BRIEF DESCRIPTION OF THE DRAWINGS
The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description made with reference to the accompanying drawings. In the drawings:
FIG. 1 is a schematic cross-sectional view showing an ultrasonic sensor mounted to an automobile according to an example of a first embodiment;
FIG. 2A is a plan view showing a receiving element for the ultrasonic sensor according to the first embodiment, and FIG. 2B is a cross-sectional view taken along line IIB-IIB in FIG. 2A;
FIG. 3 is a schematic cross-sectional view showing an ultrasonic sensor according to another example of the first embodiment;
FIG. 4 is a plan view showing receiving elements for an ultrasonic sensor according to a second embodiment;
FIG. 5 is a schematic cross-sectional view showing the ultrasonic sensor according to an example of the second embodiment;
FIG. 6 is a schematic cross-sectional view showing an ultrasonic sensor according to another example of the second embodiment;
FIG. 7 is a schematic cross-sectional view showing an ultrasonic sensor including multiple receiving elements according to a third embodiment;
FIG. 8A is a plan view showing a receiving element with an oscillating portion cantilevered by a supporting portion according to a modification of the present invention, and FIG. 8B is a cross-sectional view taken along line VIIIB-VIIIB in FIG. 8A;
FIG. 9 is a schematic cross-sectional view showing an ultrasonic sensor including receiving elements with an oscillating portion supported at one side by a supporting portion according to another modification of the present invention; and
FIG. 10 is a schematic cross-sectional view showing a receiving portion according to a modified example of the present invention.