The present invention pertains to temperature control of devices and particularly to an apparatus for such temperature control.
The invention is a vapor phase variable thermal resistor for efficient thermal control of a device in a changeable ambient temperature environment.
Many systems include components or subsystems that require operation at fixed and elevated temperatures. Temperature regulation is usually achieved by use of a variable power heater that uses more heat when the external environment is cool and uses less heat when the external environment is warm. Often, the power used in this temperature regulation system is a dominant part of the power budget for the entire system. It is desirable to reduce the power required to maintain constant temperature.
The present invention may incorporate a variable thermal resistor that reduces the power required to maintain a device at constant temperature by varying the thermal resistance of the package as a function of temperature. The term “resistor” herein may generally refer to a thermal resistor rather than an electrical resistor.
The present system may be passively adapted to the ambient temperature, without a need of complex mechanical structure. It may be easy to scale from a small to a large device and vice versa without an increase of design and structure complexity. The system may easily adapt to devices of various shapes and surfaces, including irregular ones, and be quite inert to structural failure because of no moving components. The system may enable a temperature-stabilizing capability to an operating temperature range which may have appeared previously not feasible due to power constraints.
Some of the advantages of the system with a VTR compared with a similar system without a VTR may be noted herein. In the present system, there may be significantly lower thermal management power consumption (greater than ten times) than a system without VTR. The present system may significantly extend the operating temperature range (e.g., to a low temperature so as to meet military specs) which appeared previously impossible with other like systems. Thus, this system may make feasible (military) applications of high precision devices at very low temperatures with long-term deployment.
The system may provide a passive approach without a mechanically moving component, and therefore would not necessarily be prone to structural failure and mechanical drift. The system may be non-complex and structurally simple. The system may involve “non-contact”, and be non-intrusive with minimum interference to the subject device function and structure.
Some factors of the present system may include several of the following items. There should be a vapor material selection. It appears desirable to have the vapor material work in the free-molecule and/or transition heat transfer regimes in the desired operating temperatures. The material should be compatible with the process and structure. Although there may be vapor materials available in the temperature range of interest, one might do a parametric study and experimental validation before selection of the material.
In the passive approach of the present system, the thermal performance may be adjusted once built. Thus, one may design and build the device to a set specification without large variation. This may require accurate modeling and some validation during design to eliminate uncertainty.
This approach may require an integration of the functional device, vapor cell, and thermal isolation structure through hermetic packaging. Although hermetic bonding/sealing methods appear well developed, the process compatibility and feasibility may still be examined carefully for accurate design and process control.
Interference from impurities may be a concern. An impurity gas could come from other materials inside the structure, from ambient gas diffusion and/or process-induced gas. It seems virtually impracticable to wholly eliminate all impurities. Thus, it may be important to understand the influence and tolerance of impurity gases and to control them to an acceptable level. Out-gassing from the structure may be controlled by material selection and a getter. The ambient gas intrusion may be controlled by a cautious bonding/sealing design. The process-induced gas may be controlled by a vacuum process.
The resistor system 10 may consist of a hermetically sealed solid shell surrounding the device which is to remain at constant temperature (the device being, for example, a VCSEL or a MEMS gyroscope). An instance of an arrangement of the shell or package 11 and device or component 12, is shown cutaway views of
The space 17 between the shell 11 and the device 12 may be evacuated such that the only gas in the space 17 is the vapor 18 of the low vapor pressure solid 16 or liquid 16. A gap 19 between the shell 11 and the device 12 may be a design parameter of space 17 that can be changed to adjust the heat transfer between the shell 11 and the device 12. The gap 19 may be usually from just above zero to a few millimeters (mm). A structure of low thermal conductance bars or legs 21 may support the device 12 relative to the shell 11 in order to minimize solid conduction losses between device 12 and shell 11. The conductance of the legs 21 may be varied to dissipate the steady state heat generated in the device 12. The surface 22 of the device 12 and low vapor pressure material may be of low emissivity materials to minimize radiation heat losses.
The VCSEL, MEMS gyroscope, or other device 12 may be constant temperature controlled. The device 12 may be encased in a housing having a shape and dimensions similar in proportion to those of the internal surface of the enclosure or shell 11 so as to result in a gap 19 having a constant and/or certain dimension between the surfaces of the shell 11 and device 12. The device with the housing may still be referred as to the device 12.
The thermal conductivity of a gas is generally a linear function of pressure from about zero torr to about one torr. In
At low temperatures, the vapor pressure of the “low vapor pressure material” may be very small, so the thermal conductance of the gap 19 and therefore the heat losses would be very low. At high temperature, the vapor pressure of the “low vapor pressure material” may be higher, so the thermal conductance of the gap 19 and therefore the heat losses would be higher. Thus, the present system may thus be a type of variable thermal resistor 10 that reduces the power required to maintain the VCSEL or other device 12 at a constant temperature under low ambient temperature conditions.
The vapor phase variable thermal resistor (VTR) system 10 may provide a low power approach to significantly improve the performance of the device 12 through temperature stabilization. The VTR 10 may include a hermetically sealed vapor cell or shell 11 and thermal isolation structure surrounding the device or component 12, whose thermal resistance changes by more than ten times over a temperature range of about −40° C. to 85° C. (e.g., a product specification). This passive approach may have no moving parts and take advantage of the non-linear change in vapor pressure with temperature of a vapor generating coating, to modulate the thermal resistance of the gap 19 separating the temperature stabilized component 12 and the VTR package 11.
Several applications of the present resistor system 10 and benefits of temperature stabilization with the vapor phase VTR may be noted. One application may include a micro electro mechanical systems (MEMS) gyroscope as a device 12 in which stability improved five times with temperature stabilization (
Many systems may often include components that require operation at a fixed temperature, for example, the vertical cavity semiconductor laser (VCSEL) and physical package of a chip scale atomic clock (CSAC). This may usually be achieved by heating the respective component with a variable power heater which uses more power at low ambient temperatures and less power at high ambient temperatures. In many cases, the power used to regulate component temperature may be a significant portion of the total power budget of the system. Thus, it is desirable to move away from active heating to a thermal management strategy based on a variable thermal resistance and a passive power consumption of the component. At low ambient temperatures the thermal resistance may be high, allowing the component to remain warm without significant heating; while at high ambient temperatures the thermal resistance may be low, allowing the component to dissipate enough heat to maintain the correct temperature. This approach of system 10 may complement maintenance of the temperature of the component 12.
The hermetic package 11 with an externally integrated heat sink 13 may surround the temperature stabilized component 12. A vapor-generating coating 16 (solid or liquid in porous structure) may cover the interior walls 15 of the hermetic package 11. The temperature stabilized component 12 may sit on a low conductance thermal isolation structure 21 attached to package 11, having bars or legs. The pressure in the vapor gap 19 may be modulated by an ambient temperature, which in turn can control the thermal conductance of the gap 19. Due to the non-linear nature of the change in vapor pressure versus temperature, the thermal conductance of the vapor gap 19 may change by five orders of magnitude over a temperature range of −40° C. to 85° C.
The total thermal conductance between the temperature stabilized component 12 and the hermetic package 11 may change by ten times over the temperature range. One may note that the
A stabilized component 12 may be maintained at a constant temperature by transferring to the walls of the hermetic package 11 the heat generated inside the component 12 plus the heater power used to sustain (and fine tune) the temperature when needed. Heat dissipation of system 10 may be tunable from 1e1 to 1e5 watt/sq meter by changing the low vapor coating material, gap thickness and surface area. Heat may be transferred by (solid) conduction through the thermal isolation structure 21, (gas) conduction through vapor gap 19, and (either medium) radiation. Heat transfer by free convection in enclosed gaps 19 may be negligible if the product of the dimensionless Grashof and Prandtl numbers is less that one thousand, (Holman, 1990) which is generally the case here. An operating ambient temperature range of the temperature stabilized component 12 may be limited at low ambient temperature by a maximum amount of allowed heater power, and at high ambient temperature by a maximum permissible temperature of the stabilized component 12.
The total heat transfer may be represented by the following equation.
QTot=QSolid+QGas+QRad (1)
An approximate relationship for the gas thermal conductivity may be represented by the following,
where KR is the thermal conductivity at pressure P, K0 is the thermal conductivity at one-atmosphere pressure, and PP is a pressure parameter,
Additional details of the terms in equations (1)-(3), are noted herein.
It also appears from
Gap pressure modulation as a function of temperature may be accomplished passively by coating the interior walls 15 of the package 11 with an appropriate substance 16 (solid, or liquid in porous media). When evacuated, the pressure in the gap 19 may be due only to the vapor pressure of the coating material 16, which can be computed approximately from
where “a” and “b” are empirical constants, and “T” is the package 11 temperature. Since the package 11 temperature is essentially equal to ambient temperature, the gap 19 pressure (and thermal conductivity) may be modulated or determined by ambient temperature of environment 20.
A wide range of vapor pressures may be achieved at a given temperature by choosing the appropriate material 16; thus, it may be possible to accommodate a wide range of operating ambient temperatures, heat dissipation levels, and geometries.
A MEMS gyroscope (gyro) is an example of a device 12 in which significant performance improvements are possible with temperature stabilization. With temperature stabilization, the predicted bias stability of the MEMS gyro should improve from 3
or five times. An application of the vapor phase VTR system 10 to this device may be shown.
The gyro may consist of a MEMS component and supporting electronics, both of which have temperature sensitive parameters and may benefit from temperature stabilization. The required operating temperature range of the gyro may be said to be from—40° C. to 85° C. The gyro may be approximated as a one cm3 cube that dissipates 100 mW of heat. With these gyro parameters along with VTR parameters, thermal performance of the package may be calculated and plotted. A graph on
From the appearance of the plots in the
Heater power may be zero when the ambient temperature is 85° C., and may have a maximum of 0.15 watt when the ambient temperature is 40° C. Thus, for a maximum power input of 0.15 watt, the bias stability of the gyro over the ambient −40° C. to 85° C. operating range may improve by five times.
A VCSEL may be used in many applications which require very precise temperature control to maintain constant wavelength. It may be a component 12 of the present system. A table 38 in
When compared to the heater power requirements of the previous VCSEL thermal isolation structure, the advantage of the VTR appears evident in
Relative to equation (1) herein, the radiation heat transfer for two concentric surfaces may be approximated by the following relationship (Holman 1990),
where σ is the Stefan-Bolzmann constant, ε1 and ε2 are the emissivities of the surfaces enclosing the gas layer at temperature T*.
The solid conduction QSolid through the thermal isolation structure may be governed by Fourier's Law,
QSolid=−kA∇T, (6)
where k is the thermal conductivity of the material, A is the cross sectional area, and ∇T is the temperature gradient. Solid conduction heat transfer may thus be a linear function of the temperature difference between the stabilized component 12 and the package 11.
Heat transfer QGas through the vapor gap 19 may be separated into four distinct regimes which are distinguished from each other by the value of the Knudsen number,
where λ is the mean free path and d is a characteristic length, in this case, the vapor gap 19. In a continuum regime, Kn is less than 0.01, and heat transfer QC may be calculated using Fourier's Law,
QC=−kA∇T. (8)
In the temperature jump regime, Kn is between 0.01 and 0.1, and the heat transfer QTJ may be approximately calculated using an interpolation formula,
where QTR is the heat transfer in the transition regime.
In the transition regime, Kn is between 0.1 and 10, and the heat transfer may be calculated as (Springer 1971)
where αM is the mean value of thermal accommodation coefficients.
In the free molecular regime Kn is greater than 10, and the heat transfer QFM may be calculated using a relationship developed by Sparrow and Kinney (1964),
where α1 and α2are accommodation coefficients, ρ is the gas density, T* is the temperature of a homogenous Maxwellian gas, R is the molar ideal gas constant, and TS1 and TS2 are the surface temperatures. Another equation may include a number of empirically determined coefficients for the solid and vapor material combination that should be measured to accurately compute the gas heat transfer.
Use of the present vapor phase VTR system 10 may improve the performance of an example MEMS gyroscope (gyro). The gyro may have bias stability over temperature of about 3 deg/hr (1 sigma) as indicated by curve 51 in
In the present specification, some of the matter may be of a hypothetical or prophetic nature although stated in another manner or tense.
Although the invention has been described with respect to at least one illustrative example, many variations and modifications will become apparent to those skilled in the art upon reading the present specification. It is therefore the intention that the appended claims be interpreted as broadly as possible in view of the prior art to include all such variations and modifications.
This invention claims the benefit of U.S. Provisional Application No. 60/872,220, filed Dec. 1, 2006. Provisional Application No. 60/872,220, filed Dec. 1, 2006, is hereby incorporated by reference.
Number | Date | Country | |
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60872220 | Dec 2006 | US |