Unique feedstocks for spherical powders and methods of manufacturing

Information

  • Patent Grant
  • 11717886
  • Patent Number
    11,717,886
  • Date Filed
    Tuesday, November 17, 2020
    3 years ago
  • Date Issued
    Tuesday, August 8, 2023
    a year ago
Abstract
Disclosed herein are embodiments of methods, devices, and assemblies for processing feedstock materials using microwave plasma processing. Specifically, the feedstock materials disclosed herein pertains to unique powder feedstocks such as Tantalum, Yttrium Stabilized Zirconia, Aluminum, water atomized alloys, Rhenium, Tungsten, and Molybdenum. Microwave plasma processing can be used to spheroidize and remove contaminants. Advantageously, microwave plasma processed feedstock can be used in various applications such as additive manufacturing or powdered metallurgy (PM) applications that require high powder flowability.
Description
BACKGROUND
Field

The present disclosure is generally directed in some embodiments towards producing spherical or spheroidal powder products from unique feedstock materials.


Description of the Related Art

An important aspect of preparing some forms of industrial powders is the spheroidization process, which transforms irregularly shaped or angular powders produced by conventional crushing methods, into spherical low-porosity particles. Spherical powders are homogenous in shape, denser, less porous, have a high and consistent flowability, and high tap density. Such powders exhibit superior properties in applications such as injection molding, thermal spray coatings, additive manufacturing, etc.


Conventional spheroidization methods employ thermal arc plasma described in U.S. Pat. No. 4,076,640 issued Feb. 28, 1978 and radio-frequency generated plasma described in U.S. Pat. No. 6,919,527 issued Jul. 19, 2005. However, these two methods present limitations inherent to the thermal non-uniformity of radio-frequency and thermal arc plasmas.


In the case of thermal arc plasma, an electric arc is produced between two electrodes generates a plasma within a plasma channel. The plasma is blown out of the plasma channel using plasma gas. Powder is injected from the side, either perpendicularly or at an angle, into the plasma plume, where it is melted by the high temperature of the plasma. Surface tension of the melt pulls it into a spherical shape, then it is cooled, solidified and is collected in filters. An issue with thermal arc plasma is that the electrodes used to ignite the plasma are exposed to the high temperature causing degradation of the electrodes, which contaminates the plasma plume and process material. In addition, thermal arc plasma plume inherently exhibit large temperature gradient. By injecting powder into the plasma plume from the side, not all powder particles are exposed to the same process temperature, resulting in a powder that is partially spheroidized, non-uniform, with non-homogeneous porosity.


In the case of radio-frequency inductively coupled plasma spheroidization, the plasma is produced by a varying magnetic field that induces an electric field in the plasma gas, which in turn drives the plasma processes such as ionization, excitation, etc. to sustain the plasma in cylindrical dielectric tube. Inductively coupled plasmas are known to have low coupling efficiency of the radio frequency energy into the plasma and a lower plasma temperature compared to arc and microwave generated plasmas. The magnetic field responsible for generating the plasma exhibits a non-uniform profile, which leads to a plasma with a large temperature gradient, where the plasma takes a donut-like shape that exhibiting the highest temperature at the edge of the plasma (close to the dielectric tube walls) and the lowest temperature in the center of the donut. In addition, there is a capacitive component created between the plasma and the radio frequency coils that are wrapped around the dielectric tube due to the RF voltage on the coils. This capacitive component creates a large electric field that drives ions from the plasma towards the dielectric inner walls, which in turn leads to arcing and dielectric tube degradation and process material contamination by the tube's material.


SUMMARY

Disclosed herein are embodiments for spheroidizing unique feedstock materials using microwave plasma processing. In one aspect, a method for producing a spheroidized powder from a feed material including Yttrium Stabilized Zirconia (YSZ) is provided. The method includes: introducing a feed material including YSZ particles into a microwave plasma torch; and melting and spheroidizing the particles within a plasma generated by the microwave plasma torch to form spheroidized powder.


In another aspect, a method for producing a spheroidized powder from a feed material including Aluminum (Al) or Al alloy is provided. The method includes: introducing a feed material including Al or Al alloy particles into a microwave plasma torch; and melting and spheroidizing the particles within a plasma generated by the microwave plasma torch to form spheroidized powder. In some embodiments, the Al or Al alloy includes Al 6000 series or Aluminum Silicon Magnesium (AlSiMg). The AlSiMg can be AlSi10Mg.


In another aspect, a method for producing a spheroidized powder from a feed material including water atomized alloy is provided. The method including: introducing a feed material including water atomized alloy into a microwave plasma torch; and melting and spheroidizing the particles within a plasma generated by the microwave plasma torch to form spheroidized powder. In some embodiments, the water atomized alloy includes metal injection molded (MIM) 17-4 Stainless Steel. In some embodiments, the water atomized alloy includes Inconel Alloy 625 (IN625).


In another aspect, a method for producing a spheroidized powder from a feed material including Tantalum (Ta) is provided. The method includes: introducing a feed material including Ta particles into a microwave plasma torch; and melting and spheroidizing the particles within a plasma generated by the microwave plasma torch to form spheroidized powder.


In another aspect, a method for producing a spheroidized powder from a feed material including Titanium Nitride (TiN) is provided. The method includes: introducing a feed material including TiN particles into a microwave plasma torch; and melting and spheroidizing the particles within a plasma generated by the microwave plasma torch to form spheroidized powder.


In another aspect, a method for producing a spheroidized powder from a feed material including Rhenium (Re) is provided. The method including: introducing a feed material including Re particles into a microwave plasma torch; and melting and spheroidizing the particles within a plasma generated by the microwave plasma torch to form spheroidized powder.


In another aspect, a method for producing a spheroidized powder from a feed material including Tungsten (W) is provided. The method including: introducing a feed material including W particles into a microwave plasma torch; and melting and spheroidizing the particles within a plasma generated by the microwave plasma torch to form spheroidized powder.


In another aspect, a method for producing a spheroidized powder from a feed material including Molybdenum (Mo) is provided. The method includes: introducing a feed material including Mo particles into a microwave plasma torch; and melting and spheroidizing the particles within a plasma generated by the microwave plasma torch to form spheroidized powder.


In various embodiments, the introducing the feed material into the microwave plasma torch can include introducing the feed material into an exhaust of the microwave plasma torch or into a plume of the microwave plasma torch.


In various embodiments, the collective average or median aspect ratio of the feed material may be between 5:1 to 20:1. In various embodiments, the method further includes sieving the feed material before introducing the feed material into the microwave plasma torch. In various embodiments, the spheroidized powder may have a medium sphericity of at least 0.75. In various embodiments, the spheroidized powder may have a medium sphericity of at least 0.91. In various embodiments, the spheroidized powder may have a particle size distribution of 15 to 45 microns. In various embodiments, the spheroidized powder may have a particle size distribution of 45 to 105 microns.


Further disclosed is a method of producing spheroidized powder as disclosed herein and a spheroidized powder as disclosed herein.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 illustrates an example embodiment of a method of producing spheroidal particles according to the present disclosure.



FIG. 2 illustrates an embodiment of a microwave plasma torch that can be used in the production of spheroidal powders, according to embodiments of the present disclosure.



FIGS. 3A-B illustrate embodiments of a microwave plasma torch that can be used in the production of spheroidal powders, according to a side feeding hopper embodiment of the present disclosure.





APPENDIX

This specification includes Appendix A provided herewith in 11 pages. Any suitable combination of features described in Appendix A can be implemented in combination with the subject matter described herein.


DETAILED DESCRIPTION

Disclosed herein are embodiments of methods, devices, and assemblies for spheroidization of feedstock materials using microwave plasma processing. The feedstocks disclosure herein are a number of metals and ceramics, each of which have their own critical, specialized, and unique requirements for the initial feedstock as well as the processing in a microwave plasma torch in order to achieve a desired spheroidization.


As disclosed herein, processing in a microwave plasma torch can include feeding the feedstock into a microwave plasma torch, a plasma plume of the microwave plasma torch, and/or an exhaust of the microwave plasma torch. The location may vary depending on the type of feedstock used. Further the feedstock can be selected based on different requirements. Examples of requirements are aspect ratio, particle size distribution (PSD), chemistry, density, diameter, sphericity, oxygenation, hardness, and ductility.


The feedstock can then be used as a feedstock for a microwave plasma process to form a final spheroidized powder, which can then be used in different processes, such as additive manufacturing processes. However, the particular feedstock materials disclosed herein are extremely difficult to process into a proper feedstock for microwave plasma processing.


In some embodiments, the powders may be pre-processed before they are introduced into the plasma process. For example, the powders may be sieved to remove large agglomerations and selected the desired size to be processed in the plasma. In some embodiments, the powders may be cleaned with water, surfactant, detergent, solvent or any other chemical such as acids to remove contamination. In some embodiments, the powders may be magnetically cleaned if they are contaminated with any magnetic material. In some embodiments, the powder can be pre-treated to de-oxidize it. In some embodiments, other elements or compounds can be added to compensate or modify the chemistry of the powder. In some embodiments, the powder can be de-dusted to remove fines. In some embodiments, no pre-processing may be performed.


In some embodiments, particle size distribution (PSD) is with a minimum diameter of 1 micrometers (μm) and a maximum diameter of 22 (or about 22) μm, or a minimum of 5 (or about 5) μm and a maximum of 15 (or about 15) μm, or a minimum of 15 (or about 15) μm and a maximum of 45 (or about 45) μm or a minimum of 22 (or about 22) μm and a maximum of 44 (or about 44) μm, or a minimum of 20 (or about 20) μm to a maximum of 63 (or about 63) μm, or a minimum of 44 (or about 44) μm and a maximum of 70 (or about 70) μm, or a minimum of 70 (or about 70) μm and a maximum of 106 (or about 106) μm, or a minimum of 105 (or about 105) μm to a maximum of 150 (or about 150) μm, or a minimum of 106 (or about 106) μm and a maximum of 300 (or about 300) μm. In some embodiments, the PSD can be expressed as the D50 of the particles in the feedstock. As will be appreciated, these upper and lower values are provided for illustrative purposes only, and alternative PSD values may be used in other embodiments.


In some embodiments, the powder feedstock can have be angular or have a high aspect ratio before plasma processing. In some embodiments, the average aspect ratio of the powder feedstock is 2:1 (or about 2:1), 3:1 (or about 3:1), 5:1 (or about 5:1), 10:1 (or about 10:1), 20:1 (or about 20:1), 100:1 (or about 100:1), or 200:1 (or about 200:1). In some embodiments, the average aspect ratio of the powder feedstock is greater than 1:1 (or about 1:1), 3:1 (or about 3:1), 5:1 (or about 5:1), greater 10:1 (or about 10:1), greater 20:1 (or about 20:1), greater 100:1 (or about 100:1), or greater 200:1 (or about 200:1). In some embodiments, the average aspect ratio of the powder feedstock is less than, 3:1 (or about 3:1), 5:1 (or about 5:1), greater 10:1 (or about 10:1), greater 20:1 (or about 20:1), greater 100:1 (or about 100:1), or greater 200:1 (or about 200:1).


Tantalum (Ta) Feedstock


Tantalum (Ta) or Ta alloy powder can be used in various applications. Applications of Ta or Ta alloy powder can benefit from a narrow particle size distribution and a high sphericity. It has been observed that microwave plasma processing of Ta or Ta alloy powder feedstock can yield a narrow particle size distribution and a high sphericity Ta or Ta alloy powder. Before plasma processing, the feedstock can be sieved to remove large agglomerations and selected the desired size to be processed in the plasma. Ta7300 is high purity Tantalum spherical powder that may be synthesized according to the embodiments herein for use in various applications including additive manufacturing. Ta has high electrical and thermal conductivity, biocompatibility and high corrosion resistance. In some embodiments, as an example, a Ta or TA alloy powder may comprise an apparent density of about 9 g/cc, a flow of about 7 s/50 g, a D10 of about 15 mm, a D50 of about 30 mm, and D90 of about 55 mm.


Yttrium Stabilized Zirconia (YSZ) Feedstock


Yttrium Stabilized Zirconia (YSZ) powder can be used in various applications. Applications of YSZ powder can benefit from a narrow particle size distribution and a high sphericity. It has been observed that microwave plasma processing of YSZ powder feedstock can yield a narrow particle size distribution and a high sphericity. Before plasma processing, the feedstock can be sieved to remove large agglomerations and selected the desired size to be processed in the plasma. In some embodiments, 8% YSZ may be synthesized, which is a high purity yttria stabilized zirconia spherical powder. In some embodiments, a microwave plasma treatment produces highly spherical powder with substantially no satellites. In some embodiments, YSZ powder synthesized according to the embodiments herein may comprise a composition about 8 mol % Y2O3 and about 92 mol % ZrO2, with particle sizes ranging from about 15 microns to about 45 microns. In some embodiments, as an example, the apparent density may be about 3.12 g/cc and the flow may be about 23 s/50 g


Titanium Nitride (TiN) Feedstock


Titanium Nitride (TiN) powder can be used in various applications. Applications of TiN powder can benefit from a narrow particle size distribution and a high sphericity. It has been observed that microwave plasma processing of TiN powder feedstock can yield a narrow particle size distribution and a high sphericity. Before plasma processing, the feedstock can be sieved to remove large agglomerations and selected the desired size to be processed in the plasma. In some embodiments, TiN powder may be synthesized with substantially no satellites, high Sphericity, high flowability, high bulk density, and low interstitials. In some embodiments, as an example, TiN powder synthesized according to the embodiments herein may comprise an apparent density of about 2.7 g/cc, a flow of about 31 s/50 s, a D10 of about 18 mm, a D50 of about 35 mm, and a D90 of about 52 mm.


Aluminum Feedstock


Aluminum (Al) or Al alloy powders can be used in various applications. Specifically, Al 6000 series and Aluminum Silicon Magnesium (AlSiMg) powder has been demonstrated to be useful in various applications. Applications of Al 6000 series or AlSiMg powder can benefit from a narrow particle size distribution and a high sphericity. It has been observed that microwave plasma processing of AlSiMg powder feedstock can yield a narrow particle size distribution and a high sphericity. Before plasma processing, the feedstock can be sieved to remove large agglomerations and selected the desired size to be processed in the plasma. AlSiMg powder can be AlSi10Mg powder which includes a Silicon content of about 9% to about 11%. AlSi10Mg is a lightweight Aluminum alloy designed specifically for use in Additive Manufacturing. This alloy has a high strength to weight ratio and excellent corrosion resistance. In some embodiments, a Al or Al alloy powders synthesized according to the embodiments herein may comprise a composition of about 9.0-11.0% Si, about 0.25-0.45% Mg, about 0.25% or less Fe, about 0.20% or less N, about 0.20% or less 0, about 0.15% or less Ti, about 0.10% or less Zn, about 0.10% or less Mn, and the balance Al. As an example, an Al or Al alloy powder according to the embodiments herein may comprise a particle size of about 20-63 microns, an apparent density of about 1.4 g/cc, and a flow of about 40 s/50 g.


Water Atomized Alloy Feedstock


Water atomized alloy powders can be used in various applications. Specifically, water atomized metal injection molded (MIM) 17-4 Stainless Steel powder and water atomized Inconel Alloy 625 (IN625) powder has been demonstrated to be useful is various applications. Applications of water atomized alloy powders can benefit from a narrow particle size distribution and a high sphericity. It has been observed that microwave plasma processing of water atomized MIM 17-4 Stainless Steel powder feedstock and water atomized IN625 powder feedstock can yield a narrow particle size distribution and a high sphericity. Before plasma processing, the feedstock can be sieved to remove large agglomerations and selected the desired size to be processed in the plasma. As an example, in some embodiments, a MIM 17-4 powder may comprise an apparent density of about 4.2·g/cc, a flow of about 17 s/50 g, a D10 of about 18 mm, a D50 of about 32 mm, and a D90 of about 56 mm. In some embodiments, a MIM 17-4 powder synthesized according to the embodiments herein may comprise about 17% Cr, about 4.5% Ni, about 4% Cu, about 0.30% of Nb and Ta combined, about 0.07% or less C, and the balance Fe.


As an example, in some embodiments, IN625 powder may comprise about 0.10% or less C, about 0.015% or less P, about 0.50% or less Si, about 0.50% or less Cu, about 0.40% Ti, about 0.40% Al, about 0.03% or less 0, about 3.15%-4.15% Ni and Ta combined, about 0.50% or less Mn, about 20.0%-23.0% Cr, about 8.00-10.00% Mo, about 1.00% or less Co, about 0.02% or less Ni, about 5.0% or less Fe, and the balance Nickel. As an example, in some embodiments, IN625 powder may comprise an apparent density of about 4.3 g/cc, a tap density of about 5 g/cc, a flow of about 15 s/50 g, a D10 of about 16-26 mm, a D50 of about 26-37 mm, and a D90 of about 37-49 mm.


Rhenium Feedstock


Rhenium (Re) or Re alloy powder can be used in various applications. Applications of Re or Re alloy powder can benefit from a narrow particle size distribution and a high sphericity. It has been observed that microwave plasma processing of Re or Re alloy powder feedstock can yield a narrow particle size distribution and a high sphericity Re or Re alloy powder. Before plasma processing, the feedstock can be sieved to remove large agglomerations and selected the desired size to be processed in the plasma. In some embodiments, the Re or Re alloy powder may comprise Re7500. As an example, in some embodiments, an Re or Re alloy powder may comprise over 99.9% Re, particle sizes between 20-63 microns, an apparent density of about 11.4 g/cc, a flow of about 4.3 s/50 g, a D10 of about 29 microns, a D50 of about 39 microns, and a D90 of about 55 microns.


Tungsten Feedstock


Tungsten (W) or W alloy powder can be used in various applications. Applications of W or W alloy powder can benefit from a narrow particle size distribution and a high sphericity. It has been observed that microwave plasma processing of W or W alloy powder feedstock can yield a narrow particle size distribution and a high sphericity W or W alloy powder. Before plasma processing, the feedstock can be sieved to remove large agglomerations and selected the desired size to be processed in the plasma. In some embodiments, the W or W alloy powder may comprise W7400. As an example, in some embodiments, a W or W alloy powder may comprise over 90.9% W, or preferably over 99.9% W. As an example, in some embodiments, a W or W alloy powder may comprise particle sizes between 20-63 microns, an apparent density of about 11.2 g/cc, a flow of about 5.16 s/50 g, a D10 of about 29 microns, a D50 of about 39 microns, and a D90 of about 55 microns.


Molybdenum Feedstock


Molybdenum (Mo) or Mo alloy powder can be used in various applications. Applications of Mo or Mo alloy powder can benefit from a narrow particle size distribution and a high sphericity. It has been observed that microwave plasma processing of Mo or Mo alloy powder feedstock can yield a narrow particle size distribution and a high sphericity Mo or Mo alloy powder. Before plasma processing, the feedstock can be sieved to remove large agglomerations and selected the desired size to be processed in the plasma. In some embodiments, the Mo or Mo alloy powder may comprise Mo4200. As an example, in some embodiments, the Mo or Mo alloy powder may comprise over 99.9% Mo. As an example, in some embodiments, the Mo or Mo alloy powder may comprise particle sizes between 15-45 microns, an apparent density of about 5.5 g/cc, and a flow of about 11.7 s/50 g.


Sphericity


In some embodiments, the final particles achieved by the plasma processing can be spherical or spheroidal, terms which can be used interchangeably. Advantageously, by using the critical and specific disclosure relevant to each of the different feedstocks disclosed, all of the feedstocks can be transformed into the spherical powders.


Embodiments of the present disclosure are directed to producing particles that are substantially spherical or spheroidal or have undergone significant spheroidization. In some embodiments, spherical, spheroidal or spheroidized particles refer to particles having a sphericity greater than a certain threshold. Particle sphericity can be calculated by calculating the surface area of a sphere As,ideal with a volume matching that of the particle, V using the following equation:







r
ideal

=



3

V


4

π


2








A

s
,
ideal


=

4

π






r
ideal
2






The idealized surface area can be compared with the measured surface area of the particle, As,actual:






sphericity
=



A

s
,
ideal



A

s
,
actual



.





In some embodiments, particles can have a sphericity of greater than 0.5, 0.6, 0.7, 0.75, 0.8, 0.9, 0.91, 0.95, or 0.99 (or greater than about 0.5, about 0.6, about 0.7, about 0.75, about 0.8, about 0.8, about 0.91, about 0.95, or about 0.99). In some embodiments, particles can have a sphericity of 0.75 or greater or 0.91 or greater (or about 0.75 or greater or about 0.91 or greater). In some embodiments, particles can have a sphericity of less than 0.5, 0.6, 0.7, 0.75, 0.8, 0.9, 0.91, 0.95, or 0.99 (or less than about 0.5, about 0.6, about 0.7, about 0.75, about 0.8, about 0.8, about 0.91, about 0.95, or about 0.99). In some embodiments, a particle is considered to be spherical, spheroidal or spheroidized if it has a sphericity at or above any of the aforementioned sphericity values, and in some preferred embodiments, a particle is considered to be spherical if its sphericity is at or about 0.75 or greater or at or about 0.91 or greater.


In some embodiments, a median sphericity of all particles within a given powder can be greater than 0.5, 0.6, 0.7, 0.75, 0.8, 0.9, 0.91, 0.95, or 0.99 (or greater than about 0.5, about 0.6, about 0.7, about 0.75, about 0.8, about 0.8, about 0.91, about 0.95, or about 0.99). In some embodiments, a median sphericity of all particles within a given powder can be less than 0.5, 0.6, 0.7, 0.75, 0.8, 0.9, 0.91, 0.95, or 0.99 (or less than about 0.5, about 0.6, about 0.7, about 0.75, about 0.8, about 0.8, about 0.91, about 0.95, or about 0.99). In some embodiments, a powder is considered to be spheroidized if all or a threshold percentage (as described by any of the fractions below) of the particles measured for the given powder have a median sphericity greater than or equal to any of the aforementioned sphericity values, and in some preferred embodiments, a powder is considered to be spheroidized if all or a threshold percentage of the particles have a median sphericity at or about 0.75 or greater or at or about 0.91 or greater.


In some embodiments, the fraction of particles within a powder that can be above a given sphericity threshold, such as described above, can be greater than 50%, 60%, 70%, 80%, 90%, 95%, or 99% (or greater than about 50%, about 60%, about 70%, about 80%, about 90%, about 95%, or about 99%). In some embodiments, the fraction of particles within a powder that can be above a given sphericity threshold, such as described above, can be less than 50%, 60%, 70%, 80%, 90%, 95%, or 99% (or less than about 50%, about 60%, about 70%, about 80%, about 90%, about 95%, or about 99%).


Particle size distribution and sphericity may be determined by any suitable known technique such as by SEM, optical microscopy, dynamic light scattering, laser diffraction, manual measurement of dimensions using an image analysis software, for example from about 15-30 measures per image over at least three images of the same material section or sample, and any other techniques.


Embodiments of the disclosed process can include feeding the powders using a powder feeder into a microwave generated plasma where the power density, gas flows and residence time are controlled. The process parameters such as power density, flow rates and residence time of the powder in the plasma can depend on the powder material's physical characteristics, such as the melting point and thermal conductivity. The power density can range from 20 W/cm3 to 500 W/cm3 (or about 20 W/cm3 to about 500 W/cm3). The total gas flows can range from 0.1 cfm to 50 cfm (or about 0.1 cfm to about 50 cfm), and the residence time can be tuned from 1 ms to 10 sec (or about 1 ms to about 10 sec). This range of process parameters will cover the required processing parameters for materials with a wide range of melting point and thermal conductivity.


In some embodiments, the ability to control oxygen can provide advantages. In some embodiments where the material is milled, the milling can be done in water. Different environmental gasses can be used for different applications. As an example, nitrogen gas can be used.


In some embodiments, the feedstock could be of various morphology such as angular powder, angular chips, irregular powder, and sponge powders. The feedstock can be processed to meet certain criteria for size, gas content, purity contamination and chemistry by processing such as but not limited to grinding, milling, cleaning, washing, drying and screening. The cleaning includes removing organic, ceramic, or other contaminants.


Microwave Plasma Processing


The process parameters can be optimized to obtain maximum spheroidization depending on the feedstock initial condition. For each feedstock characteristic, process parameters can be optimized for a particular outcome. U.S. Pat. Pub. No. 2018/0297122, U.S. Pat. No. 8,748,785 B2, and U.S. Pat. No. 9,932,673 B2 disclose certain processing techniques that can be used in the disclosed process, specifically for microwave plasma processing. Accordingly, U.S. Pat. Pub. No. 2018/0297122, U.S. Pat. No. 8,748,785 B2, and U.S. Pat. No. 9,932,673 B2 are incorporated by reference in its entirety and the techniques describes should be considered to be applicable to the feedstock described herein.


One aspect of the present disclosure involves a process of spheroidization using a microwave generated plasma. The powder feedstock is entrained in an inert and/or reducing gas environment and injected into the microwave plasma environment. Upon injection into a hot plasma (or plasma plume or exhaust), the feedstock is spheroidized and released into a chamber filled with an inert gas and directed into hermetically sealed drums where is it stored. This process can be carried out at atmospheric pressure, in a partial vacuum, or at a slightly higher pressure than atmospheric pressure. In alternative embodiments, the process can be carried out in a low, medium, or high vacuum environment. The process can run continuously and the drums are replaced as they fill up with spheroidized particles.


Cooling processing parameters include, but are not limited to, cooling gas flow rate, residence time of the spheroidized particles in the hot zone, and the composition or make of the cooling gas. For example, the cooling rate or quenching rate of the particles can be increased by increasing the rate of flow of the cooling gas. Residence time of the particles within the hot zone of the plasma can also be adjusted to provide control. That is, the length of time the particles are exposed to the plasma determines the extent of melting of the particle (i.e., surface of the particle melted as compared to the inner most portion or core of the particle). Consequently, the extent of melting effects the extent of cooling needed for solidification and thus it is a cooling process parameter. Residence time can be adjusted by adjusting such operating variables of particle injection rate and flow rate (and conditions, such as laminar flow or turbulent flow) within the hot zone. Equipment changes can also be used to adjust residence time. For example, residence time can be adjusted by changing the cross-sectional area of the hot zone.


Another cooling processing parameter that can be varied or controlled is the composition of the cooling gas. Certain cooling gases are more thermally conductive than others. For example helium is considered to be a highly thermally conductive gas. The higher the thermal conductivity of the cooling gas, the faster the spheroidized particles can be cooled/quenched. By controlling the composition of the cooling gas (e.g., controlling the quantity or ratio of high thermally conductive gasses to lesser thermally conductive gases) the cooling rate can be controlled.


In one exemplary embodiment, inert gas is continually purged surrounding a powdered feed to remove oxygen within a powder-feed hopper. A continuous volume of powder feed is then entrained within an inert gas and fed into the microwave generated plasma for dehydrogenation or for composition/maintaining purity of the spheroidized particles. In one example, the microwave generated plasma may be generated using a microwave plasma torch, as described in U.S. Patent Publication No. US 2013/0270261, and/or U.S. Pat. Nos. 8,748,785, 9,023,259, 9,259,785, and 9,206,085, each of which is hereby incorporated by reference in its entirety. In some embodiments, the particles are exposed to a uniform temperature profile at between 4,000 and 8,000 K within the microwave generated plasma. In some embodiments, the particles are exposed to a uniform temperature profile at between 3,000 and 8,000 K within the microwave generated plasma. In some embodiments, the microwave generated plasma may be generated by using an argon and hydrogen (H2) mixture. In some embodiments, the microwave generated plasma may be generated by using a nitrogen (N2) gas. At times, the microwave generated plasma using N2 gas may be larger, more stable, and more laminar than the microwave generated plasma using an argon and H2 mixture which can allow for a higher plasma temperature to be achieved. For certain feedstocks, a higher temperature plasma can be beneficial due to their high melting temperature. For example, YSZ, W, and Mo have high melting temperatures and therefore can benefit from a higher temperature plasma. For these feedstocks, it could be advantageous to use a microwave generated plasma using N2 gas.


Within the plasma torch, the powder particles are rapidly heated and melted. As the particles within the process are entrained within an inert gas, such as argon, generally contact between particles is minimal, greatly reducing the occurrence of particle agglomeration. The need for post-process sifting is thus greatly reduced or eliminated, and the resulting particle size distribution could be practically the same as the particle size distribution of the input feed materials. In exemplary embodiments, the particle size distribution of the feed materials is maintained in the end products.


Within the plasma, plasma plume, or exhaust, the materials are inherently spheroidized due to liquid surface tension. As the microwave generated plasma exhibits a substantially uniform temperature profile, more than 90% spheroidization of particles could be achieved (e.g., 91%, 93%, 95%, 97%, 99%, 100%). After exiting the plasma, the particles are cooled before entering collection bins. When the collection bins fill, they can be removed and replaced with an empty bin as needed without stopping the process.


In one exemplary embodiment, inert gas is continually purged surrounding a feed to remove oxygen within a powder-feed hopper. A continuous volume of powder feed is then entrained within an inert gas and fed into the microwave generated plasma for composition/maintaining purity of the spheroidized particles. In one example, the microwave generated plasma may be generated using a microwave plasma torch, as described in U.S. Patent Publication No. US 2013/0270261, and/or U.S. Pat. No. 8,748,785, each of which is hereby incorporated by reference in its entirety. In some embodiments, the particles are exposed to a uniform temperature profile at between 4,000 and 8,000 K within the microwave generated plasma. Within the plasma torch, the powder particles are rapidly heated and melted. As the particles within the process are entrained within an inert gas, such as argon, generally contact between particles is minimal, greatly reducing the occurrence of particle agglomeration. The need for post-process sifting is thus greatly reduced or eliminated, and the resulting particle size distribution could be practically the same as the particle size distribution of the input feed materials. In exemplary embodiments, the particle size distribution of the feed materials is maintained in the end products.


Within the plasma, the feedstock is inherently spheroidized due to liquid surface tension. As the microwave generated plasma exhibits a substantially uniform temperature profile, more than 90% spheroidization of particles could be achieved (e.g., 91%, 93%, 95%, 97%, 99%, 100%). In embodiments, both spheroidization and tailoring (e.g., changing, manipulating, controlling) microstructure are addressed or, in some instances, partially controlled, by treating with the microwave generated plasma. After exiting the plasma, the particles are cooled before entering collection bins. When the collection bins fill, they can be removed and replaced with an empty bin as needed without stopping the process.



FIG. 1 is a flow chart illustrating an exemplary method (250) for producing spherical powders, according to an embodiment of the present disclosure. In this embodiment, the process (250) begins by introducing a feed material into a plasma torch (255). In some embodiments, the plasma torch is a microwave generated plasma torch or an RF plasma torch. Within the plasma torch, the feed materials are exposed to a plasma causing the materials to melt, as described above (260). The melted materials are spheroidized by surface tension, as discussed above (260b). After exiting the plasma, the products cool and solidify, locking in the spherical shape and are then collected (265).


As discussed above, the plasma torch can be a microwave generated plasma or an RF plasma torch. In one example embodiment, an AT-1200 rotating powder feeder (available from Thermach Inc.) allows a good control of the feed rate of the powder. In an alternative embodiment, the powder can be fed into the plasma using other suitable means, such as a fluidized bed feeder. The feed materials may be introduced at a constant rate, and the rate may be adjusted such that particles do not agglomerate during subsequent processing steps. In another exemplary embodiment, the feed materials to be processed are first sifted and classified according to their diameters, with a minimum diameter of 1 micrometers (μm) and a maximum diameter of 22 μm, or a minimum of 5 μm and a maximum of 15 μm, or a minimum of 15 μm and a maximum of 45 μm or a minimum of 22 μm and a maximum of 44 μm, or a minimum of 20 μm to a maximum of 63 μm, or a minimum of 44 μm and a maximum of 70 μm, or a minimum of 70 μm and a maximum of 106 μm, or a minimum of 105 μm to a maximum of 150 μm, or a minimum of 106 μm and a maximum of 300 μm. As will be appreciated, these upper and lower values are provided for illustrative purposes only, and alternative size distribution values may be used in other embodiments. This eliminates recirculation of light particles above the hot zone of the plasma and also ensures that the process energy present in the plasma is sufficient to melt the particles without vaporization. Pre-screening allows efficient allocation of microwave power necessary to melt the particles without vaporizing material.


In some embodiments, the environment and/or sealing requirements of the bins are carefully controlled. That is, to prevent contamination or potential oxidation of the powders, the environment and or seals of the bins are tailored to the application. In one embodiment, the bins are under a vacuum. In one embodiment, the bins are hermetically sealed after being filled with powder generated in accordance with the present technology. In one embodiment, the bins are back filled with an inert gas, such as, for example argon. Because of the continuous nature of the process, once a bin is filled, it can be removed and replaced with an empty bin as needed without stopping the plasma process.



FIG. 2 illustrates an exemplary microwave plasma torch that can be used in the production of spheroidal powders, according to embodiments of the present disclosure. As discussed above, feed materials 9, 10 can be introduced into a microwave plasma torch 3, which sustains a microwave generated plasma 11. In one example embodiment, an entrainment gas flow and a sheath flow (downward arrows) may be injected through inlets 5 to create flow conditions within the plasma torch prior to ignition of the plasma 11 via microwave radiation source 1. In some embodiments, the entrainment flow and sheath flow are both axis-symmetric and laminar, while in other embodiments the gas flows are swirling. The feed materials 9 are introduced axially into the microwave plasma torch, where they are entrained by a gas flow that directs the materials toward the plasma. As discussed above, the gas flows can consist of a noble gas column of the periodic table, such as helium, neon, argon, etc. Within the microwave generated plasma, the feed materials are melted in order to spheroidize the materials. Inlets 5 can be used to introduce process gases to entrain and accelerate particles 9, 10 along axis 12 towards plasma 11. First, particles 9 are accelerated by entrainment using a core laminar gas flow (upper set of arrows) created through an annular gap within the plasma torch. A second laminar flow (lower set of arrows) can be created through a second annular gap to provide laminar sheathing for the inside wall of dielectric torch 3 to protect it from melting due to heat radiation 6 from plasma 11. In exemplary embodiments, the laminar flows direct particles 9, 10 toward the plasma 11 along a path as close as possible to axis 12, exposing them to a substantially uniform temperature within the plasma. In some embodiments, suitable flow conditions are present to keep particles 10 from reaching the inner wall of the plasma torch 3 where plasma attachment could take place. Particles 9, 10 are guided by the gas flows towards microwave plasma 11 were each undergoes homogeneous thermal treatment. Various parameters of the microwave generated plasma, as well as particle parameters, may be adjusted in order to achieve desired results. These parameters may include microwave power, feed material size, feed material insertion rate, gas flow rates, plasma temperature, residence time and cooling rates. In some embodiments, the cooling or quenching rate is not less than 10+3 degrees C./sec upon exiting plasma 11. As discussed above, in this particular embodiment, the gas flows are laminar; however, in alternative embodiments, swirl flows or turbulent flows may be used to direct the feed materials toward the plasma.



FIGS. 3A-B illustrates an exemplary microwave plasma torch that includes a side feeding hopper rather than the top feeding hopper shown in the embodiment of FIG. 2, thus allowing for downstream feeding. Thus, in this implementation the feedstock is injected after the microwave plasma torch applicator for processing in the “plume” or “exhaust” of the microwave plasma torch. Thus, the plasma of the microwave plasma torch is engaged at the exit end of the plasma torch to allow downstream feeding of the feedstock, as opposed to the top-feeding (or upstream feeding) discussed with respect to FIG. 2. This downstream feeding can advantageously extend the lifetime of the torch as the hot zone is preserved indefinitely from any material deposits on the walls of the hot zone liner. Furthermore, it allows engaging the plasma plume downstream at temperature suitable for optimal melting of powders through precise targeting of temperature level and residence time. For example, there is the ability to dial the length of the plume using microwave powder, gas flows, and pressure in the quenching vessel that contains the plasma plume.


Generally, the downstream spheroidization method can utilize two main hardware configurations to establish a stable plasma plume which are: annular torch, such as described in U.S. Pat. Pub. No. 2018/0297122, or swirl torches described in U.S. Pat. No. 8,748,785 B2 and U.S. Pat. No. 9,932,673 B2. Both FIG. 3A and FIG. 3B show embodiments of a method that can be implemented with either an annular torch or a swirl torch. A feed system close-coupled with the plasma plume at the exit of the plasma torch is used to feed powder axisymmetrically to preserve process homogeneity. Other feeding configurations may include one or several individual feeding nozzles surrounding the plasma plume. The feedstock powder can enter the plasma from any direction and can be fed in 360° around the plasma. The feedstock powder can enter the plasma at a specific position along the length of the plasma plume where a specific temperature has been measured and a residence time estimated for sufficient melting of the particles. The melted particles exit the plasma into a sealed chamber where they are quenched then collected.


The feed materials 314 can be introduced into a microwave plasma torch 302. A hopper 306 can be used to store the feed material 314 before feeding the feed material 314 into the microwave plasma torch 302, plume, or exhaust. The feed material 314 can be injected at any angle to the longitudinal direction of the plasma torch 302. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, or 55 degrees. In some embodiments, the feedstock can be injected an angle of greater than 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, or 55 degrees. In some embodiments, the feedstock can be injected an angle of less than 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, or 55 degrees. In alternative embodiments, the feedstock can be injected along the longitudinal axis of the plasma torch. The microwave radiation can be brought into the plasma torch through a waveguide 304. The feed material 314 is fed into a plasma chamber 310 and is placed into contact with the plasma generated by the plasma torch 302. When in contact with the plasma, plasma plume, or plasma exhaust, the feed material melts. While still in the plasma chamber 310, the feed material 314 cools and solidifies before being collected into a container 312. Alternatively, the feed material 314 can exit the plasma chamber 310 while still in a melted phase and cool and solidify outside the plasma chamber. In some embodiments, a quenching chamber may be used, which may or may not use positive pressure. While described separately from FIG. 2, the embodiments of FIGS. 3A-B are understood to use similar features and conditions to the embodiment of FIG. 2.


In some embodiments, implementation of the downstream injection method may use a downstream swirl, extended spheroidization, or quenching. A downstream swirl refers to an additional swirl component that can be introduced downstream from the plasma torch to keep the powder from the walls of the tube. An extended spheroidization refers to an extended plasma chamber to give the powder longer residence time. In some implementations, it may not use a downstream swirl, extended spheroidization, or quenching. In some embodiments, it may use one of a downstream swirl, extended spheroidization, or quenching. In some embodiments, it may use two of a downstream swirl, extended spheroidization, or quenching.


Injection of powder from below may results in the reduction or elimination of plasma-tube coating in the microwave region. When the coating becomes too substantial, the microwave energy is shielded from entering the plasma hot zone and the plasma coupling is reduced. At times, the plasma may even extinguish and become unstable. Decrease of plasma intensity means decreases in spheroidization level of the powder. Thus, by feeding feedstock below the microwave region and engaging the plasma plume at the exit of the plasma torch, coating in this region is eliminated and the microwave powder to plasma coupling remains constant through the process allowing adequate spheroidization.


Thus, advantageously the downstream approach may allow for the method to run for long durations as the coating issue is reduced. Further, the downstream approach allows for the ability to inject more powder as there is no need to minimize coating.


From the foregoing description, it will be appreciated that inventive processing methods for converting unique feedstocks to spheroidized powder are disclosed. While several components, techniques and aspects have been described with a certain degree of particularity, it is manifest that many changes can be made in the specific designs, constructions and methodology herein above described without departing from the spirit and scope of this disclosure.


Certain features that are described in this disclosure in the context of separate implementations can also be implemented in combination in a single implementation. Conversely, various features that are described in the context of a single implementation can also be implemented in multiple implementations separately or in any suitable subcombination. Moreover, although features may be described above as acting in certain combinations, one or more features from a claimed combination can, in some cases, be excised from the combination, and the combination may be claimed as any subcombination or variation of any subcombination.


Moreover, while methods may be depicted in the drawings or described in the specification in a particular order, such methods need not be performed in the particular order shown or in sequential order, and that all methods need not be performed, to achieve desirable results. Other methods that are not depicted or described can be incorporated in the example methods and processes. For example, one or more additional methods can be performed before, after, simultaneously, or between any of the described methods. Further, the methods may be rearranged or reordered in other implementations. Also, the separation of various system components in the implementations described above should not be understood as requiring such separation in all implementations, and it should be understood that the described components and systems can generally be integrated together in a single product or packaged into multiple products. Additionally, other implementations are within the scope of this disclosure.


Conditional language, such as “can,” “could,” “might,” or “may,” unless specifically stated otherwise, or otherwise understood within the context as used, is generally intended to convey that certain embodiments include or do not include, certain features, elements, and/or steps. Thus, such conditional language is not generally intended to imply that features, elements, and/or steps are in any way required for one or more embodiments.


Conjunctive language such as the phrase “at least one of X, Y, and Z,” unless specifically stated otherwise, is otherwise understood with the context as used in general to convey that an item, term, etc. may be either X, Y, or Z. Thus, such conjunctive language is not generally intended to imply that certain embodiments require the presence of at least one of X, at least one of Y, and at least one of Z.


Language of degree used herein, such as the terms “approximately,” “about,” “generally,” and “substantially” as used herein represent a value, amount, or characteristic close to the stated value, amount, or characteristic that still performs a desired function or achieves a desired result. For example, the terms “approximately”, “about”, “generally,” and “substantially” may refer to an amount that is within less than or equal to 10% of, within less than or equal to 5% of, within less than or equal to 1% of, within less than or equal to 0.1% of, and within less than or equal to 0.01% of the stated amount. If the stated amount is 0 (e.g., none, having no), the above recited ranges can be specific ranges, and not within a particular % of the value. For example, within less than or equal to 10 wt./vol. % of, within less than or equal to 5 wt./vol. % of, within less than or equal to 1 wt./vol. % of, within less than or equal to 0.1 wt./vol. % of, and within less than or equal to 0.01 wt./vol. % of the stated amount.


The disclosure herein of any particular feature, aspect, method, property, characteristic, quality, attribute, element, or the like in connection with various embodiments can be used in all other embodiments set forth herein. Additionally, it will be recognized that any methods described herein may be practiced using any device suitable for performing the recited steps.


While a number of embodiments and variations thereof have been described in detail, other modifications and methods of using the same will be apparent to those of skill in the art. Accordingly, it should be understood that various applications, modifications, materials, and substitutions can be made of equivalents without departing from the unique and inventive disclosure herein or the scope of the claims.

Claims
  • 1. A method for producing a spheroidized powder from a feed material comprising Tungsten (W), the method comprising: introducing a W powder feed material into a microwave plasma torch via a powder feeder downstream of an applicator of the microwave plasma torch; andmelting and spheroidizing the feed material within a plasma generated by the microwave plasma torch to form spheroidized powder,wherein the spheroidized powder has a minimum particle size of 20 microns and a maximum particle size of 63 microns, with a D10 of at least 20 microns and a D90 of at most 55 microns.
  • 2. The method of claim 1, wherein the introducing the feed material into the microwave plasma torch comprises introducing the powder feed material into an exhaust of the microwave plasma torch or into a plume of the microwave plasma torch.
  • 3. The method of claim 1, wherein the spheroidized powder has a median sphericity of at least 0.75.
  • 4. The method of claim 1, wherein the spheroidized powder has a median sphericity of at least 0.91.
  • 5. The method of claim 1, wherein the spheroidized powder has a median sphericity of at least 0.99.
  • 6. The method of claim 1, wherein the spheroidized powder comprises W or W alloy powder.
  • 7. The method of claim 1, wherein the spheroidized powder comprises W powder having over 90.9% W by weight.
  • 8. The method of claim 1, wherein the spheroidized powder comprises W powder having over 99.9% W by weight.
  • 9. The method of claim 1, wherein the spheroidized powder comprises W alloy powder having over 90.9% W by weight.
  • 10. The method of claim 1, further comprising sieving the powder feed material before introducing the powder feed material into the microwave plasma torch.
  • 11. The method of claim 1, wherein the powder feed material comprises angular powder, an irregular powder, or a sponge powder.
  • 12. The method of claim 1, further comprising cleaning the powder feed material with water, surfactant, detergent, or solvent prior to introducing the powder feed material into the microwave plasma torch.
  • 13. The method of claim 1, further comprising deoxidizing the powder feed material prior to introducing the powder feed material into the microwave plasma torch.
REFERENCE TO RELATED APPLICATIONS

This application claims the priority benefit under 35 U.S.C. § 119(e) of U.S. Provisional Application No. 62/937,054, filed Nov. 18, 2019, the entire disclosure of which is incorporated herein by reference.

US Referenced Citations (487)
Number Name Date Kind
1699205 Podszus et al. Jul 1925 A
2892215 Naeser et al. Jun 1959 A
3290723 Jacques et al. Dec 1966 A
3293334 Bylund et al. Dec 1966 A
3434831 Knopp et al. Mar 1969 A
3466165 Rhys et al. Sep 1969 A
RE26879 Kelso May 1970 E
3652259 Knopp Mar 1972 A
3802816 Kaufmann Apr 1974 A
3845344 Rainer Oct 1974 A
3909241 Cheney et al. Sep 1975 A
3966374 Honnorat et al. Jun 1976 A
3974245 Cheney et al. Aug 1976 A
4076640 Forgensi et al. Feb 1978 A
4177026 Honnorat et al. Dec 1979 A
4212837 Oguchi et al. Jul 1980 A
4221554 Oguchi et al. Sep 1980 A
4221775 Anno Sep 1980 A
4423303 Hirose et al. Dec 1983 A
4431449 Dillon et al. Feb 1984 A
4439410 Santen et al. Mar 1984 A
4544404 Yolton et al. Oct 1985 A
4569823 Westin Feb 1986 A
4599880 Stepanenko et al. Jul 1986 A
4611108 Leprince et al. Sep 1986 A
4670047 Kopatz Jun 1987 A
4692584 Caneer, Jr. Sep 1987 A
4705560 Kemp, Jr. et al. Nov 1987 A
4711660 Kemp, Jr. et al. Dec 1987 A
4711661 Kemp, Jr. et al. Dec 1987 A
4714587 Eylon et al. Dec 1987 A
4731110 Kopatz et al. Mar 1988 A
4731111 Kopatz et al. Mar 1988 A
4772315 Johnson et al. Sep 1988 A
4778515 Kemp, Jr. et al. Oct 1988 A
4780131 Kemp, Jr. et al. Oct 1988 A
4783216 Kemp, Jr. et al. Nov 1988 A
4783218 Kemp, Jr. et al. Nov 1988 A
4787934 Johnson et al. Nov 1988 A
4802915 Kopatz et al. Feb 1989 A
4836850 Kemp, Jr. et al. Jun 1989 A
4859237 Johnson et al. Aug 1989 A
4923509 Kemp, Jr. et al. May 1990 A
4943322 Kemp, Jr. et al. Jul 1990 A
4944797 Kemp et al. Jul 1990 A
4952389 Szymanski et al. Aug 1990 A
5041713 Weidman Aug 1991 A
5095048 Takahashi et al. Mar 1992 A
5114471 Johnson et al. May 1992 A
5131992 Church Jul 1992 A
5200595 Boulos et al. Apr 1993 A
5290507 Runkle Mar 1994 A
5292370 Tsai et al. Mar 1994 A
5376475 Ovshinsky et al. Dec 1994 A
5411592 Ovshinsky et al. May 1995 A
5431967 Manthiram et al. Jul 1995 A
5518831 Tou et al. May 1996 A
5676919 Kawamura et al. Oct 1997 A
5750013 Lin May 1998 A
5776323 Kobashi Jul 1998 A
5958361 Laine et al. Sep 1999 A
5980977 Deng et al. Nov 1999 A
5989648 Phillips Nov 1999 A
6027585 Patterson et al. Feb 2000 A
6221125 Soda et al. Apr 2001 B1
6261484 Phillips et al. Jul 2001 B1
6274110 Kim et al. Aug 2001 B1
6329628 Kuo et al. Dec 2001 B1
6334882 Aslund Jan 2002 B1
6376027 Lee et al. Apr 2002 B1
6409851 Sethuram et al. Jun 2002 B1
6428600 Flurschutz et al. Aug 2002 B1
6543380 Sung-Spritzl Apr 2003 B1
6551377 Leonhardt Apr 2003 B1
6569397 Yadav et al. May 2003 B1
6579573 Strutt et al. Jun 2003 B2
6589311 Han et al. Jul 2003 B1
6652822 Phillips et al. Nov 2003 B2
6676728 Han et al. Jan 2004 B2
6689192 Phillips Feb 2004 B1
6752979 Talbot et al. Jun 2004 B1
6755886 Phillips et al. Jun 2004 B2
6780219 Singh et al. Aug 2004 B2
6793849 Gruen et al. Sep 2004 B1
6805822 Takei et al. Oct 2004 B2
6838072 Kong et al. Jan 2005 B1
6869550 Dorfman et al. Mar 2005 B2
6902745 Lee et al. Jun 2005 B2
6919257 Gealy et al. Jul 2005 B2
6919527 Boulos et al. Jul 2005 B2
6989529 Wiseman Jan 2006 B2
7066980 Akimoto et al. Jun 2006 B2
7091441 Kuo Aug 2006 B1
7108733 Enokido Sep 2006 B2
7125537 Liao et al. Oct 2006 B2
7125822 Nakano et al. Oct 2006 B2
7175786 Celikkaya et al. Feb 2007 B2
7182929 Singhal et al. Feb 2007 B1
7220398 Sutorik et al. May 2007 B2
7235118 Bouaricha et al. Jun 2007 B2
7285194 Uno et al. Oct 2007 B2
7285307 Hohenthanner et al. Oct 2007 B2
7297310 Peng et al. Nov 2007 B1
7297892 Kelley et al. Nov 2007 B2
7344776 Kollmann et al. Mar 2008 B2
7357910 Phillips et al. Apr 2008 B2
7368130 Kim et al. May 2008 B2
7374704 Che et al. May 2008 B2
7375303 Twarog May 2008 B2
7431750 Liao et al. Oct 2008 B2
7442271 Asmussen et al. Oct 2008 B2
7491468 Okada et al. Feb 2009 B2
7517513 Sarkas et al. Apr 2009 B2
7524353 Johnson, Jr. et al. Apr 2009 B2
7534296 Swain et al. May 2009 B2
7572315 Boulos et al. Aug 2009 B2
7622211 Vyas et al. Nov 2009 B2
7629553 Fanson et al. Dec 2009 B2
7700152 Laine et al. Apr 2010 B2
7776303 Hung et al. Aug 2010 B2
7806077 Lee et al. Oct 2010 B2
7828999 Yubuta et al. Nov 2010 B2
7901658 Weppner et al. Mar 2011 B2
7931836 Xie et al. Apr 2011 B2
7939141 Matthews et al. May 2011 B2
8007691 Sawaki et al. Aug 2011 B2
8043405 Johnson, Jr. et al. Oct 2011 B2
8092941 Weppner et al. Jan 2012 B2
8101061 Suh et al. Jan 2012 B2
8168128 Seeley et al. May 2012 B2
8178240 Wang et al. May 2012 B2
8192865 Buiel et al. Jun 2012 B2
8193291 Zhang Jun 2012 B2
8211388 Woodfield et al. Jul 2012 B2
8268230 Cherepy et al. Sep 2012 B2
8283275 Heo et al. Oct 2012 B2
8303926 Luhrs et al. Nov 2012 B1
8329090 Hollingsworth et al. Dec 2012 B2
8329257 Larouche et al. Dec 2012 B2
8338323 Takasu et al. Dec 2012 B2
8389160 Venkatachalam et al. Mar 2013 B2
8420043 Gamo et al. Apr 2013 B2
8439998 Ito et al. May 2013 B2
8449950 Shang et al. May 2013 B2
8478785 Jamjoom et al. Jul 2013 B2
8492303 Bulan et al. Jul 2013 B2
8529996 Bocian et al. Sep 2013 B2
8592767 Rappe et al. Nov 2013 B2
8597722 Albano et al. Dec 2013 B2
8623555 Kang et al. Jan 2014 B2
8658317 Weppner et al. Feb 2014 B2
8685593 Dadheech et al. Apr 2014 B2
8728680 Mikhail et al. May 2014 B2
8735022 Schlag et al. May 2014 B2
8748785 Jordan et al. Jun 2014 B2
8758957 Dadheech et al. Jun 2014 B2
8784706 Shevchenko et al. Jul 2014 B2
8822000 Kumagai et al. Sep 2014 B2
8840701 Borland et al. Sep 2014 B2
8877119 Jordan et al. Nov 2014 B2
8911529 Withers et al. Dec 2014 B2
8919428 Cola et al. Dec 2014 B2
8945431 Schulz et al. Feb 2015 B2
8951496 Hadidi et al. Feb 2015 B2
8956785 Dadheech et al. Feb 2015 B2
8968587 Shin et al. Mar 2015 B2
8968669 Chen Mar 2015 B2
8980485 Lanning et al. Mar 2015 B2
8999440 Zenasni et al. Apr 2015 B2
9023259 Hadidi et al. May 2015 B2
9065141 Merzougui et al. Jun 2015 B2
9067264 Moxson et al. Jun 2015 B2
9079778 Kelley et al. Jul 2015 B2
9085490 Taylor et al. Jul 2015 B2
9101982 Aslund Aug 2015 B2
9136569 Song et al. Sep 2015 B2
9150422 Nakayama et al. Oct 2015 B2
9193133 Shin et al. Nov 2015 B2
9196901 Se-Hee et al. Nov 2015 B2
9196905 Tzeng et al. Nov 2015 B2
9206085 Hadidi et al. Dec 2015 B2
9242224 Redjdal et al. Jan 2016 B2
9259785 Hadidi et al. Feb 2016 B2
9293302 Risby et al. Mar 2016 B2
9321071 Jordan et al. Apr 2016 B2
9322081 McHugh et al. Apr 2016 B2
9352278 Spatz et al. May 2016 B2
9356281 Verbrugge et al. May 2016 B2
9368772 Chen et al. Jun 2016 B1
9412998 Rojeski et al. Aug 2016 B2
9421612 Fang et al. Aug 2016 B2
9425463 Hsu et al. Aug 2016 B2
9463435 Schulz et al. Oct 2016 B2
9520600 Dadheech et al. Dec 2016 B2
9624565 Lee et al. Apr 2017 B2
9630162 Sunkara et al. Apr 2017 B1
9643891 Hadidi et al. May 2017 B2
9700877 Kim et al. Jul 2017 B2
9705136 Rojeski Jul 2017 B2
9718131 Boulos et al. Aug 2017 B2
9735427 Zhang Aug 2017 B2
9738788 Gross et al. Aug 2017 B1
9751129 Boulos et al. Sep 2017 B2
9768033 Ranjan et al. Sep 2017 B2
9776378 Choi Oct 2017 B2
9782791 Redjdal et al. Oct 2017 B2
9782828 Wilkinson Oct 2017 B2
9796019 She et al. Oct 2017 B2
9796020 Aslund Oct 2017 B2
9831503 Sopchak Nov 2017 B2
9871248 Rayner et al. Jan 2018 B2
9879344 Lee et al. Jan 2018 B2
9899674 Hirai et al. Feb 2018 B2
9917299 Behan et al. Mar 2018 B2
9932673 Jordan et al. Apr 2018 B2
9945034 Yao et al. Apr 2018 B2
9947926 Kim et al. Apr 2018 B2
9981284 Guo et al. May 2018 B2
9991458 Rosenman et al. Jun 2018 B2
9999922 Struve Jun 2018 B1
10011491 Lee et al. Jul 2018 B2
10050303 Anandan et al. Aug 2018 B2
10057986 Prud'Homme et al. Aug 2018 B2
10065240 Chen Sep 2018 B2
10079392 Huang et al. Sep 2018 B2
10116000 Federici et al. Oct 2018 B1
10130994 Fang et al. Nov 2018 B2
10167556 Ruzic et al. Jan 2019 B2
10170753 Ren et al. Jan 2019 B2
10193142 Rojeski Jan 2019 B2
10244614 Foret Mar 2019 B2
10319537 Claussen et al. Jun 2019 B2
10333183 Sloop Jun 2019 B2
10350680 Yamamoto et al. Jul 2019 B2
10411253 Tzeng et al. Sep 2019 B2
10439206 Behan et al. Oct 2019 B2
10442000 Fukada et al. Oct 2019 B2
10461298 Herle Oct 2019 B2
10477665 Hadidi Nov 2019 B2
10493524 She et al. Dec 2019 B2
10522300 Yang Dec 2019 B2
10526684 Ekman et al. Jan 2020 B2
10529486 Nishisaka Jan 2020 B2
10543534 Hadidi et al. Jan 2020 B2
10593985 Sastry et al. Mar 2020 B2
10610929 Fang et al. Apr 2020 B2
10637029 Gotlib Vainshtein et al. Apr 2020 B2
10638592 Foret Apr 2020 B2
10639712 Barnes et al. May 2020 B2
10647824 Hwang et al. May 2020 B2
10655206 Moon et al. May 2020 B2
10665890 Kang et al. May 2020 B2
10668566 Smathers et al. Jun 2020 B2
10669437 Cox et al. Jun 2020 B2
10688564 Boulos et al. Jun 2020 B2
10707477 Sastry et al. Jul 2020 B2
10717150 Aleksandrov et al. Jul 2020 B2
10727477 Kim et al. Jul 2020 B2
10741845 Yushin et al. Aug 2020 B2
10744590 Maier et al. Aug 2020 B2
10756334 Stowell et al. Aug 2020 B2
10766787 Sunkara et al. Sep 2020 B1
10777804 Sastry et al. Sep 2020 B2
10858255 Koziol et al. Dec 2020 B2
10858500 Chen et al. Dec 2020 B2
10892477 Choi et al. Jan 2021 B2
10930473 Paukner et al. Feb 2021 B2
10943744 Sungail et al. Mar 2021 B2
10944093 Paz et al. Mar 2021 B2
10964938 Rojeski Mar 2021 B2
10987735 Hadidi et al. Apr 2021 B2
10998552 Lanning et al. May 2021 B2
11031641 Gupta et al. Jun 2021 B2
11050061 Kim et al. Jun 2021 B2
11072533 Shevchenko et al. Jul 2021 B2
11077524 Smathers et al. Aug 2021 B2
11108050 Kim et al. Aug 2021 B2
11116000 Sandberg et al. Sep 2021 B2
11130175 Parrish et al. Sep 2021 B2
11130994 Shachar et al. Sep 2021 B2
11133495 Gazda et al. Sep 2021 B2
11148202 Hadidi et al. Oct 2021 B2
11167556 Shimada et al. Nov 2021 B2
11170753 Nomura et al. Nov 2021 B2
11171322 Seol et al. Nov 2021 B2
11183682 Sunkara et al. Nov 2021 B2
11193142 Angelidaki et al. Dec 2021 B2
11196045 Dadheech et al. Dec 2021 B2
11219884 Takeda et al. Jan 2022 B2
11244614 He et al. Feb 2022 B2
11245065 Ouderkirk et al. Feb 2022 B1
11245109 Tzeng et al. Feb 2022 B2
11254585 Ekman et al. Feb 2022 B2
11273322 Zanata et al. Mar 2022 B2
11273491 Barnes et al. Mar 2022 B2
11299397 Lanning et al. Apr 2022 B2
11311938 Badwe et al. Apr 2022 B2
11319537 Dames et al. May 2022 B2
11333183 Desai et al. May 2022 B2
11335911 Lanning et al. May 2022 B2
11350680 Rutkoski et al. Jun 2022 B2
11411253 Busacca et al. Aug 2022 B2
11439206 Santos Sep 2022 B2
11442000 Vaez-Iravani et al. Sep 2022 B2
11461298 Shemmer et al. Oct 2022 B1
11465201 Barnes et al. Oct 2022 B2
11471941 Barnes et al. Oct 2022 B2
11477665 Franke et al. Oct 2022 B2
11577314 Hadidi et al. Feb 2023 B2
11590568 Badwe et al. Feb 2023 B2
11611130 Wrobel et al. Mar 2023 B2
11633785 Badwe et al. Apr 2023 B2
20010016283 Shiraishi et al. Aug 2001 A1
20010021740 Lodyga et al. Sep 2001 A1
20020112794 Sethuram Aug 2002 A1
20030027021 Sharivker et al. Feb 2003 A1
20030129497 Yamamoto et al. Jul 2003 A1
20030172772 Sethuram et al. Sep 2003 A1
20030186128 Singh et al. Oct 2003 A1
20030207978 Yadav Nov 2003 A1
20040013941 Kobayashi et al. Jan 2004 A1
20040045807 Sarkas et al. Mar 2004 A1
20040060387 Tanner-Jones Apr 2004 A1
20040123699 Liao et al. Jul 2004 A1
20050025698 Talbot et al. Feb 2005 A1
20050163696 Uhm et al. Jul 2005 A1
20050242070 Hammer Nov 2005 A1
20050260786 Yoshikawa et al. Nov 2005 A1
20060040168 Sridhar Feb 2006 A1
20060141153 Kubota et al. Jun 2006 A1
20060145124 Hsiao et al. Jul 2006 A1
20060291827 Suib et al. Dec 2006 A1
20070077350 Hohenthanner et al. Apr 2007 A1
20070089860 Hou et al. Apr 2007 A1
20070209758 Sompalli et al. Sep 2007 A1
20070221635 Boulos et al. Sep 2007 A1
20070259768 Kear et al. Nov 2007 A1
20080029485 Kelley et al. Feb 2008 A1
20080182114 Kim et al. Jul 2008 A1
20080220244 Wai et al. Sep 2008 A1
20080286490 Bogdanoff et al. Nov 2008 A1
20080296268 Mike et al. Dec 2008 A1
20080305025 Vitner et al. Dec 2008 A1
20090074655 Suciu Mar 2009 A1
20090093553 Jager et al. Apr 2009 A1
20090155689 Zaghib et al. Jun 2009 A1
20090202869 Sawaki et al. Aug 2009 A1
20090258255 Terashima et al. Oct 2009 A1
20090305132 Gauthier et al. Dec 2009 A1
20100007162 Han et al. Jan 2010 A1
20100096362 Hirayama et al. Apr 2010 A1
20100176524 Burgess et al. Jul 2010 A1
20110006254 Richard et al. Jan 2011 A1
20120015284 Merzougui et al. Jan 2012 A1
20120027955 Sunkara et al. Feb 2012 A1
20120034135 Risby Feb 2012 A1
20120048064 Kasper et al. Mar 2012 A1
20120051962 Imam et al. Mar 2012 A1
20120074342 Kim et al. Mar 2012 A1
20120100438 Fasching et al. Apr 2012 A1
20120122017 Mills May 2012 A1
20120230860 Ward-Close et al. Sep 2012 A1
20120240726 Kim et al. Sep 2012 A1
20120294919 Jaynes et al. Nov 2012 A1
20130032753 Yamamoto et al. Feb 2013 A1
20130071284 Kano et al. Mar 2013 A1
20130078508 Tolbert et al. Mar 2013 A1
20130084474 Mills Apr 2013 A1
20140131906 Hadidi May 2014 A1
20140202286 Yokoyama et al. Jul 2014 A1
20140272430 Kalayaraman Sep 2014 A1
20140322632 Sugimoto et al. Oct 2014 A1
20140373344 Takada et al. Dec 2014 A1
20150000844 Woo Jan 2015 A1
20150101454 Shimizu et al. Apr 2015 A1
20150167143 Luce et al. Jun 2015 A1
20150171455 Mills Jun 2015 A1
20150255767 Aetukuri et al. Sep 2015 A1
20150259220 Rosocha et al. Sep 2015 A1
20150333307 Thokchom et al. Nov 2015 A1
20160028088 Romeo et al. Jan 2016 A1
20160045841 Kaplan et al. Feb 2016 A1
20160152480 Jang et al. Jun 2016 A1
20160285090 Ozkan et al. Sep 2016 A1
20160287113 Hebert et al. Oct 2016 A1
20160308244 Badding et al. Oct 2016 A1
20160332232 Forbes Jones et al. Nov 2016 A1
20160351910 Albano et al. Dec 2016 A1
20170009328 Germann et al. Jan 2017 A1
20170070180 Mills Mar 2017 A1
20170113935 Pennington et al. Apr 2017 A1
20170120339 Aslund May 2017 A1
20170125842 Meguro et al. May 2017 A1
20170151609 Elsen et al. Jun 2017 A1
20170176977 Huang et al. Jun 2017 A1
20170179477 Walters et al. Jun 2017 A1
20170368604 Wilkinson Dec 2017 A1
20170373344 Hadidi et al. Dec 2017 A1
20180022928 Blush Jan 2018 A1
20180083264 Soppe Mar 2018 A1
20180104745 L'Esperance et al. Apr 2018 A1
20180159178 Weisenstein et al. Jun 2018 A1
20180169763 Dorval et al. Jun 2018 A1
20180214956 Larouche Aug 2018 A1
20180241956 Suzuki Aug 2018 A1
20180248175 Ghezelbash et al. Aug 2018 A1
20180277849 Gayden Sep 2018 A1
20180297122 Hadidi et al. Oct 2018 A1
20180346344 Chen et al. Dec 2018 A1
20180366707 Johnson et al. Dec 2018 A1
20180375149 Beck et al. Dec 2018 A1
20190001416 Larouche et al. Jan 2019 A1
20190061005 Kelkar Feb 2019 A1
20190084290 Stoyanov et al. Mar 2019 A1
20190125842 Grabowski May 2019 A1
20190127835 Yang et al. May 2019 A1
20190160528 McGee et al. May 2019 A1
20190165413 Furusawa May 2019 A1
20190173130 Schuhmacher et al. Jun 2019 A1
20190218650 Subramanian et al. Jul 2019 A1
20190271068 Sungail et al. Sep 2019 A1
20190292441 Hill et al. Sep 2019 A1
20190334206 Sastry et al. Oct 2019 A1
20190341650 Lanning et al. Nov 2019 A9
20190348202 Sachdev et al. Nov 2019 A1
20190362936 Van Den Berg et al. Nov 2019 A1
20190381564 Barnes Dec 2019 A1
20190389734 Dietz et al. Dec 2019 A1
20200067128 Chmiola et al. Feb 2020 A1
20200136176 Chen Apr 2020 A1
20200153037 Renna et al. May 2020 A1
20200198977 Hof et al. Jun 2020 A1
20200203706 Holman et al. Jun 2020 A1
20200207668 Cavalli et al. Jul 2020 A1
20200215606 Barnes et al. Jul 2020 A1
20200220222 Watarai et al. Jul 2020 A1
20200223704 Neale et al. Jul 2020 A1
20200227728 Huang et al. Jul 2020 A1
20200254432 Shirman et al. Aug 2020 A1
20200276638 King et al. Sep 2020 A1
20200288561 Huh Sep 2020 A1
20200314991 Duanmu et al. Oct 2020 A1
20200335754 Ramasubramanian et al. Oct 2020 A1
20200335781 Oshita et al. Oct 2020 A1
20200346287 Badwe et al. Nov 2020 A1
20200350542 Wrobel et al. Nov 2020 A1
20200350565 Oshita et al. Nov 2020 A1
20200358093 Oshita et al. Nov 2020 A1
20200358096 Paulsen et al. Nov 2020 A1
20200388857 Sunkara et al. Dec 2020 A1
20200391295 Dorval et al. Dec 2020 A1
20200395607 Tzeng Dec 2020 A1
20200407858 Sano et al. Dec 2020 A1
20210047186 Ifuku et al. Feb 2021 A1
20210075000 Holman et al. Mar 2021 A1
20210078072 Barnes et al. Mar 2021 A1
20210085468 Ryd et al. Mar 2021 A1
20210129216 Barnes et al. May 2021 A1
20210139331 Kang et al. May 2021 A1
20210187607 Badwe et al. Jun 2021 A1
20210187614 Tsubota et al. Jun 2021 A1
20210226302 Lanning et al. Jul 2021 A1
20210252599 Hadidi et al. Aug 2021 A1
20210253430 Zaplotnik et al. Aug 2021 A1
20210273292 Yun et al. Sep 2021 A1
20210276094 Sobu et al. Sep 2021 A1
20210296731 Wrobel et al. Sep 2021 A1
20210310110 Stowell et al. Oct 2021 A1
20210344059 Ekman et al. Nov 2021 A1
20210367264 Hadidi et al. Nov 2021 A1
20210408533 Holman et al. Dec 2021 A1
20220041457 Pullen et al. Feb 2022 A1
20220095445 Shang et al. Mar 2022 A1
20220118517 Hadidi et al. Apr 2022 A1
20220127145 Ding et al. Apr 2022 A1
20220134431 Badwe et al. May 2022 A1
20220143693 Larouche et al. May 2022 A1
20220223379 Holman et al. Jul 2022 A1
20220228288 Holman et al. Jul 2022 A1
20220267216 Holman et al. Aug 2022 A1
20220288685 Badwe et al. Sep 2022 A1
20220314325 Badwe Oct 2022 A1
20220324022 Badwe Oct 2022 A1
20230001375 Kozlowski et al. Jan 2023 A1
20230001376 Kozlowski et al. Jan 2023 A1
20230032362 Holman et al. Feb 2023 A1
20230144075 Badwe et al. May 2023 A1
Foreign Referenced Citations (229)
Number Date Country
2003211869 Sep 2003 AU
2014394102 Jun 2020 AU
2947531 Nov 2015 CA
1188073 Jul 1998 CN
1653869 Aug 2005 CN
1675785 Sep 2005 CN
1967911 May 2007 CN
101191204 Jun 2008 CN
101391307 Mar 2009 CN
101728509 Jun 2010 CN
101716686 Feb 2011 CN
102394290 Mar 2012 CN
102412377 Apr 2012 CN
102427130 Apr 2012 CN
102664273 Sep 2012 CN
102723502 Oct 2012 CN
102179521 Jan 2013 CN
102867940 Jan 2013 CN
102983312 Mar 2013 CN
103121105 May 2013 CN
103402921 Nov 2013 CN
102554242 Dec 2013 CN
103456926 Dec 2013 CN
103682372 Mar 2014 CN
103682383 Mar 2014 CN
103700815 Apr 2014 CN
103874538 Jun 2014 CN
103956520 Jul 2014 CN
104064736 Sep 2014 CN
104084592 Oct 2014 CN
104209526 Dec 2014 CN
104218213 Dec 2014 CN
204156003 Feb 2015 CN
104485452 Apr 2015 CN
104752734 Jul 2015 CN
103515590 Sep 2015 CN
105514373 Apr 2016 CN
104772473 Sep 2016 CN
106159316 Nov 2016 CN
106450146 Feb 2017 CN
106493350 Mar 2017 CN
206040854 Mar 2017 CN
106684387 May 2017 CN
106784692 May 2017 CN
107093732 Aug 2017 CN
107579241 Jan 2018 CN
108134104 Jun 2018 CN
108145170 Jun 2018 CN
108217612 Jun 2018 CN
108649190 Oct 2018 CN
108907210 Nov 2018 CN
108963239 Dec 2018 CN
109167070 Jan 2019 CN
109301212 Feb 2019 CN
109616622 Apr 2019 CN
109742320 May 2019 CN
109888233 Jun 2019 CN
110153434 Aug 2019 CN
110299516 Oct 2019 CN
110790263 Feb 2020 CN
110993908 Apr 2020 CN
111099577 May 2020 CN
111342163 Jun 2020 CN
111370751 Jul 2020 CN
111403701 Jul 2020 CN
111515391 Aug 2020 CN
111970807 Nov 2020 CN
112259740 Jan 2021 CN
112331947 Feb 2021 CN
112397706 Feb 2021 CN
112421006 Feb 2021 CN
112421048 Feb 2021 CN
112447977 Mar 2021 CN
112768709 May 2021 CN
112768710 May 2021 CN
112768711 May 2021 CN
112864453 May 2021 CN
113097487 Jul 2021 CN
113104838 Jul 2021 CN
113764688 Dec 2021 CN
113871581 Dec 2021 CN
114388822 Apr 2022 CN
114744315 Jul 2022 CN
114824297 Jul 2022 CN
115394976 Nov 2022 CN
10335355 Nov 2004 DE
102009033251 Sep 2010 DE
102010006440 Aug 2011 DE
102011109137 Feb 2013 DE
102018132896 Jun 2020 DE
0 256 233 Feb 1988 EP
2 292 557 Mar 2011 EP
3 143 838 Mar 2017 EP
2525122 Oct 1983 FR
2591412 Jun 1987 FR
2595745 Dec 2021 GB
202011017775 Oct 2021 IN
10-172564 Jun 1998 JP
11-064556 Mar 1999 JP
2001-348296 Dec 2001 JP
2004-505761 Feb 2004 JP
2004-193115 Jul 2004 JP
2004-311297 Nov 2004 JP
2004-362895 Dec 2004 JP
2005-015282 Jan 2005 JP
2005-072015 Mar 2005 JP
2005-076052 Mar 2005 JP
2005-135755 May 2005 JP
2005-187295 Jul 2005 JP
2005-222956 Aug 2005 JP
2005-272284 Oct 2005 JP
2006-040722 Feb 2006 JP
2007-113120 May 2007 JP
2007-138287 Jun 2007 JP
2007-149513 Jun 2007 JP
2007-238402 Sep 2007 JP
2008-230905 Oct 2008 JP
2008-243447 Oct 2008 JP
2009-187754 Aug 2009 JP
2010-024506 Feb 2010 JP
2010-097914 Apr 2010 JP
2011-108406 Jun 2011 JP
2011-222323 Nov 2011 JP
2011-258348 Dec 2011 JP
2012-046393 Mar 2012 JP
2012-151052 Aug 2012 JP
2013-062242 Apr 2013 JP
2013-063539 Apr 2013 JP
2013-076130 Apr 2013 JP
2015-048269 Mar 2015 JP
2015-122218 Jul 2015 JP
2016-029193 Mar 2016 JP
2016-047961 Apr 2016 JP
6103499 Mar 2017 JP
2017-524628 Aug 2017 JP
2018-141762 Sep 2018 JP
2018-190563 Nov 2018 JP
2019-516020 Jun 2019 JP
2020-121898 Aug 2020 JP
2021-061089 Apr 2021 JP
2021-061090 Apr 2021 JP
2021-116191 Aug 2021 JP
10-2007-0076686 Jul 2007 KR
10-2009-0070140 Jul 2009 KR
10-1133094 Apr 2012 KR
10-2017-0039922 Apr 2017 KR
10-2017-0045181 Apr 2017 KR
2018-0001799 Jan 2018 KR
10-2018-0035750 Apr 2018 KR
10-1907912 Oct 2018 KR
10-1907916 Oct 2018 KR
10-1923466 Nov 2018 KR
10-2101006 Apr 2020 KR
10-2124946 Jun 2020 KR
10-2020-0131751 Nov 2020 KR
10-2021-0057253 May 2021 KR
2744449 Mar 2021 RU
521539 Feb 2003 TW
200823313 Jun 2008 TW
I329143 Aug 2010 TW
201411922 Mar 2014 TW
0377333 Sep 2003 WO
2004054017 Jun 2004 WO
2004089821 Oct 2004 WO
WO 2005039752 May 2005 WO
2006100837 Sep 2006 WO
2010095726 Aug 2010 WO
2011090779 Jul 2011 WO
WO 2011082596 Jul 2011 WO
2012023858 Feb 2012 WO
2012114108 Aug 2012 WO
WO 2012144424 Oct 2012 WO
2012162743 Dec 2012 WO
2013017217 Feb 2013 WO
2014011239 Jan 2014 WO
2014110604 Jul 2014 WO
2014153318 Sep 2014 WO
WO 2015064633 May 2015 WO
WO 2015174949 Nov 2015 WO
WO 2016048862 Mar 2016 WO
2016091957 Jun 2016 WO
2017074081 May 2017 WO
2017074084 May 2017 WO
2017080978 May 2017 WO
WO 2017091543 Jun 2017 WO
WO 2017106601 Jun 2017 WO
2017118955 Jul 2017 WO
2017130946 Aug 2017 WO
2017158349 Sep 2017 WO
2017178841 Oct 2017 WO
WO 2017177315 Oct 2017 WO
WO 2017223482 Dec 2017 WO
2018133429 Jul 2018 WO
WO 2018141082 Aug 2018 WO
2019052670 Mar 2019 WO
WO 2019045923 Mar 2019 WO
WO 2019095039 May 2019 WO
WO 2019139773 Jul 2019 WO
WO 2019243870 Dec 2019 WO
WO 2019246242 Dec 2019 WO
WO 2019246257 Dec 2019 WO
WO 2020009955 Jan 2020 WO
2020041767 Feb 2020 WO
2020041775 Feb 2020 WO
WO 2020091854 May 2020 WO
WO 2020132343 Jun 2020 WO
WO 2020223358 Nov 2020 WO
WO 2020223374 Nov 2020 WO
2021029769 Feb 2021 WO
WO 2021046249 Mar 2021 WO
2021085670 May 2021 WO
2021115596 Jun 2021 WO
WO 2021118762 Jun 2021 WO
WO 2021127132 Jun 2021 WO
2021191281 Sep 2021 WO
2021245410 Dec 2021 WO
2021245411 Dec 2021 WO
WO 2021263273 Dec 2021 WO
2022005999 Jan 2022 WO
2022032301 Feb 2022 WO
2022043701 Mar 2022 WO
2022043702 Mar 2022 WO
2022043704 Mar 2022 WO
2022043705 Mar 2022 WO
2022067303 Mar 2022 WO
2022075846 Apr 2022 WO
2022107907 May 2022 WO
2022133585 Jun 2022 WO
2022136699 Jun 2022 WO
Non-Patent Literature Citations (102)
Entry
Murugan et al. Nanostructured α/β-tungsten by reduction of WO3 under microwave plasma. Int. Journal of Refractory Metals and Hard Materials 29 (2011) 128-133. (Year: 2011).
Park et al. Preparation of spherical WTaMoNbV refractory high entropy alloy powder by inductively-coupled thermal plasma. Materials Letters 255 (2019) 126513 (Year: 2019).
Zhang et al. High thickness tungsten coating with low oxygen content prepared by air plasma spray. Cailliao Gongcheng. (2014) (5) 23-28 (Year: 2014).
Majewksi. Investigation of W—Re—Ni heavy alloys produced from plasma spheroidized powders. Solid State Phenomena vol. 199, pp. 448-453. Online: Mar. 18, 2013. (Year: 2013).
DeArmitt. 26 Functional Fillers for Plastics. Applied Plastics Engineering Handbook. Elsevier. 2011. 455-468. (Year: 2011).
Nichols. On the spheroidization of rod-shaped particles of finite length. Journal of Materials Science 11 (1976) 1077-1082. (Year: 1976).
FR 2591412 machine translation (Year: 1987).
CN 101391307 machine translation (Year: 2009).
International Search Report and Written Opinion, re PCT Application No. PCT/US2020/060778, dated May 3, 2021.
“Build Boldly”, Technology Demonstration, 6K Additive in 11 pages.
Ajayi, B. et al., “A rapid and scalable method for making mixed metal oxide alloys for enabling accelerated materials discovery”, Journal of Materials Research, Jun. 2016, vol. 31, No. 11, pp. 1596-1607.
Bobzin, K. et al., “Modelling and Diagnostics of Multiple Cathodes Plasma Torch System for Plasma Spraying”, Frontiers of Mechanical Engineering, Sep. 2011, vol. 6, pp. 324-331.
Bobzin, K. et al., “Numerical and Experimental Determination of Plasma Temperature during Air Plasma Spraying with a Multiple Cathodes Torch”, Journal of Materials Processing Technology, Oct. 2011, vol. 211, pp. 1620-1628.
Boulos, M., “The inductively coupled radio frequency plasma”, Journal of High Temperature Material Process, 1997, vol. 1, pp. 17-39.
Boulos, M., “Induction Plasma Processing of Materials for Powders, Coating, and Near-Net-Shape Parts”, Advanced Materials & Processes, Aug. 2011, pp. 52-53, in 3 pages.
Boulos, M., “Plasma power can make better powders”, Metal Powder Report, May 2004, vol. 59(5), pp. 16-21.
Carreon, H. et al., “Study of Aging Effects in a Ti—6Al—4V alloy with Widmanstatten and Equiaxed Microstructures by Non-destructive Means”, AIP Conference Proceedings 1581, 2014 (published online Feb. 17, 2015), pp. 739-745.
Chang, S. et al., “One-Step Fast Synthesis of Li4Ti5O12 Particles Using an Atmospheric Pressure Plasma Jet”, Journal of the American Ceramic Society, Dec. 26, 2013, vol. 97, No. 3, pp. 708-712.
Chen, G. et al., “Spherical Ti—6Al—4V Powders Produced by Gas Atomization”, Key Engineering Materials, vol. 704, Aug. 2016, pp. 287-292. URL: https://www.scientific.net/KEM.704.287.
Chikumba, S. et al., “High Entropy Alloys: Development and Applications”, 7th International Conference on Latest Trends in Engineering & Technology (ICLTET'2015), Nov. 26-27, 2015, Irene, Pretoria (South Africa), pp. 13-17.
Coldwell, D. M. et al., “The reduction of SiO2 with Carbon in a Plasma”, Journal of Electrochemical Society, Jan. 1977, vol. 124, pp. 1686-1689.
Dolbec, R., “Recycling Spherical Powders”, Presented at Titanium 2015, Orlando, FL, Oct. 2015, in 20 pages.
Fuchs, G.E. et al., “Microstructural evaluation of as-solidified and heat-treated y-TiAl based powders”, Materials Science and Engineering, 1992, A152, pp. 277-282.
Gradl, P. et al., “GRCop-42 Development and Hot-fire Testing Using Additive Manufacturing Powder Bed Fusion for Channel-Cooled Combustion Chambers”, 55th AIAA/SAE/ASEE Joint Propulsion Conference 2019, Aug. 2019, pp. 1-26.
He, J. Y. et al., “A precipitation-hardened high-entropy alloy with outstanding tensile properties”, Acta Materialia, 2016, vol. 102, pp. 187-196.
Ivasishin, O. M. et al., “Innovative Process for Manufacturing Hydrogenated Titanium Powder for Solid State Production of P/M Titanium Alloy Components”, Titanium 2010, Oct. 3-6, 2010, in 27 pages.
Jia, H. et al., “Hierarchical porous silicon structures with extraordinary mechanical strength as high-performance lithium-ion battery anodes”, Nature Communications, Mar. 2020, vol. 11, in 9 pages. URL: https://doi.org/10.1038/s41467-020-15217-9.
Ko, M. et al., “Challenges in Accommodating Volume Change of Si Anodes for Li-Ion Batteries”, Chem Electro Chem, Aug. 2015, vol. 2, pp. 1645-1651. URL: https://doi.org/10.1002/celc.201500254.
Kotlyarov, V. I. et al, “Production of Spherical Powders on the Basis of Group IV Metals for Additive Manufacturing”, Inorganic Materials: Applied Research, Pleiades Publishing, May 2017, vol. 8, No. 3, pp. 452-458.
Laine, R. M. et al., “Making nanosized oxide powders from precursors by flame spray pyrolysis”, Key Engineering Materials, Jan. 1999, vol. 159-160, pp. 17-24.
Li, X. et al., “Mesoporous silicon sponge as an anti-pulverization structure for high-performance lithium-ion battery anodes”, Nature Communications, Jul. 2014, vol. 5, Article No. 4105, in 7 pages. URL: https://doi.org/10.1038/ncomms5105.
Li, L. et al., “Spheroidization of silica powders by radio frequency inductively coupled plasma with Ar—H2 and Ar—N2 as the sheath gases at atmospheric pressure”, International Journal of Minerals, Metallurgy, and Materials, Sep. 2017, vol. 24(9), pp. 1067-1074.
Li, Z. et al., “Strong and Ductile Non-Equiatomic High-Entropy Alloys: Design, Processing, Microstructure, and Mechanical Properties”, The Journal of The Minerals, Metals & Materials Society, Aug. 2017, vol. 69(1), pp. 2099-2106. URL: https://doi.org/10.1007/s11837-017-2540-2.
Lin, M., “Gas Quenching with Air Products' Rapid Gas Quenching Gas Mixture”, Air Products, Dec. 31, 2007, in 4 pages. URL: https://www.airproducts.co.uk/-/media/airproducts/files/en/330/330-07-085-us-gas-quenching-with-air-products-rapid-gas-quenching-gas-mixture.pdf.
Moisan, M. et al., “Waveguide-Based Single and Multiple Nozzle Plasma Torches: the Tiago Concept”, Plasma Sources Science and Technology, Jun. 2001, vol. 10, pp. 387-394.
Muoto, C. et al., “Phase Homogeneity in Y2O3—MgO Nanocomposites Synthesized by Thermal Decomposition of Nitrate Precursors with Ammonium Acetate Additions”, Journal of the American Ceramic Society, 2011, vol. 94(12), pp. 4207-4217.
Nyutu, E. et al., “Ultrasonic Nozzle Spray in Situ Mixing and Microwave-Assisted Preparation of Nanocrystalline Spinel Metal Oxides: Nickel Ferrite and Zinc Aluminate”, Journal of Physical Chemistry C, Feb. 1, 2008, vol. 112, No. 5, pp. 1407-1414.
Ohta, R. et al., “Effect of PS-PVD production throughput on Si nanoparticles for negative electrode of lithium ion batteries”, Journal of Physics D: Applied Physics, Feb. 2018, vol. 51(1), in 7 pages.
Or, T. et al., “Recycling of mixed cathode lithium-ion batteries for electric vehicles: Current status and future outlook”, Carbon Energy, Jan. 2020, vol. 2, pp. 6-43. URL: https://doi.org/10.1002/cey2.29.
Popescu, G. et al., “New TiZrNbTaFe high entropy alloy used for medical applications”, IOP Conference Series: Materials Science and Engineering, Mod Tech 2018, Sep. 2018, vol. 400, in 9 pages.
Reig, L. et al., “Microstructure and Mechanical Behavior of Porous Ti—6Al—4V Processed by Spherical Powder Sintering”, Materials, Oct. 23, 2013, vol. 6, pp. 4868-4878.
Sastry, S.M.L. et al., “Rapid Solidification Processing of Titanium Alloys”, Journal of Metals (JOM), Sep. 1983, vol. 35, pp. 21-28.
Savage, S. J. et al., “Production of rapidly solidified metals and alloys”, Journal of Metals (JOM), Apr. 1984, vol. 36, pp. 20-33.
Sheng, Y. et al., “Preparation of Spherical Tungsten Powder by RF Induction Plasma”, Rare Metal Materials and Engineering, Nov. 2011, vol. 40, No. 11, pp. 2033-2037.
Sheng, Y. et al., “Preparation of Micro-spherical Titanium Powder by RF Plasma”, Rare Metal Materials and Engineering, Jun. 2013, vol. 42, No. 6, pp. 1291-1294.
Suryanarayana, C., “Recent Developments in Mechanical Alloying”, Reviews on Advanced Materials Science, Aug. 2008, vol. 18(3), pp. 203-211.
Suryanarayana, C. et al., “Rapid solidification processing of titanium alloys”, International Materials Reviews, 1991, vol. 36, pp. 85-123.
Tang, H. P. et al., “Effect of Powder Reuse Times on Additive Manufacturing of Ti—6Al—4V by Selective Electron Beam Melting”, JOM, Mar. 2015, vol. 67, pp. 555-563.
Van Laar, J. H. et al., “Spheroidisation of Iron Powder in a Microwave Plasma Reactor”, Journal of the Southern African Institute of Mining and Metallurgy, Oct. 2016, vol. 116, No. 10, pp. 941-946.
Veith, M. et al., “Low temperature synthesis of nanocrystalline Y3Al5O12 (YAG) and Cedoped Y3Al5O12 via different sol-gel methods”, The Journal of Materials Chemistry, Jan. 1999, vol. 9, pp. 3069-3079.
Wang, J. et al., “Preparation of Spherical Tungsten and Titanium Powders by RF Induction Plasma Processing”, Rare Metals, Jun. 2015 (published online May 31, 2014), vol. 34, No. 6, pp. 431-435.
Wang, Y. et al., “Developments in Nanostructured Cathode Materials for High-Performance Lithium-Ion Batteries”, Advanced Materials, Jun. 2008, pp. 2251-2269.
Yang, S. et al., “Preparation of Spherical Titanium Powders from Polygonal Titanium Hydride Powders by Radio Frequency Plasma Treatment”, Materials Transactions, Nov. 2013, vol. 54, No. 12, pp. 2313-2316.
Zhang, K., Ph.D., “The Microstructure and Properties of Hipped Powder Ti Alloys”, a thesis submitted to The University of Birmingham, College of Engineering and Physical Sciences, Apr. 2009, in 65 pages.
Zhang, Y. et al., “Microstructures and properties of high-entropy alloys”, Progress in Materials Science, Apr. 2014 (available online Nov. 2013), vol. 61, pp. 1-93.
Zhang, Y. D. et al., “High-energy cathode materials for Li-ion batteries: A review of recent developments”, Science China Technological Sciences, Sep. 2015, vol. 58(11), pp. 1809-1828.
Zielinski, A. et al., “Modeling and Analysis of a Dual-Channel Plasma Torch in Pulsed Mode Operation for Industrial, Space, and Launch Applications”, IEEE Transactions on Plasma Science, Jul. 2015, vol. 43(7), pp. 2201-2206.
“High-entropy alloy”, Wikipedia, webpage last edited Dec. 29, 2022 (accessed Jan. 17, 2023), in 16 pages. URL: https://en.wikipedia.org/wiki/High-entropy_alloy.
Barbis et al., “Titanium powders from the hydride-dehydride process.” Titanium Powder Metallurgy. Butterworth-Heinemann, 2015. pp. 101-116.
Ajayi, B. P. et al., “Atmospheric plasma spray pyrolysis of lithiated nickel-manganese-cobalt oxides for cathodes in lithium ion batteries”, Chemical Engineering Science, vol. 174, Sep. 14, 2017, pp. 302-310.
Gleiman, S. et al., “Melting and spheroidization of hexagonal boron nitride in a microwave-powered, atmospheric pressure nitrogen plasma”, Journal of Materials Science, Aug. 2002, vol. 37(16), pp. 3429-3440.
Houmes et al., “Microwave Synthesis of Ternary Nitride Materials”, Journal of Solid State Chemistry, vol. 130, Issue 2, May 1997, pp. 266-271.
International Preliminary Report on Patentability and Written Opinion, re PCT Application No. PCT/US2020/060778, dated Jun. 2, 2022.
Moldover, M. R. et al., “Measurement of the Universal Gas Constant R Using a Spherical Acoustic Resonator”, Physical Review Letters, Jan. 1988, vol. 60(4), pp. 249-252.
Walter et al., “Microstructural and mechanical characterization of sol gel-derived Si—O—C glasses” Journal of the European Ceramic Society, vol. 22, Issue 13, Dec. 2002, pp. 2389-2400.
Zhang, Y. S. et al., “Core-shell structured titanium-nitrogen alloys with high strength, high thermal stability and good plasticity”, Scientific Reports, Jan. 2017, vol. 7, in 8 pages.
Ali, MY., et al., Spray Flame Synthesis (SFS) of Lihium Lanrthaum Zirconate (LLZO) Solid Electroly, Materials, vol. 14, No. 13, 2021, pp. 1-13.
Bardos, L., et al., “Differences between microwave and RF activation of nitrogen for the PECVD process”, J. Phys. D: Appl. Phys., vol. 15, 1982, pp. 79-82.
Bardos, L., et al., “Microwave Plasma Sources and Methods in Processing Technology”, IEEE Press, 2022, 10 pages.
Choi, S. I., et al., “Continuous process of carbon nanotubes synthesis by decomposition of methane using an arc-jet plasma”, Thin Solid Films, 2006, vol. 506-507, 2006, pp. 244-249.
Collin, J. E., et al., “Ionization of methane and it's electronic energy levels”, Canadian Journal of Chemistry, 2011, vol. 45, No. 16, pp. 1875-1882.
Decker, J., et al., “Sample preparation protocols for realization of reproducible characterization of single-wall carbon nanotubes”, Metrologia, 2009, vol. 46, No. 6, pp. 682-692.
Ding, F., et al., “Nucleation and Growth of Single-Walled Carbon Nanotubes: A Molecular Dynamics Study”, J. Phys. Chem. B, vol. 108, 2004, pp. 17369-17377.
Ding, F., et al., “The Importance of Strong Carbon-Metal Adhesion for Catalytic Nucleation of Single-Walled Carbon Nanotubes”, Nano Letters, 2008, vol. 8, No. 2, pp. 463-468.
Dors, M., et al., “Chemical Kinetics of Methane Pyrolysis in Microwave Plasma at Atmospheric Pressure”, Plasma Chem Plasma Process, 2013, vol. 34, No. 2, pp. 313-326.
Eremin, A., et al., “The Role of Methyl Radical in Soot Formation”, Combustion Science and Technology, vol. 191, No. 12, 2008, pp. 2226-2242.
Finckle, J. R., et al., “Plasma Pyrolysis of Methane to Hydrogen and Carbon Black”, Industrial Engineering and Chemical Research, 2002. vol. 41, No. 6, 2002, pp. 1425-1435.
Fu, D., et al., “Direct synthesis of Y-junction carbon nanotubes by microwave-assisted pyrolysis of methane”, Materials Chemistry and Physics, vol. 118, vol. 2-3, 2009, pp. 501-505.
Grace, J. et al., “Connecting particle sphericity and circularity”, Particuology, vol. 54, 2021, pp. 1-4, ISSN 1674-2001, https://doi .org/10.1016/j.partic.2020.09.006. (Year: 2020).
Haghighatpanah, S., et al., “Computational studies of catalyst-free single walled carbon nanotube growth”, J Chem Phys, vol. 139, No. 5, 10 pages.
Haneklaus, N., et al., “Stop Smoking—Tube-In-Tube Helical System for Flameless Calcination of Minerals,” Processes, vol. 5, No. 4, Nov. 3, 2017, pp. 1-12.
Huo, H., et al., “Composite electrolytes of polyethylene oxides/gamets interfacially wetted by ionic liquid for room-temperature solid-state lithium battery”, Journal of Power Sources, vol. 372, 2017, pp. 1-7.
Irle, S., et al., “Milestones in molecular dynamics simulations of single-walled carbon nanotube formation: A brief critical review”, Nano Research, 2009, vol. 2, No. 10, pp. 755-767.
Jasek, O., et al., “Microwave plasma-based high temperature dehydrogenation of hydrocarbons and alcohols as a single route to highly efficient gas phase synthesis of freestanding graphene”, Nanotechnology, 2021, vol. 32, 11 pages.
Jasinski, M., et al., “Atmospheric pressure microwave plasma source for hydrogen production”, International Journal of Hydrogen Energy, vol. 38, Issue 26, 2013, pp. 11473-11483.
Jasinski, M., et al., “Hydrogen production via methane reforming using various microwave plasma sources”, Chem. Listy, 2008, vol. 102, pp. s1332-s1337.
Kassel, L. S., “The Thermal Decomposition of Methane”, Journal of the American Chemical Society, vol. 54, No. 10, 1932, pp. 3949-3961.
Kerscher, F., et al., “Low-carbon hydrogen production via electron beam plasma methane pyrolysis: Techno-economic analysis and carbon footprint assessment”, International Journal of Hydrogen Energy, vol. 46, Issue 38, 2021, pp. 19897-19912.
Kim, K. S., et al., “Synthesis of single-walled carbon nanotubes by induction thermal plasma”, Nano Research, 2009, vol. 2, No. 10, pp. 800-817.
Kumal, R. R., et al., “Microwave Plasma Formation of Nanographene and Graphitic Carbon Black”, C, 2020, vol. 6, No. 4, 10 pages.
Lee, D. H., et al., “Comparative Study of Methane Activation Process by Different Plasma Sources”, Plasma Chem. Plasma Process., vol. 33, No. 4, 2013, pp. 647-661.
Lee, D. H., et al., “Mapping Plasma Chemistry in Hydrocarbon Fuel Processing Processes”, Plasma Chem. Plasma Process., vol. 33, No. 1, 2013, pp. 249-269.
Liu, Y., et al., “Advances of microwave plasma-enhanced chemical vapor deposition in fabrication of carbon nanotubes: a review”, J Mater Sci., vol. 55, 2021, pp. 12559-12583.
Olsvik, O., et al, “Thermal Coupling of Methane—A Comparison Between Kinetic Model Data and Experimental Data”, Thermochimica Acta., vol. 232, No. 1, 1994, pp. 155-169.
Pulsation Reactors—Thermal Processing for Extraordinary Material Properties, retrieved from https://www.ibu-tec.com/facilities/pulsation-reactors/, retrieved on Mar. 18, 2023, pp. 5.
Seehra, M. S., et al., “Correlation between X-ray diffraction and Raman spectra of 16 commercial graphene-based materials and their resulting classification”, Carbon N Y., 2017, vol. 111, pp. 380-384.
Wang, H., et al., “A detailed kinetic modeling study of aromatics formation in laminar premixed acetylene and ethylene flames” Combustion and Flame, vol. 110, No. 1-2, 1997, pp. 173-221.
Zavilopulo, A. N., et al., “Ionization and Dissociative Ionization of Methane Molecules”, Technical Physics, vol. 58, No. 9, 2013, pp. 1251-1257.
Zeng, X., et al., “Growth and morphology of carbon nanostructures by microwave-assisted pyrolysis of methane”, Physica E., vol. 42, No. 8, 2010, pp. 2103-2108.
Zhang, H., et al., “Plasma activation of methane for hydrogen production in a N2 rotating gliding arc warm plasma: A chemical kinetics study”, Chemical Engineering Journal, vol. 345, 2018, pp. 67-78.
Zhang, J., et al., “Flexible and ion-conducting membrane electrolytes for solid-state lithium batteries: Dispersion of garnet nanoparticles in insulating polyethylene oxide”, Nano Energy, vol. 28, 2016, pp. 447-454.
Zhong, R., et al., “Continuous preparation and formation mechanism of few-layer graphene by gliding arc plasma”, Chemical Engineering Journal, vol. 387, 2020, 10 pages.
Related Publications (1)
Number Date Country
20210146432 A1 May 2021 US
Provisional Applications (1)
Number Date Country
62937054 Nov 2019 US