Claims
- 1. A method for making fluid droplets, comprising the steps of:
- a) causing a layer of silicon dioxide to form on a surface of a silicon plate,
- b) micromachining an aperture in said plate,
- c) thermally fusing said plate to a first end of a tube, thereby capping said first end of tube, said tube comprising a compound comprising silicon,
- d) pouring a fluid into said tube through a second end of said tube,
- e) applying a plurality of pressure pulses to said fluid using an ejection means for applying pressure pulses and a control means for sending drive pulses to said ejection means;
- whereby droplets of said fluid are ejected from said tube through said aperture.
- 2. The method of claim 1, wherein said silicon-comprising compound is glass.
- 3. The method of claim 1, wherein said silicon-comprising compound is quartz.
- 4. The method of claim 1, additionally comprising the step of attaching a piezoelectric device to the exterior of said tube, and wherein applying said pressure pulses comprises the step of supplying a varying electric current to said piezoelectric device.
- 5. The method of claim 1, further comprising the step of stirring said fluid while said fluid is in said tube.
- 6. The method of claim 1, further comprising the step of controlling a global pressure in said tube.
- 7. The method of claim 1, wherein causing said silicon dioxide layer to form comprises the step of exposing said plate to air.
- 8. The method of claim 1, wherein causing said silicon dioxide layer to form comprises the step of using thin film deposition techniques.
- 9. A chemically unreactive fluid dropper comprising:
- a) a fluid;
- b) a fluid reservoir for holding said fluid, said reservoir comprising:
- (i) a side wall of a silicon-comprising compound having a surface layer comprising silicon dioxide, and
- (ii) an end cap comprising a silicon plate having a micromachined aperture,
- said end cap being thermally welded to said side wall across said surface layer;
- c) an ejection means for producing pressure pulses in said fluid; and
- d) a control means in electrical communication with said ejection means, for sending drive pulses to said ejection means;
- whereby said fluid is ejected from said reservoir through said aperture by the pressure pulses produced by said ejection means.
- 10. The apparatus of claim 9, wherein said silicon-comprising compound is glass.
- 11. The apparatus of claim 9, wherein said silicon-comprising compound is quartz.
- 12. The apparatus of claim 9, wherein said ejection means comprises a piezoelectric device mounted on the exterior of said side wall.
- 13. A chemically unreactive fluid dropper comprising:
- a) a fluid;
- b) a fluid reservoir for holding said fluid, said reservoir comprising:
- (i) a side wall of a silicon-comprising compound, and
- (ii) an end cap comprising a silicon plate having a micromachined aperture,
- said end cap being thermally welded to said side wall;
- c) a means for stirring said fluid;
- d) an ejection means for producing pressure pulses in said fluid; and
- e) a control means in electrical communication with said ejection means, for sending drive pulses to said ejection means;
- whereby said fluid is ejected from said reservoir through said aperture by the pressure pulses produced by said ejection means.
- 14. A chemically unreactive fluid dropper comprising:
- a) a fluid;
- b) a fluid reservoir for holding said fluid, said reservoir comprising:
- (i) a side wall of a silicon-comprising compound, and
- (ii) an end cap comprising a silicon plate having a micromachined aperture,
- said end cap being thermally welded to said side wall;
- c) a means for controlling a global pressure in said reservoir;
- d) an ejection means for producing pressure pulses in said fluid; and
- e) a control means in electrical communication with said ejection means, for sending drive pulses to said ejection means;
- whereby said fluid is ejected from said reservoir through said aperture by the pressure pulses produced by said ejection means.
RELATED APPLICATION DATA
This application is a continuation-in-part of application Ser. No. 08/908,333 filed Aug. 7, 1997.
Government Interests
This invention was made with U.S. Government support under grant No. DE-AC-03-76SF00515, awarded by the Department of Energy. The U.S. Government has certain rights in this invention.
US Referenced Citations (3)
Non-Patent Literature Citations (2)
Entry |
Savage, M. et al., A search for fractional charges in native mercury, Phys. Lett., vol. 167B, No. 4, 1986. |
Joyce, D., M. S. Thesis, San Francisco State University, 1985. |
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
908333 |
Aug 1997 |
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