| Number | Name | Date | Kind |
|---|---|---|---|
| 4682128 | Sproul et al. | Jul 1987 | |
| 4814774 | Herczfeld | Mar 1989 | |
| 4894626 | Kubinec | Jan 1990 | |
| 5121089 | Larson | Jun 1992 | |
| 5164688 | Larson | Nov 1992 | |
| 5168249 | Larson | Dec 1992 | |
| 5175521 | Larson | Dec 1992 | |
| 5263004 | Larson, III | Nov 1993 | |
| 5339087 | Miharik | Aug 1994 | |
| 5400037 | East | Mar 1995 | |
| 5475392 | Newberg et al. | Dec 1995 |
| Entry |
|---|
| "Microactuators for Ga-As-Based Microwave Integrated Circuits," L.E. Larson et al., Transducer '91, Digest of the International Conference on Solid-State Sensors and Actuators, pp. 743-746. |
| "The Integration of Micro-Machine Fabrication with Electronic Device Fabrication on III-V Semiconductor Materials," R.H. Hackett et al., Transducer '91, Digest of the International Conference on Solid-State Sensors and Actuators, pp. 51-54. |