1. Field of the Invention
The present invention relates to a microelectronic battery and more particularly to a microelectronic battery formed as a volume energy storage device from soft lithography techniques which provides increased capacity relative to so-called thin film batteries or area energy storage devices.
2. Description of the Prior Art
Thin film microelectronic batteries are known. Examples of such batteries are disclosed in U.S. Pat. Nos. 5,338,625 and 5,567,210. Such thin film batteries are formed by depositing an anode, such as vanadium on a substrate. A cathode, such as amorphous vanadium oxide, VOx, is deposited on a portion of the anode. An amorphous oxynitride lithium electrolyte film is deposited on top of the cathode to form a Li—VOx battery cell.
The footprint of the Li—VOx battery cell is about one square centimeter and about 8 microns thick. Such a configuration provides about 130 microamp hours of battery capacity. In order to increase the capacity of such a thin film battery, the area dimensions are increased. As such, such thin film batteries are known as area energy storage devices.
Unfortunately, applications exist in which the area or footprint is limited and increased capacity is required. Examples of such applications include high speed electronics applications and certain military applications. In particular, high speed electronics applications are known in which the processing speed is so fast that on-chip/on-board power supplies are required to prevent local current starvation. Military applications are also known with space constraints and relatively high capacity requirements. Examples of such military applications include sensor applications used in covert applications. Due to the capacity or requirements and space limitations, thin film power supplies are unsuitable.
In order to increase the battery capacity for use in such applications without increasing the footprint, one possible solution is to utilize a different battery technology which provides a higher capacity. For example, Zn/Air batteries are known to have the highest volumetric energy storage (36 J/mm3) of any known battery technology. In addition to having a high capacity, Zn/Air batteries provide other advantages. For example, Zn/Air batteries are also known to have a relatively flat discharge curve with a relatively long storage life. Moreover, such Zn/Air batteries have already been demonstrated to be environmentally safe and are amenable for use in medical applications. Examples of such Zn/Air batteries are disclosed in U.S. Pat. Nos. Des. 427,144 and 4,842,963.
Unfortunately, such Zn/Air batteries have heretofore only been known to be formed on a macroscale, thus making them unsuitable for use in various microelectronic applications as discussed above. Thus, there is a need for a microelectronic battery having increased capacity relative to known thin film batteries for use in applications which require relatively high capacity in a relatively small area or footprint.
Briefly, the present invention relates to a microelectronic battery which provides increased battery capacity relative to known thin film batteries without the need for increasing the footprint. In order to provide increased capacity, the microelectronic battery in accordance with the present invention is formed from Zn/Air technology as a volumetric energy storage device. As a volumetric energy storage device, the height dimension of the device may be increased relative to known thin film batteries to provide increased battery capacity without the need to increase the footprint dimensions. As such, the microelectronic battery in accordance with the present invention is suitable for various applications which require a relatively high capacity power supply with a relatively small footprint.
These and other advantages of the present invention will be readily understood with reference to the following specification and attached drawing wherein:
The present invention relates to a microelectronic battery, generally identified with the reference numeral 20, formed from Zn/Air technology. The microelectronic battery 20 is formed as a volume energy storage device and provides increased battery capacity relative to known thin film batteries, for example, as discussed above, without increasing the dimensions of the footprint. For example, the microelectronic battery 20 formed, for example, as a 1 mm cube, can provide around 600 microamp hours of capacity as compared to the 130 microamp hour capacity of the Li—VOx thin film battery discussed above. In addition to increased capacity and small footprint relative to thin film batteries, the microelectronic battery 20 is amenable to being fabricated utilizing micro electromechanical systems (MEMS) fabrication processes, such as soft lithography manufacturing processes, used for non-silicon materials, such as ceramics, polymers and plastics. In addition, the microelectronic battery 20 is volume scalable which enables its volume (rather than area) to be increased or decreased depending on the application.
Turning to
Electrochemical reactions for Zn/Air batteries are well known and are provided below.
A diagram for forming an array of microelectronic battery cells 20 is illustrated in FIG. 2. As mentioned above, each microelectronic battery cell can be formed utilizing soft lithography techniques. In particular, the air cathode 22 is formed on a substrate 30, for example, a silicon substrate. A plurality of Ni electrodes, generally identified with the reference numeral 32, are deposited on the substrate 30 utilizing known metal deposition techniques, such as RF or DC magnetron or diode sputtering techniques or other metal deposition techniques. In addition, a number of bond pads, generally identified with the reference numeral 34, are deposited by known metal deposition techniques on the substrate 30. As shown in
In order to limit the influx of water and protect the substrate 30 from the electrolyte, a hydrophobic membrane 38, which acts as a separator, is deposited over the assembly. The hydrophobic membrane 38 is a gas permeable membrane formed from, a carbon black/PTFE composite or polymeric perfluoropolyalkylene oxide membrane, for example, that allows air to pass while limiting the diffusive influx of water.
As mentioned above, air access holes 28 are provided to enable air to enter into the battery cells. These air access holes 28 are formed in the substrate 30. A membrane, formed from, for example, Si3N4 is deposited on an exposed side of the substrate 30 to isolate the battery from oxygen in the atmosphere until it is desired to put the battery in use.
The Zn anode includes a glass substrate 42. A plurality of Zn electrodes 44 are deposited upon the glass substrate 42 by known techniques. As shown, a number of bond pads, generally identified with the reference numeral 46, are formed along one edge of the substrate 42. In addition, a number of electrical conductors or leads 48 are formed on the substrate 42 to connect each of the Zn electrodes 44 to each of the bond pads 46.
The electrolyte tank 26 acts as an insulator to insulate the anode 24 and cathode 22 as shown in FIG. 1. The electrolyte tank 26 may also form a tank for holding an electrolyte as shown in FIG. 2. The electrolyte tank 26 may be formed in a generally rectangular shape as shown having a number of cells commensurate with the number of Zn electrodes 44. The electrolyte tank 26 may be formed from a polymer material, such as polyethylene (PE) or polytetrafluoro ethylene (PTFE) or other solution processable polymer.
The electrolyte tank 26 is aligned over the Zn electrodes 44. The tank is then filled with an electrolyte such as KOH gel mixed with Zn powder, fibers or granules in order to maximize the surface area of the Zn available for oxidation. Additional organic components, such as binders and corrosion inhibitors, can be added to improve battery performance, if desired.
As shown in
Many modifications and variations of the present invention are possible in light of the above teachings. For example, thus, it is to be understood that, within the scope of the appended claims, the invention may be practiced otherwise than as specifically described above.
What is claimed and desired to be secured by Letters Patent of the United States is.
The present invention is related to commonly-owned patent application Ser. No. 09/948,033, entitled “Micro Supercapacitors”, filed on Sep. 5, 2001, now U.S. Pat. No. 6,621,687B2.
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4842963 | Ross, Jr. | Jun 1989 | A |
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20030152815 | LaFollette et al. | Aug 2003 | A1 |
Number | Date | Country | |
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20030044664 A1 | Mar 2003 | US |