Claims
- 1. A valve system comprising:
- a manifold block;
- a plurality of sealing valves at one surface of said manifold block;
- a common passage buried in said manifold block away from said one surface;
- a plurality of entry ports extending from said surface of said manifold block into said manifold, one end of each entry port being in fluid connection with a corresponding one of said sealing valves, the other end of said entry port being in fluid connection with the common passage at a juncture; and
- a projection positioned in the common passage at the juncture of the common passage and at least one of said entry ports for directing the flow of said fluid from the common passage into the entry port and then back into the common passage, said flow being sufficient to wash said entry port.
- 2. The valve system as in claim 1 wherein said flow interrupting means comprises a physical projection blocking a portion of said common passage at said juncture of said common passage and said entry port.
- 3. A valve system as in claim 2 wherein:
- said manifold block comprises a plurality of layers, at least some of said layers being composed of photochemically machinable glass material, at least one of said layers having a pattern of openings forming said common passage, said plurality of entry ports, and said flow interrupting means, when said layers are stacked and fused to form said manifold block.
- 4. The valve system as in claim 1 further comprising vacuum manifold means integral to said manifold block, for conducting a vacuum through said manifold block.
- 5. A valve system as in claim 4 wherein said vacuum manifold means comprises a vacuum passage buried in said block.
- 6. The valve system as in claim 1 wherein:
- said manifold block comprises a plurality of layers, at least some of said layers being composed of silicon, at least one of said layers having a pattern of openings forming said common passage, said plurality of entry ports, and said flow interrupting means, when said layers are stacked and fused to form said manifold block.
Parent Case Info
This application is a continuation of application Ser. No. 08/324,322 filed 17 Oct. 1994 now abandoned.
US Referenced Citations (10)
Continuations (1)
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Number |
Date |
Country |
Parent |
324322 |
Oct 1994 |
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