Claims
- 1. A scroll vacuum pump having:a first stage including a first stage fixed plate having a spiral involute, a first stage orbiting plate having a spiral involute wrap, a first stage inlet, and a first stage outlet; said spiral involute wraps meshing with each other to define chambers, said chambers increasing in size from said first stage inlet to said first stage outlet; and a second stage including a second stage fixed plate having a spiral involute wrap, a second stage orbiting plate having a spiral involute, a second stage inlet in fluid communication with said first stage outlet, and a second stage outlet; said second stage spiral involute wraps meshing with each other to define chambers, said chambers decreasing in size from said second stage inlet to said second stage outlet; said first stage having an expansion ratio greater than or equal to one and said second stage having a compression ratio greater than or equal to one; and the displacement of the first stage is greater than the displacement of the second stage so that the interstage pressure will be at a value between the first stage inlet and the second stage outlet.
- 2. The scroll vacuum pump of claim 1 wherein the first stage involute wraps are taller than the second stage involute wraps.
- 3. The scroll vacuum pump of claim 1 wherein the first stage inlet is located at an approximate center of said first stage fixed plate; said first stage outlet is at a periphery of said first stage; said second stage inlet is at a periphery of said second stage; and said second stage outlet is located at an approximate center of said second stage fixed plate.
- 4. The scroll vacuum pump of claim 1 wherein including a single orbiting plate, said plate having an upper surface and a lower surface; said upper surface defining said second stage orbiting plate and said lower surface defining said first stage orbiting plate.
- 5. The scroll vacuum pump of claim 1 including an upper housing; said upper housing having an end surface spaced from said second stage fixed plate to define an exit chamber; said second stage exit being in fluid communication with said exit chamber; said upper housing including an outlet from said exit chamber.
- 6. The scroll vacuum pump of claim 1 including a motor which drives said orbiting involute wraps; said motor being including an output shaft which extends through said second stage fixed plate; said first and second stage orbiting scroll plates being operatively connected to said output shaft to be driven thereby; said second stage outlet surrounding said output shaft, such that said output shaft is at atmospheric pressure.
- 7. The scroll vacuum pump of claim 1 wherein the fixed and orbiting involutes of the first stage have a central portion and an peripheral portion; the central portion and peripheral portions having different heights.
- 8. The scroll vacuum pump of claim 7 wherein the central portion of the fixed and orbiting involutes is taller than the peripheral portion of the fixed and orbiting involutes.
- 9. The scroll vacuum pump of claim 1 wherein the pressure at the second stage exit is less than the pressure at the first stage inlet.
- 10. A scroll vacuum pump having:a first stage including a first stage fixed plate having a spiral involute, a first stage orbiting plate having a spiral involute wrap, a first stage inlet, and a first stage outlet; said spiral involute wraps meshing with each other to define chambers, said chambers increasing in size from said first stage inlet to said first stage outlet; said first stage having an expansion ratio greater than or equal to one; a second stage including a second stage fixed plate having a spiral involute wrap, a second stage orbiting plate having a spiral involute, a second stage inlet in fluid communication with said first stage outlet, and a second stage outlet; said second stage spiral involute wraps meshing with each other to define chambers, said chambers decreasing in size from said second stage inlet to said second stage outlet; and said second stage having a compression ratio greater than or equal to one; an upper housing; said upper housing having an end surface spaced from said second stage fixed plate to define an exit chamber; said second stage exit being in fluid communication with said exit chamber; said upper housing including an outlet from said exit chamber; and a motor which drives said orbiting involute wraps; said motor being mounted to an outer surface of said upper housing and including an output shaft which extend through said exit chamber and said second stage fixed plate; said first and second stage orbiting scroll plates being operatively connected to said output shaft to be driven thereby; said output shaft being at atmospheric pressure; said scroll vacuum pump lacking any sealing which would seal said shaft from ambient atmosphere.
- 11. A scroll vacuum pump having:a first stage including a first stage fixed plate having a spiral involute, a first stage orbiting plate having a spiral involute wrap, a first stage inlet, and a first stage outlet; said spiral involute wraps meshing with each other to define chambers, said chambers increasing in size from said first stage inlet to said first stage outlet; and a second stage including a second stage fixed plate having a spiral involute wrap, a second stage orbiting plate having a spiral involute, a second stage inlet in fluid communication with said first stage outlet, and a second stage outlet; said second stage spiral involute wraps meshing with each other to define chambers, said chambers decreasing in size from said second stage inlet to said second stage outlet; said first stage having an expansion ratio greater than or equal to one and said second stage having a compression ratio greater than or equal to one; the involute spirals being provided with tip seals; said tip seals being extended as close as possible to the center of the involute to delay porting of gas by 180° of rotation.
- 12. A scroll pump having:a first stage including a first stage fixed plate having a spiral involute, a first stage orbiting plate having a spiral involute wrap, a first stage inlet, and a first stage outlet; said spiral involute wraps meshing with each other to define chambers, said chambers increasing in size from said first stage inlet to said first stage outlet; and a second stage including a second stage fixed plate having a spiral involute wrap, a second stage orbiting plate having a spiral involute, a second stage inlet in fluid communication with said first stage outlet, and a second stage outlet; said second stage spiral involute wraps meshing with each other to define chambers, said chambers decreasing in size from said first stage inlet to said first stage outlet; said first stage involute wraps having a central portion and an peripheral portion; the central portion and peripheral portions having different heights; the central portion of the fixed and orbiting involutes wraps being taller than the peripheral portion of the fixed and orbiting involutes.
- 13. The scroll pump of claim 12 wherein said first stage has an expansion ratio greater than or equal to one and said second stage having a compression ratio greater than or equal to one.
- 14. The scroll pump of claim 12 wherein said first stage expansion ratio is less than or equal to said second stage compression ratio.
CROSS-REFERENCE TO RELATED APPLICATIONS
This application is a continuation-in-part upon application Ser. No. 09/228,485 filed on Jan. 11, 1999, now U.S. Pat. No. 6,050,792.
US Referenced Citations (26)
Foreign Referenced Citations (4)
Number |
Date |
Country |
05138247 |
May 1992 |
EP |
2002455 |
Aug 1977 |
GB |
405157076 |
Jun 1993 |
JP |
7109981 |
Apr 1995 |
JP |
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
09/228485 |
Jan 1999 |
US |
Child |
09/715726 |
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US |