The present invention relates to an ultrasonic atomization apparatus that atomizes a source solution into fine mist by using an ultrasonic vibrator and transfers the mist to the outside.
In a field of manufacturing electronic devices, an ultrasonic atomization apparatus is used in some cases. In the field of the electronic device manufacturing, the ultrasonic atomization apparatus atomizes a solution by using ultrasonic waves that are oscillated from an ultrasonic vibrator, and sends out the atomized solution to the outside by using transfer gas. When the source solution mist transferred to the outside is sprayed onto a substrate, a thin film for the electronic device is formed on the substrate.
Various solvents are used for the source solution used in the film formation, and in order to prevent erosion of the ultrasonic vibrator, a double chamber method, in which the source solution and the ultrasonic vibrator do not come into contact with each other, is used. In the double chamber method, in order to separate the ultrasonic vibrator and the source solution, a separator cup for accommodating the source solution is used separately for a water tank provided with the ultrasonic vibrator in its bottom surface. The separator cup is required to allow transmission of ultrasonic waves, and a material that easily transmits ultrasonic waves, such as polyethylene and polypropylene (PP), is used as its constituent material. Further, polyethylene and polypropylene have properties of being easily subjected to formation as well.
One example of the ultrasonic atomization apparatus employing the double chamber method described above is an atomization apparatus disclosed in Patent Document 1.
Patent Document 1: WO 2015/019468
In general, toluene, ether, and the like, which are solvents high in solubility, are used as a solvent of the source solution. This is because toluene and ether have properties of high resin solubility.
However, when toluene and ether are used as a solvent of the source solution in a conventional ultrasonic atomization apparatus, the high resin solubility of the solvent may cause a leakage of the source solution due to swelling and deformation of the separator cup using polyethylene or polypropylene as its constituent material, or opening of a hole in the separator cup.
This results in deterioration of accommodation stability of the source solution in the conventional ultrasonic atomization apparatus, which poses a problem that the source solution mist of an appropriate atomization amount cannot be generated.
The present invention has an object to provide an ultrasonic atomization apparatus that solves the problem as described above, that is excellent in tolerance to a source solution, and that can generate a source solution mist of an appropriate atomization amount.
An ultrasonic atomization apparatus according to the present invention includes: a container including a separator cup configured to accommodate a source solution at a lower part; an internal hollow structure body including a hollow inside being provided above the separator cup in the container; a water tank configured to accommodate an ultrasonic wave conveyance medium inside, the water tank and the separator cup being positioned so that a bottom surface of the separator cup is immersed in the ultrasonic wave conveyance medium; and at least one ultrasonic vibrator provided in a bottom surface of the water tank. The separator cup uses fluorocarbon resin as a constituent material, and includes a bottom surface having thickness satisfying a thin film condition. The thin film condition is that “the thickness of the bottom surface is 0.5 mm or less”.
The constituent material of the bottom surface of the separator cup in the ultrasonic atomization apparatus being the invention of the present application according to claim 1 is fluorocarbon resin. The fluorocarbon resin has properties of having relatively high tolerance to various solvents. Thus, the separator cup of the ultrasonic atomization apparatus can exert relatively high tolerance to the source solution.
In addition, through satisfaction of the thin film condition that “the thickness of the bottom surface is 0.5 mm or less”, the separator cup being the invention of the present application according to claim 1 enhances transmissiveness of ultrasonic waves in the bottom surface, and can thus generate a source solution mist with an appropriate atomization amount.
As a result, the invention of the present application according to claim 1 produces effects of being excellent in tolerance to the source solution, and enabling generation of the source solution mist of an appropriate atomization amount.
These and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings.
<First Embodiment>
As illustrated in
The upper cup 11 may have any shape as long as the upper cup 11 is a container having a space formed inside. In the ultrasonic atomization apparatus 101, the upper cup 11 has a substantially cylindrical shape, and in the upper cup 11, a space surrounded by a side surface being formed in a circular shape in plan view is formed.
Meanwhile, in the separator cup 12, a source solution 15 is accommodated. The constituent material of the separator cup 12 is polytetrafluoroethylene (PTFE) being one of fluorocarbon resins, whose entire thickness is uniformly 0.5 mm. Specifically, the separator cup 12 uses PTFE as its constituent material, and has a bottom surface BP1 having a thickness of 0.5 mm.
As described above, the separator cup 12 according to the first embodiment has features in that the separator cup 12 satisfies a thin film condition that “the thickness of the bottom surface BP1 is 0.5 mm or less”.
Further, in the first embodiment, the ultrasonic vibrator 2 applies ultrasonic waves to the source solution 15 in the separator cup 12, and thereby atomizes the source solution 15. Four ultrasonic vibrators 2 (only two of them are illustrated in
The internal hollow structure body 3 is a structure body including a hollow in side. In an upper surface part of the upper cup 11 of the container 1, an opening part is formed, and as illustrated in
Here, in a state in which the internal hollow structure body 3 is inserted in the opening part, a part between the internal hollow structure body 3 and the upper cup 11 is hermetically closed. In other words, the part between the internal hollow structure body 3 and the opening part of the upper cup 11 is sealed.
For the shape of the internal hollow structure body 3, any shape may be adopted as long as the shape is a shape in which a hollow is formed inside. In the configuration example of
The tubular part 3A is a tubular path part having a cylindrical shape, and the tubular part 3A extends from the outside of the upper cup 11 to the inside of the upper cup 11 in a manner of being inserted through the opening part provided in the upper surface of the upper cup 11. More specifically, the tubular part 3A is divided into an upper tubular part disposed on the outside of the upper cup 11 and a lower tubular part disposed on the inside of the upper cup 11. Further, the upper tubular part is attached from the outside of the upper surface of the upper cup 11, and the lower tubular part is attached from the inside of the upper surface of the upper cup 11, and in a state in which these are attached together, the upper tubular part and the lower tubular part communicate to each other through the opening part disposed on the upper surface of the upper cup 11. One end of the tubular part 3A is connected to, for example, the inside of a thin-film film forming apparatus that forms a thin film by using a source solution mist MT, which is present on the outside of the upper cup 11. In contrast, another end of the tubular part 3A is connected to an upper end side of the circular truncated cone part 3B inside the upper cup 11.
The circular truncated cone part 3B has its external appearance (side wall surface) of a circular truncated cone shape, and has a hollow being formed inside. The circular truncated cone part 3B has its upper surface and bottom surface being opened. In other words, the hollow being formed inside is closed, and there are no upper surface and bottom surface. The circular truncated cone part 3B is present in the upper cup 11, and as described above, the upper end side of the circular truncated cone part 3B connects (communicates) to the another end of the tubular part 3A, and a lower end portion side of the circular truncated cone part 3B is connected to the upper end side of the cylindrical part 3C.
Here, the circular truncated cone part 3B has a cross-sectional shape that is widened toward the end, that is, from the upper end side toward the lower end side. In other words, the diameter of the side wall on the upper end side of the circular truncated cone part 3B is the smallest (the same as the diameter of the tubular part 3A), the diameter of the side wall on the lower end side of the circular truncated cone part 3B is the largest (the same as the diameter of the cylindrical part 3C), and the diameter of the side wall of the circular truncated cone part 3B is smoothly increased from the upper end side toward the lower end side.
The cylindrical part 3C is a part having a cylindrical shape, and as described above, the upper end side of the cylindrical part 3C connects (communicates) to the lower end side of the circular truncated cone part 3B, and the lower end side of the cylindrical part 3C faces the bottom surface of the upper cup 11. Here, in the configuration example of
Here, in the configuration example of
When the internal hollow structure body 3 having the above-described shape is disposed in a manner of being inserted into the upper cup 11, the inside of the upper cup 11 is divided into two spaces. The first space is a hollow part being formed inside the internal hollow structure body 3. The hollow part is hereinafter referred to as an “atomization space 3H”. The atomization space 3H is a space surrounded by the inner side surface of the internal hollow structure body 3.
The space is a space formed by an inner surface of the upper cup 11 and an outer side surface of the internal hollow structure body 3. The space is hereinafter referred to as a “gas supply space 1H”. As described above, the inside of the upper cup 11 is sectioned into the atomization space 3H and the gas supply space 1H.
Further, the atomization space 3H and the gas supply space 1H are connected through a lower opening part of the cylindrical part 3C.
Further, in the configuration example of
The gas supply unit 4 is disposed in the upper surface of the upper cup 11. Through the gas supply unit 4, a carrier gas G4 for transferring the source solution mist MT (see
The carrier gas G4 supplied from the gas supply unit 4 is supplied into the gas supply space 1H and fills the gas supply space 1H, and is then introduced to the atomization space 3H through the lower opening part of the cylindrical part 3C.
Further, in the ultrasonic atomization apparatus 101 of the first embodiment, the separator cup 12 of the container 1 has a cup-like shape, and accommodates the source solution 15 inside. The bottom surface BP1 of the separator cup 12 is gently inclined from a side surface part toward the center, and is formed into a spherical surface shape having a predetermined curvature.
Further, the water tank 10 is filled with ultrasonic wave conveyance water 9, which serves as an ultrasonic wave conveyance medium. The ultrasonic wave conveyance water 9 has a function of conveying ultrasonic vibration that is generated from the ultrasonic vibrator 2 disposed in the bottom surface of the water tank 10 to the source solution 15 in the separator cup 12.
In other words, the ultrasonic wave conveyance water 9 is accommodated in the water tank 10 so as to be able to convey, to the inside of the separator cup 12, vibration energy of ultrasonic waves applied from the ultrasonic vibrator 2.
As described above, in the bottom surface BP1 of the separator cup 12, the source solution 15 to be atomized is accommodated, and a liquid level 15A of the source solution 15 is positioned lower than the position at which the connector 5 is disposed (see
Further, regarding the separator cup 12, the positions of the separator cup 12 and the water tank 10 are set so that the entire bottom surface BP1 is immersed in the ultrasonic wave conveyance water 9. Specifically, the bottom surface BP1 of the separator cup 12 is disposed above the bottom surface of the water tank 10 without touching the bottom surface of the water tank 10, and the ultrasonic wave conveyance water 9 is present between the bottom surface BP1 of the separator cup 12 and the bottom surface of the water tank 10.
In the ultrasonic atomization apparatus 101 having the configuration as described above, when the ultrasonic vibrators 2 apply ultrasonic vibration, vibration energy of the ultrasonic waves is conveyed to the source solution 15 in the separator cup 12 through the ultrasonic wave conveyance water 9 and the bottom surface BP1 of the separator cup 12.
Then, as illustrated in
In the following, parts similar to those of the ultrasonic atomization apparatus 101 according to the first embodiment illustrated in
A container 51 corresponding to the container 1 of the ultrasonic atomization apparatus 101 is made of a combined structure of an upper cup 61 and a separator cup 62.
The upper cup 61 is configured similarly to the upper cup 11.
A conventional separator cup 62 corresponding to the separator cup 12 of the first embodiment adopts polypropylene (PP) that easily transmits ultrasonic waves as its constituent material, whose entire thickness is uniformly 1.0 mm.
In order to make the thickness of the separator cup 62 as thin as possible with the aim of maintaining transmissiveness of the ultrasonic waves (preventing attenuation of vibration energy of the ultrasonic waves) and maintaining the shape of the separator cup 62, the thickness of the separator cup 62 is set to 1.0 mm.
In
BP1 is 0.5 mm. Atomization amount variation L3 shows a case in which the constituent material of the separator cup 12 is PTFE, and the film thickness t of the bottom surface BP1 is 0.6 mm. Specifically, the atomization amount variations L1 to L3 are experimental results related to the ultrasonic atomization apparatus 101 according to the first embodiment.
Meanwhile, atomization amount variation L4 shows a case in which the constituent material of the separator cup 62 is PP, and film thickness t of a bottom surface BP6 is 1.0 mm. Specifically, the atomization amount variation L4 is experimental results related to the conventional ultrasonic atomization apparatus 200.
As shown by the atomization amount variation L3 of
However, when the film thickness of the bottom surface BP1 is set to 0.5 mm, specifically, when the bottom surface BP1 satisfies the thin film condition described above as shown by the atomization amount variation L2 of
In addition, when the film thickness of the bottom surface BP1 is set to 0.3 mm as shown by the atomization amount variation L1 of
As can be understood from the experimental results of
In addition, it was confirmed that the atomization amount of the source solution mist MT reaches a high standard excelling the related art regarding transmissiveness of ultrasonic waves if the film thickness of PTFE adopted as the constituent material of the separator cup 12 was set to 0.3 mm or less.
Note that transmissiveness of ultrasonic waves is determined by acoustic impedance. Acoustic impedance of fluorocarbon resins, including PTFE, is approximately 1.15[×106 kg/m2s], and thus it is estimated that results similar to those of the case shown in
As described above, regarding the ultrasonic atomization apparatus 101 according to the first embodiment, a configuration that the thin film condition regarding the separator cup 12 that “the thickness of the bottom surface BP1 is 0.5 mm or less” is satisfied is referred to as a basic configuration, and a configuration that a limited thin film condition regarding the separator cup 12 that “the thickness of the bottom surface BP1 is 0.3 mm or less” is satisfied is referred to as a limited configuration. Specifically, the thin film condition described above includes the limited thin film condition described above.
As described above, the constituent material of the separator cup 12 in the ultrasonic atomization apparatus 101 according to the first embodiment is PTFE being fluorocarbon resin. The fluorocarbon resin as typified by PTFE has properties of having relatively high tolerance to various solvents. Thus, the separator cup 12 of the ultrasonic atomization apparatus 101 can exert relatively high tolerance to the source solution 15.
In addition, through satisfaction of the thin film condition that “the thickness of the bottom surface BP1 is 0.5 mm or less”, the separator cup 12 having the basic configuration according to the first embodiment enhances transmissiveness of ultrasonic waves in the bottom surface BP1, and can thus generate the source solution mist MT with the atomization amount at the practical level.
As a result, the basic configuration of the ultrasonic atomization apparatus 101 according to the first embodiment produces effects of enabling generation of the source solution mist MT that is excellent in tolerance to the source solution 15 and that has an approximate atomization amount.
In addition, through satisfaction of the limited thin film condition that “the thickness of the bottom surface BP1 is 0.3 mm or less”, the separator cup 12 having the limited configuration of the ultrasonic atomization apparatus 101 according to the first embodiment can further enhance transmissiveness of ultrasonic waves in the bottom surface BP1 and generate the source solution mist MT with a higher atomization amount.
<Second Embodiment>
In
As illustrated in
The bottom surface BP2 is separated into four thin film regions R1 each having a relatively small film thickness of 0.5 mm or less, and a thick film region R2 having a relatively large film thickness of larger than 0.5 mm.
The four thin film regions R1 are set to correspond to the four ultrasonic vibrators 2. Each of the four thin film regions R1 is set in a region including the entire ultrasonic wave transmission region through which the ultrasonic waves applied from a corresponding ultrasonic vibrator 2 transmit. Further, in the bottom surface BP2, the entire region except for the four thin film regions R1 is set to the thick film region R2. Further, the film thickness of the side surface and the upper surface of the separator cup 12 is also set to the same film thickness as the thick film region R2.
In this manner, the bottom surface BP2 of the separator cup 12B includes four thin film regions R1 corresponding to the four ultrasonic vibrators 2. Each of the four thin film regions R1 includes an ultrasonic wave transmission region that allows transmission of the ultrasonic waves generated from a corresponding ultrasonic vibrator 2 out of the four ultrasonic vibrators 2.
Further, the separator cup 12B of the ultrasonic atomization apparatus 102 according to the second embodiment has its thickness (<0.5 mm) of the four thin film regions R1 set smaller than the thickness (>0.5 mm) of the other region.
In this manner, in the bottom surface of the separator cup 12B according to the second embodiment, each of the four thin film regions R1 satisfies the thin film condition that “the thickness is 0.5 mm or less” and the thick film region R2 does not satisfy the thin film condition described above.
In
As illustrated in
In this manner, the ultrasonic atomization apparatus 102 according to the second embodiment has features in that, in the bottom surface BP2 of the separator cup 12B, the four thin film regions R1 (at least one thin film region) satisfy the thin film condition described above, and the thick film region R2 being the other region except for the four thin film regions R1 does not satisfy the thin film condition described above.
Regarding the ultrasonic atomization apparatus 102 according to the second embodiment, owing to the features described above, by setting the film thickness of the thick film region R2 to be relatively large of larger than 0.5 mm in the separator cup 12B, tolerance to the source solution 15 can be enhanced to the maximum.
In addition, the ultrasonic atomization apparatus 102 according to the second embodiment satisfies the thin film condition that the four thin film regions R1 each including the ultrasonic wave transmission region has a “thickness of 0.5 mm or less”, similarly to the ultrasonic atomization apparatus 101 according to the first embodiment.
Thus, the ultrasonic atomization apparatus 102 according to the second embodiment produces effects of enabling generation of the source solution mist MT with an appropriate atomization amount, similarly to the ultrasonic atomization apparatus 101 according to the first embodiment.
Note that, as a matter of course, the source solution mist MT of a higher atomization amount can be generated in the second embodiment as well by setting the thickness of the four thin film regions R1 to 0.3 mm or less so as to achieve satisfaction of the limited thin film condition as in the limited configuration according to the first embodiment.
While the present invention has been shown and described in detail, the foregoing description is in all aspects illustrative and not restrictive. It is therefore understood that numerous unillustrated modifications can be devised without departing from the scope of the present invention.
1 Container
2 Ultrasonic vibrator
3 Internal hollow structure body
4 Gas supply unit
9 Ultrasonic wave conveyance water
10 Water tank
12, 12B Separator cup
15 Source solution
101, 102 Ultrasonic atomization apparatus
BP1, BP2 Bottom surface
R1 Thin film region
R2 Thick film region
Filing Document | Filing Date | Country | Kind |
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PCT/JP2020/001494 | 1/17/2020 | WO | 00 |