Claims
- 1. Apparatus for use in manufacturing high-purity fine particles of reactive metals, comprising:
- a hermetically sealable vessel for containing inert gas atmosphere therein;
- a pair of rubber gloves for conducting operations within the vessel under the inert gas atmosphere;
- a cryogenic cooling device attached to one wall of the vessel so as to condense the moisture remaining in the inert gas atmosphere into dew droplets; and
- an accumulator for equalizing the inner pressure of the vessel with the ambient atmospheric pressure.
- 2. The apparatus according to claim 1, further comprising:
- a door for covering each of the openings of the rubber gloves; and
- a pressure equalizing device for keeping the pressure inside the gloves covered with the door equal to the inner pressure of the vessel.
- 3. The apparatus according to claim 1, further comprising:
- a plurality of hermetically sealable vessels mutually connected in series with each other.
- 4. The apparatus according to claim 1, further comprising:
- a plurality of hermetically sealable vessels mutually connected in series, the vessels each being equipped with a pair of rubber gloves;
- doors for respectively covering the openings of the rubber gloves; and
- a pressure equalizing device for keeping the pressure inside the glove covered with the door equal to the inner pressure of the vessel.
- 5. The apparatus according to claim 1, further comprising:
- an inert gas inlet port formed at a bottom of the vessel for introducing the inert gas; and
- an exhaust nozzle provided at a top of the vessel for discharging air before and as the inert gas is introduced into the vessel.
- 6. The apparatus according to claim 1, further comprising a vacuum pump connected to the exhaust nozzle for evacuating the vessel.
- 7. The apparatus according to claim 1, further comprising an electromagnetic valve provided between the accumulator and the vessel for selectively activating the accumulator.
- 8. The apparatus according to claim 1, wherein the accumulator includes a backflow absorber, a glass bottle, an oil bath and a high-pressure vinyl hose extending from the backflow absorber into the oil bath.
- 9. The apparatus according to claim 1, further comprising an observation window for allowing an interior of the vessel to be observed.
Priority Claims (2)
| Number |
Date |
Country |
Kind |
| 63-210620 |
Aug 1988 |
JPX |
|
| 63-218486 |
Sep 1988 |
JPX |
|
Parent Case Info
This is a divisional of co-pending application Ser. No. 071378,531 filed on July 11, 1989, now U.S. Pat. No. 4,971,258.
US Referenced Citations (1)
| Number |
Name |
Date |
Kind |
|
4566293 |
Arner et al. |
Jan 1986 |
|
Divisions (1)
|
Number |
Date |
Country |
| Parent |
378531 |
Jul 1989 |
|