TREA

Vacuum processing equipment configuration

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Information

  • Patent Grant
  • D473354
  • Patent Number
    D473,354
  • Date Filed
    Tuesday, January 12, 1999
    25 years ago
  • Date Issued
    Tuesday, April 15, 2003
    21 years ago
Information
Abstract
Description




FIG. 1 is front, top and right side perspective view of cassettes storage eguipment in relation to a conveyor equipped robot and load and unload chambers showing our new design;




FIG. 2 is a top plan view;




FIG. 3 is a front side elevational view;




FIG. 4 is a right side elevational view;




FIG. 5 is a rear side elevational view;




FIG. 6 is a left side elevational view;




FIG. 7 is a bottom plan view; and,




FIG. 8 is a right side elevational view along line 8—8 of FIG. 2.




The details shown in broken lines in all views is for illustrative purposes only and form no part of the claimed design.



Claims
  • The ornamental design for a vacuum processing equipment configuration, as shown and described.
Priority Claims (1)
Number Date Country Kind
02-225321 Aug 1990 JP
US Referenced Citations (43)
Number Name Date Kind
3652444 Lester et al. Mar 1972 A
3981791 Rosvold Sep 1976 A
4138306 Niwa Feb 1979 A
4226897 Coleman Oct 1980 A
4311427 Coad et al. Jan 1982 A
4313783 Davies et al. Feb 1982 A
4313815 Graves, Jr. et al. Feb 1982 A
4318767 Hijikata et al. Mar 1982 A
4449885 Hertel et al. May 1984 A
4457661 Flint et al. Jul 1984 A
4534314 Ackley Aug 1985 A
4563240 Shibata et al. Jan 1986 A
4576698 Gallagher et al. Mar 1986 A
4634331 Hertel Jan 1987 A
4705951 Layman et al. Nov 1987 A
4715764 Hutchinson Dec 1987 A
4836733 Hertel et al. Jun 1989 A
4836905 Davis et al. Jun 1989 A
4851101 Hutchinson Jul 1989 A
4895107 Yano et al. Jan 1990 A
4902934 Miyamura et al. Feb 1990 A
4903937 Jakuiec et al. Feb 1990 A
4909695 Hurwitt et al. Mar 1990 A
4911597 Maydan et al. Mar 1990 A
4915564 Eror et al. Apr 1990 A
4917556 Stark et al. Apr 1990 A
4924890 Giles et al. May 1990 A
4936329 Michael et al. Jun 1990 A
4951601 Maydan et al. Aug 1990 A
4969790 Petz et al. Nov 1990 A
5007981 Kawasaki et al. Apr 1991 A
5014217 Savage May 1991 A
5292393 Maydan et al. Mar 1994 A
5351415 Brooks et al. Oct 1994 A
5452166 Aylwin et al. Sep 1995 A
5462397 Iwabuchi Oct 1995 A
5504033 Bajor et al. Apr 1996 A
5504347 Jovanovic et al. Apr 1996 A
5509771 Hiroki Apr 1996 A
5556714 Fukuyama et al. Sep 1996 A
5651858 Lin Jul 1997 A
5675461 Aylwin et al. Oct 1997 A
5685684 Kato et al. Nov 1997 A
Foreign Referenced Citations (23)
Number Date Country
0246453 Apr 1987 EP
0381338 May 1990 EP
57-29577 Feb 1982 JP
60246635 Dec 1985 JP
62-44571 Feb 1987 JP
62-50463 Mar 1987 JP
6289881 Apr 1987 JP
62207866 Sep 1987 JP
63-153270 Jun 1988 JP
636582 Jan 1989 JP
6412037 Jan 1989 JP
131970 Feb 1989 JP
131971 Feb 1989 JP
1135015 May 1989 JP
1-251734 Oct 1989 JP
1298180 Dec 1989 JP
1-310553 Dec 1989 JP
2-61064 Mar 1990 JP
265252 Mar 1990 JP
294647 Apr 1990 JP
2-106037 Apr 1990 JP
430549 Apr 1992 JP
8707309 May 1987 WO
Non-Patent Literature Citations (3)
Entry
R.P.H. Chang, “Multipurpose plasma reactor for materials research and processing”, J. Vac. Sci. Technol., vol. 14, No. 1, Jan./Feb. 1977, pp. 278-280.
Semiconductor Equipment Association of Japan, Terminological Dictionary of Semiconductor Equipment), front, table, p. 183, back, Nov. 20, 1987.
Semiconductor Equipment Association of Japan, “Semiconductor News”, vol. 4, pp. 38-43, Apr. 10, 1987 (w/translation).
Continuations (4)
Number Date Country
Parent 08/882731 Jun 1997 US
Child 09/061062 US
Parent 08/443039 May 1995 US
Child 08/593870 US
Parent 08/096256 Jul 1993 US
Child 08/302443 US
Parent 07/751951 Aug 1991 US
Child 08/096256 US
Continuation in Parts (1)
Number Date Country
Parent 09/061062 Apr 1998 US
Child 29/099071 US