Number | Name | Date | Kind |
---|---|---|---|
4682128 | Sproul et al. | Jul 1987 | |
4814774 | Herczfeld | Mar 1989 | |
4894626 | Kubinec | Jan 1990 | |
5121089 | Larson | Jun 1992 | |
5164688 | Larson | Nov 1992 | |
5168249 | Larson | Dec 1992 | |
5175521 | Larson | Dec 1992 | |
5263004 | Larson, III | Nov 1993 | |
5339087 | Miharik | Aug 1994 | |
5400037 | East | Mar 1995 | |
5475392 | Newberg et al. | Dec 1995 |
Entry |
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"Microactuators for Ga-As-Based Microwave Integrated Circuits," L.E. Larson et al., Transducer '91, Digest of the International Conference on Solid-State Sensors and Actuators, pp. 743-746. |
"The Integration of Micro-Machine Fabrication with Electronic Device Fabrication on III-V Semiconductor Materials," R.H. Hackett et al., Transducer '91, Digest of the International Conference on Solid-State Sensors and Actuators, pp. 51-54. |