The present invention relates generally to field-type electron emitters, and, more particularly, to a system for addressing individual electron emitters in an emitter array. A field emitter unit includes a protection and focusing scheme that functions to minimize degradation of the electron beam and allow for focusing of the electron beam into a desired spot size. A control system is provided that allows for individual control of field emitter units in an array with a minimum amount of control channels.
Electron emissions in field-type electron emitter arrays are produced according to the Fowler-Nordheim theory relating the field emission current density of a clean metal surface to the electric field at the surface. Most field-type electron emitter arrays generally include an array of many field emitter devices. Emitter arrays can be micro- or nano-fabricated to contain tens of thousands of emitter devices on a single chip. Each emitter device, when properly driven, can emit a beam or current of electrons from the tip portion of the emitter device. Field emitter arrays have many applications, one of which is in field emitter displays, which can be implemented as a flat panel display. In addition, field emitter arrays may have applications as electron sources in microwave tubes, x-ray tubes, and other microelectronic devices.
The electron-emitting field emitter devices themselves may take a number of forms, such as a “Spindt”-type emitter. In operation, a control voltage is applied across a gating electrode and substrate to create a strong electric field and extract electrons from an emitter element placed on the substrate. Typically, the gate layer is common to all emitter devices of an emitter array and supplies the same control or emission voltage to the entire array. In some Spindt emitters, the control voltage may be about 100V. Other types of emitters may include refractory metal, carbide, diamond, or silicon tips or cones, silicon/carbon nanotubes, metallic nanowires, or carbon nanotubes.
When used as an electron source in an x-ray tube application, field emitter arrays create challenges regarding the addressability and activation of each field emitter. That is, in existing designs of field emitter arrays, each of the emitters in the array is addressed in turn via an associated bias or activation line and at appropriate time intervals. Due to the large number of emitter elements in a typical array, there can exist an equally large quantity of associated activation lines and connections. The large number of activation lines need to pass through the vacuum chamber of the x-ray tube to supply the emitter elements, thus there necessitates a large number of vacuum feedthroughs. There is an unavoidable leak rate associated with any feedthrough device, which can lead to gas pressure levels in the tube that can inhibit performance of the emitter elements and their ability to generate electrons.
Additionally, it may be desired for the field emitters in the array to be arranged in one of many varying orientations. That is, depending on the specific application, the field emitters may not always be arranged in a “matrix” type orientation (e.g., a 3×3 matrix/array of emitters), but may also be arranged in a linear array or in different patterns. Such patterns and arrangements can cause additional challenges with respect to the connection of each field emitter to an associated activation line and connection.
Thus, a need exists for a system for controlling the emitter elements in an emitter array that reduces the number of activation lines and feedthrough channels. It would also be desirable for such a system to be able to operate independent of the physical topology of the emitter elements in the emitter array.
Embodiments of the invention overcome the aforementioned drawbacks by providing a virtual matrix arrangement and addressing scheme for activation of individual field emitter units in an array. The field emitter units are addressed/activated via a virtual matrix scheme such that a minimum number of voltage control channels are needed to individual address/activate field emitter units in the array.
According to one aspect of the invention, a field emitter array system includes an emitter array comprising a plurality of emitter elements arranged in a non-rectangular layout and configured to generate at least one electron beam and a plurality of extraction grids positioned adjacent to the emitter array, each extraction grid being associated with at least one emitter element to extract the at least one electron beam therefrom. The field emitter array system also includes a plurality of voltage control channels connected to the plurality of emitter elements and the plurality of extraction grids such that each of the emitter elements and each of the extraction grids is individually addressable. In the field emitter array system, the number of voltage control channels is equal to a sum of a pair of integers closest in value whose product equals the number of emitter elements.
According to another aspect of the invention, a multiple-spot electron beam generator includes a plurality of emitter groups that are linearly arranged, with each emitter group including a plurality of emitter elements. The multiple-spot electron beam generator also includes at least one extraction grid associated with, and positioned adjacent to, each emitter group and configured to extract an electron beam from at least one of the plurality of emitter elements associated therewith and a plurality of control channels coupled to the plurality of emitter elements and to the extraction grids associated with the emitter groups. The plurality of control channels includes a plurality of emitter control channels configured to deliver an emitter voltage, each emitter control channel connected to an emitter element from each of the plurality of emitter groups. The plurality of control channels also includes a plurality of grid control channels configured to deliver an extraction voltage, wherein each grid control channel corresponds to a respective emitter group and is connected to the at least one extraction grid adjacent to each emitter group. The quantity of emitter control channels and grid control channels is equal to a sum of a pair of integers having a minimum difference therebetween and whose product equals the number of emitter elements.
According to yet another aspect of the invention, a distributed x-ray source for an imaging system includes a plurality of electron generators configured to emit at least one electron beam therefrom, with each electron generator comprising an emitter element and an extraction grid. The distributed x-ray source also includes a plurality of control circuits electrically connected to the plurality of electron generators such that each electron generator is connected to a pair of the control circuits to receive voltages therefrom, wherein a first control circuit of the pair of the control circuits is electrically connected to the emitter element and a second control circuit of the pair of control circuits is electrically connected to the extraction grid. The distributed x-ray source further includes a shielded anode positioned in a path of the at least one electron beam and configured to emit a beam of high-frequency electromagnetic energy conditioned for use in a CT imaging process when the electron beam impinges thereon. The number of control circuits in the distributed x-ray source is equal to a sum of a pair of integers closest in value whose product equals the number of emitter elements.
These and other advantages and features will be more readily understood from the following detailed description of preferred embodiments of the invention that is provided in connection with the accompanying drawings.
The drawings illustrate embodiments presently contemplated for carrying out the invention.
In the drawings:
The operating environment of embodiments of the invention is described with respect to an x-ray source or generator that includes a field emitter based cathode and/or an array of such field emitters. That is, the protection, focusing, and activation schemes of the invention are described as being provided for a field emitter based x-ray source. However, it will be appreciated by those skilled in the art that embodiments of the invention for such protection, focusing, and activation schemes are equally applicable for use with other cathode technologies, such as dispenser cathodes and other thermionic cathodes. The invention will be described with respect to a field emitter unit and arrays of such field emitters, but is equally applicable with other cold cathode and/or thermionic cathode structures.
Referring to
Substrate layer 12 is registered onto insulating layer 16, which in one embodiment is a ceramic spacer element having desired insulating properties as well as compressive properties for absorbing loads caused by translation of the field emitter unit (e.g., when the field emitter unit forms part of an x-ray source that rotates about a CT gantry). Insulating layer 16 is used to separate the substrate layer 12 from an extraction electrode 20 (i.e., gate electrode, gate layer), so that an electrical potential may be applied between extraction electrode 20 and substrate 12. A channel or cavity 22 is formed in insulating layer 16, and a corresponding opening 24 is formed in extraction electrode 20. As shown, opening 24 substantially overlaps cavity 22. In other embodiments, cavity 22 and opening 24 may be of approximately the same diameter, or cavity 22 may be narrower than opening 24 of gate layer extraction electrode 20.
An electron emitter element 26 is disposed in cavity 22 and affixed on substrate layer 12. The interaction of an electrical field in opening 24 (created by extraction electrode 20) with the emitter element 26 generates an electron beam 28 that may be used for a variety of functions when a control voltage is applied to emitter element 26 by way of substrate 12. In one embodiment, emitter element 26 is a carbon nanotube based emitter; however, it is contemplated that the system and method described herein are also applicable to emitters formed of several other materials and shapes used in field-type emitters.
As shown in
Referring still to
A focusing electrode 34 is also included in field emitter unit 10 and is positioned above extraction electrode 20 to focus electron beam 28 as it passes through an aperture 36 formed therein. The size of aperture 36 and thickness of focusing electrode 34 are designed such that maximum electron beam compression can be achieved. As shown in
As set forth above, focusing electrode 34 functions to focus electron beam 28 into a desired focal spot 39 on target anode 38. As shown in
Anode shield 40 can also intercept electrons backscattered from anode surface. Without such shield, most of these backscattered electrons leave the surface of the target with a large proportion of their original kinetic energy and will return to the anode at some distance from the focal spot producing off-focal radiation. Therefore, anode shield 40 can improve the image quality by reducing off-focal radiation.
Inception of the backscattering electrons with anode shield 40 can also improve the thermal management of the target by preventing them from back striking the target. Such anode shield 40 can be liquid cooled.
Anode shield 40 can also be constructed to provide partial x-ray shielding by coating the anode with a high Z material 44 (i.e., a high atomic number material, such as tungsten) on an inner surface of anode shield 40. Placement of anode shield 40 about target anode 38 can also improve the high voltage stability of field emitter unit 10 and help prevent high voltage arcing. As target shield 40 is positioned very close to target anode 38, it is possible to reduce the material needed for x-ray shielding, thus reducing the total weight of an x-ray source (shown in
As shown in
Referring now to
In another embodiment, and as shown in
Referring now to
In another embodiment, and as shown in
For certain advanced CT applications, it is desirable to have electron beam wobbling capability. Thus, as shown in the embodiment of
While shown as a single field emitter unit 10 in
The field emitter array 88 has three rows, designated by X, Y, and Z, and three columns, designated by A, B, and C. The field emitter units 10 are activated or addressed by six activation connections 92 (i.e., voltage control channels), which are shared among field emitter units 10. Note that each field emitter unit 10 has two associated activation connections 92, one from rows X-Z and one from columns A-C. Thus, for a field emitter array 88 in this configuration, with N rows and N columns or N2 elements, there are 2N (i.e., N+N) activation connections 92. As another example, a 900-emitter array in this configuration would utilize 60 activation connections. The activation connections 92 may be considered as 60 vacuum feedthrough lines.
Each activation connection 92 corresponding to a row X-Z of field emitter units 10 delivers an emitter voltage to an emitter element (see
In addition to activation lines 92 configured to apply an emitter voltage and extraction voltage to each field emitter unit 10, it is also envisioned that a pair of common focusing lines (not shown) may be coupled to each field emitter unit 10 and the focusing electrode therein to control the width and length of the focal spot generated by each field emitter unit 10.
Referring now to
Referring to
Rotation of gantry 212 and the operation of x-ray source 214 are governed by a control mechanism 226 of CT system 210. Control mechanism 226 includes an x-ray controller 228 that provides power, control, and timing signals to x-ray source 214 and a gantry motor controller 230 that controls the rotational speed and position of gantry 212. X-ray controller 228 is preferably programmed to account for the electron beam amplification properties of an x-ray tube of the invention when determining a voltage to apply to field emitter based x-ray source 214 to produce a desired x-ray beam intensity and timing. An image reconstructor 234 receives sampled and digitized x-ray data from DAS 232 and performs high speed reconstruction. The reconstructed image is applied as an input to a computer 236 which stores the image in a mass storage device 238.
Computer 236 also receives commands and scanning parameters from an operator via console 240 that has some form of operator interface, such as a keyboard, mouse, voice activated controller, or any other suitable input apparatus. An associated display 242 allows the operator to observe the reconstructed image and other data from computer 236. The operator supplied commands and parameters are used by computer 236 to provide control signals and information to DAS 232, x-ray controller 228 and gantry motor controller 230. In addition, computer 236 operates a table motor controller 244 which controls a motorized table 246 to position patient 222 and gantry 212. Particularly, table 246 moves patients 222 through a gantry opening 248 of
Referring now to
As shown in
To allow for the activation and addressing of individual field emitter units 258, a plurality of emitter control channels 262 and a plurality of grid control channels 264 (together forming voltage control channels 260) are included in multiple spot electron beam generator 252 to apply variable voltages to emitter elements 254 and meshed grids 256, respectively. That is, the voltages applied to emitter elements 254 and meshed grids 256 by emitter control channels 262 and grid control channels 264 can be independently controlled as “High” and “Low” to allow for activation of specified field emitter units 258. Thus, for example, to address a specific field emitter unit 266, an emitter control channel 268 connected to an emitter element 270 in specified emitter unit 266 is set to Low voltage. A grid control channel 272 connected to the specified emitter unit 266 is then set to High voltage so as to apply an extraction voltage to a meshed grid 274 included in specified emitter unit 266. Assuming that the extraction voltage applied by grid control channel 272 is sufficiently higher than the emission voltage applied by emitter control channel 268 (e.g., 1 kV), the specified field emitter unit 266 will be activated to emit an electron beam therefrom. Conversely, if the voltages applied to both the emitter element 270 and the meshed grid 274 are Low or if the voltage applied to the emitter element 270 is High and the voltage applied to the meshed grid 274 is Low, than the specified field emitter unit 266 will not be activated to emit an electron beam. Beneficially, it is understood that, in addition to independently controlling High and Low voltages to a specified field emitter unit, the High and Low voltages themselves applied to each field emitter unit 258 can be individually controlled to modulate the electron beam current, which is a desirable feature for CT applications.
According to the addressing/activation scheme of the virtual matrix arrangement, and as shown in
For addressing/activating the emitter elements 254 in the virtual matrix arrangement, a design is implemented in which the number of voltage control channels 260 is equal to the sum of a pair of integers closest in value (i.e., having a minimum difference therebetween) whose product equals the number of emitter elements 254. Thus, for the 1×9 emitter array 250 shown in
Referring now to
As shown in
While described with respect to a sixty-four-slice “third generation” computed tomography (CT) system, it will be appreciated by those skilled in the art that embodiments of the invention are equally applicable for use with other imaging modalities, such as electron gun based systems, x-ray projection imaging, package inspection systems, as well as other multi-slice CT configurations or systems or inverse geometry CT (IGCT) systems. Moreover, the invention has been described with respect to the generation, detection and/or conversion of x-rays. However, one skilled in the art will further appreciate that the invention is also applicable for the generation, detection, and/or conversion of other high frequency electromagnetic energy.
Therefore, according to one embodiment of the invention, a field emitter array system includes an emitter array comprising a plurality of emitter elements arranged in a non-rectangular layout and configured to generate at least one electron beam and a plurality of extraction grids positioned adjacent to the emitter array, each extraction grid being associated with at least one emitter element to extract the at least one electron beam therefrom. The field emitter array system also includes a plurality of voltage control channels connected to the plurality of emitter elements and the plurality of extraction grids such that each of the emitter elements and each of the extraction grids is individually addressable. In the field emitter array system, the number of voltage control channels is equal to a sum of a pair of integers closest in value whose product equals the number of emitter elements.
According to another embodiment of the invention, a multiple-spot electron beam generator includes a plurality of emitter groups that are linearly arranged, with each emitter group including a plurality of emitter elements. The multiple-spot electron beam generator also includes at least one extraction grid associated with, and positioned adjacent to, each emitter group and configured to extract an electron beam from at least one of the plurality of emitter elements associated therewith and a plurality of control channels coupled to the plurality of emitter elements and to the extraction grids associated with the emitter groups. The plurality of control channels includes a plurality of emitter control channels configured to deliver an emitter voltage, each emitter control channel connected to an emitter element from each of the plurality of emitter groups. The plurality of control channels also includes a plurality of grid control channels configured to deliver an extraction voltage, wherein each grid control channel corresponds to a respective emitter group and is connected to the at least one extraction grid adjacent to each emitter group. The quantity of emitter control channels and grid control channels is equal to a sum of a pair of integers having a minimum difference therebetween and whose product equals the number of emitter elements.
According to yet another embodiment of the invention, a distributed x-ray source for an imaging system includes a plurality of electron generators configured to emit at least one electron beam therefrom, with each electron generator comprising an emitter element and an extraction grid. The distributed x-ray source also includes a plurality of control circuits electrically connected to the plurality of electron generators such that each electron generator is connected to a pair of the control circuits to receive voltages therefrom, wherein a first control circuit of the pair of the control circuits is electrically connected to the emitter element and a second control circuit of the pair of control circuits is electrically connected to the extraction grid. The distributed x-ray source further includes a shielded anode positioned in a path of the at least one electron beam and configured to emit a beam of high-frequency electromagnetic energy conditioned for use in a CT imaging process when the electron beam impinges thereon. The number of control circuits in the distributed x-ray source is equal to a sum of a pair of integers closest in value whose product equals the number of emitter elements.
While the invention has been described in detail in connection with only a limited number of embodiments, it should be readily understood that the invention is not limited to such disclosed embodiments. Rather, the invention can be modified to incorporate any number of variations, alterations, substitutions or equivalent arrangements not heretofore described, but which are commensurate with the spirit and scope of the invention. Additionally, while various embodiments of the invention have been described, it is to be understood that aspects of the invention may include only some of the described embodiments. Accordingly, the invention is not to be seen as limited by the foregoing description, but is only limited by the scope of the appended claims.
The present invention is a continuation-in-part of and claims the benefit of U.S. Ser. No. 12/017,098, filed on Jan. 21, 2008, the disclosure of which is incorporated herein by reference.
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Number | Date | Country | |
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Number | Date | Country | |
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Parent | 12017098 | Jan 2008 | US |
Child | 12113726 | US |