ULTRAVIOLET LIGHT IRRADIATION DEVICE

Abstract

An ultraviolet light irradiation device includes an optical filter. The optical filter has a transmission spectrum of zero-degree light including a first transmission band and a second transmission band that transmit the zero-degree light and a first restriction band that restricts transmission of the zero-degree light. The first transmission band is present within the wavelength band of 200 nm or more and less than 240 nm. The second transmission band is present within a wavelength band of more than 300 nm and less than 400 nm. The first restriction band is present over an entire wavelength range of at least 240 nm or more and 300 nm or less, and the first restriction band has an upper limit provided within a range of more than 300 nm and 380 nm or less.

Description

Claims

1. An ultraviolet light irradiation device comprising: a light source that emits ultraviolet light belonging to a wavelength band of 200 nm or more and less than 240 nm; andan optical filter disposed to allow the ultraviolet light to enter and including a dielectric multilayer film, wherein the optical filter has a transmission spectrum of zero-degree light including a first transmission band and a second transmission band that transmit the zero-degree light and a first restriction band that restricts transmission of the zero-degree light, the zero-degree light being the ultraviolet light incident on the optical filter with an incident angle of zero degrees,the first transmission band is present within the wavelength band of 200 nm or more and less than 240 nm,the second transmission band is present within a wavelength band of more than 300 nm and less than 400 nm, andthe first restriction band is present over an entire wavelength range of at least 240 nm or more and 300 nm or less, and the first restriction band has an upper limit provided within a range of more than 300 nm and 380 nm or less.

2. The ultraviolet light irradiation device according to claim 1, wherein the first restriction band is further present over an entire wavelength range of more than 300 nm and less than 310 nm, and the first restriction band has the upper limit provided within a range of 310 nm or more and 360 nm or less.

3. The ultraviolet light irradiation device according to claim 2, wherein the first restriction band is further present over an entire wavelength range of 310 nm or more and less than 320 nm.

4. The ultraviolet light irradiation device according to claim 1, wherein the second transmission band is further present over an entire wavelength range of 380 nm or more and less than 400 nm.

5. The ultraviolet light irradiation device according to claim 4, wherein the second transmission band is further present over an entire wavelength range of 360 nm or more and less than 380 nm.

6. The ultraviolet light irradiation device according to claim 5, wherein the second transmission band is further present over an entire wavelength range of 340 nm or more and less than 360 nm.

7. The ultraviolet light irradiation device according to claim 1, wherein the transmission spectrum of the zero-degree light further has a second restriction band that restricts transmission of the zero-degree light in a wavelength band of 200 nm or more and 210 nm or less.

8. The ultraviolet light irradiation device according to claim 2, wherein the transmission spectrum of the zero-degree light further has a second restriction band that restricts transmission of the zero-degree light in a wavelength band of 200 nm or more and 210 nm or less.

9. The ultraviolet light irradiation device according to claim 3, wherein the transmission spectrum of the zero-degree light further has a second restriction band that restricts transmission of the zero-degree light in a wavelength band of 200 nm or more and 210 nm or less.

10. The ultraviolet light irradiation device according to claim 4, wherein the transmission spectrum of the zero-degree light further has a second restriction band that restricts transmission of the zero-degree light in a wavelength band of 200 nm or more and 210 nm or less.

11. The ultraviolet light irradiation device according to claim 5, wherein the transmission spectrum of the zero-degree light further has a second restriction band that restricts transmission of the zero-degree light in a wavelength band of 200 nm or more and 210 nm or less.

12. The ultraviolet light irradiation device according to claim 6, wherein the transmission spectrum of the zero-degree light further has a second restriction band that restricts transmission of the zero-degree light in a wavelength band of 200 nm or more and 210 nm or less.

13. The ultraviolet light irradiation device according to claim 1, wherein the optical filter has a transmission spectrum of a 50-degree light being the ultraviolet light incident on the optical filter with an incident angle of 50 degrees, the transmission spectrum having a third restriction band that restricts transmission of the 50-degree light over an entire wavelength range of 240 nm or more and less than 280 nm.

14. The ultraviolet light irradiation device according to claim 1, wherein the dielectric multilayer film includes a laminate in which high refractive index layers and low refractive index layers are alternately laminated, andthe laminate may have a film thickness of 1.0 µm or more and 3.0 µm or less.

15. The ultraviolet light irradiation device according to claim 14, wherein the laminate has a film thickness of 1.0 µm or more and 2.0 µm or less.

16. The ultraviolet light irradiation device according to claim 14, wherein the laminate has HfO2 layers and SiO2 layers alternately laminated, andthe HfO2 layers that are all included in the laminate have a total thickness of 0.5 µm or more and less than 2.0 µm.

17. The ultraviolet light irradiation device according to claim 15, wherein the laminate has HfO2 layers and SiO2 layers alternately laminated, andthe HfO2 layers that are all included in the laminate have a total thickness of 0.5 µm or more and less than 2.0 µm.