Number | Date | Country | Kind |
---|---|---|---|
3-333961 | Nov 1991 | JPX | |
3-359136 | Dec 1991 | JPX | |
4-091870 | Mar 1992 | JPX | |
4-324964 | Nov 1992 | JPX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/JP92/01511 | 11/19/1992 | 7/19/1993 | 7/19/1993 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO93/10275 | 5/27/1993 |
Number | Name | Date | Kind |
---|---|---|---|
3642541 | Shepard | Feb 1972 | |
3915757 | Engel | Oct 1975 | |
4237192 | Ito et al. | Dec 1980 | |
4252837 | Auton | Feb 1981 | |
4587135 | Diener et al. | May 1986 | |
4729905 | Zhed et al. | Mar 1988 | |
4933058 | Bache et al. | Jun 1990 | |
4940522 | Kagechika et al. | Jul 1990 | |
4966668 | Veistinen | Oct 1990 | |
4978588 | Adaniya et al. | Dec 1990 | |
4980195 | Olds | Dec 1990 | |
5061512 | Upadhya | Oct 1991 | |
5073403 | Kagechika et al. | Dec 1991 | |
5270081 | Manier et al. | Dec 1993 |
Number | Date | Country |
---|---|---|
269112 | Jun 1988 | EPX |
135216 | Apr 1979 | DEX |
263084 | Dec 1988 | DEX |
86-141869 | Jul 1985 | JPX |
86-169372 | Jul 1988 | JPX |
2080553 | Mar 1990 | JPX |
2247371 | Oct 1990 | JPX |
5-78818 | Mar 1993 | JPX |
1745776 | Jul 1992 | SUX |
Entry |
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Kominkiak et al, "Reactive Plasma Cleaning of Metals", Thin Solid Films, 40, 1977 (no month) pp. 141-148. |