Patent Grant
11746788
The present application is based on, and claims priority from JP Application Serial Number 2020-141531, filed Aug. 25, 2020 and JP Application Serial Number 2021-099986, filed Jun. 16, 2021, the disclosure of which are hereby incorporated by reference herein in its entirety.
The present disclosure relates to a device.
JP-A-2000-74080 (Patent Literature 1) discloses a vacuum pump that houses a motor. According to Patent Literature 1, a rotating shaft of the motor is fixed by a pair of bearings. A rotary blade is set in the rotating shaft. The motor rotates the rotary blade to thereby function as a pump. When balls of the bearings are deteriorated, the bearings vibrate. According to Patent Literature 1, by attenuating the vibration of the bearings in a rotating speed region of a natural frequency of the bearings, the vacuum pump can reduce a tilt of a main shaft and positional deviation in an axial direction. For predictive maintenance of such a vacuum pump, it is conceivable to attach a monitoring device mounted with a sensor unit.
However, it is not easy to attach the monitoring device to a vibration source in the vacuum pump or the like. More specifically, since a portion near the bearings, which are vibration sources, has high temperature, sensing accuracy of the monitoring device is deteriorated. When the monitoring device is set in a portion far from the vibration sources, the temperature of the monitoring device decreases. However, since the vibration transmitted from the bearings is attenuated, vibration detection accuracy is deteriorated. Therefore, there has been a demand for a structure that can prevent a temperature rise of the monitoring device even in a place where the temperature of a housing rises near the vibration sources.
A device includes: a movable body; a housing configured to house the movable body; and a monitoring device attached to the housing and configured to detect vibration of the housing. The housing includes first channels for causing a coolant to flow to overlap the monitoring device in a plan view from a direction perpendicular to an attachment surface for the monitoring device.
In a first embodiment, a characteristic example of a vacuum pump attached with a monitoring device is explained. As shown in
The vacuum pump 1 includes a housing 3. The housing 3 includes a motor case 4, a connecting section 5, a pump case 6, and a gear case 7 disposed from a −X-direction side toward a +X-direction side. The housing 3 includes a first sidewall 8 between the connecting section 5 and the pump case 6. The housing 3 includes a second sidewall 9 between the pump case 6 and the gear case 7.
An intake pipe 11 is coupled to the surface on a +Z-direction side of the pump case 6. An exhaust pipe 12 is coupled to the surface on a −Z-direction side of the pump case 6.
The first sidewall 8 includes a first leg section 13 and a second leg section on the base 2 side. The first leg section 13 is disposed on a −Y-direction side and the second leg section is disposed on a +Y-direction side. The second sidewall 9 includes a third leg section 14 and a fourth leg section on the base 2 side. The third leg section 14 is disposed on the −Y-direction side and the fourth leg section is disposed on the +Y-direction side. The first leg section 13 to the fourth leg section are fastened to the base 2 by first bolts 15.
A monitoring device 16 is attached to the pump case 6, which is a part of the housing 3. The monitoring device 16 detects vibration of the housing 3. The monitoring device 16 includes a sensor unit 17 that detects the vibration of the housing 3. The sensor unit 17 includes an inertial sensor. Further, the monitoring device 16 includes a plate 18 for attachment of the sensor unit 17. Further, the plate 18 is fixed to the pump case 6 by second bolts 19. When the sensor unit 17 detects vibrations in three axial directions orthogonal to one another, a posture of the sensor unit 17 is not limited. The monitoring device 16 may output a waveform of vibration or may determine amplitude of the vibration and output a warning signal.
The pump case 6 includes first pipes 22 forming first channels 21. The motor case 4, the connecting section 5, and the pump case 6 include second pipes 24 forming second channels 23.
The internal structure of the vacuum pump 1 is explained with reference to
The two pump rotors 25 include two rotating shafts 27. First bearings 28 and second bearings 29 respectively rotatably support the two rotating shafts 27. The two motors 26 are coupled to one ends of the respective rotating shafts 27. The motors 26 are configured to rotate the two pump rotors 25 in synchronization in opposite directions each other. Two timing gears 31 are fixed to the other ends of the rotating shafts 27. The timing gears 31 are provided to secure synchronized rotation of the two pump rotors 25 when the synchronized rotation of the two motors 26 is lost.
The pump case 6 is sandwiched by the first sidewall 8 and the second sidewall 9. The pump rotors 25 are disposed in a pump chamber 32 configured by the pump case 6, the first sidewall 8, and the second sidewall 9.
The first sidewall 8 supports the first bearings 28 on the intake pipe 11 side. The first bearings 28 are disposed in the connecting section 5. The motors 26 are disposed in the motor case 4 fixed to the connecting section 5. The second bearings 29 on the exhaust pipe 12 side are fixed to the second sidewall 9. The timing gears 31 and the second bearings 29 are disposed in the gear case 7. The first bearings 28 and the second bearings 29 vibrate according to rotation of the pump rotors 25. The vibration of the first bearings 28 and the second bearings 29 is transmitted to the housing 3 for the pump case 6 and the like via the first sidewall 8 and the second sidewall 9.
As shown in
The pump case 6, which is a part of the housing 3, includes the second channels 23 for causing the water 33 to flow to portions opposed to the pump rotors 25. The water 33 in the second channels 23 prevents a temperature rise of the entire vacuum pump 1. Specifically, the first channels 21 is disposed in the pump case 6 in a portion opposed to the monitoring device 16. The second channels 23 are disposed in the pump case 6 in a portion not opposed to the monitoring device 16.
The first channels 21 have higher density than the second channels 23. The density indicates a total of sectional areas of a channel per unit area of a cross section orthogonal to the channel. With this configuration, since the first channels 21 have the higher density than the second channels 23, the monitoring device 16 can be efficiently cooled.
Specifically, a channel sectional area of the first channels 21 and a channel sectional area of the second channels 23 are the same. The number of the first channels 21 included in a predetermined area when viewed from the Y direction in which the water 33 flows in the pump case 6 is larger than the number of the second channels 23. With this configuration, the channel sectional area of the first channels 21 and the channel sectional area of the second channels 23 are the same. The first channels 21 and the second channels 23 can be formed by the same cutting tool. The first channels 21 and the second channels 23 can be formed with high productivity. The number of the first channels 21 included in the predetermined area when viewed from the Y direction in which the water 33 flows is larger than the number of the second channels 23. Therefore, the density of the first channels 21 can be set higher than the density of the second channels 23.
The first channels 21 and the second channels 23 having a linear shape are set in the housing 3. The first pipes 22 are disposed in portions where the first channels 21 exit the housing 3. The first channels 21 adjacent to one another in the housing 3 are coupled by the first channels 21 in the first pipes 22. Similarly, the second pipes 24 are disposed in portions where the second channels 23 exit the housing 3. The second channels 23 adjacent to one another in the housing 3 are coupled by the second channels 23 in the second pipes 24.
The housing 3 is a casting. The housing 3 is formed by pouring a material into a mold. The first channels 21 and the second channels 23 are formed by forming linear through-holes in the housing 3 with a drill. The through-holes are coupled by inserting the first pipes 22 and the second pipes 24 into the through-holes.
As shown in
The vacuum pump 1 includes a dividing section 38 that divides the supply channel 37 for supplying the water 33 into the first channel 21 and the second channel 23. With this configuration, the water 33 flowing in the supply channel 37 is supplied to the first channel 21 and the second channel 23. The temperature of the water 33 flowing in the first channel 21 is not affected by the temperature of the water 33 flowing in the second channel 23. Therefore, the first channel 21 can stably cool the monitoring device 16.
In an example in this embodiment, the temperature of the pump rotors 25 are approximately 70 degrees to 90 degrees. The temperature of the portions of the first bearings 28 and the second bearings 29 are approximately 100 degrees. A temperature compensation range of the monitoring device 16 is −40 degrees to 80 degrees. However, for the monitoring device 16 to accurately detect vibration of the housing 3, it is preferable to set the temperature of the housing 3 in a place where the monitoring device 16 is set to 15 degrees or higher and 45 degrees or lower. The temperature of the water 33 supplied from the supply channel 37 is approximately 20 degrees. The water 33 flowing in the second channel 23 removes heat of the entire vacuum pump 1. The water 33 flowing in the first channel 21 removes heat of the housing 3 in a place opposed to the monitoring device 16.
A second valve 39 is set in the first channel 21. The operator operates the second valve 39 to adjust a flow rate of the water 33 flowing in the first channel 21. A third valve 41 is set in the second channel 23. The operator operates the third valve 41 to adjust a flow rate of the water 33 flowing in the second channel 23. The operator adjusts the first valve 36, the second valve 39, and the third valve 41 to maintain the temperature of the housing 3 in the place where the monitoring device 16 is set at 15 degrees or higher and 45 degrees or lower.
The second channel 23 passes the pump case 6, the connecting section 5, and the motor case 4 in this order. The water 33 flowing in the second channel 23 is the lowest when flowing in the pump case 6 and is the highest when flowing in the motor case 4. The first channel 21 and the second channel 23 in which the water 33 having passed through the housing 3 flows merge in a merging section 42 and are coupled to a discharge channel 43. The water 33 having passed through the discharge channel 43 is discharged to a drainage channel 44. Order of the second channel 23 passing the sections in the housing 3 is not particularly limited.
A coolant flowing in the first channel 21 and the second channel 23 to cool the housing 3 is the water 33. With this configuration, since the coolant is the water 33, the industrial water can be used. Therefore, a device that circulates the coolant is unnecessary. The vacuum pump 1 can be constructed with high productivity.
A second embodiment is different from the first embodiment in that the first channel 21 and the second channel 23 are coupled in series. As shown in
Therefore, the supply channel 37 for supplying the water 33, the first channel 21, and the second channel 23 are coupled in series in this order. With this configuration, for example, when the water 33 having passed through the first channel 21 is supplied to the second channel 23, the temperature of the water 33 flowing in the first channel 21 is less easily affected by the temperature of the water 33 flowing in the second channel 23. Therefore, the first channel 21 can stably cool the monitoring device 16.
In the vacuum pump 46, the lengths of the first pipe 22 and the second pipe 24 can be set shorter compared with the first embodiment. Therefore, the vacuum pump 46 can be a device manufacturable with high productivity.
A third embodiment is different from the first embodiment in that the monitoring device 16 is set on the first sidewall 8. As shown in
The motor case 4, the connecting section 5, and the pump case 49 include second channels 52 and second pipes 53 for causing the water 33 to flow. The housing 48 includes the second channels 52 for causing the water 33 to flow to the portions opposed to the pump rotors 25. The second pipes 53 are disposed in portions where the second channels 52 exit the housing 48. The second channels 52 adjacent to one another in the housing 48 are coupled by the second channels 52 in the second pipes 53.
The first sidewall 51 includes an attachment stand 54. The monitoring device 16 is attached to the attachment stand 54. The attachment stand 54 is a part of the housing 48. The attachment stand 54 includes first channels 55 and first pipes 56 for causing the water 33 to flow. The housing 48 includes the first channels 55 for causing the water 33 to flow to a portion opposed to the monitoring device 16. The first channels 55 having a linear shape are set in the housing 48. The first pipes 56 are disposed in portions where the first channels 55 exit the housing 48. The first channels 55 adjacent to one another in the housing 48 are coupled by the first channels 55 in the first pipes 56.
As shown in
A fourth embodiment is different from the third embodiment in that the first channel 55 and the second channel 52 are coupled in series. As shown in
Therefore, the supply channel 37 for supplying the water 33, the first channel 55, and the second channel 52 are coupled in series in this order. With this configuration, for example, when the water 33 having passed through the first channel 55 is supplied to the second channel 52, the temperature of the water 33 flowing in the first channel 55 is less easily affected by the temperature of the water 33 flowing in the second channel 52. Therefore, the first channel 55 can stably cool the monitoring device 16.
In the vacuum pump 59, the lengths of the first pipe 56 and the second pipe 53 can be set shorter compared with the third embodiment. Therefore, the vacuum pump 59 can be a device manufacturable with high productivity.
In the first embodiment, the monitoring device 16 is set in the vacuum pump 1. The vacuum pump 1 is illustrated as the device. However, a type of the vacuum pump 1 is not particularly limited. The vacuum pump 1 may be various devices including rotating mechanisms such as a hydraulic pump and a water pump.
A sixth embodiment is different from the first embodiment in that a form of a channel for cooling the vacuum pump 1 is different. As shown in
The first top plate 71a includes a first water inlet port 71c and a first water outlet port 71d. The first water inlet port 71c and the first water outlet port 71d communicate with the first hollow 71e. The water 33 is filled in the first hollow 71e. Heat of the motors 26 is absorbed by the water 33 in the first hollow 71e. The water 33 supplied from the first water inlet port 71c absorbs the heat and is discharged from the first water outlet port 71d. As a result, the motors 26 are cooled. The first hollow 71e is formed as a channel wide in the X direction.
The first side plate 66a includes a second water inlet port 66c and a second water outlet port 66d. The second water inlet port 66c and the second water outlet port 66d communicate with the second hollow 66e. The water 33 is filled in the second hollow 66e. Heat of the motors 26 and the pump rotors 25 is absorbed by the water 33 in the second hollow 66e. The water 33 supplied from the second water inlet port 66c absorbs the heat and is discharged from the second water outlet port 66d. As a result, the motors 26 and the pump rotors 25 are cooled.
As shown in
The third top plate 72a includes a third water inlet port 72c and a third water outlet port 72d. The third water inlet port 72c and the third water outlet port 72d communicate with the third hollow 72e. The water 33 is filled in the third hollow 72e. Heat of the pump rotors 25 is absorbed by the water 33 in the third hollow 72e. The water 33 supplied from the third water inlet port 72c absorbs the heat and is discharged from the third water outlet port 72d. As a result, the temperature of the monitoring device 16 is maintained. The third hollow 72e is formed as a channel wide in the Y direction, the water 33 flowing in the channel in a positive direction.
A surface on the +Z-direction side of the sensor cooling section 72 is an attachment surface 72f for the monitoring device 16. The monitoring device 16 is attached to the attachment surface 72f. The length in the X direction of the third hollow 72e is a first length 73. The length in the Y direction of the third hollow 72e is a second length 74. The first length 73 and the second length 74 are the lengths in a direction parallel to the attachment surface 72f. A third length 75 is the length in the Z direction of the third hollow 72e. The third length 75 is the length of the third hollow 72e in a direction perpendicular to the attachment surface 72f. The first length 73 and the second length 74 are larger than the third length 75. Therefore, the length of a sectional shape of the third hollow 72e in a direction parallel to the attachment surface 72f for the monitoring device 16 is larger than the length in a direction perpendicular to the attachment surface 72f for the monitoring device 16.
With this configuration, a channel by the third hollow 72e can be more easily manufactured compared with the first channel 21 in the first embodiment. Since the channel is wider and shorter, fluid resistance can be set smaller compared with the first channel 21 in the first embodiment.
The housing 63 includes the third hollow 72e for causing the water 33 to flow to overlap the monitoring device 16 in a plan view from the direction perpendicular to the attachment surface 72f for the monitoring device 16.
As shown in
When a gap is present between the fourth bottom plate 76b and the pump case 67, the sensor unit 17 is affected by noise. Therefore, it is preferable to increase flatness of the components and join the components.
The housing 63 includes the fourth hollow 76e for causing the water 33 to flow to the portions opposed to the pump rotors 25. The supply channel 37 for supplying the water 33, the third hollow 72e, and the fourth hollow 76e are coupled in series in this order.
First through-holes 76g are formed in the fourth top plate 76a. Second through-holes 76h are formed in the fourth bottom plate 76b. Female screws are formed on the surface on the −Z-direction side of the pump case 67. Bolts pass through the first through-holes 76g and the second through-holes 76h and screw in the female screws of the pump case 67. The pump cooling section 76 is fixed to the pump case 67 by the bolts.
The fourth top plate 76a includes a fourth water inlet port 76c and a fourth water outlet port 76d. The fourth water inlet port 76c and the fourth water outlet port 76d communicate with the fourth hollow 76e. The water 33 is filled in the fourth hollow 76e. Heat of the pump rotors 25 is absorbed by the water 33 in the fourth hollow 76e. The water 33 supplied from the fourth water inlet port 76c absorbs heat and is discharged from the fourth water outlet port 76d. As a result, the pump rotors 25 are cooled.
The third side plate 68a includes a fifth water inlet port 68c and a fifth water outlet port 68d. The fifth water inlet port 68c and the fifth water outlet port 68d communicate with the fifth hollow 68e. The water 33 is filled in the fifth hollow 68e. Heat of the pump rotors 25 and the timing gears 31 is absorbed by the water 33 in the fifth hollow 68e. The water 33 supplied from the fifth water inlet port 68c absorbs the heat and is discharged from the fifth water outlet port 68d. As a result, the pump rotors 25 and the timing gears 31 are cooled.
As shown in
The cooling pipe 77 includes a sixth water inlet port 77c and a sixth water outlet port 77d. The sixth water inlet port 77c and the sixth water outlet port 77d are coupled to the cooling pipe 77. Heat of the timing gears 31 is transferred to the lubricating oil 78. Heat of the lubricating oil 78 is absorbed by the water 33 flowing in the cooling pipe 77. The water 33 supplied from the sixth water inlet port 77c absorbs the heat and is discharged from the sixth water outlet port 77d. As a result, the lubricating oil 78 and the timing gears 31 are cooled.
The water source 34 and the third water inlet port 72c are coupled by the supply pipe 35. The water 33 supplied from the water source 34 passes through the supply channel 37, the sensor cooling section 72, the cooling pipe 77, the motor cooling section 71, the first sidewall 66, the second sidewall 68, and the pump cooling section 76 in this order and is discharged to the drainage channel 44. Since the water 33 in the water source 34 is cooled, the sensor cooling section 72 on upstream has the highest cooling ability.
It is preferable to use Ni-resist as the material of the sensor cooling section 72, the motor cooling section 71, the first sidewall 66, the second sidewall 68, and the pump cooling section 76. The Ni-resist is an alloy containing chrome, nickel, and copper other than iron. Characteristics of the Ni-resist include heat resistance, corrosion resistance, and a low coefficient of thermal expansion. Therefore, the life of the vacuum pump 62 can be extended.
The sensor cooling section 72, the motor cooling section 71, the first sidewall 66, the second sidewall 68, and the pump cooling section 76 may be casted. A shape having a recess can be easily manufactured.
As a method of fixing the sensor cooling section 72 to the pump case 67, screwing and welding can be used. Besides, the sensor cooling section 72 and the pump case 67 may be integrally formed.
A seventh embodiment is different from the sixth embodiment in that the monitoring device 16 is set on the first sidewall 66. As shown in
The first sidewall 83 includes a first side plate 83a and a second side plate 83b. The first side plate 83a includes a recess on the second side plate 83b side. The first side plate 83a and the second side plate 83b are joined. The recess is formed as a second hollow 83e.
The first side plate 83a includes a second water inlet port 83c and a second water outlet port 83d. The second water inlet port 83c and the second water outlet port 83d communicate with the second hollow 83e. The water 33 is filled in the second hollow 83e. Heat of the motors 26 and the pump rotors 25 are absorbed by the water 33 in the second hollow 83e. The water 33 supplied from the second water inlet port 83c absorbs the heat and is discharged from the second water outlet port 83d. As a result, the motors 26 and the pump rotors 25 are cooled.
The first sidewall 83 is longer on the +Z-direction side than the first sidewall 66 in the sixth embodiment. On the +Z-direction side of the first sidewall 83, a sensor cooling section 84 is set on the −X-direction side. As shown in
The sensor cooling section 84 includes the third top plate 84a and a third bottom plate 84b. The third top plate 84a includes a recess on the third bottom plate 84b side. The third top plate 84a and the third bottom plate 84b are joined. The recess is formed as a third hollow 84e functioning as a first channel.
The third top plate 84a includes a third water inlet port 84c and a third water outlet port 84d. The third water inlet port 84c and the third water outlet port 84d communicate with the third hollow 84e. The water 33 is filled in the third hollow 84e. Heat transferred from the first sidewall 83 is absorbed by the water 33 in the third hollow 84e. The water 33 supplied from the third water inlet port 84c absorbs the heat and is discharged from the third water outlet port 84d. As a result, the temperature of the monitoring device 16 is maintained.
The surface on the +Z-direction side of the sensor cooling section 84 is an attachment surface 84f for the monitoring device 16. The monitoring device 16 is attached to the attachment surface 84f. The length in the X direction of the third hollow 84e is the first length 73. The length in the Y direction of the third hollow 84e is the second length 74. The first length 73 and the second length 74 are lengths in a direction parallel to the attachment surface 84f. The third length 75 is the length in the Z direction of the third hollow 84e. The third length 75 is the length of the third hollow 84e in a direction perpendicular to the attachment surface 84f. The first length 73 and the second length 74 are larger than the third length 75. Therefore, the length of a sectional shape of the third hollow 84e in the direction parallel to the attachment surface 84f for the monitoring device 16 is larger than the length in the direction perpendicular to the attachment surface 84f for the monitoring device 16.
With this configuration, a channel by the third hollow 84e can be easily manufactured compared with the first channel 21 in the first embodiment. Since the channel is wider and shorter, fluid resistance can be set smaller compared with the first channel 21 in the first embodiment.
The housing 82 includes the third hollow 84e for causing the water 33 to flow to overlap the monitoring device 16 in a plan view from the direction perpendicular to the attachment surface 84f of the monitoring device 16.
The water source 34 and the third water inlet port 84c are coupled by the supply pipe 35. The water 33 supplied from the water source 34 passes through the supply channel 37, the sensor cooling section 84, the cooling pipe 77, the motor cooling section 71, the first sidewall 83, the second sidewall 68, and the pump cooling section 76 in this order and is discharged to the drainage channel 44.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2020-141531 | Aug 2020 | JP | national |
| 2021-099986 | Jun 2021 | JP | national |
| Number | Name | Date | Kind |
|---|---|---|---|
| 20180170783 | Baxter | Jun 2018 | A1 |
| 20220412357 | Mikulic | Dec 2022 | A1 |
| Number | Date | Country |
|---|---|---|
| 207982885 | Oct 2018 | CN |
| 2000-074080 | Mar 2000 | JP |
| Entry |
|---|
| English translation of CN207982885 by PE2E Jan. 10, 2023. |
| Number | Date | Country | |
|---|---|---|---|
| 20220065253 A1 | Mar 2022 | US |
