Claims
- 1. An apparatus for controlling and regulating liquid flow, comprising:
a) a liquid flow channel having a low permeability for liquid flow, w herein said flow channel has an inlet and an outlet, w herein the inlet is joined to a high pressure liquid source and the outlet joined to a delivery point; b) spaced electrodes disposed within said liquid flow channel; and c) a power supply connected to said spaced electrodes.
- 2. The apparatus of claim 1, wherein said flow channel comprises a plurality of capillaries or microchannels.
- 3. The apparatus of claim 1, wherein low permeability is provided by incorporating immobile particles within said flow channel.
- 4. The apparatus of claim 1, wherein low permeability is provided by incorporating a porous polymer material or ceramic medium within said flow channel.
- 5. The apparatus of any of claims 1, 2, 3, or 4 wherein the permeability of the liquid flow channel is between about 1×10−6 to about 1×10−14/cm2.
- 6. The apparatus of claim 1, w herein the high pressure liquid source is an electrokinetic pump.
- 7. The apparatus of claim 1, further including feedback control means.
- 8. A mass flow controller, comprising:
a) a high pressure liquid source having an inlet and an outlet; and b) a variable flow controller, wherein said flow controller comprises;
a liquid flow channel having a low permeability for liquid flow, wherein said flow channel has an inlet and an outlet, wherein the inlet is joined to a high pressure liquid source and the outlet joined to a delivery point, spaced electrodes disposed within said liquid flow channel, and a power supply connected to said spaced electrodes.
- 9. The mass flow controller of claim 8, further including a liquid accumulator connected to the junction between the high pressure liquid source and the variable flow controller.
- 10. The mass flow controller of claim 8, further including feedback control means for controlling liquid flow from said variable flow controller.
- 11. The mass flow controller of claim 8, wherein said flow channel comprises a plurality of capillaries or microchannels.
- 12. The mass flow controller of claim 8, wherein low permeability is provided by incorporating immobile particles within said flow channel.
- 13. The mass flow controller of claim 8, wherein low permeability is provided by incorporating a porous polymer material or ceramic medium within said flow channel.
- 14. The mass flow controller of any of claims 8, 11, 12, or 13 wherein the permeability of the liquid flow channel is between about 1×10−6 to about 1×10−14/cm2.
- 15. The mass flow controller of claim 8, wherein said high pressure liquid source is an electrokinetic pump.
- 16. A liquid flow controller for a high pressure microfluidic device, comprising:
a substrate fabricated to define a microchannel system disposed thereon, the microchannel system, in part, comprising:
a) a liquid flow channel having a low permeability for liquid flow, wherein said flow channel has an inlet and an outlet, wherein the inlet is joined to a high pressure liquid source and the outlet joined to a delivery point; b) spaced electrodes disposed within said liquid flow channel; and c) a power supply connected to said spaced electrodes.
- 17. The apparatus of claim 16, wherein said flow channel comprises a plurality of capillaries or microchannels.
- 18. The apparatus of claim 16, wherein low permeability is provided by incorporating immobile particles within said flow channel.
- 19. The apparatus of claim 16, wherein low permeability is provided by incorporating a porous polymer material or ceramic medium within said flow channel.
- 20. The apparatus of any of claims 16, 17, 18, or 19 wherein the permeability of the liquid flow channel is between about 1×10−6 to about 1×10−14/cm2.
- 21. The apparatus of claim 16, wherein the high pressure liquid source is an electrokinetic pump.
- 22. A method for controlling and regulating liquid flow, comprising:
a) providing a high pressure liquid source having an inlet and an outlet; b) connecting the apparatus of claim 1 to the outlet of the liquid source; c) controlling the rate of liquid flow from the source by applying a voltage to said spaced electrodes.
- 23. The method of claim 22, further including providing a pressure accumulator positioned at the junction between the high pressure liquid source and the apparatus of claim 1.
STATEMENT OF GOVERNMENT INTEREST
[0001] This invention w as made with Government support under contract no. DE-AC04-94AL85000 awarded by the U. S. Department of Energy to Sandia Corporation. The Government has certain rights in the invention.