
112014001188 | Nov 2015 | DE |
2003-023193 | Jan 2003 | JP |
2010-219307 | Sep 2010 | JP |
2011-18798 | Jan 2011 | JP |
2014-175488 | Sep 2014 | JP |
2014136943 | Sep 2014 | WO |
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Number | Date | Country | |
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20190157836 A1 | May 2019 | US |