Vaporizer for substrate processing apparatus

Information

  • Patent Grant
  • D741823
  • Patent Number
    D741,823
  • Date Filed
    Thursday, January 9, 2014
    10 years ago
  • Date Issued
    Tuesday, October 27, 2015
    9 years ago
Abstract
Description


FIG. 1 is a front, perspective view of a vaporizer for substrate processing apparatus showing our new design;



FIG. 2 is a front, bottom perspective view thereof;



FIG. 3 is a front elevational view thereof, the back elevation view being the same therefore omitted;



FIG. 4 is a left side elevational view thereof, the right side elevation view being the same therefore omitted;



FIG. 5 is a top plan view thereof;



FIG. 6 is a bottom plan view thereof; and,



FIG. 7 is a cross-sectional view taken along line 7-7 in FIG. 5.


The back elevational view is the same as the front elevational view and has, therefore, been omitted; the right side elevational view is the same as the left side elevational view and has, therefore been omitted.


Claims
  • The ornamental design for a vaporizer for substrate processing apparatus, as shown and described.
Priority Claims (1)
Number Date Country Kind
2013-015793 Jul 2013 JP national
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