VACUUM PRESSURE FEEDING SYSTEM

Abstract

A vacuum pressure feeding system is provided with a first vacuum pressure feeding path for feeding vacuum pressure from a vacuum source to a holder for holding an object using the vacuum pressure, a tank for storing vacuum pressure, a second vacuum pressure feeding path branching from partway along the first vacuum pressure feeding path and connecting to the tank, and a first electromagnetic valve provided on the second vacuum pressure feeding path.

Description

Claims

1. A vacuum pressure supply system comprising: a first vacuum pressure supply path configured to allow a vacuum pressure to be supplied from a vacuum source to a holding unit configured to hold an object using the vacuum pressure;a tank configured to store the vacuum pressure;a second vacuum pressure supply path branching off from the first vacuum pressure supply path and being connected to the tank; anda first solenoid valve provided on the second vacuum pressure supply path.

2. The vacuum pressure supply system according to claim 1, further comprising: a second solenoid valve provided on the first vacuum pressure supply path between the holding unit and a branch point of the second vacuum pressure supply path; anda filling control unit configured to perform control to close the second solenoid valve and open the first solenoid valve when filling of the tank with the vacuum pressure is performed while the second solenoid valve is opened.

3. The vacuum pressure supply system according to claim 1 further comprising: a pressure sensor provided on the first vacuum pressure supply path and configured to detect a magnitude of the vacuum pressure; anda preliminary vacuum pressure control unit configured to perform control to open the first solenoid valve when the magnitude of the vacuum pressure detected by the pressure sensor is out of a normal range while the first solenoid valve is closed.

4. The vacuum pressure supply system according to claim 3, wherein the pressure sensor is provided on the first vacuum pressure supply path between the holding unit and a branch point of the second vacuum pressure supply path.

5. The vacuum pressure supply system according to claim 4, wherein the pressure sensor is provided closer to the holding unit than a second solenoid valve provided on the first vacuum pressure supply path between the holding unit and the branch point of the second vacuum pressure supply path.

6. The vacuum pressure supply system according to claim 1 further comprising: a pressure sensor provided in the holding unit and configured to detect a magnitude of the vacuum pressure; anda preliminary vacuum pressure control unit configured to perform control to open the first solenoid valve when the magnitude of the vacuum pressure detected by the pressure sensor is out of a normal range while the first solenoid valve is closed.

7. The vacuum pressure supply system according to claim 1 further comprising: a third solenoid valve provided on the first vacuum pressure supply path between the vacuum source and a branch point of the second vacuum pressure supply path; anda supply control unit configured to perform control to open the third solenoid valve when supply of the vacuum pressure to the holding unit or the tank is performed while the third solenoid valve is closed.

8. The vacuum pressure supply system according claim 3, further comprising: a third solenoid valve provided on the first vacuum pressure supply path between the vacuum source and a branch point of the second vacuum pressure supply path,wherein the preliminary vacuum pressure control unit performs control to open the first solenoid valve and close the third solenoid valve when the magnitude of the vacuum pressure detected by the pressure sensor is out of the normal range while the first solenoid valve is closed and the third solenoid valve is opened.