IEEE 1986 Ultrasonics Symposium, Nov. 1986, vol. 2, pp. 745-748, "Planar-Structure Focusing Lens for Operation at 200 MHz and Its Application to the Reflection-Mode Acoustic Microscope", K. Yamada et al. |
Applied Physics Letters, vol. 52, No. 10, Mar. 1988, pp. 836-837, "Chemically Etched Micromirrors in Silicon", D. L. Kendall et al. |
RCA Review, vol. 31, No. 2, Jun. 1970, pp. 271-275, "The Etching of Deep Vertical-Walled Patterns in Silicon", A. I. Stoller. |
IBM Technical Disclosure Bulletin, vol. 14, No. 2, Jul. 1971, p. 417, "Fabricating Shaped Grid and Aperture Holes", R. A. Leone et al. |
Extended Abstracts/Electrochemical Society, vol. 87-2, Oct., 1987, p. 769, "Anisotropic Etching of Silicon for 3-D Microstructure Fabrication". |
Electronics Letters, vol. 17, No. 15, Jul. 1981, pp. 520-522, "Linearly Focused Acoustic Beams for Acoustic Microscopy", J. Kushibiki et al. |