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4652954 | Church | Mar 1987 | A |
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4713710 | Soda et al. | Dec 1987 | A |
4727643 | Schewe et al. | Mar 1988 | A |
4771350 | Desserre | Sep 1988 | A |
4907113 | Mallary | Mar 1990 | A |
4967298 | Mowry | Oct 1990 | A |
5142426 | Re et al. | Aug 1992 | A |
5168409 | Koyama et al. | Dec 1992 | A |
5264980 | Mowry et al. | Nov 1993 | A |
5270895 | Ruigrok et al. | Dec 1993 | A |
5331493 | Schwarz | Jul 1994 | A |
5438747 | Krounbi et al. | Aug 1995 | A |
5452164 | Cole et al. | Sep 1995 | A |
5476804 | Lazzari | Dec 1995 | A |
5493464 | Koshikawa | Feb 1996 | A |
5566442 | Gaud et al. | Oct 1996 | A |
5576098 | Arimoto et al. | Nov 1996 | A |
5576914 | Rottmayer et al. | Nov 1996 | A |
5597496 | Masaichi et al. | Jan 1997 | A |
5621593 | Kitajima | Apr 1997 | A |
5621596 | Santini | Apr 1997 | A |
5640753 | Schultz et al. | Jun 1997 | A |
5649351 | Cole et al. | Jul 1997 | A |
5668689 | Schultz et al. | Sep 1997 | A |
5691867 | Onuma et al. | Nov 1997 | A |
5700380 | Krounbi et al. | Dec 1997 | A |
5702756 | McKean et al. | Dec 1997 | A |
5703740 | Cohen et al. | Dec 1997 | A |
5734531 | Nix et al. | Mar 1998 | A |
5822161 | Yagyu | Oct 1998 | A |
5828533 | Ohashi et al. | Oct 1998 | A |
6024886 | Han et al. | Feb 2000 | A |
6034847 | Komuro et al. | Mar 2000 | A |
6034848 | Garfunkel et al. | Mar 2000 | A |
6063512 | Osaka et al. | May 2000 | A |
6130809 | Santini | Oct 2000 | A |
6154347 | Sasaki | Nov 2000 | A |
6226149 | Dill, Jr. et al. | May 2001 | B1 |
6317288 | Sasaki | Nov 2001 | B1 |
6338551 | Sugiura et al. | Jan 2002 | B1 |
6466401 | Hong et al. | Oct 2002 | B1 |
Entry |
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Dubin, V.M., Ting, C.H., Cheung, R., “Electro-Chemical Deposition of Copper for VLSI Metallization,” 1997 VMIC Conference, Jun. 10-12, 1997, Santa Clara, CA, pp. 69-74. |