Claims
- 1. A method of simultaneously forming bonds between a semiconductor die having at least one bond pad on a first surface thereof and an interconnect having at least one contact member on a connection surface thereof, said at least one contact member configured to penetrate a layer of hard material on an outer surface of said at least one bond pad, thereby connecting said at least one contact member to said at least one bond pad of said semiconductor die, said method comprising:aligning said semiconductor die and said interconnect; bringing together the first surface of the semiconductor die and the connection surface of the interconnect having said at least one contact member aligned proximate said at least one bond pad on said first surface of said semiconductor die; engaging said semiconductor die and said interconnect using an increasing force; and substantially ultrasonically vibrating one of said semiconductor die and said interconnect using vibrational energy having said at least one contact member of said nterconnect penetrating a portion of said at least one bond pad of said semiconductor die forming an electrical connection.
- 2. The method of claim 1, wherein said ultrasonic vibration is conducted to achieve a vibrational amplitude of about 5 to about 30 percent of the predetermined depth.
- 3. The method of claim 1, wherein said ultrasonic vibration is conducted for about 5 to about 200 milliseconds.
- 4. The method of claim 1, wherein said method forms a non-permanent electrical connection between said at least one bond pad and said at least one contact member.
- 5. The method of claim 1, wherein said method forms a permanent electrical connection bond between said at least one bond pad and said at least one contact member.
- 6. The method of claim 1, further comprising:retracting said semiconductor die and said interconnect from each other while applying linear axial ultrasonic vibrational force to one of said semiconductor die and said interconnect, said retraction disconnecting said semiconductor die from said interconnect.
- 7. The method of claim 1, whereby said engaging and said ultrasonic vibration are continued having said at least one contact member penetrating said portion of said at least one bond pad to a predetermined depth.
- 8. The method of claim 7, wherein said predetermined depth comprises about 0.3-0.8 of the thickness of said at least one bond pad.
- 9. The method of claim 7, further comprising:detecting penetration of said at least one bond pad to the predetermined depth by detection/feedback apparatus.
- 10. The method of claim 9, further comprising:detecting the penetration of said at least one bond pad on said first surface of said semiconductor die upon detecting the penetration of said at least one bond pad to the predetermined depth by said detection/feedback apparatus.
CROSS REFERENCE TO RELATED APPLICATION
This application is a continuation of application Ser. No. 09/027,690, filed Feb. 23, 1998, now U.S. Pat. No. 6,045,026 is sued Apr. 4, 2000.
US Referenced Citations (26)
Continuations (1)
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Number |
Date |
Country |
Parent |
09/027690 |
Feb 1998 |
US |
Child |
09/416248 |
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US |