VACUUM VALVE

Abstract

In a vacuum valve composed of a main valve portion that opens and closes a vale seat in a flow path connecting two ports by a valve member, and an operating portion that performs an opening and closing operation for the valve member, the housing of the main valve portion is assembled by joining the two port members with a cylindrically shaped housing main body formed by a squeezing process for a plate material made of metal, or a ring-shaped material made of the metal. In an end portion of the housing, a flange-shaped attaching portion that is bent inward is formed. The operating portion is attached onto the attaching portion via a ring-shaped supporting seat member. A sealing member is sandwiched between a ring-shaped supporting plate and the attaching portion. Both ends of a bellows are respectively connected to the supporting plate and the valve member.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of an assembling condition illustrating a first constructional example of a housing of a vacuum valve according to the present invention.

FIG. 2 is a cross-sectional view illustrating a condition before the housing in FIG. 1 is assembled.

FIG. 3 is a cross-sectional view illustrating a second constructional example of the housing.

FIG. 4( a) through (c) is a cross-sectional view illustrating different constructional examples of a port member.

FIG. 5 is a cross-sectional view illustrating a first embodiment of the vacuum valve according to the present invention.

FIG. 6 is a plan view of FIG. 5.

FIG. 7 is a plan view illustrating a supporting seat member.

FIG. 8 is a cross-sectional view illustrating a second embodiment of the vacuum valve according to the present invention.

FIG. 9 is a right side elevation of FIG. 8.

FIG. 10 is a main-part cross-sectional view illustrating an example of a method for forming an attaching portion.

FIG. 11 is a main-part cross-sectional view illustrating another constructional example of the supporting seat member.

FIG. 12 is a plan view of FIG. 11.

FIG. 13 is a cross-sectional view illustrating a third constructional example of the housing.

Claims

1. A vacuum valve comprising: two ports connected to a vacuum chamber and a vacuum source;a valve seat formed in a halfway of a flow path connecting the two ports;a main valve portion including a poppet-type valve member contacting and separating from the valve seat for opening and closing the flow path; andan operating portion for performing an opening and closing operation for the valve member,wherein a housing of the main valve portion includes a cylindrically shaped housing main body having a uniform thickness formed by performing a press-drawing process or a spinning process for a plate material made of metal, or a ring-shaped material made of metal, and cylindrically shaped two port members forming the two ports, and wherein the housing of the main valve portion is assembled by joining each of the two port members with an opening portion for a port, formed at each of a first end in an axis line direction of the housing main body and a side surface thereof, andwherein at a second end in the axis line direction of the housing main body, a flange-shaped attaching portion having a uniform thickness is formed by inwardly bending the end portion of the housing main body, and a supporting seat member provided with a round inner hole having a diameter greater than an inner diameter of the attaching portion is attached onto the attaching portion, and wherein the operating portion is attached onto the supporting seat member, and further a ring-shaped sealing member and a ring shaped supporting plate are sandwiched between the attaching portion and the operating portion in an inner hole of the supporting seat member, and wherein both ends of a bellows are respectively connected to the supporting plate and the valve member.

2. The vacuum valve according to claim 1, wherein the supporting seat member is fixed by joining the same with the attaching portion, and a plurality of female screws are formed in the supporting seat member, and wherein the operating portion is attached to the supporting seat member by screwing a screw rod provided in the operating portion into each of the plurality of female screws.

3. The vacuum valve according to claim 1, wherein the supporting plate is formed from an anticorrosion metallic material as the same as the housing.

4. The vacuum valve according to claim 2, wherein the supporting plate is formed from an anticorrosion metallic material as the same as the housing.

5. The vacuum valve according to claim 1, wherein the supporting seat member includes a main body portion to be mounted on an upper surface of the attaching portion, and a skirt portion extending out from an outer peripheral end of the main body portion to a housing side, and surrounding an outer periphery of the housing.

6. The vacuum valve according to claim 2, wherein the supporting seat member includes a main body portion to be mounted on an upper surface of the attaching portion, and a skirt portion extending out from an outer peripheral end of the main body portion to a housing side, and surrounding an outer periphery of the housing.

7. The vacuum valve according to claim 1, wherein the supporting seat member has a groove-shaped cross-sectional shape, and is attached onto the attaching portion in a condition that an opening edge of the groove is in contact with the attaching portion.

8. The vacuum valve according to claim 2, wherein the supporting seat member has a groove-shaped cross-sectional shape, and is attached onto the attaching portion in a condition that an opening edge of the groove is in contact with the attaching portion.

9. The vacuum valve according to claim 1, wherein a jacket for transmitting heat is adhered to an outer surface of the housing of the main valve portion.

10. The vacuum valve according to claim 9, wherein the jacket and the supporting seat member are integrally formed.

11. A housing for use in a main valve portion in a vacuum valve comprising: two ports connected to a vacuum chamber and a vacuum source;a valve seat formed in a halfway of a flow path connecting the two ports;a main valve portion including a poppet-type valve member for opening and closing the valve seat; andan operating portion for performing an opening and closing operation for the valve member,wherein a housing includes a cylindrically shaped housing main body having a uniform thickness formed by performing a press-drawing process or a spinning process for a plate material made of metal, or a ring-shaped material made of metal, and cylindrically shaped two port members forming the two ports, and wherein the housing is assembled by joining each of the two port members with an opening portion for a port, formed at each of a first end in an axis line direction of the housing main body and a side surface thereof, andwherein at a second end in the axis line direction of the housing main body, a flange-shaped attaching portion having a uniform thickness for attaching the operating portion is formed by inwardly bending an end portion of the housing main body.

12. The housing for use in a main valve portion according to claim 11, wherein a supporting seat member including a round inner hole having a diameter greater than an inner diameter of the attaching portion, and a plurality of female screws for attaching the operating portion is fixed onto the attaching portion by joining.

13. The vacuum valve according to claim 12, wherein the supporting seat member has a groove-shaped cross-sectional shape, and is fixed to the attaching portion in a condition that the opening edge of the groove is in contact with the attaching portion.