Claims
- 1. A method of vibrational processing using vibrational processing apparatus including a vibration generating unit for generating predetermined vibration, a vibratable element connected to said vibration generating unit for containing an object to be processed and for applying vibration to said object to be processed, a displacement detecting unit for detecting vibrational displacement of said vibratable element, and a first control unit for outputting a control signal to said vibrational generating unit, the method comprising the steps of:
- a) causing said control unit to output a control signal to said vibration generating unit prior to a plating process to subject said vibratable element to vibration;
- b) detecting displacement of said vibratable element to obtain displacement characteristics thereof;
- c) determining the optimum amplitude of vibration to be applied to said vibratable element from said displacement characteristics; and
- d) applying a second control signal from said control unit to said vibration generating unit in accordance with the optimum amplitude determined in step c).
- 2. A method of vibrational processing using vibrational processing apparatus including a vibration generating unit for generating predetermined vibration, a vibratable element connected to said vibration generating unit for containing an object to be processed and for applying vibration to said object to be processed, a displacement detecting unit for detecting vibrational displacement of said vibratable element, and a first control unit for outputting a control signal to said vibrational generating unit, the method comprising the steps of:
- a) causing said control unit to output a control signal to said vibration generating unit prior to a polishing process to subject said vibratable element to vibration;
- b) detecting displacement of said vibratable element to obtain displacement characteristics thereof;
- c) determining the optimum amplitude of vibration to be applied to said vibratable element from said displacement characteristics; and
- d) applying a second control signal from said control unit to said vibration generating unit in accordance with the optimum amplitude determined in step c).
Priority Claims (1)
Number |
Date |
Country |
Kind |
7-178839 |
Jul 1995 |
JPX |
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Parent Case Info
This is a Division of application Ser. No. 08/687,074, filed Jul. 15, 1996, now U.S. Pat. No. 5,726,361.
US Referenced Citations (5)
Foreign Referenced Citations (1)
Number |
Date |
Country |
5070999 |
Mar 1993 |
JPX |
Non-Patent Literature Citations (1)
Entry |
"Linear Control Systems" by James L. Melsa and Donald G. Schultz (1969) Chapte 1--Introduction to Automatic Control Systems, pp. 1-7. |
Divisions (1)
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Number |
Date |
Country |
Parent |
687074 |
Jul 1996 |
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