Patent Application
20250164030
The present application relates to valves, and more particularly to valves with diaphragms for controlling fluid such as chemical solution, water or the like.
The controlled amounts of chemical solutions or water are required in many manufacturing processes, for example, when a pharmaceutical factory produces drugs, or when a semiconductor factory coats the surface of a wafer to form a film of uniform thickness. Therefore, a precise valve is required for many industries. For example, the PTFE (Polytetrafluoroethylene) diaphragm valves are used in chemical fluid systems in the semiconductor industry. Traditional PTFE valves lack self-detecting functions to alarm the leakage from the valves. The leakage may cause safety accidents and losses of personnel and property. While a valve installed in a flow channel inevitably has the leakage issue, there is a requirement for a valve with the leakage detection.
The present disclosure reveals a valve with the self-detecting function for leakage to achieve the timely detection and timely processing, and reduce the losses caused by failed valves.
One aspect of the present disclosure provides a valve comprising a controller and a body. The controller comprises a drive rod and a diaphragm. The drive rod is driven to move the diaphragm. The body comprises an opening and a chamber. The opening is covered by the controller. The chamber contains the diaphragm moving inside the chamber, and the chamber is blocked by the diaphragm driven to reach a bottom of the chamber. A detector is installed to detect a leakage above the diaphragm, and the detector is connected to outside.
Another aspect of the present disclosure provides a valve comprising a controller and a body. The controller comprises a drive rod, a cylinder, a pneumatic hole, and a diaphragm. The drive rod is driven to move the diaphragm, and the drive rod has a piston in a middle section. The cylinder covers the controller. The pneumatic hole moves the drive rod by pumping air into or exhausting air from a space between the cylinder and the piston. The body comprising an opening, and a chamber. The opening is covered by the controller. The chamber contains the diaphragm moving inside the chamber, and the chamber is blocked by the diaphragm driven to reach a bottom of the chamber. A detector is installed above the diaphragm to detect a leakage, and the detector is connected to outside.
Another aspect of the present disclosure provides a valve comprising a chamber, a diaphragm and a detector. The diaphragm moves inside the chamber. The chamber is blocked when the diaphragm is driven to reach a bottom of the chamber. The detector is installed above the diaphragm to detect a leakage, and the detector is connected to outside.
The foregoing has outlined rather broadly the features and technical advantages of the present disclosure in order that the detailed description of the disclosure that follows may be better understood. Additional features and advantages of the disclosure will be described hereinafter, and form the subject of the claims of the disclosure. It should be appreciated by those skilled in the art that the conception and specific embodiment disclosed may be readily utilized as a basis for modifying or designing other structures or processes for carrying out the same purposes of the present disclosure. It should also be realized by those skilled in the art that such equivalent constructions do not depart from the spirit and scope of the disclosure as set forth in the appended claims.
A more complete understanding of the present disclosure may be derived by referring to the detailed description and claims when considered in connection with the example embodiments shown in the drawings, in which:
Embodiments, or examples, of the disclosure illustrated in the drawings are now described using specific language. It shall be understood that no limitation of the scope of the disclosure is hereby intended. Any alteration or modification of the described embodiments, and any further applications of principles described in this document, are to be considered as normally occurring to one of ordinary skill in the art to which the disclosure relates. Reference numerals may be repeated throughout the embodiments, but this does not necessarily mean that feature(s) of one embodiment apply to another embodiment, even if they share the same reference numeral. It shall be understood that, although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers or sections, these elements, components, regions, layers or sections are not limited by these terms. Rather, these terms are merely used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present inventive concept. The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limited to the present inventive concept. As used herein, the singular forms “a,” “an” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It shall be further understood that the terms “comprises” and “comprising,” when used in this specification, point out the presence of stated features, integers, steps, operations, elements, or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or groups thereof.
Valves according to embodiments of the present disclosure will be described with reference to the drawings. The present invention will be described in detail below with reference to the accompanying drawings.
As shown in
After the opening shell 121 is inserted by the limiting element 122, the limiting element 122 is configured to be fixed at a position of the drive rod 132 to prevent the drive rod 132 from being overdriven. An inner case 128 is installed inside the controller 100, and the inner case 128 has a through hole for containing a part of the drive rod 132. The threaded sleeve 126 encircles the inner case 128 and covering the opening 210. The limiting element 122 moves with the drive rod 132 until the limiting element 122 touches the inner case 128, and the drive rod 132 stops moving when the limiting element 122 stops moving. Optionally, a protruding ring 133 encircles a bottom end of the drive rod 132 to prevent the drive rod 132 from disengaging the inner case 128. Below the drive rod 132, a connector 134 has a rod inserted into the diaphragm 140 and a round indentation to be inserted by the drive rod 132. A flange 136 and a gasket 138 are installed over the diaphragm 140 and inside the inner case 128. Optionally, a colored ring 124 encircles an upper opening of the inner case 128. The colored ring 124 is totally covered by the knob 120 when the diaphragm 140 reaches a position to totally block the chamber 285 of the body 200 shown in
Referring to
Referring to
To sum up, the diaphragm valves described in the embodiments of the present disclosure can performed precise and accurate fluid control, and is extremely advantageous as a device used in, for example, a semiconductor production line or a production line of various chemicals.
Although the present disclosure and its advantages have been described in detail, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the disclosure as defined by the appended claims. For example, many of the processes discussed above can be implemented in different methodologies and replaced by other processes, or a combination thereof. Moreover, the scope of the present application is not intended to be limited to the particular embodiments of the process, machine, manufacture, composition of matter, means, methods and steps described in the specification. As one of ordinary skill in the art will readily appreciate from the disclosure of the present disclosure, processes, machines, manufacture, compositions of matter, means, methods, or steps, presently existing or later to be developed, that perform substantially the same function or achieve substantially the same result as the corresponding embodiments described herein may be utilized according to the present disclosure. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufacture, compositions of matter, means, methods, or steps.
